Integrated valve group, gas processing unit, dilution refrigerator and quantum computer

Abstract

The utility model discloses an integrated valve group, a gas processing unit, a dilution refrigerator and a quantum computer, the integrated valve group comprises a valve body, a valve core and a control valve, and the gas processing unit comprises an integrated valve group, a gas reservoir, a pump set, a filter, a flow meter and a pressure meter. The dilution refrigerator comprises a gas processing unit, a refrigeration unit, an evacuation unit, a control unit and a pre-cooling unit, and the quantum computer comprises a dilution refrigerator, a line connection subsystem, a quantum chip subsystem and a measurement and control subsystem. Components such as a circulation valve, a pressure meter and a flow meter except a pump set and an air reservoir are uniformly installed on a valve body through an integrated valve set, a valve blind hole is formed in the end face of the integrated valve set, and a closed loop is formed by simulating pipeline connection through an internal preset flow channel; the valve element structure is optimized to be matched with the corresponding valve body, the overall structure is compact, the containerization degree is high, the sealing effect is effectively improved, and the working medium gas leakage risk and the maintenance cost are reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to quantum computer technical field especially relates to an integrated valve group, dilution refrigerator and quantum computer. BACKGROUND

[0002] The computing efficiency of quantum computer is far beyond that of traditional classical computer, and its technical route is also more, such as superconducting, ion trap, etc. At present, superconducting quantum computer is a relatively mature scheme, which is mainly composed of four core subsystems: low-temperature environment subsystem, quantum chip subsystem, line connection subsystem and measurement and control subsystem. Among them, the low-temperature environment subsystem (i.e. dilution refrigerator) is the key part of the whole quantum computer, and its performance directly affects the information processing accuracy of the quantum chip.

[0003] And the most important indicator of low-temperature environment subsystem is temperature, which must be maintained at a certain temperature range (generally the minimum temperature requirement is less than 10mK) for a long time, so that the quantum chip can continuously be in a superconducting state and perform quantum computation. The refrigeration circulating medium of low-temperature environment subsystem is helium.

[0004] At present, the valve group design of low-temperature environment subsystem adopts "bulk" splicing design of joint and pipeline, that is, splicing according to the connection order of gas circuit schematic diagram, resulting in a large number of joints and pipelines, and low overall integration. Because of the large number of joints, the threads connecting the joints and pipelines are prone to loosen under the repeated impact of high-pressure gas flow for a long time, and at the same time, due to the insufficient tightness of part of the pipeline welding, it may cause leakage and loss of working medium, thereby causing the refrigeration power to decrease and affecting the working performance of the chip; at the same time, since the working medium is a low-temperature gas mixed by helium 3 and helium 4 in a specific proportion, its price is very expensive, so the maintenance cost is high. UTILITY MODEL CONTENTS

[0005] The utility model aims at: in order to solve the above problems, the utility model provides an integrated valve group, gas processing unit, dilution refrigerator and quantum computer.

[0006] In order to achieve the above purpose, in the first aspect, the utility model provides an integrated valve group, which comprises: valve body, valve core and control valve, the valve body end face is provided with a plurality of groups of valve blind holes, a plurality of groups of valve blind holes are communicated with the valve body internal flow channel, and the simulation pipeline connection forms a closed loop;

[0007] The control valve is butted through the valve blind hole of the valve core and the valve body, the valve core is divided into a plurality of gas chambers, and the flow direction of the gas is controlled through the valve core and the control valve.

[0008] In some embodiments, the valve blind hole comprises a first blind hole and a second blind hole, the first blind hole is arranged on one side of the second blind hole, and the first blind hole is communicated with the second blind hole through an internal flow channel of the valve body.

[0009] In some embodiments, the control valve comprises a flow valve and a safety valve, the flow valve is communicated with the valve body through the first blind hole and the second blind hole, and the safety valve is communicated with the valve body through the second blind hole.

[0010] In some embodiments, the valve core comprises a shell, an air inlet is arranged at the top of the shell, a driving gas flow inlet is arranged at the middle of the shell, a working gas flow inlet is arranged at the bottom of the shell, a valve rod is arranged in the shell, a plurality of valve plates are arranged on the valve rod, and the shell is divided into a plurality of gas chambers by the valve rod through the valve plates.

