Chip rotation testboard

By designing a chip rotation test stage, using a marble substrate and a dual-axis rotation mechanism, combined with a pressure head and cylinder system, stable holding and rapid pick-and-place of MEMS chips were achieved. This solved the problem of high cost of existing equipment, improved testing efficiency and accuracy, and reduced the economic burden on manufacturers.

CN223526395UActive Publication Date: 2025-11-07SUZHOU YONGCHUANG INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202422505419.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-16
Publication Date
2025-11-07
Estimated Expiration
2034-10-16

AI Technical Summary

Technical Problem

Existing MEMS chip testing equipment is expensive and difficult to promote on a large scale, which increases the manufacturing costs and testing cycles for MEMS chip manufacturers and affects their economic benefits.

Method used

A chip rotation test stage was designed, which adopts a marble substrate and a dual-axis rotation mechanism, combined with a pressure head and a cylinder system, to achieve stable chip holding and rapid chip placement and removal, and supports batch testing of multiple chips.

Benefits of technology

It improves the testing efficiency and accuracy of MEMS chips, reduces testing costs, and is suitable for large-scale application.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a chip rotation testboard, comprising a marble substrate arranged horizontally, a first support plate, a second support plate and a test carrier plate which are vertically arranged on the upper surface of the marble substrate, and the test carrier plate is arranged on a rotation part of a first turntable capable of rotating around a first direction. The fixed part of the first rotating disc is installed on a rotating base, the other end of the rotating base with one end rotationally connected with the first supporting plate is installed on the rotating part of a second rotating disc capable of rotating around the second direction, and the fixed part of the second rotating disc is installed on the second supporting plate. A test board communicated with an upper computer and a chip carrier plate electrically connected with the test board are sequentially arranged above the test carrier plate, and a plurality of chip seats are arranged on the upper surface, opposite to the test board, of the chip carrier plate. According to the utility model, each chip can be stably pressed and held through the pressing head in the test process, and the chips in the chip seat can be rapidly taken and placed through the strip-shaped through holes, so that the production test efficiency is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to chip test technical field especially relates to chip rotation test board. BACKGROUND

[0002] In recent years, the miniaturization trend of MEMS chip is more and more obvious, and the detection demand for MEMS chip is also increasing, MEMS is various, and the MEMS of hundreds of millions of dollars is consumed in the world every year, and is widely used in smart mobile phone, automobile electronics, intelligent manufacturing and other fields. And the market share of MEMS chip depends on its own quality, and the quality detection of MEMS chip usually needs to use the corresponding test seat to realize the control of MEMS chip quality, and the existing product for MEMS chip test has too large manufacturing cost, cannot realize larger scale popularization and practicality well, thereby greatly increasing the manufacturing cost and test cycle of MEMS chip manufacturer, thereby being not conducive to improving the economic benefit. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims at providing a kind of chip rotation test board, the chip rotation test board can be in the test process by pressure head to realize the stable pressure of each chip hold, also can pass through strip-shaped through hole to the chip in chip seat line fast pick and place, improve production test efficiency.

[0004] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of: a kind of chip rotation test board, comprising: horizontally arranged marble base plate, vertically installed on the first support plate of marble base plate upper surface, second support plate and the test board for being set between first support plate and second support plate, the test board is installed on the rotating part of first rotating disc that can rotate around first direction, the fixed part of first rotating disc is installed on rotating base, one end of rotating base is rotatably connected with first support plate, the other end of rotating base is installed on the rotating part of second rotating disc that can rotate around second direction, the fixed part of second rotating disc is installed on second support plate, the upper of test board is sequentially provided with a test board that is communicated with host computer and a chip carrier plate that is electrically connected with the test board, the upper surface of chip carrier plate opposite to test board is provided with a plurality of chip seats.

[0005] The lower surface of a pressing plate arranged above a chip carrier plate is provided with a plurality of pressing heads corresponding to the chip seats, the plurality of pressing heads are arranged to form at least two pressing head columns, the plurality of pressing heads in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole extending along the X direction is formed on the upper surface of the pressing plate between any two adjacent pressing head columns, the upper surface of the test carrier plate is provided with at least one transverse cylinder which can extend along the Y direction perpendicular to the X direction, a movable plate connected with the piston rod of the transverse cylinder is slidably arranged above the test carrier plate, at least two vertical cylinders are installed on the movable plate, the piston rod of each vertical cylinder is connected with the pressing plate, when the pressing heads on the pressing plate move to above the chip seats along the transverse cylinder and the piston rod of the vertical cylinder is in the contracted state, the pressing heads are in extrusion contact with the chips in the chip seats.

