Cleaning mechanism and machining equipment

Abstract

The utility model provides a cleaning mechanism and machining equipment, the cleaning mechanism comprises a mounting frame, a coarse driving piece, a connecting piece, a fine driving piece and a cleaning assembly, and the coarse driving piece is arranged on the mounting frame; the thick driving piece is in driving connection with the connecting piece and can drive the connecting piece to move in the first direction; the fine driving piece is arranged on the connecting piece; the cleaning assembly comprises a mounting seat, the fine driving part is in driving connection with the mounting seat, and the fine driving part can drive the mounting seat to move in the first direction; the cleaning assembly further comprises a first cleaning piece, and the first cleaning piece is arranged on the mounting base. The coarse driving piece drives the connecting piece to move in the first direction, so that the first cleaning piece gets close to the workpiece; the fine driving part further drives the mounting base to move in the first direction, and the first cleaning part can make contact with the workpiece to clean the workpiece.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of impurity removal processing of workpiece surfaces, and more particularly to a cleaning mechanism and processing equipment. BACKGROUND

[0002] During laser processing of the surface of an OLED panel, high-energy laser beams acting on the material can produce residues, and at the same time, there are also some dust and the like in the processing environment, and ultimately these tiny particulate impurities will fall onto the surface of the OLED panel, thereby affecting the quality of the OLED panel.

[0003] The related technology discloses a cleaning mechanism for cleaning the impurities on the surface of an OLED panel after laser processing, but due to the unreasonable arrangement of the cleaning mechanism, the OLED panel is easily pressed and injured during the process of contacting the OLED panel to clean the impurities. CONTENT OF THE UTILITY MODEL

[0004] The application provides a cleaning mechanism which can effectively avoid pressing and injuring the OLED panel when used to clean the impurities on the surface of the OLED panel.

[0005] The technical solution adopted by the application is as follows: a cleaning mechanism for cleaning particulate impurities on the surface of a workpiece is provided, which comprises a mounting frame, a coarse driving member, a connecting member, a fine driving member, and a cleaning assembly, the coarse driving member is arranged on the mounting frame; the coarse driving member is drivingly connected with the connecting member, and the coarse driving member can drive the connecting member to move in a first direction; the fine driving member is arranged on the connecting member; the cleaning assembly comprises a mounting seat, the fine driving member is drivingly connected with the mounting seat, and the fine driving member can drive the mounting seat to move in the first direction; the cleaning assembly further comprises a first cleaning member, which is arranged on the mounting seat; the coarse driving member drives the connecting member to move in the first direction, so that the first cleaning member can approach the workpiece; the fine driving member further drives the mounting seat to move in the first direction, so that the first cleaning member can contact the workpiece and clean the workpiece.

[0006] Further, the mounting seat is movably connected with the connecting member in the first direction, the connecting member is movably connected with the mounting frame in the first direction, and the fine driving member is a pneumatic cylinder.

[0007] Further, the cleaning mechanism further comprises an elastic member, which is elastically connected with the connecting member and the mounting seat in the first direction, and the elastic force direction of the elastic member acting on the mounting seat is a direction of approaching the connecting member in the first direction.

[0008] Further, the first cleaning member comprises a first roller rotatably and movably arranged in the mounting base along the first direction, and a first adhesive layer covering a circumferential surface of the first roller; the cleaning assembly further comprises a second cleaning member comprising a second roller rotatably arranged in the mounting base, and a multilayer second adhesive layer wound on a circumferential surface of the second roller layer by layer; when the first roller moves along the first direction, the surface of the first adhesive layer is in contact with the surface of the second adhesive layer, at this time, the rotation of the first roller can synchronously drive the rotation of the second roller, the first adhesive layer can adhere to the surface of the cleaned workpiece, the second adhesive layer can adhere to the surface of the first adhesive layer, and the multilayer second adhesive layer can be torn off along the circumference of the second roller.

[0009] Further, the radial dimension of the second adhesive layer is greater than or equal to the radial dimension of the first adhesive layer, the axial dimension of the second adhesive layer along the second roller is greater than or equal to the axial dimension of the first adhesive layer along the first roller, and the two ends of the first adhesive layer along the axial direction of the first roller are respectively not more than the two ends of the second adhesive layer along the axial direction of the second roller.