[0011] In some embodiments, a state indicating rod is arranged at the top of the valve rod, the valve rod, the valve plate and the state indicating rod are integrally formed, a guide seat is arranged in the shell towards the shaft center, and the valve rod is installed in the guide seat after being sleeved with an elastic member.

[0012] In some embodiments, the valve plate comprises an execution plate and a driving plate, the execution plate is arranged at the bottom of the valve rod, and the driving plate is arranged at the middle of the valve rod.

[0013] In some embodiments, the sealing ring comprises a first sealing ring, a second sealing ring, a third sealing ring and a fourth sealing ring, the first sealing ring is sleeved at the bottom of the execution plate, the second sealing ring is sleeved at the side of the execution plate, the third sealing ring is sleeved at the side of the driving plate, and the fourth sealing ring is sleeved between the valve rod and the guide seat.

[0014] In the second aspect, the utility model also provides a gas processing unit, comprising the integrated valve group as described in the first aspect, and further comprising:

[0015] A gas storage is communicated with the integrated valve group and the refrigeration unit, and the gas storage is used for storing working gas.

[0016] A pump group is communicated with the integrated valve group, and the pump group is used for conveying working gas.

[0017] A filter, a flow meter and a pressure gauge are arranged on the flow pipeline of the integrated valve group and the refrigeration unit, the filter is used for removing impurities in the gas, the flow meter is used for measuring the flow of working gas, and the pressure gauge is used for monitoring the pressure change of working gas.

[0018] In a third aspect, the utility model still provides a dilution refrigerator, including the gas processing unit as described in second aspect, still include:

[0019] A refrigeration unit for providing a cold source environment;

[0020] An evacuation unit for providing a vacuum environment;

[0021] A control unit for monitoring the dilution refrigerator operating parameters;

[0022] A precooling unit for providing a precooling refrigeration capacity.

[0023] In a fourth aspect, the utility model still provides a quantum computer, including the dilution refrigerator as described in third aspect, still include:

[0024] A line connection subsystem for data transmission and processing;

[0025] A quantum chip subsystem for storing and processing quantum information;

[0026] A measurement and control subsystem for controlling the quantum bit state.

[0027] The utility model has the advantages that:

[0028] The utility model discloses an integrated valve group, which comprises a valve body, a valve core and a control valve, a plurality of valve blind holes are formed in the end face of the valve body, the valve core is connected with the valve blind holes of the valve body, the plurality of valve blind holes are connected with the preset flow channel in the valve body to simulate pipeline connection and form a closed loop, the inside of the valve core is divided into a plurality of gas chambers by a valve rod and a valve plate on the valve rod, and the plurality of gas chambers are sealed by a plurality of sealing rings, the optimized valve core structure can be matched with the valve body, the flow direction of working gas is controlled by the valve core and the control valve, the flow of the working gas is smoother, the sealing effect of the working gas in the dilution refrigerator is improved, and the leakage risk and maintenance cost of the working gas are reduced, and the integrated valve group is designed to uniformly install various components such as flow valves, pressure gauges and flow meters except pump groups and gas storages on one valve body, so that the overall layout structure is compact, the number of connecting components is small, and the degree of containerization is high.

[0029] To make the structure characteristics and effects of the utility model clearer, the utility model will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 The structure diagram of the valve body and the control valve in the integrated valve group of the utility model is shown.

[0031] Figure 2 Structure diagram of the valve core in the integrated valve group Figure 1

[0032] Figure 3 Structure diagram of the valve core in the integrated valve group Figure 2

[0033] Figure 4 Structure diagram of the valve core in the integrated valve group Figure 3

[0034] Figure 5 Composition principle diagram of the gas processing unit

[0035] Figure 6 Gas path principle diagram of the gas processing unit

[0036] Figure 7 Composition principle diagram of the dilution refrigerator

[0037] Figure 8 Composition principle diagram of the quantum computer.

[0038] Legend:

[0039] 1, valve body; 11, valve blind hole; 111, first blind hole; 112, second blind hole; 2, valve core; 21, shell; 211, air passage; 212, driving gas flow passage; 213, working gas flow passage; 22, valve rod; 23, valve plate; 231, execution plate; 232, driving plate; 24, state indicating rod; 25, guide seat; 26, elastic member; 27, sealing ring; 271, first sealing ring; 272, second sealing ring; 273, third sealing ring; 3, control valve; 31, flow valve; 32, safety valve. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model.