[0006] The further improved scheme in the above technical scheme is as follows:

[0007] 1. In the above scheme, the upper ends of the piston rods of the four vertical cylinders are respectively connected with the four corner portions of the lower surface of the pressing plate.

[0008] 2. In the above scheme, the two transverse cylinders are respectively installed on the outer sides of the two ends of the pressing plate.

[0009] 3. In the above scheme, the two movable plates connected with the piston rods of the two transverse cylinders are respectively slidably installed on the lower surface of the test plate through at least one set of slide rails and slide blocks.

[0010] 4. In the above scheme, the pressing heads are silica gel pressing heads, rubber pressing heads or polyurethane pressing heads.

[0011] Thanks to the use of the above technical scheme, the present application has the following advantages compared with the prior art:

[0012] The utility model discloses a chip rotation test platform, it includes the horizontal setting marble baseplate, vertical installation first support board on marble baseplate upper surface, second support board and set up between first support board and second support board test carrier plate, test carrier plate installs on the rotation of first direction rotatable first carousel's rotation part, one end with the rotation base of first support board swing joint another end installs on the rotation of second direction rotatable second carousel's rotation part, the upper surface of test carrier plate is provided with a test board and a chip carrier plate with test board electric connection in proper order with host computer communication, the upper surface of chip carrier plate opposite test board is provided with a plurality of chip seat, can carry out double -axis multi -angle rotation to many chips, thereby realizes the batch testing of multi -chip, can also guarantee the stability and consistency of chip stress in the rotation process, guarantees the precision of test, further, the lower surface of the pressing plate set up in the upper surface of chip carrier plate has a plurality of pressure head corresponding with chip seat, a plurality of pressure head arrangement forms at least 2 pressure head columns, a plurality of pressure heads in each pressure head column are along X spacing arrangement, the upper surface of pressing plate and between any 2 adjacent pressure head column all are provided with a strip-shaped through -hole extending along X, the upper surface of test carrier plate is installed at least one transverse cylinder that can contract along Y perpendicular to X, the piston rod of a movable plate connected with transverse cylinder can be slidably arranged above test carrier plate, at least 2 vertical cylinders are installed on movable plate, and the piston rod of each vertical cylinder is connected with pressing plate, can realize the stable pressure of each chip through pressure head in the test process, can also through the strip-shaped through -hole to the chip in the chip seat carries out fast pick -and -place, improves production test efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0013] ATTACHED Figure 1 It is whole structure schematic diagram of the utility model chip rotation test platform;

[0014] ATTACHED Figure 2 It is local structure schematic diagram of the utility model chip rotation test platform;

[0015] ATTACHED Figure 3 It is Figure 2 Structure enlarged schematic diagram in A place.

[0016] In the above drawing: 100, chip;1, marble baseplate;2, first support board;3, second support board;4, test carrier plate;51, first carousel;52, second carousel;53, rotation motor;54, wiring slip ring;6, rotation base;7, test board;8, chip carrier plate;9, chip seat;10, pressing plate;11, pressure head;12, vertical cylinder;13, transverse cylinder;14, movable plate;15, strip-shaped through -hole. DETAILED DESCRIPTION

[0017] Further, the lower surface of the pressing plate set up in the upper surface of chip carrier plate has a plurality of pressure head corresponding with chip seat, a plurality of pressure head arrangement forms at least 2 pressure head columns, a plurality of pressure heads in each pressure head column are along X spacing arrangement, the upper surface of pressing plate and between any 2 adjacent pressure head column all are provided with a strip-shaped through -hole extending along X, the upper surface of test carrier plate is installed at least one transverse cylinder that can contract along Y perpendicular to X, the piston rod of a movable plate connected with transverse cylinder can be slidably arranged above test carrier plate, at least 2 vertical cylinders are installed on movable plate, and the piston rod of each vertical cylinder is connected with pressing plate, can realize the stable pressure of each chip through pressure head in the test process, can also through the strip-shaped through -hole to the chip in the chip seat carries out fast pick -and -place, improves production test efficiency.