[0010] Further, the mounting base is provided with two slot holes in parallel along the first direction, the two slot holes are oppositely arranged along the axial direction of the first roller, the two ends of the axial direction of the first roller are respectively inserted and matched with the two slot holes, and the first roller is movable along the strip-shaped track of the slot hole.

[0011] Further, the length of the slot hole along the first direction is greater than or equal to the distance between the surface of the first adhesive layer and the circumferential surface of the second roller along the first direction.

[0012] Further, the second roller and the mounting base are detachably connected, and after the second roller is connected with the mounting base, the second roller and the first roller are arranged along the first direction.

[0013] Further, the cleaning mechanism further comprises an electrostatic removal member movably arranged in the mounting frame, the electrostatic removal member can generate air masses with positive and negative charges; the output end of the electrostatic removal member outputting the air masses with positive and negative charges is arranged opposite to the surface of the first cleaning member and / or the workpiece with particulate impurities to be removed, so as to remove the electrostatic charges of the particles cleaned by the first cleaning member and / or the particles on the surface of the workpiece.

[0014] The application further provides a processing device, which comprises a carrier table for carrying a workpiece to be cleaned of particle impurities and the cleaning mechanism as described in any of the above.

[0015] In the cleaning mechanism provided by the application, the coarse driving member is controlled to drive the connecting member to move close to the workpiece in the first direction, so as to synchronously cause the first cleaning member of the cleaning assembly to move close to the workpiece in the first direction; then the fine driving member is controlled to drive the mounting base to move close to the workpiece in the first direction, so as to synchronously cause the first cleaning member of the cleaning assembly to move close to the workpiece in the first direction until the first cleaning member contacts the surface of the workpiece. It can be understood that the cleaning mechanism of the application can drive the first cleaning member to gradually move close to the workpiece until the first cleaning member contacts the workpiece by cooperation of the coarse driving member and the fine driving member. After the first cleaning member contacts the workpiece, the first cleaning member can be used to clean the particle impurities on the surface of the workpiece. The cleaning method of the first cleaning member is not limited and can be suction cleaning, adhesion cleaning, sweeping cleaning or the like.

[0016] The mounting bracket provides mounting positions and structural support for the components of the cleaning mechanism, and the connecting member provides mounting positions and structural support for the fine driving member. From the aspect of driving, the connecting member is a structure for carrying the fine driving member and the cleaning assembly, so that the coarse driving member drives the fine driving member and the cleaning assembly to synchronously move to close to the workpiece, thereby providing stroke progress for the subsequent driving of the fine driving member to gradually move the cleaning assembly until the first cleaning member contacts the workpiece. It can be understood that the fine driving member is a fine control driving member, and the coarse driving member is a coarse control driving member. Since the existing driving members can generally be adjusted and controlled, the use of two driving members in cooperation can increase the adjustable control performance, so that the driving stroke required and the accuracy of driving the cleaning assembly to the target position can be met.

[0017] In the cleaning mechanism disclosed by the related art, only one driving member is used to drive the cleaning assembly to move until the cleaning member thereof contacts the surface of the OLED panel. In this driving arrangement, the cleaning member of the cleaning assembly often exerts a large pressing force on the OLED panel, and even the OLED panel can be pressed and damaged. Compared with the cleaning mechanism scheme disclosed by the related art, when the cleaning mechanism of the application is used to clean the surface of the OLED panel, the coarse driving member drives the first cleaning member to move close to the OLED panel but not to contact the OLED panel. If the first cleaning member needs to contact the OLED panel, the fine driving member is further driven, so that the first cleaning member can be accurately contacted to the OLED panel. It can also be understood that the first cleaning member is just contacted to the OLED panel, and the pressure on the OLED panel is greatly reduced, so that the probability of damaging the OLED panel can be effectively reduced. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0019] Figure 1 A perspective view of the cleaning mechanism provided by the embodiments of the present application is shown in the figure.

[0020] Figure 2 A perspective view of the processing device provided by the embodiments of the present application is shown in the figure. Figure 1 A local enlarged view at A.

[0021] Figure 3 A perspective view of the processing device provided by the embodiments of the present application is shown in the figure.

