Charging device for producing large-size niobium oxide target material

By designing a loading device that includes a base, turntable, limit seat, and cylinder control, the problem of material spillage and uneven distribution in the production of niobium oxide targets was solved, and an efficient and stable loading process was achieved.

CN223521100UActive Publication Date: 2025-11-07SHENZHEN CANYUAN METAL MATERIAL CO LTD
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Patent Information

Application Number
CN202423186839.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-24
Publication Date
2025-11-07
Estimated Expiration
2034-12-24

AI Technical Summary

Technical Problem

In the existing niobium oxide target production process, the problems of material spillage and uneven distribution lead to low production efficiency and increased costs.

Method used

A loading device was designed, comprising components such as a base, turntable, limit seat, feeding tank, cylinder, and ratchet. The cylinder controls the lifting and rotation of the feeding tank and turntable to ensure that the material is accurately and evenly loaded into the mold, avoiding spillage and uneven distribution.

Benefits of technology

It improved production efficiency, reduced operational complexity and time costs, ensured the stability and uniformity of materials, and simplified the operation process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of target material production, in particular to a loading device for producing a large-size niobium oxide target material. According to the technical scheme, a die is placed on a base in a limited mode through a rotary disc, a discharging tank is installed on the base and located above the rotary disc through a first air cylinder, the rotary disc is rotationally installed on a fixing plate through a limiting column, a ratchet wheel is installed at the bottom end of the rotary disc through a fixing disc, and a pushing mechanism is installed at the position, located at the bottom end of the rotary disc, of the base. A fixing mechanism is installed on the fixing plate, the pushing mechanism and the ratchet wheel are matched with each other to drive the rotating disc to rotate, and the fixing mechanism and the fixing disc are matched with each other to position the rotating disc. Through the design of positioning and rotation of the turntable and the mold, matching of the pushing mechanism and the ratchet wheel, positioning of the fixing mechanism and the turntable and the like, the problem that when an existing device is used, the discharging tank can be aligned to the mold only by adjusting the position of the discharging tank for multiple times through a discharging tank transverse moving mechanism is effectively solved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to target material production technical field, concretely relates to loading device for large size niobium oxide target material production. BACKGROUND

[0002] Niobium oxide is the general term of various oxides of niobium, including niobium monoxide, niobium dioxide, di-niobium trioxide, di-niobium pentoxide. Niobium oxide target material is an important material for preparing AR glass (anti-reflective glass) and ITO (indium tin oxide) glass. In addition, niobium oxide target material is also widely used in the fields of solar cells, optical glass and mobile phone touch screen. In the production process of niobium oxide target material, di-niobium pentoxide powder and metal niobium powder are used as raw materials and put into a mixer according to the ratio for mixing; then the mixed powder raw material is put into a high-energy ball mill tank for ball milling; then the ball-milled powder is put into a high-purity graphite mold for pre-pressing; then the graphite mold is put into a hot pressing furnace for heating, vacuumizing and cooling to form a target blank. When the mixed powder raw material is loaded into the graphite mold, a discharge hopper is usually used. However, the distance between the discharge hopper and the graphite mold is relatively large, and the material falling from the discharge hopper often appears to be scattered, resulting in waste of material.

[0003] After searching, the patent with patent publication number CN202123276793.4 discloses a loading device for large size niobium oxide target material production, which can effectively avoid the scattering of material during loading, ensure the uniformity of material loading, and make the density distribution of the target material uniform. However, the device needs to adjust the position of the discharge tank multiple times through the discharge tank horizontal moving mechanism to align the discharge tank with the mold. This process increases the complexity of operation and may lead to reduced production efficiency. Moreover, multiple position adjustments mean more time is needed for preparation before loading, increasing the time cost of production. UTILITY MODEL CONTENTS

[0004] To overcome the shortcomings of the prior art, the utility model provides a loading device for large size niobium oxide target material production, which solves the problems raised in the background art.

[0005] The utility model solves the above technical problems by the following scheme:

[0006] The loading device for large size niobium oxide target material production comprises a base, a turntable installed on the base, a mold placed on the turntable in a limited manner, a first air cylinder installed above the turntable on the base, and a discharge tank installed on the output end of the first air cylinder.