[0041] With reference to Figures 1-3 , the embodiment of the integrated valve group provided by the utility model, the specific structure includes: valve body 1, valve core 2 and control valve 3. Among them, the valve core 2 is fixed on the valve blind hole 11 of the valve body 1, and multiple control valves 3 are butt-jointed one by one through the valve core 2 and the valve blind hole 11 of the valve body 1, and then the flow direction of working gas in the internal flow passage of the valve body 1 is controlled jointly through the corresponding valve core 2 and control valve 3.

[0042] ​​​It should be noted that, in order to ensure the sealing of valve core 2 and valve body 1, a sealing gasket (not shown) can be installed on the mounting surface to ensure that the working gas does not leak out from the gaps in the mounting surface.

[0043] Furthermore, the valve body 1 is made of aluminum. The working gas (including a mixture of helium-3 and helium-4) flowing inside the valve body is at room temperature outside the refrigeration unit, and is cooled down step by step after entering the refrigeration unit. A valve blind hole 11 is provided on the end face of the valve body 1. The valve blind hole 11 includes a first blind hole 111 and a second blind hole 112, forming a closed loop through the first blind hole 111 and the second blind hole 112.

[0044] The system includes one or more sets of first blind holes 111 and second blind holes 112, with the first blind hole 111 located on one side of the second blind hole 112 and the first blind hole 111 and the second blind hole 112 connected. The control valve 3 includes a flow valve 31 and a safety valve 32. The flow valve 31 is connected to the valve body 1 through the first blind hole 111, while the safety valve 32 is connected to the valve body 1 through the second blind hole 112.

[0045] For example, on the side of the valve body 1, each valve mounting position is designed with multiple blind holes. Figure 1 The first blind hole 111 is represented by a straight line (it has not yet been opened through the valve body 1), and multiple blind holes are also provided at the corresponding positions on the front of the valve body 1. Figure 1 The second blind hole 112 is represented by a circle, and the depth of these blind holes needs to be drilled to the corresponding side blind hole. This design allows the working gas to be effectively guided to the corresponding external nodes, such as pump sets, safety valves 32, filters, flow meters, and gas storage devices, thereby ultimately forming an efficient closed loop.

[0046] By opening multiple sets of channels inside the valve body 1, and constructing various connection routes based on the air circuit diagram, all air pipes and connectors in the traditional air circuit can be eliminated. The entire valve assembly has a smaller installation volume and a higher degree of integration, which effectively improves airtightness while reducing the risk of leakage. This ensures the stability and safety of the system during operation and reduces maintenance costs.

[0047] It should be explained in detail that the valve blind hole 11 on the side of the valve body 1 and the internal flow channel design can be configured in various ways according to specific gas path requirements: they can be designed to be coplanar, that is, all holes are arranged on the same level to form a single-layer layout, which simplifies the structure and reduces manufacturing and maintenance costs; or they can be designed to be staggered according to the gas path schematic diagram to form a multi-layer structure, which can achieve more flexible control and distribution of working gas, thereby meeting higher performance requirements.

[0048] To ensure the safety of the circuit, a safety valve 32 is arranged in the gas circuit. When an abnormal situation such as blockage occurs in the circuit and the pressure value exceeds the set safety threshold, the safety valve 32 will automatically open to release pressure, ensuring the safety of the circuit.

[0049] Referring to Figures 2-4 The valve core 2 comprises a housing 21, and a valve rod 22 is arranged inside the housing 21. A plurality of valve plates 23 are arranged on the valve rod 22. The valve rod 22 separates the inside of the housing 21 into a plurality of chambers through the valve plates 23, so as to realize pressure relief to the outside and opening and closing of the working gas flow path through high-pressure gas.

[0050] Further, a gas vent 211 is arranged at the top of the housing 21 to cooperate with the reciprocating movement of the indicating rod to release pressure. A drive gas flow port 212 is arranged in the middle of the housing 21 to realize axial sliding of the valve rod 22 through high-pressure gas. A working gas flow port 213, including an inlet and an outlet, is arranged at the bottom of the housing 21 to control the delivery of working gas.