[0022] In the figure, various reference signs are as follows:

[0023] 10, cleaning mechanism; 11, mounting frame; 12, coarse driving member; 13, connecting member; 14, fine driving member; 15, cleaning assembly; 151, mounting seat; 1511, slot hole; 152, first cleaning member; 1521, first adhesive layer; 1522, first roller; 153, second cleaning member; 1531, second adhesive layer; 1532, second roller; 16, elastic member; 17, static electricity removing member; 20, processing device; 21, carrier. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0025] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0026] It should be understood that the terms "length", "width", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0027] In addition, the terms "first", "second", etc. are used only for descriptive purposes and should not be construed as implying or suggesting relative importance or an indicated number of the technical features. Thus, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0028] Please refer to Figure 1 and Figure 3 The cleaning mechanism 10 provided by the embodiments of the present application will be described. The cleaning mechanism 10 provided by the embodiments of the present application includes a mounting frame 11, a coarse driving member 12, a connecting member 13, a fine driving member 14, and a cleaning assembly 15. The coarse driving member 12 is arranged on the mounting frame 11. The coarse driving member 12 is drivingly connected with the connecting member 13, and the coarse driving member 12 can drive the connecting member 13 to move in a first direction, which is denoted as Z. The fine driving member 14 is arranged on the connecting member 13. The cleaning assembly 15 includes a mounting seat 151. The fine driving member 14 is drivingly connected with the mounting seat 151, and the fine driving member 14 can drive the mounting seat 151 to move in the first direction. The cleaning assembly 15 further includes a first cleaning member 152. The first cleaning member 152 is arranged on the mounting seat 151. The coarse driving member 12 drives the connecting member 13 to move in the first direction, which can make the first cleaning member 152 close to the workpiece. The fine driving member 14 further drives the mounting seat 151 to move in the first direction, which can make the first cleaning member 152 contact the surface of the workpiece to clean the workpiece.

[0029] In the cleaning mechanism 10 provided by the embodiments of the present application, the coarse driving member 12 is controlled to drive the connecting member 13 to move in the first direction to close to the workpiece, which can synchronously make the first cleaning member 152 of the cleaning assembly 15 move in the first direction to close to the workpiece. Then, the fine driving member 14 is controlled to drive the mounting seat 151 to move in the first direction to close to the workpiece, which can synchronously make the first cleaning member 152 of the cleaning assembly 15 move in the first direction to close to the workpiece until contacting the surface of the workpiece. It can be understood that the cleaning mechanism 10 of the embodiments of the present application can make the first cleaning member 152 gradually close to and contact the workpiece by the cooperation of the coarse driving member 12 and the fine driving member 14. After the first cleaning member 152 contacts the workpiece, it can be used to clean the particulate impurities on the surface of the workpiece. The cleaning method of the first cleaning member 152 is not limited, which can be suction cleaning, adhesion cleaning, sweeping cleaning, etc.

[0030] The mounting frame 11 provides mounting positions and structural support for the components of the cleaning mechanism 10, and the connecting piece 13 provides mounting positions and structural support for the fine driving piece 14. From the driving aspect, the connecting piece 13 is a structure that carries the fine driving piece 14 and the cleaning assembly 15, so that the coarse driving piece 12 drives the fine driving piece 14 and the cleaning assembly 15 to move synchronously to approach the workpiece, providing a stroke progress for the subsequent driving of the fine driving piece 14 to drive the cleaning assembly 15 to gradually approach until the first cleaning piece 152 contacts the workpiece. It can be understood that the fine driving piece 14 is a fine control driving, and the coarse driving piece 12 is a coarse control driving. Since the existing driving pieces can generally be adjusted and controlled, the use of two driving pieces can increase the adjustable control performance, so that the required stroke of driving can be met, and the accuracy of driving the cleaning assembly 15 to the target position can also be met.

