Split type loading mechanism and vacuum treatment equipment
By designing a split loading mechanism, the problem that existing loading mechanisms cannot adapt to workpieces of different shapes is solved, thereby improving the efficiency of vacuum processing of workpieces and reducing costs.
Patent Information
- Application Number
- CN202423010332.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-06
AI Technical Summary
The existing loading mechanism is a single unit, which cannot flexibly adapt to workpieces of different shapes, resulting in frequent replacements or modifications, reducing production efficiency and increasing manufacturing costs.
It adopts a split loading mechanism, including workpiece fixture, docking assembly and fixing assembly. The workpiece fixture can be quickly replaced through detachable connection and fasteners, which can be adapted to the vacuum treatment of different workpieces.
It improves the efficiency of vacuum processing of workpieces, reduces manufacturing costs, and simplifies the workpiece changeover process.
Smart Images
Figure CN223522653U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to vacuum treatment technical field especially relates to a split type loading mechanism and vacuum processing equipment. BACKGROUND
[0002] In the vacuum processing process such as vacuum coating, the workpiece to be processed is usually installed on a jig or other loading mechanism first, and then the loading mechanism is assembled with the mounting mechanism on the rotating mechanism in the vacuum processing chamber to realize the vacuum processing of the workpiece to be processed. In a vacuum processing equipment equipped with an automatic feeding and discharging mechanism, the automatic handling device completes the operation of loading mechanism in and out of the vacuum processing chamber under the action of the control program. For different workpieces, different loading mechanisms are usually needed to achieve loading effect.
[0003] The existing loading mechanism is integrated, and when different shaped workpieces need to be loaded, the appropriate loading mechanism needs to be replaced or the original loading mechanism needs to be modified, which leads to the decrease of production efficiency and the increase of manufacturing cost. UTILITY MODEL CONTENT
[0004] The utility model discloses a split type loading mechanism and vacuum processing equipment to solve the problem that the existing loading mechanism is integrated, and when different shaped workpieces need to be loaded, the appropriate loading mechanism needs to be replaced or the original loading mechanism needs to be modified, improve the efficiency of workpiece vacuum processing, and reduce manufacturing cost.
[0005] To achieve this purpose, the utility model adopts the following technical scheme:
[0006] On the one hand, a split type loading mechanism is provided, comprising:
[0007] Workpiece jig, the workpiece jig is used to load workpiece;
[0008] The docking assembly comprises a first docking piece and a second docking piece, and the first docking piece and the second docking piece are respectively detachably connected with both ends of the workpiece jig along the first direction;
[0009] The fixing assembly is two groups, and is respectively detachably arranged between the first docking piece and the workpiece jig and between the second docking piece and the workpiece jig.
[0010] As an optional technical scheme of the split type loading mechanism, both ends of the workpiece jig are provided with protruding shafts, one end of the first docking piece and the second docking piece connected with the workpiece jig is provided with a hollow shaft, and the protruding shaft can be inserted into the hollow shaft along the first direction.
[0011] As an optional technical scheme of the split loading mechanism, the fixing assembly comprises a fastener, the protruding shaft is provided with a first through hole in a second direction, the hollow shaft is provided with a second through hole and a threaded hole in the second direction, and when the protruding shaft is inserted into the hollow shaft, the fastener can pass through the second through hole and the first through hole in sequence and be screwed in the threaded hole.
[0012] As an optional technical scheme of the split loading mechanism, the protruding shaft is hollow, and the first through hole is two.
[0013] As an optional technical scheme of the split loading mechanism, the fixing assembly further comprises a limiting piece, the limiting piece is arranged in the protruding shaft in the first direction, so as to position the position of the fastener and limit the movement of the fastener in the second direction.
[0014] As an optional technical scheme of the split loading mechanism, the fixing assembly further comprises an elastic piece, the elastic piece is arranged in the cavity of the protruding shaft and located between the inner end face of the protruding shaft away from the workpiece fixture and the limiting piece, and the limiting piece can be moved in the first direction through the elastic piece.
[0015] As an optional technical scheme of the split loading mechanism, the fastener is provided with an annular notch, when the fastener is screwed in the threaded hole, the annular notch is located between the two first through holes and matched with the limiting piece, and the limiting piece can be driven by the elastic piece to fall into the annular notch.
[0016] As an optional technical scheme of the split loading mechanism, the center axes of the two first through holes coincide and pass through the center axis of the protruding shaft.
[0017] As an optional technical scheme of the split loading mechanism, the center axes of the second through hole and the threaded hole coincide and pass through the center axis of the hollow shaft.
[0018] In another aspect, a vacuum processing equipment is provided, comprising a vacuum chamber and the split loading mechanism, and the split loading mechanism can be moved into or out of the vacuum chamber.