[0051] Exemplarily, the valve plate 23 comprises two parts, an execution plate 231 and a drive plate 232. The execution plate 231 is located at the bottom of the valve rod 22, and the drive plate 232 is arranged in the middle of the valve rod 22. A state indicating rod 24 is arranged at the top of the valve rod 22, and the valve rod 22, the valve plate 23 and the state indicating rod 24 are integrally formed. At the same time, a guide seat 25 is arranged inside the housing 21 and extends towards the shaft center, which can provide positioning and support for the axial movement of the valve rod 22, so that the valve rod 22 will not deviate or sway during the working process, ensuring the normal opening and closing of the valve core 2. In addition, an elastic member 26 (which can be a common elastic component such as a spring) is sleeved on the middle of the valve rod 22. The elastic member 26 is installed in the guide seat 25, thereby realizing the axial reciprocating movement of the valve rod 22.

[0052] It needs to be noted that the space inside the valve core 2 between the execution plate 231 and the guide seat 25 forms a spring cavity, the space inside the valve core 2 between the guide seat 25 and the drive plate 232 forms a drive cavity, and the space inside the valve core 2 between the drive plate 232 and the housing 21 forms a gas permeation cavity. When the valve rod 22 moves upward along the axial direction, the elastic member 26 is compressed. At this time, the space inside the valve core 2 below the execution plate 231 forms a flow-through cavity, so that the working gas can enter the flow-through cavity from the inlet and flow out from the outlet.

[0053] Exemplarily, to ensure the sealing, sealing rings 27 are arranged at all positions of relative movement. The sealing rings 27 comprise a first sealing ring 271, a second sealing ring 272, a third sealing ring 273 and a fourth sealing ring 274. The first sealing ring 271 is sleeved on the bottom of the execution plate 231, the second sealing ring 272 is sleeved on the side of the execution plate 231, the third sealing ring 273 is sleeved on the side of the drive plate 232, and the fourth sealing ring 274 is sleeved between the valve rod 22 and the guide seat 25.

[0054] Wherein, the first seal ring 271 is arranged at the inlet and the outlet, which can completely block the working gas flow passage 213 in the closed state.

[0055] Need to be explained in detail, the valve core 2 shell 21 shape can be regular polygon, circular and so on, but the valve plate 23 is set to circular, and then the sealing ring 27 is conveniently installed. Figures 2-3 The internal structure of the valve core 2 is not limited to the structure in the figure, as long as the internal structure can ensure that the gas flow passage is effectively opened and cut off.

[0056] Please continue to refer to Figures 2-4 , the elastic member 26 is in a compressed state in a natural state, which can press the execution plate 231 to block the working gas flow passage 213, so that the valve core 2 is in a closed state.

[0057] The external electromagnetic valve is controlled to make the driving gas (usually compressed high-pressure clean air) enter the driving cavity through the driving gas flow passage 212, then overcome the compression elastic force of the elastic member 26 to drive the driving plate 232 to move upward along the axial direction, and synchronously drive the execution plate 231 below to move upward to form a flow-through cavity, the valve passage is opened, and the working gas enters from the inlet and then flows out from the outlet through the flow-through cavity; At this time, the state indicating rod 24 is inserted into and passes through the air inlet 211 a certain distance, so that the working state of the valve core 2 can be directly judged.

[0058] Referring to Figure 5 , the utility model also provides a gas processing unit, including integrated valve group as above-mentioned embodiment, still include: gas warehouse, pump group, filter, flowmeter and pressure gauge.

[0059] Wherein, the gas warehouse is communicated with the integrated valve group and the refrigeration unit, and the filter, the flowmeter and the pressure gauge are arranged on the flow passage of the integrated valve group and the refrigeration unit. The gas warehouse is used for storing working gas; and the pump group is communicated with the integrated valve group to transport working gas, so that the fluid can still flow smoothly at low temperature, thereby ensuring the stability of the refrigeration effect; the filter is used for removing impurities in the gas, prolonging the service life of the equipment; the flowmeter is used for measuring the flow rate of the gas, ensuring that the refrigerant flows at a suitable speed in the system; and the pressure gauge is used for monitoring the pressure change of the working gas, so that the control system can timely adjust the working state of the pump group and the valve group through feedback pressure data, to maintain the required pressure level, and ensure the accuracy of the flow and mixing ratio of the refrigerant.

[0060] Referring to Figure 6 , an embodiment of a gas circuit principle diagram including the above-mentioned gas processing unit: according to the working process, generally includes three stages, in turn, the charging stage, the circulation stage, the gas collection stage.