[0031] In the related art disclosed cleaning mechanism, only one driving piece is used to drive the cleaning assembly to move until the cleaning piece thereof contacts the surface of the OLED panel. In this driving arrangement, the cleaning piece of the cleaning assembly often exerts a large pressing force on the OLED panel, and even the OLED panel can be pressed and injured. Compared with the related art disclosed cleaning mechanism, the cleaning mechanism 10 of the present application can drive the first cleaning piece 152 to move close to the OLED panel without contacting the OLED panel when used for cleaning the surface of the OLED panel. If it is necessary to make the first cleaning piece 152 contact the OLED panel, the fine driving piece 14 is further driven, so that the first cleaning piece 152 can be accurately contacted to the OLED panel, and it can be understood that the first cleaning piece 152 just contacts the OLED panel, thereby greatly reducing the pressure on the OLED panel and effectively reducing the probability of injuring the OLED panel.

[0032] The coarse driving piece 12 and the fine driving piece 14 in the embodiment of the present application can be any driving piece that can drive the first cleaning piece 152 to the target position, such as a driving motor or a cylinder and a driving module. In the embodiment of the present application, the coarse driving piece 12 and the fine driving piece 14 are taken as an example of a cylinder, and the cylinder specification of the fine driving piece 14 is taken as an example of being smaller than that of the coarse driving piece 12, that is, the fine driving piece 14 is a cylinder with smaller driving force, and the coarse driving piece 12 is a cylinder with larger driving force.

[0033] Thus, the rough driving member 12 can drive the connecting member 13 with stronger driving force, and help the fine driving member 14 and the cleaning assembly 15 move synchronously and stably, so that the first cleaning member 152 is close to the workpiece to be cleaned without contacting the workpiece, thus avoiding the first cleaning member 152 from impacting and pressing on the workpiece due to the strong driving force of the rough driving member 12. The fine driving member 14 can drive the first cleaning member 152 to move gently, so that the first cleaning member 152 contacts the workpiece gently. In addition, due to the working principle of the air cylinder, when the driving is hindered, the air cylinder itself has a certain buffering effect, and the smaller the size of the air cylinder, the smaller the required resistance to trigger the buffering effect. Therefore, when the first cleaning member 152 contacts the workpiece and generates a relative pressure, the fine driving member 14 using a smaller air cylinder as the driving can help to buffer the force of the smaller pressure, thereby helping to protect the workpiece and reducing the risk of being pressed.

[0034] Please refer to Figure 1 Further, regarding the driving of the rough driving member 12 and the fine driving member 14 in the first direction, it can be understood that the driving in the first direction is reciprocating. In the embodiment of the present application, when the cleaning mechanism 10 is used to clean the workpiece, the rough driving member 12 is driven first, and then the fine driving member 14 is driven, that is, the rough driving member 12 drives the first cleaning member 152 to move close to the workpiece to the target position, and then the fine driving member 14 drives the first cleaning member 152 to contact the workpiece. When the work of cleaning the workpiece is completed, the rough driving member 12 and the fine driving member 14 can be driven without distinction to move the cleaning assembly 15 away from the workpiece.

[0035] In the above embodiment, the rough driving member 12 and the fine driving member 14 are both arranged to drive in the first direction, so as to optimize the driving path and shorten the total driving distance, thereby improving the driving efficiency. The mounting seat 151 in the cleaning assembly 15 is mainly used to provide a mounting position for the first cleaning member 152 and facilitate the movement of the first cleaning member 152 driven by the fine driving member 14. It can be understood that the mounting seat 151 plays a role of an intermediate connecting structure. Specifically, the connecting member 13 in the embodiment of the present application is connected to the mounting bracket 11 in the first direction. Similarly, the mounting seat 151 is connected to the connecting member 13 in the first direction, so that the mounting bracket 11 can stably move the connecting member 13 and the mounting seat 151. The specific movable connection mode can meet the use conditions, for example, sliding connection.

[0036] Please refer to Figure 1Further, the cleaning mechanism 10 of the above embodiment can further comprise an elastic member 16, the elastic member 16 being elastically connected to the connecting member 13 and the mounting base 151 along the first direction, and the elastic force of the elastic member 16 acting on the mounting base 151 is along the first direction to the connecting member 13, wherein the first direction is taken as an example parallel to the vertical direction.