[0007] The base is provided with a fixed plate, the fixed plate is provided with a limiting column, the rotating disc is rotatably installed on the fixed plate through the limiting column, the bottom end of the rotating disc is provided with a fixed disc, the fixed disc is provided with a ratchet wheel, the bottom end of the rotating disc is provided with a pushing mechanism, the fixed plate is provided with a fixing mechanism, the pushing mechanism and the ratchet wheel drive the rotating disc to rotate in cooperation, and the fixing mechanism and the fixed disc position the rotating disc after rotation in cooperation.

[0008] Based on the above technical scheme, the utility model further can make improvement as follows.

[0009] Further, the discharging tank is provided with a discharging pipe, and the discharging tank is connected and fixed with the first cylinder through the discharging pipe.

[0010] The beneficial effects of the above further scheme are:

[0011] The discharging tank is connected and fixed with the first cylinder through the discharging pipe, and this connection mode can keep the discharging tank stable during lifting and is not prone to shaking or deviation. This helps to ensure that the material can be accurately and uniformly loaded into the mold, avoiding problems such as material scattering or uneven distribution. The connection mode of the discharging pipe with the discharging tank and the first cylinder is simple and clear, facilitating maintenance and replacement. When the discharging tank needs to be cleaned, repaired or replaced, the operator can easily detach it from the first cylinder and perform the corresponding maintenance work.

[0012] Further, the rotating disc is provided with a limiting seat, and the mold is placed on the rotating disc through the limiting seat.

[0013] The beneficial effects of the above further scheme are:

[0014] The design of the limiting seat can effectively limit the movement of the mold on the rotating disc, ensuring that the mold remains stable during loading. This stability is crucial for ensuring that the material is uniformly and accurately loaded into the mold, avoiding problems such as material scattering and uneven distribution caused by mold shaking or deviation. By placing the mold on the limiting seat through the limiting seat, the operation process can be simplified. The operator does not need to perform additional fixing or adjustment work, but only needs to place the mold on the limiting seat. This not only improves work efficiency, but also reduces operation difficulty, making the loading process smoother.

[0015] Further, the pushing mechanism is provided with a second cylinder, the output end of the second cylinder is rotatably installed with a connecting arm, the connecting arm is rotatably sleeved on the limiting column, a clamping block is rotatably installed on the connecting arm through a tension spring, and the clamping block is deflected by the tension spring to be clamped with the ratchet wheel.

[0016] The beneficial effects of the above further scheme are:

[0017] Through the telescopic movement of the second cylinder, the connecting arm can be automatically driven to deflect around the limit post, and then the ratchet wheel is pushed to rotate by the clamping block. This design realizes the automatic rotation of the turntable without manual operation, improving the production efficiency. The design of the tension spring enables the clamping block to be tightly clamped with the teeth of the ratchet wheel, ensuring the stability of the turntable during rotation. Even in the case of external interference or load change, the turntable can maintain stable rotation.

[0018] Further, when the second cylinder pushes the connecting arm to deflect around the limit post, the ratchet wheel is pushed to rotate by the clamping block on the connecting arm, and then the turntable is pushed to rotate by the pushing mechanism. When the second cylinder pulls the connecting arm back, one end of the clamping block is deflected by the tension of the tension spring and tightly attached to the surface of the ratchet wheel until it is reset again to be clamped with the teeth of the ratchet wheel.

[0019] The beneficial effects of the above further scheme are:

[0020] The design precisely controls the deflection angle of the connecting arm through the telescopic movement of the second cylinder, and then the ratchet wheel is rotated by the clamping block. Since the ratchet wheel has a fixed pitch and number of teeth, the angle and distance of each rotation of the turntable can be ensured to be accurate. During the rotation of the turntable, the clamping block and the teeth of the ratchet wheel are clamped with each other, forming a stable transmission relationship. This design not only prevents the turntable from shaking or deviating during rotation, but also ensures that the turntable can maintain stable rotation when subjected to external force interference. At the same time, the design of the tension spring enables the clamping block to be tightly attached to the surface of the ratchet wheel during retraction, further improving the stability and reliability of rotation.

[0021] Further, the fixing mechanism is provided with a third cylinder, and a clamping jaw is rotatably installed on the output end of the third cylinder.