[0019] The utility model discloses beneficial effects are as follows:
[0020] The application discloses a split loading mechanism and a vacuum processing device, and the split loading mechanism comprises a workpiece jig, a docking assembly and a fixing assembly, the workpiece jig is used for loading workpieces, the docking assembly comprises a first docking piece and a second docking piece, and the first docking piece and the second docking piece are detachably connected with two ends of the workpiece jig along a first direction respectively, and the fixing assembly is two groups and is detachably arranged between the first docking piece and the workpiece jig and between the second docking piece and the workpiece jig respectively. By splitting the original integrated material string mechanism into the workpiece jig, the first docking piece and the second docking piece, when different workpieces are vacuum processed, only the workpiece jig that is suitable is replaced, the efficiency of vacuum processing of the workpieces is improved, and the manufacturing cost is reduced. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments of the present application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the contents of the embodiments of the present application and the drawings.
[0022] Figure 1 is a sectional view of the split loading mechanism provided by the embodiments of the present application;
[0023] Figure 2 is a first sectional view of part of the structure of the split loading mechanism provided by the embodiments of the present application;
[0024] Figure 3 is a second sectional view of part of the structure of the split loading mechanism provided by the embodiments of the present application;
[0025] Figure 4 is an axonometric view of a second split loading mechanism provided by the embodiments of the present application;
[0026] Figure 5 is an axonometric view of a third split loading mechanism provided by the embodiments of the present application.
[0027] In the drawings:
[0028] 10, workpiece jig; 11, protruding shaft; 111, first through hole;
[0029] 20, docking assembly; 21, first docking piece; 22, second docking piece; 23, hollow shaft; 231, second through hole; 232, threaded hole;
[0030] 30, fixing assembly; 31, fastener; 311, annular notch; 32, limiting piece. DETAILED DESCRIPTION
[0031] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are merely intended to explain the utility model and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description, not all the structures.
[0032] In the description of the utility model, unless explicitly defined and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0033] In the utility model, unless explicitly defined and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0034] In the description of the embodiment, the terms "up", "down", "right", etc. orientation or position relationship is based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in description, and have no special meaning.
[0035] The existing loading mechanism is integrated, when different shaped workpieces need to be loaded, the appropriate loading mechanism needs to be replaced, or the original loading mechanism needs to be modified, thereby causing the production efficiency to decrease and the manufacturing cost to increase.
[0036] To solve the above problems, the embodiment provides a vacuum processing equipment, which comprises a vacuum chamber and a split type loading mechanism, and the split type loading mechanism can be moved into or out of the vacuum chamber. Wherein, referring to Figure 1The split loading mechanism comprises a workpiece fixture 10, a docking assembly 20 and a fixing assembly 30. The workpiece fixture 10 is used for loading workpieces. The docking assembly 20 comprises a first docking piece 21 and a second docking piece 22. The first docking piece 21 and the second docking piece 22 are respectively detachably connected with two ends of the workpiece fixture 10 along a first direction. The fixing assembly 30 is provided in two groups and is detachably arranged between the first docking piece 21 and the workpiece fixture 10 and between the second docking piece 22 and the workpiece fixture 10. By splitting the original integrated material string mechanism into the workpiece fixture 10, the first docking piece 21 and the second docking piece 22, only the workpiece fixture 10 needs to be replaced when different workpieces are vacuum processed, thereby improving the efficiency of workpiece vacuum processing and reducing manufacturing costs.
[0037] Specifically, referring to Figure 1 、 Figure 4 and Figure 5 , the workpiece fixture 10 can be provided in the form of a cylinder, a prism or a screw column.
[0038] Further, referring to Figure 2 and Figure 3 , the workpiece fixture 10 has a protruding shaft 11 at both ends. The first docking piece 21 and the second docking piece 22 are provided with a hollow shaft 23 at one end connected with the workpiece fixture 10. The protruding shaft 11 can be inserted into the hollow shaft 23 along the first direction. In this embodiment, the protruding shaft 11 and the hollow shaft 23 can be fixed by the fixing assembly 30.
[0039] Specifically, the fixing assembly 30 comprises a fastener 31. The protruding shaft 11 is provided with a first through hole 111 along a second direction. The hollow shaft 23 is provided with a second through hole 231 and a threaded hole 232 along the second direction. When the protruding shaft 11 is inserted into the hollow shaft 23, the fastener 31 can pass through the second through hole 231 and the first through hole 111 in sequence and be screwed into the threaded hole 232. The fastener 31 can be provided in the form of a bolt or a screw column.
[0040] In other embodiments, the protruding shaft 11 and the hollow shaft 23 can be clamped by a spring clamp block. Specifically, the center axis of the second through hole 231 and the center axis of the threaded hole 232 coincide and pass through the center axis of the hollow shaft 23. In this embodiment, the inner diameter of the threaded hole 232 is smaller than the inner diameter of the second through hole 231. The first direction is the Y direction and the second direction is the X direction.