[0037] In the embodiment of the present application, the cleaning mechanism 10 is taken as an example arranged above the workpiece, that is, the fine driving member 14 drives the mounting base 151 to move downward to make the first cleaning member 152 close to the workpiece in contact, in this process, the self-gravity of the cleaning assembly 15 and the driving force direction of the fine driving member 14 are the same, and the elastic member 16 of the embodiment of the present application always exerts the elastic force on the mounting base 151 along the first direction away from the workpiece side, that is, the elastic force of the elastic member 16 hinders the fine driving member 14 to drive the mounting base 151 to close to the workpiece along the first direction, so as to offset part of the combined force of the self-gravity of the cleaning assembly 15 and the fine driving member 14, and the embodiment of the present application is taken as an example that the combined force of the self-gravity of the cleaning assembly 15 and the fine driving member 14 is slightly greater than the elastic force of the elastic member 16, so that when the fine driving member 14 is controlled to drive, the first cleaning member 152 can gently close to and contact the workpiece, which helps to reduce the probability of the workpiece being pressed. The elastic member 16 can be a spring, a tension spring, and a spring sheet and other elastic components that meet the conditions.

[0038] Please refer to Figure 1 In any of the above embodiments, the first cleaning member 152 can comprise a first roller 1522 and a first adhesive layer 1521, the first roller 1522 being rotatable and movably arranged in the mounting base 151 along the first direction, and the first adhesive layer 1521 being wrapped on the circumferential surface of the first roller 1522; the cleaning assembly 15 can further comprise a second cleaning member 153, the second cleaning member 153 comprising a second roller 1532 and a plurality of second adhesive layers 1531, the second roller 1532 being rotatably arranged in the mounting base 151, the axial direction of the second roller 1532 being parallel to the axial direction of the first roller 1522, and the plurality of second adhesive layers 1531 being wound on the circumferential surface of the second roller 1532 layer by layer; the first roller 1522 moving along the first direction can make the surface of the first adhesive layer 1521 contact the surface of the second adhesive layer 1531, at this time, the rotation of the first roller 1522 can synchronously drive the rotation of the second roller 1532, the first adhesive layer 1521 can adhere to the surface of the cleaned workpiece, the second adhesive layer 1531 can adhere to the surface of the first adhesive layer 1521, and the plurality of second adhesive layers 1531 can be torn along the circumferential direction of the second roller 1532.

[0039] The first cleaning member 152 is used to clean the workpiece by rolling adhesion in the embodiment. The first roller 1522 and the second roller 1532 are both approximately cylindrical structures. When the first adhesive layer 1521 contacts the surface of the workpiece, the first roller 1522 rolls on the surface of the workpiece to adhere the particle impurities, and at the same time, the second roller 1532 is driven to rotate synchronously, so that the second adhesive layer 1531 adheres the particle impurities adhered on the first adhesive layer 1521. Finally, the second adhesive layer 1531 adhering the particle impurities is torn off from the second roller 1532, so that the particle impurities are removed.

[0040] In the embodiment, the second adhesive layer 1531 is arranged in a wrapping and winding manner around the circumference of the second roller 1532. The second adhesive layer 1531 is similar to the adhesive tape in winding manner. After the surface is used for adhesion, the used part of the second adhesive layer 1531 is gradually torn off from the second roller 1532. Specifically, after the first adhesive layer 1521 contacts the surface of the workpiece, the workpiece and the first adhesive layer 1521 have a certain interaction force in the first direction under the combined action of the weight of the cleaning assembly 15 and the elastic force of the elastic member 16. Under the interaction force, the first adhesive layer 1521 stops moving after contacting the workpiece, and the mounting seat 151 continues to move relative to the first adhesive layer 1521 in the first direction until the first adhesive layer 1521 contacts the second adhesive layer 1531 and has an interaction force equal to the combined force F. At this time, the pressure of the workpiece received by the cleaning mechanism 10 is the sum of the combined force F and the weight of the first roller 1522 wrapped with the first adhesive layer 1521.

[0041] Then, as the first adhesive layer 1521 rolls on the surface of the workpiece to adhere the particle impurities, the second adhesive layer 1531 is driven to roll on the surface of the first adhesive layer 1521 in the corresponding circumferential direction to adhere the particle impurities on the surface of the first adhesive layer 1521. After the surface of the second adhesive layer 1531 is used for adhesion, the used part of the second adhesive layer 1531 is gradually torn off from the second roller 1532, so that the adhered particle impurities are removed.