[0022] The beneficial effects of the above further scheme are:

[0023] The third cylinder as a power source can accurately control the opening and closing action of the clamping jaw. By adjusting the telescopic amount of the cylinder, the opening angle of the clamping jaw can be accurately controlled, thereby ensuring that the mold or material can be stably clamped or released. The clamping jaw is rotatably installed on the fixed plate through the stand column, which makes the clamping jaw stable during clamping and less likely to shake or deviate. This helps to ensure the stability and accuracy of the mold or material during loading.

[0024] Further, when the turntable rotates, the third cylinder pulls the claw to deflect around the column, and then the claw is separated from the fixed disc; when the turntable needs to be positioned, the third cylinder pushes the claw to deflect around the column, and then the claw is clamped with the fixed disc, and then the turntable is positioned through the fixing mechanism.

[0025] The beneficial effects of the further scheme are:

[0026] The design realizes the rapid control of the claw through the rapid extension and retraction of the third cylinder. When the turntable needs to be positioned, the third cylinder rapidly pushes the claw to deflect, so that the claw is tightly clamped with the fixed disc, thereby realizing the rapid positioning of the turntable. This design can significantly improve the production efficiency and reduce the positioning time. The clamping structure between the claw and the fixed disc is stable and reliable, and can bear a large weight and load of the turntable. This design ensures the stability of the turntable during positioning, and prevents the turntable from accidentally rotating or deviating due to external interference.

[0027] The utility model discloses a loading device for large-size niobium oxide target material production. It has the following beneficial effects:

[0028] The discharge tank and the discharge pipe in the device are reasonably designed, which can ensure that the materials are accurately and uniformly loaded into the mold, and avoid the occurrence of material scattering phenomenon. Through accurate control of the extension and retraction of the cylinder, accurate adjustment of the discharging position can be realized, thereby meeting the production requirements of niobium oxide target materials of different sizes and specifications.

[0029] The device adopts base, turntable, fixed plate and other structural parts, and through the limiting device such as limiting seat and limiting column, the stability and accuracy of the turntable and the mold are ensured. The cooperation design of the ratchet wheel and the pushing mechanism makes the turntable stable during rotation and is not easy to shake or deviate.

[0030] The operation process of the device is simple and clear, and the rotation and positioning of the turntable, as well as the lifting and loading of the discharge tank can be realized by controlling the extension and retraction of the cylinder. The fixed mechanism and the pushing mechanism and other components in the device are designed flexibly, which can be adjusted and optimized according to actual needs to adapt to the mold and target material production requirements of different sizes and specifications. BRIEF DESCRIPTION OF DRAWINGS

[0031] The drawings described herein are used to provide further understanding of the utility model and constitute a part of the application. The schematic embodiments of the utility model and their descriptions are used to explain the utility model, and do not constitute an improper limitation on the utility model.

[0032] In the drawings:

[0033] Figure 1 It is the front view appearance schematic diagram of the utility model;

[0034] Figure 2 This is a schematic diagram of the main view of the explosion mechanism of the fixed plate of this utility model;

[0035] Figure 3 This is a schematic diagram of the fixed plate explosion mechanism of this utility model from a downward view;

[0036] Figure 4 This is a schematic diagram of the pushing mechanism and fixing mechanism of this utility model.

[0037] The attached diagram lists the components represented by each number as follows:

[0038] 1. Base; 2. First cylinder; 3. Feed tank; 301. Feed pipe; 4. Turntable; 401. Limit seat; 402. Ratchet; 403. Fixing plate; 5. Mold; 6. Fixing plate; 601. Limiting post; 7. Pushing mechanism; 701. Clamping block; 702. Second cylinder; 703. Tension spring; 704. Connecting arm; 8. Fixing mechanism; 801. Third cylinder; 802. Clamping claw; 803. Column. Detailed Implementation

[0039] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0040] Please see Figures 1 to 4 As shown, the embodiments provided by this utility model are as follows:

[0041] Example 1

[0042] The application discloses a charging device for large-size niobium oxide target material production, which comprises a base 1, a rotating disc 4 installed on the base 1, a mold 5 placed on the rotating disc 4 in a limited manner, a limiting seat 401 arranged on the rotating disc 4, and the mold 5 placed on the rotating disc 4 in a limited manner through the limiting seat 401. The limiting seat 401 can effectively limit the movement of the mold 5 on the rotating disc 4 and ensure that the mold 5 remains stable during the charging process. Such stability is crucial for ensuring that the material is uniformly and accurately charged into the mold 5 and can avoid problems such as material scattering and uneven distribution caused by shaking or deviation of the mold 5. The mold 5 is placed on the rotating disc 4 in a limited manner through the limiting seat 401, which can simplify the operation process. The operator does not need to perform additional fixing or adjusting work, but only needs to place the mold 5 on the limiting seat 401. This not only improves the work efficiency, but also reduces the operation difficulty, so that the charging process is more smooth. A first air cylinder 2 is installed above the rotating disc 4 on the base 1, an output end of the first air cylinder 2 is provided with a discharging tank 3, the discharging tank 3 is provided with a discharging pipe 301, the discharging tank 3 is connected and fixed with the first air cylinder 2 through the discharging pipe 301, and the discharging tank 3 is connected and fixed with the first air cylinder 2 through the discharging pipe 301. Such a connection mode can keep the discharging tank 3 stable during the lifting process and is not prone to shaking or deviation. This helps to ensure that the material can be accurately and uniformly charged into the mold 5 and avoids problems such as material scattering or uneven distribution. The connection mode of the discharging pipe 301 with the discharging tank 3 and the first air cylinder 2 is simple and clear, and is convenient for maintenance and replacement. When the discharging tank 3 needs to be cleaned, repaired or replaced, the operator can easily detach it from the first air cylinder 2 and perform corresponding maintenance work.

[0043] Example two

[0044] In order to facilitate the rotation of the rotating disc 4 and the positioning of the rotating disc 4, for example, Figures 1 to 4As shown, the application also includes: the base 1 is installed with a fixed plate 6, the fixed plate 6 is provided with a limiting column 601, the rotating disc 4 is rotatably installed on the fixed plate 6 through the limiting column 601, the bottom end of the rotating disc 4 is provided with a fixed disc 403, the fixed disc 403 is installed with a ratchet wheel 402, the base 1 is installed with a pushing mechanism 7 at the bottom end of the rotating disc 4, the fixed plate 6 is installed with a fixing mechanism 8, the pushing mechanism 7 and the ratchet wheel 402 are mutually matched to drive the rotating disc 4 to rotate, the pushing mechanism 7 is provided with a second cylinder 702, the output end of the second cylinder 702 is rotatably installed with a connecting arm 704, and the connecting arm 704 is rotatably sleeved on the limiting column 601, the connecting arm 704 is rotatably installed with a clamping block 701 through a tension spring 703, the clamping block 701 is deflected by the tension spring 703 to be clamped with the ratchet wheel 402, through the extension and retraction movement of the second cylinder 702, the connecting arm 704 can be automatically driven to deflect with the limiting column 601 as the center, and then the ratchet wheel 402 is driven to rotate through the clamping block 701. This design realizes the automatic rotation of the rotating disc 4 without manual operation, and improves the production efficiency. The design of the tension spring 703 enables the clamping block 701 to be tightly clamped with the ratchet teeth of the ratchet wheel 402, thereby ensuring the stability of the rotating disc 4 during rotation. Even in the case of external interference or load change, the rotating disc 4 can still rotate stably, when the second cylinder 702 pushes the connecting arm 704 to deflect with the limiting column 601 as the center, the ratchet wheel 402 is driven to rotate through the clamping block 701 on the connecting arm 704, and then the rotating disc 4 is driven to rotate through the pushing mechanism 7, when the second cylinder 702 pulls the connecting arm 704 to retract, one end of the clamping block 701 is deflected by the tension of the tension spring 703 and tightly adheres to the surface of the ratchet wheel 402 until reset to be clamped with the ratchet teeth of the ratchet wheel 402 again. This design accurately controls the deflection angle of the connecting arm 704 through the extension and retraction movement of the second cylinder 702, and then drives the ratchet wheel 402 to rotate through the clamping block 701. Since the ratchet wheel 402 has fixed pitch and number of teeth, the angle and distance of the rotating disc 4 each time can be ensured to be accurate. During the rotation of the rotating disc 4, the clamping block 701 is clamped with the ratchet teeth of the ratchet wheel 402, forming a stable transmission relationship. This design not only prevents the rotating disc 4 from shaking or deviating during rotation, but also ensures that the rotating disc 4 can still rotate stably when subjected to external force interference. At the same time, the design of the tension spring 703 enables the clamping block 701 to tightly adhere to the surface of the ratchet wheel 402 during retraction, further improving the stability and reliability of rotation, and the fixing mechanism 8 and the fixed disc 403 are matched to position the rotating disc 4 after rotation, the fixing mechanism 8 is provided with a third cylinder 801, the output end of the third cylinder 801 is rotatably installed with a clamping jaw 802, the clamping jaw 802 is rotatably installed on the fixed plate 6 through a vertical column 803, the third cylinder 801 serves as a power source and can accurately control the opening and closing action of the clamping jaw 802.By adjusting the extension and retraction amount of the cylinder, the opening and closing angle of the claw 802 can be accurately controlled, thereby ensuring that the mold 5 or the material can be stably clamped or released. The claw 802 is rotatably installed on the fixed plate 6 through the column 803, which makes the claw 802 stable during clamping and less likely to shake or deviate. This helps to ensure the stability and accuracy of the mold 5 or the material during loading. When the turntable 4 rotates, the third cylinder 801 pulls the claw 802 to deflect the claw 802 with the column 803 as the center, thereby separating the claw 802 from the fixed disc 403. When the turntable 4 needs to be positioned, the third cylinder 801 pushes the claw 802 to deflect the claw 802 with the column 803 as the center, thereby making the claw 802 and the fixed disc 403 interlock, and then positioning the turntable 4 through the fixing mechanism 8. This design realizes rapid control of the claw 802 through rapid extension and retraction of the third cylinder 801. When the turntable 4 needs to be positioned, the third cylinder 801 rapidly pushes the claw 802 to deflect, so that the claw 802 tightly interlocks with the fixed disc 403, thereby realizing rapid positioning of the turntable 4. This design can significantly improve production efficiency and reduce positioning time. The interlocking structure between the claw 802 and the fixed disc 403 is stable and reliable, and can withstand the weight and load of the turntable 4. This design ensures the stability of the turntable 4 during positioning, preventing accidental rotation or deviation of the turntable 4 due to external interference.