[0061] (1)Charging stage: the working medium (helium) from the gas storage into the refrigeration unit for condensation, heat transfer cooling process. The specific flow sequence is: gas storage flow valve 8 (open hand valve) flow valve 7 flow valve 5 pump 1 (open) flow valve 1 pump 2 (open) flow valve 2 filter flow meter refrigeration unit (parallel flow valve 3 bypass valve closed, when the pressure gauge 3 pressure is abnormal, only open pressure gauge 3 to relieve pressure, to protect the refrigeration unit) pump 3 (closed).

[0062] Wherein, flow valve 4 is a maintenance manual valve, when access to the maintenance equipment (such as leak detector) is opened; and this stage flow valve 6 is closed state. In the process of charging real-time monitoring pressure gauge 2 pressure value, when rising to the set pressure value, pump 1 and pump 2 are closed, then monitor the temperature value in the refrigeration unit, when the set temperature value is reached, close the flow valve 5 to complete the charging stage, then enter the next stage.

[0063] (2) Circulation stage: the working medium (helium) is continuously pumped into / pumped out of the refrigeration unit, during which the dilution refrigeration cycle is maintained to continue. The specific flow sequence is: pump 1 (open) flow valve 1 pump 2 (open) flow valve 2 filter flow meter refrigeration unit pump 3 (open) pump 1 (open), thereby forming a closed loop.

[0064] Wherein, if there is a leak in the circuit, it will cause the working gas to continue to leak and be lost, thereby reducing the refrigeration power, so internal maintenance (taking and placing quantum chips, installing cable components, etc.) is needed, at this time, the temperature needs to be raised to room temperature, flow valve 2 is closed, and flow valve 6 is opened, completing the circulation stage, and then entering the next stage.

[0065] (3) Collecting stage: the working medium (helium) is collected into the gas storage. The specific flow sequence is: filter flow meter refrigeration unit pump 3 (open) pump 1 (open) flow valve 1 pump 2 (open) flow valve 6 flow valve 7 flow valve 8 gas storage.

[0066] Wherein, whether the gas collection is completed is determined by monitoring the pressure value of the pressure gauge 2, and when the pressure value decreases to the set value, all pumps and flow valve 7 are closed, and the gas collection stage is completed.

[0067] Referring to Figure 7 The utility model also provides a dilution refrigerator, including gas processing unit in above -mentioned embodiment, still include: refrigeration unit, evacuation unit and control unit and precooling unit.

[0068] The refrigeration unit is used for providing a cold source environment, and helium or other cooling medium is used to reduce the temperature to near absolute zero (usually lower than 10 mK) to maintain the state of the superconducting quantum bit; the evacuation unit is used for providing a vacuum environment to reduce the influence of heat conduction and convection and further improve the cooling efficiency; the control unit is used for monitoring the working parameters of the dilution refrigerator, and automatically adjusting the working state of the refrigeration unit through real-time feedback mechanism to ensure that the temperature is maintained in a very low range for a long time; and the precooling unit is used for providing precooling refrigeration. The precooling unit adopts a pulse tube refrigerator, and because the dilution cycle loop in the refrigeration unit cannot be started directly from room temperature, the precooling refrigeration provided by the precooling unit is needed for precooling, and the refrigeration can be started when a certain low temperature is reached.

[0069] Reference Figure 8 The utility model also provides a quantum computer, including dilution refrigerator in above -mentioned embodiment, still include: line connection subsystem, quantum chip subsystem and measurement and control subsystem.

[0070] The dilution refrigerator (i.e. low-temperature environment subsystem) is used for providing a low-temperature environment, using superconductor or other materials to shield external magnetic field to avoid its interference on quantum information, and reducing the influence of external vibration on quantum chip; the quantum chip subsystem is located inside the low-temperature environment subsystem, processing quantum information through quantum gate to complete complex computing task; the line connection subsystem is located inside the low-temperature environment subsystem, and is used for information transmission and processing (transmitting control signal, filtering noise signal and amplifying data signal); the measurement and control subsystem is used for information measurement and control, including generating and adjusting microwave pulse, accurately controlling the state of quantum bit and the like.