[0042] It should be noted that, as the second adhesive layer 1531 is torn off, the radial dimension of the second adhesive layer 1531 arranged in a winding manner becomes smaller and smaller. Under the action of the combined force F, the mounting seat 151 and the first roller 1522 gradually move relative to each other in the first direction, so that the first adhesive layer 1521 and the second adhesive layer 1531 can always be in contact, and the pressure received by the workpiece is always consistent.

[0043] The movable connection between the first roller 1522 and the mounting seat 151 can be sliding connection or the like, as long as the above functional requirements can be met.

[0044] It should be noted that the first adhesive layer 1521 in the embodiment of the present application is connected end to end along the circumference of the first roller 1522 to cover the cylindrical surface, and the first adhesive layer 1521 is flexible to prevent the workpiece from being damaged by hard contact with the workpiece. As for the adhesion of the first adhesive layer 1521, the adhesion of other adhesive layers with similar purposes can be referred to, and the adhesion required by the embodiment of the present application can be met.

[0045] In an embodiment, the first roller 1522 and the second roller 1532 can be positioned and rotated by the first roller 1522 arranged on the mounting seat 151, and the second roller 1532 can be rotatable and movable along the first direction arranged on the mounting seat 151. In this arrangement, the second roller 1532 wrapped with the second adhesive layer 1531 can always keep the second adhesive layer 1531 in contact with the first adhesive layer 1521 under the action of gravity, and the first adhesive layer 1521 contacts the workpiece under the action of the resultant force F. The force of the first adhesive layer 1521 along the first direction on the workpiece is the resultant force F, which helps to further reduce the pressure on the workpiece.

[0046] The second roller 1532 in the above embodiment is taken as an example of detachable connection with the mounting seat 151, so that the second adhesive layer 1531 can be replaced by disassembling the second roller 1532 when it is used up. The specific detachable manner is not limited, for example, it can be clamped or connected with the aid of screws and other intermediate parts.

[0047] In the cleaning mechanism disclosed in the related art, an adhesive layer is wrapped around a roller, and the free end of the adhesive layer is arranged on another roller which contacts the surface of the workpiece. As the roller rolls along the surface of the workpiece, the adhesive layer gradually adheres to the particulate impurities on the surface of the workpiece and is gradually transferred to the roller. When the adhesive layer is completely used up, both rollers need to be replaced. Compared with the two-roller arrangement scheme of the related art, the second adhesive layer 1531 of the present application only needs to replace the second roller 1532 when it is used up, which takes less time to replace, and is conducive to improving the working efficiency of the cleaning mechanism 10.

[0048] It should be noted that the first roller 1522 and the second roller 1532 are arranged, and as long as one of them moves along the first direction to make the first adhesive layer 1521 contact the second adhesive layer 1531, it can be understood that the positional relationship between the first roller 1522 and the second roller 1532 can be arranged along the first direction or inclined to the first direction. The present application takes the positional relationship between the first roller 1522 and the second roller 1532 arranged along the first direction as an example to optimize the path of relative movement close to each other.

[0049] Please refer to Figure 1 and Figure 2Further, the mounting base 151 in the above embodiment can be provided with two slot holes 1511 in strip shape parallel along the first direction, the two slot holes 1511 are oppositely arranged along the axial direction of the first roller 1522, and the two ends of the axial direction of the first roller 1522 are respectively inserted and matched with the two slot holes 1511. The first roller 1522 can move along the strip-shaped track of the slot hole 1511.

[0050] The slot hole 1511 in strip shape is used as the movable mounting position of the first roller 1522 along the first direction, which can also meet the rotation of the first roller 1522 relative to the mounting base 151. Compared with the movable setting of the slide rail and the slide block, the matching mode of the first roller 1522 and the slot hole 1511 in the embodiment of the application is more convenient to operate and has lower cost.

[0051] The length of the slot hole 1511 along the first direction is greater than or equal to the distance between the surface of the first adhesive layer 1521 and the circumferential surface of the second roller 1532 along the first direction. It can be understood that even if the second adhesive layer 1531 is used to the last layer, the first roller 1522 can also move along the slot hole 1511 to make the first adhesive layer 1521 contact with the second adhesive layer 1531.