[0018] Embodiment 1: a chip rotation test platform, comprising: a marble base plate 1 arranged horizontally, a first support plate 2 vertically mounted on the upper surface of the marble base plate 1, a second support plate 3, and a test carrier plate 4 arranged between the first support plate 2 and the second support plate 3, the test carrier plate 4 is mounted on the rotating part of a first rotating disc 51 rotatable in a first direction, the fixed part of the first rotating disc 51 is mounted on a rotating base 6, one end of the rotating base 6 rotatably connected with the first support plate 2 is mounted on the rotating part of a second rotating disc 52 rotatable in a second direction, the fixed part of the second rotating disc 52 is mounted on the second support plate 3, a test plate 7 in communication with an upper computer and a chip carrier plate 8 electrically connected with the test plate 7 are arranged in turn above the test carrier plate 4, and the upper surface of the chip carrier plate 8 opposite to the test plate 7 is provided with a plurality of chip seats 9.

[0019] A pressing plate 10 arranged above the chip carrier plate 8 has a plurality of pressing heads 11 corresponding to the chip seats 9 on the lower surface, the plurality of pressing heads 11 are arranged to form at least two pressing head columns, and the plurality of pressing heads 11 in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole 15 extending along the X direction is formed on the upper surface of the pressing plate 10 between any two adjacent pressing head columns, at least one transverse cylinder 13 telescopic along the Y direction perpendicular to the X direction is mounted on the upper surface of the test carrier plate 4, an activity plate 14 connected with the piston rod of the transverse cylinder 13 is slidably arranged above the test carrier plate 4, and at least two vertical cylinders 12 are mounted on the activity plate 14, the piston rod of each vertical cylinder 12 is connected with the pressing plate 10, and when the pressing heads 11 on the pressing plate 10 are moved above the chip seats 9 by the transverse cylinder 13 and the piston rod of the vertical cylinder 12 is in a retracted state, the pressing heads 11 are in extrusion contact with the chips 100 in the chip seats 9.

[0020] The first support plate 2 and the second support plate 3 are marble support plates.

[0021] The fixed part of each of the first rotating disc 51 and the second rotating disc 52 is provided with a rotating motor 53 and a wire sliding ring 54 for driving the rotating part to rotate, the first rotating disc, the second rotating disc, the rotating motor and the wire sliding ring are obtained by outsourcing and belong to the prior art, which will not be described herein.

[0022] The upper ends of the piston rods of the four vertical cylinders 12 are respectively connected with the four corner portions of the lower surface of the pressing plate 10.

[0023] The pressing head 11 is a rubber pressing head.

[0024] Embodiment 2: a chip rotation test platform, comprising: a marble base plate 1 arranged horizontally, a first support plate 2 vertically mounted on the upper surface of the marble base plate 1, a second support plate 3, and a test carrier plate 4 arranged between the first support plate 2 and the second support plate 3, the test carrier plate 4 is mounted on the rotating part of a first rotating disc 51 rotatable in a first direction, the fixed part of the first rotating disc 51 is mounted on a rotating base 6, one end of the rotating base 6 rotatably connected with the first support plate 2 is mounted on the rotating part of a second rotating disc 52 rotatable in a second direction, the fixed part of the second rotating disc 52 is mounted on the second support plate 3, a test plate 7 in communication with an upper computer and a chip carrier plate 8 electrically connected with the test plate 7 are arranged in turn above the test carrier plate 4, and the upper surface of the chip carrier plate 8 opposite to the test plate 7 is provided with a plurality of chip seats 9.

[0025] A plurality of pressing heads 11 corresponding to the chip seats 9 are arranged on the lower surface of a pressing plate 10 arranged above the chip carrier plate 8, the plurality of pressing heads 11 are arranged to form at least two pressing head columns, and the plurality of pressing heads 11 in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole 15 extending along the X direction is formed on the upper surface of the pressing plate 10 between any two adjacent pressing head columns, at least one transverse cylinder 13 telescopic along the Y direction perpendicular to the X direction is mounted on the upper surface of the test carrier plate 4, an activity plate 14 connected with the piston rod of the transverse cylinder 13 is slidably arranged above the test carrier plate 4, and at least two vertical cylinders 12 are mounted on the activity plate 14, the piston rod of each vertical cylinder 12 is connected with the pressing plate 10, and when the pressing heads 11 on the pressing plate 10 are moved above the chip seats 9 by the transverse cylinder 13 and the piston rod of the vertical cylinder 12 is in the retracted state, the pressing heads 11 are in extrusion contact with the chips 100 in the chip seats 9.