[0045] Working principle:

[0046] When the device is in the initial state, the turntable 4 is stably placed on the base 1 and limited by the limiting seat 401. The mold 5 is placed on the turntable 4, ready to receive the material. The first cylinder 2 is in the retracted state, and the feeding tank 3 is located above the turntable 4, but does not contact the mold 5. The feeding pipe 301 is connected with the feeding tank 3, for conveying the material into the mold 5.

[0047] When it is necessary to load the material into the mold 5, the claw 802 does not contact the fixed disc 403, and the second cylinder 702 starts to extend to push the connecting arm 704 to deflect with the limiting column 601 as the center. The clamping block 701 on the connecting arm 704 is interlocked with the teeth of the ratchet wheel 402 under the action of the tension spring 703, and pushes the ratchet wheel 402 to rotate. The rotation of the ratchet wheel 402 drives the turntable 4 to rotate through the fixed disc 403, so that the mold 5 moves to the lower side of the feeding tank 3.

[0048] After the mold 5 moves to the lower side of the feeding tank 3, the first cylinder 2 starts to extend to drive the feeding tank 3 and the feeding pipe 301 to descend. The feeding pipe 301 extends into the inside of the mold 5, and the material is conveyed into the mold 5 through the feeding pipe 301.

[0049] When the rotating disc 4 rotates to the designated position, the third cylinder 801 starts to extend, pushing the claw 802 to deflect with the stand 803 as the center. The claw 802 is clamped with the fixed disc 403, and the rotating disc 4 is positioned by the fixing mechanism 8. In this way, the rotating disc 4 can be kept stable during the loading process, and is not prone to shaking or deviation.