[0052] Further, the radial dimension of the second adhesive layer 1531 in the above embodiment is always greater than or equal to the radial dimension of the first adhesive layer 1521, and the axial dimension of the second adhesive layer 1531 along the second roller 1532 is always greater than or equal to the axial dimension of the first adhesive layer 1521 along the first roller 1522. The two ends of the axial direction of the first adhesive layer 1521 do not exceed the two ends of the axial direction of the second adhesive layer 1531 along the second roller 1532.

[0053] It can be understood that even if the radial dimension of the second adhesive layer 1531 is used to tear off the remaining layer, it is always greater than or equal to the radial dimension of the first adhesive layer 1521. It can also be understood that the radial dimension of the second roller 1532 is greater than or equal to the radial dimension of the first adhesive layer 1521. Such a setting can meet the rotation of the first adhesive layer 1521 for one revolution, the corresponding rotation of the second adhesive layer 1531 is less than or equal to one revolution, so that the radial dimension of the second adhesive layer 1531 decreases slowly, and it is also helpful to wind more second adhesive layers 1531, which can be used for a long time and reduce the frequency of replacing the second roller 1532.

[0054] And the axial dimension of the second adhesive layer 1531 along the second roller 1532 is set to be always greater than or equal to the axial dimension of the first adhesive layer 1521 along the first roller 1522, and the two ends of the first adhesive layer 1521 along the axial direction of the first roller 1522 do not exceed the two ends of the second adhesive layer 1531 along the axial direction of the second roller 1532, which can be understood as the length of the second adhesive layer 1531 along the axial direction of the second roller 1532 and the first roller 1522 is greater than or equal to the length of the first adhesive layer 1521, and the two ends of the length of the first adhesive layer 1521 also do not protrude from the corresponding two ends of the length of the second adhesive layer 1531, so that the second adhesive layer 1531 can completely adhere to the particle impurities adhered to the surface of the first adhesive layer 1521, and help to clean more thoroughly.

[0055] Please refer to Figure 1 , further, the cleaning mechanism 10 in any of the above embodiments can further include a static electricity removing device 17, which can be movably adjusted and arranged on the mounting frame 11, and the static electricity removing device 17 can generate air masses with positive and negative charges; the output end of the static electricity removing device 17 outputting positive and negative charge air masses is arranged opposite to the first adhesive layer 1521 and / or the surface of the workpiece to be removed from the particle impurities, so as to remove static electricity from the particles adhered to the first adhesive layer 1521 and / or the particles on the surface of the workpiece.

[0056] The static electricity removing device 17 can generate air masses with positive and negative charges, for example, an ion bar structure, and the output end can be arranged to blow against the first adhesive layer 1521 or the surface of the workpiece, which is determined according to the needs, so that the particle impurities adhered to the first adhesive layer 1521 and / or the particle impurities falling on the surface of the workpiece are eliminated from the influence of static electricity, so as to be finally adhered and adsorbed by the first adhesive layer 1521 and the second adhesive layer 1531, thereby helping the second adhesive layer 1531 to remove various impurities and the like.

[0057] Please refer to Figure 1 and Figure 3 The present application also provides a processing equipment 20, which comprises a table 21 and the cleaning mechanism 10 in any of the above embodiments, the table 21 is used to carry the workpiece to be removed from the particle impurities, and the cleaning mechanism 10 is movably arranged opposite to the table 21 along the table surface of the table 21.

[0058] The embodiment of the present application takes the movable arrangement of the carrier 21 along the surface of the carrier 21 as an example, and the fixed arrangement of the cleaning mechanism 10 along the surface of the carrier 21 as an example. Thus, when the first adhesive layer 1521 is driven to be in contact with the surface of the workpiece placed on the carrier 21, the carrier 21 is moved, the workpiece is moved synchronously, the first roller 1522 covered by the first adhesive layer 1521 rolls on the surface of the workpiece to stick the particle impurities on the surface of the workpiece, and the second roller 1532 wound by the second adhesive layer 1531 rotates synchronously to stick the particle impurities adhered to the surface of the first adhesive layer 1521 and remove the particle impurities adhered to the second adhesive layer 1531 when the second adhesive layer 1531 is torn off.

[0059] The processing equipment 20 of the embodiment of the present application comprises the cleaning mechanism 10 in any of the above embodiments, and has the beneficial effects of the cleaning mechanism 10 in any of the above embodiments, which will not be repeated here.