[0041] Further, the protruding shaft 11 is hollow inside, and the first through holes 111 are two. In order to improve the cooperation between the fastener 31 and the two first through holes 111, the second through hole 231 has the same inner diameter as the first through hole 111, and the center axes of the two first through holes 111 coincide and pass through the center axis of the protruding shaft 11. The fixing assembly 30 further comprises a limiting piece 32, which is arranged inside the cavity of the protruding shaft 11 along the first direction, so as to position the fastener 31 and limit the movement of the fastener 31 along the second direction. In the embodiment, the limiting piece 32 is arranged as a ball plunger, the protruding shaft 11 is internally threaded, and the end face of the protruding shaft 11 away from the workpiece jig 10 is provided with an opening. The ball plunger is screwed into the protruding shaft 11 through the opening, and the ball head of the ball plunger can move along the first direction.
[0042] In other embodiments, the limiting piece 32 can be arranged as a limiting column or a limiting ball, etc., and the end face of the protruding shaft 11 away from the workpiece jig 10 is closed. The fixing assembly 30 further comprises a resilient piece, which is arranged inside the cavity of the protruding shaft 11 and between the inner end face of the protruding shaft 11 away from the workpiece jig 10 and the limiting piece 32. The limiting piece 32 can move along the first direction through the resilient piece. The resilient piece can be arranged as a spring or a rubber column, etc. The resilient piece is glued to the limiting piece 32 and drives the limiting piece 32 to move along the first direction.
[0043] Further, the fastener 31 is provided with an annular notch 311, and when the fastener 31 is screwed into the threaded hole 232, the annular notch 311 is located between the two first through holes 111 and is adapted to the limiting piece 32. The limiting piece 32 can be driven by the resilient piece to fall into the annular notch 311. Through the force of the side wall of the annular notch 311 abutting against the limiting piece 32, the movement of the fastener 31 along the second direction can be limited.
[0044] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not a limitation on the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement made within the spirit and principle of the utility model should be included in the protection scope of the utility model claims.
Claims
1. A split loading mechanism, characterized by, The utility model relates to a split type loading mechanism, which comprises: a workpiece fixture (10) for loading a workpiece; a docking assembly (20) comprising a first docking piece (21) and a second docking piece (22), which are detachably connected with two ends of the workpiece fixture (10) along a first direction, respectively; a fixing assembly (30) which is provided between the first docking piece (21) and the workpiece fixture (10) and between the second docking piece (22) and the workpiece fixture (10) in two groups.
2. The split loading mechanism of claim 1, wherein, The workpiece fixture (10) has a protruding shaft (11) at each end, and the first docking piece (21) and the second docking piece (22) are provided with a hollow shaft (23) at the end connected with the workpiece fixture (10), and the protruding shaft (11) can be inserted into the hollow shaft (23) along the first direction.
3. The split loading mechanism of claim 2, wherein, The fixing assembly (30) comprises a fastener (31), the protruding shaft (11) is provided with a first through hole (111) along a second direction, the hollow shaft (23) is provided with a second through hole (231) and a threaded hole (232) along the second direction, and when the protruding shaft (11) is inserted into the hollow shaft (23), the fastener (31) can pass through the second through hole (231) and the first through hole (111) in sequence and be screwed into the threaded hole (232).
4. The split loading mechanism of claim 3, wherein, The protruding shaft (11) is hollow, and the first through hole (111) is two.
5. The split loading mechanism of claim 4, wherein, The fixing assembly (30) further comprises a limiting piece (32) arranged in the cavity of the protruding shaft (11) along the first direction to position the fastener (31) and limit the movement of the fastener (31) along the second direction.
6. The split loading mechanism of claim 5, wherein, The fixing assembly (30) further comprises a resilient piece arranged in the cavity of the protruding shaft (11) between the inner end face of the protruding shaft (11) away from the workpiece fixture (10) and the limiting piece (32), and the limiting piece (32) can move along the first direction by the resilient piece.
7. The split loading mechanism of claim 6, wherein, The fastener (31) is provided with an annular notch (311), and when the fastener (31) is screwed into the threaded hole (232), the annular notch (311) is located between the two first through holes (111) and is matched with the limiting piece (32), and the limiting piece (32) can be driven by the resilient piece to fall into the annular notch (311).
8. The split loading mechanism of claim 4, wherein, The center axes of the two first through holes (111) coincide and pass through the center axis of the protruding shaft (11).
9. The split loading mechanism of claim 3, wherein, The center axis of the second through hole (231) and the center axis of the threaded hole (232) coincide and pass through the center axis of the hollow shaft (23).
10. A vacuum processing apparatus, characterized by, The utility model relates to a split type loading mechanism, which comprises: a vacuum chamber and the split type loading mechanism as claimed in any one of claims 1-9, which can be moved into or out of the vacuum chamber.