[0050] After the second cylinder 702 pulls the connecting arm 704 to retract, one end of the clamping block 701 is deflected by the pulling force of the tension spring 703 and tightly adheres to the surface of the ratchet wheel 402. With the continuous retraction of the connecting arm 704, the clamping block 701 is clamped with the teeth of the ratchet wheel 402 again, preparing for the next rotation of the rotating disc 4.

[0051] The device can repeat the above steps for continuous loading operation. When it is necessary to load the next mold 5, the second cylinder 702 and the first cylinder 2 can be started again to complete the operation.

[0052] The basic principle and main features of the device and the advantages of the device are shown and described above. For those skilled in the art, it is obvious that the device is not limited to the details of the above exemplary embodiments, and the device can be realized in other specific forms without departing from the spirit or basic characteristics of the device. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the device is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the device. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0053] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A charging device for producing large-size niobium oxide targets, comprising a base (1), a rotating disc (4) mounted on the base (1), a mold (5) placed on the rotating disc (4) in a limited manner, a first air cylinder (2) mounted on the base (1) above the rotating disc (4), and a discharging tank (3) mounted on the output end of the first air cylinder (2), characterized in that: a fixed plate (6) is mounted on the base (1), a limiting column (601) is arranged on the fixed plate (6), the rotating disc (4) is rotatably mounted on the fixed plate (6) through the limiting column (601), a fixed disc (403) is arranged at the bottom end of the rotating disc (4), a ratchet wheel (402) is mounted on the fixed disc (403), a pushing mechanism (7) is mounted on the base (1) at the bottom end of the rotating disc (4), a fixing mechanism (8) is mounted on the fixed plate (6), the pushing mechanism (7) and the ratchet wheel (402) cooperatively drive the rotating disc (4) to rotate, and the fixing mechanism (8) cooperatively positions the rotating disc (4) after rotation with the fixed disc (403).

2. The charging device for producing a large-sized niobium oxide target according to claim 1, wherein: A discharging pipe (301) is arranged on the discharging tank (3), and the discharging tank (3) is fixedly connected with the first air cylinder (2) through the discharging pipe (301).

3. The charging device for producing a large-sized niobium oxide target according to Claim 1, wherein: A limiting seat (401) is arranged on the rotating disc (4), and the mold (5) is placed on the rotating disc (4) in a limited manner through the limiting seat (401).

4. The charging device for producing a large-sized niobium oxide target according to Claim 1, wherein: The pushing mechanism (7) is provided with a second air cylinder (702), the output end of the second air cylinder (702) is rotatably provided with a connecting arm (704), the connecting arm (704) is rotatably sleeved on the limiting column (601), a clamping block (701) is rotatably arranged on the connecting arm (704) through a tension spring (703), and the clamping block (701) is deflected by the tension spring (703) to be clamped with the ratchet wheel (402).

5. The charging device for producing a large-sized niobium oxide target according to Claim 4, wherein: When the second air cylinder (702) pushes the connecting arm (704) to deflect around the limiting column (601), the clamping block (701) on the connecting arm (704) pushes the ratchet wheel (402) to rotate, and then the pushing mechanism (7) pushes the rotating disc (4) to rotate, when the second air cylinder (702) pulls the connecting arm (704) to retract, one end of the clamping block (701) is deflected by the tension of the tension spring (703) and tightly adheres to the surface of the ratchet wheel (402) until reset to be clamped with the ratchet wheel (402) again.

6. The charging device for producing a large-sized niobium oxide target according to Claim 1, wherein: The fixing mechanism (8) is provided with a third air cylinder (801), the output end of the third air cylinder (801) is rotatably provided with a clamping jaw (802), and the clamping jaw (802) is rotatably mounted on the fixed plate (6) through a stand column (803).

7. The charging device for producing a large-sized niobium oxide target according to Claim 6, wherein: When the rotary table (4) rotates, the third cylinder (801) pulls the claw (802) to deflect the claw (802) with the column (803) as the center, and then separates the claw (802) from the fixed disc (403); when the rotary table (4) needs to be positioned, the third cylinder (801) pushes the claw (802) to deflect the claw (802) with the column (803) as the center, and then makes the claw (802) and the fixed disc (403) clamped with each other, and then positions the rotary table (4) through the fixing mechanism (8).

Citation Information

Patent Citations

  • Charging device for production of large-size niobium oxide target material

    CN216427396U