[0060] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A cleaning mechanism for cleaning particulate impurities from the surface of a workpiece, characterized in that, The utility model relates to a cleaning mechanism, including: mounting frame; Coarse driving part, coarse driving part sets up in mounting frame; Connecting piece, coarse driving part and connecting piece drive connection, coarse driving part can drive connecting piece moves along first direction; Fine driving part, fine driving part sets up in connecting piece; And Cleaning assembly, the fine driving part is drivenly connected with the mounting seat, and the fine driving part can drive the mounting seat to move along the first direction; The cleaning assembly further includes a first cleaning element arranged in the mounting seat; The coarse driving part drives the connecting piece to move along the first direction, which can make the first cleaning element close to the workpiece; The fine driving part further drives the mounting seat to move along the first direction, which can make the first cleaning element contact the workpiece and clean the workpiece.

2. The clearing mechanism of claim 1, wherein, The mounting seat is movably connected with the connecting piece along the first direction, the connecting piece is movably connected with the mounting frame along the first direction, and the fine driving part is a gas cylinder.

3. The clearing mechanism of claim 2, wherein, The cleaning mechanism further includes an elastic element elastically connected to the connecting piece and the mounting seat along the first direction, and the elastic element acts on the mounting seat in a direction of elastic force along the first direction towards the connecting piece.

4. The clearing mechanism of any one of claims 1-3, wherein, The first cleaning element includes a first roller and a first adhesive layer, the first roller is rotatable and movably arranged in the mounting seat along the first direction, and the first adhesive layer covers the circumferential surface of the first roller. The cleaning assembly further includes a second cleaning element, the second cleaning element includes a second roller and a plurality of second adhesive layers, the second roller is rotatably arranged in the mounting seat, the axial direction of the second roller is parallel to the axial direction of the first roller, and the plurality of second adhesive layers are wound on the circumferential surface of the second roller layer by layer. The first roller moves along the first direction to make the surface of the first adhesive layer contact the surface of the second adhesive layer, at this time, the rotation of the first roller can synchronously drive the rotation of the second roller, the first adhesive layer can adhere to clean the surface of the workpiece, the second adhesive layer can adhere to clean the surface of the first adhesive layer, and the plurality of second adhesive layers can be torn off along the circumferential direction of the second roller.

5. The clearing mechanism of claim 4, wherein, The radial dimension of the second adhesive layer is greater than or equal to the radial dimension of the first adhesive layer, the axial dimension of the second adhesive layer along the second roller is greater than or equal to the axial dimension of the first adhesive layer along the first roller, and the two ends of the first adhesive layer along the axial direction of the first roller are respectively not more than the two ends of the second adhesive layer along the axial direction of the second roller.

6. The clearing mechanism of claim 4, wherein, The mounting seat is provided with two slot holes in parallel along the first direction, the two slot holes are oppositely arranged along the axial direction of the first roller, the two ends of the axial direction of the first roller are respectively inserted and matched with the two slot holes, and the first roller is movable along the strip-shaped track of the slot hole.

7. The clearing mechanism of claim 6, wherein, The length of the slot hole along the first direction is greater than or equal to the distance between the surface of the first adhesive layer and the circumferential surface of the second roller along the first direction.

8. The clearing mechanism of claim 4, wherein, The second roller is detachably connected with the mounting seat, and after the second roller is connected with the mounting seat, the second roller and the first roller are arranged along the first direction.

9. The clearing mechanism of claim 1, wherein, The cleaning mechanism further comprises an electrostatic elimination device movably arranged on the mounting frame, and the electrostatic elimination device is capable of generating air masses with positive and negative charges. An output end of the electrostatic elimination device for outputting air masses with positive and negative charges is arranged opposite the surface of the first cleaning device and / or the workpiece with particulate impurities, so as to electrostatically eliminate the particles cleaned by the first cleaning device and / or the particles on the surface of the workpiece.

10. A processing apparatus characterized by comprising: The processing device comprises a carrier and the cleaning mechanism according to any one of claims 1-9, the carrier is used for carrying the workpiece with particulate impurities, and the cleaning mechanism is movably arranged opposite the carrier along the top surface of the carrier.

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