[0071] Exemplarily, low-temperature electronic devices are arranged in the test line inside the dilution refrigerator, including but not limited to attenuator, filter, biasing device, signal synthesizer, signal amplifier, circulator and other electronic devices. The signals transmitted in the test line are processed through the electronic devices to ensure the accuracy of the signals transmitted to the quantum processor.

[0072] The above description of disclosed embodiments enables those skilled in the art to implement or use the utility model. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. Therefore, the utility model will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An integrated valve block, characterized by, The application relates to a valve group and a gas treatment unit. The valve group comprises a valve body (1), a valve core (2) and a control valve (3), a plurality of valve blind holes (11) are formed in the end face of the valve body (1), the plurality of valve blind holes (11) are communicated with the internal flow channel of the valve body (1), and pipeline connection is formed into a closed loop; The control valve (3) is butted with the valve blind hole (11) of the valve body (1) through the valve core (2), the valve core (2) is internally divided into a plurality of gas chambers, and the flow direction of gas is controlled through the valve core (2) and the control valve (3).

2. The integrated valve block of claim 1, wherein The valve blind hole (11) comprises a first blind hole (111) and a second blind hole (112), the first blind hole (111) is formed on one side of the second blind hole (112), and the first blind hole (111) is communicated with the second blind hole (112) through the internal flow channel of the valve body (1).

3. The integrated valve block of claim 1, wherein, The control valve (3) comprises a flow valve (31) and a safety valve (32), the flow valve (31) is communicated with the valve body (1) through the first blind hole (111) and the second blind hole (112), and the safety valve (32) is communicated with the valve body (1) through the second blind hole (112).

4. The integrated valve block of claim 1, wherein, The valve core (2) comprises a shell (21), the top of the shell (21) is provided with a gas permeation port (211), the middle of the shell (21) is provided with a driving gas flow port (212), the bottom of the shell (21) is provided with a working gas flow port (213), the shell (21) is internally provided with a valve rod (22), a plurality of valve plates (23) are arranged on the valve rod (22), and the shell (21) is internally divided into a plurality of gas chambers through the valve plates (23).

5. The integrated valve block of claim 4, wherein, A state indicating rod (24) is arranged on the top of the valve rod (22), the valve rod (22), the valve plates (23) and the state indicating rod (24) are integrally formed, a guide seat (25) is arranged in the shell (21) and towards the shaft center, and the valve rod (22) is installed in the guide seat (25) after being sleeved with an elastic element (26).

6. The integrated valve block of claim 5, wherein, The valve plates (23) comprise an execution plate (231) and a driving plate (232), the execution plate (231) is arranged at the bottom of the valve rod (22), the driving plate (232) is arranged at the middle of the valve rod (22), and the valve plates (23) are abutted with the inner wall of the shell (21) through a sealing ring (27).

7. The integrated valve block of claim 6, wherein, The sealing ring (27) comprises a first sealing ring (271), a second sealing ring (272), a third sealing ring (273) and a fourth sealing ring (274), the first sealing ring (271) is sleeved at the bottom of the execution plate (231), the second sealing ring (272) is sleeved at the side of the execution plate (231), the third sealing ring (273) is sleeved at the side of the driving plate (232), and the fourth sealing ring (274) is sleeved between the valve rod (22) and the guide seat (25).

8. A gas treatment unit, characterized in that The gas treatment unit comprises the integrated valve group and further comprises: a gas storage, which is communicated with the integrated valve group and the refrigeration unit and is used for storing working gas. A pump group, which is in communication with the integrated valve group, is used to transport working gas; A filter, a flow meter and a pressure gauge are arranged on the flow pipeline of the integrated valve group and the refrigeration unit, the filter is used to remove impurities in the gas, the flow meter is used to measure the flow of working gas, and the pressure gauge is used to monitor the pressure change of working gas.

9. A dilution refrigerator, characterized by, The dilution refrigerator comprises the gas processing unit as claimed in claim 8, and further comprises: A refrigeration unit is used to provide a cold source environment; An evacuation unit is used to provide a vacuum environment; A control unit is used to monitor the working parameters of the dilution refrigerator; A precooling unit is used to provide a precooling cold quantity.

10. A quantum computer, comprising: The quantum computer comprises the dilution refrigerator as claimed in claim 9, and further comprises: A circuit connection subsystem is used for data transmission and processing; A quantum chip subsystem is used for storing and processing quantum information; A measurement and control subsystem is used for controlling the state of quantum bits.

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