[0026] Two transverse cylinders 13 are respectively mounted on the outer sides of the two ends of the pressing plate 10.

[0027] Two activity plates 14 connected with the piston rods of the two transverse cylinders 13 are each slidably mounted on the lower surface of the test plate 7 through at least one set of slide rails 141 and slide blocks 142.

[0028] First, the piston rods of the vertical cylinders and the transverse cylinders of the test assembly are respectively placed in a first state, so that the pressing heads moved by the vertical cylinders are away from the chip seats in the vertical direction, and the strip-shaped through holes on the pressing plate moved by the transverse cylinders are above the chip seats, so as to facilitate the placement of chips into the chip seats.

[0029] After the chip is put into the chip seat, the piston rods of the horizontal cylinder and the vertical cylinder of the test assembly are switched from the first state to the second state, so that the column of pressure heads on the pressing plate moving with the horizontal cylinder moves above the chip to be tested in the chip seat, and the pressure heads moving with the vertical cylinder approach the chip seat in the vertical direction and press the chip to be tested tightly;

[0030] The first turntable and the second turntable are driven to rotate by the rotary motor, so as to drive the chip to be tested in the chip seat to rotate in two directions, in the process, the performance of the chip is tested, and the chip is classified according to the test result, and the specific test process and test software do not belong to the invention points of the present application, and will not be described here.

[0031] After the test is completed, the first turntable and the second turntable are reset, and the piston rods of the vertical cylinder and the horizontal cylinder of the test assembly are switched from the second state to the first state, so that the pressure heads moving with the vertical cylinder move away from the chip seat in the vertical direction, and the strip-shaped through holes on the pressing plate moving with the horizontal cylinder move above the chip seat, so as to pick up the chip in the chip seat which has been tested and put the next batch of chips to be tested into the chip seat.

[0032] When the chip rotating test table is used, it can rotate multiple chips in two axes and multiple angles, so as to realize batch testing of multiple chips, and can ensure the stability and consistency of the force of the chip in the rotating process, and ensure the accuracy of the test. Further, the chip can be stably held by the pressure head during the test, and the chip in the chip seat can be quickly picked up and placed through the strip-shaped through hole, so as to improve the production test efficiency.

[0033] The above embodiments are only for illustrating the technical concept and characteristics of the present application, the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A chip spin test station, characterized by: The utility model relates to a test device for chip, which comprises: a marble base plate (1) arranged horizontally, a first support plate (2) arranged vertically on the upper surface of the marble base plate (1), a second support plate (3), and a test carrier plate (4) arranged between the first support plate (2) and the second support plate (3), wherein the test carrier plate (4) is arranged on the rotating part of a first rotating disc (51) which can rotate in a first direction, the fixed part of the first rotating disc (51) is arranged on a rotating base (6), one end of the rotating base (6) is rotatably connected with the first support plate (2), and the other end of the rotating base (6) is arranged on the rotating part of a second rotating disc (52) which can rotate in a second direction, the fixed part of the second rotating disc (52) is arranged on the second support plate (3), a test plate (7) which can communicate with a host computer and a chip carrier plate (8) which is electrically connected with the test plate (7) are arranged in sequence above the test carrier plate (4), and a plurality of chip seats (9) are arranged on the upper surface of the chip carrier plate (8) opposite to the test plate (7); a pressing plate (10) is arranged above the chip carrier plate (8), the lower surface of the pressing plate (10) is provided with a plurality of pressing heads (11) corresponding to the chip seats (9), the plurality of pressing heads (11) are arranged to form at least two pressing head columns, the plurality of pressing heads (11) in each pressing head column are arranged at intervals along the X direction, a strip-shaped through hole (15) extending along the X direction is arranged on the upper surface of the pressing plate (10) between any two adjacent pressing head columns, at least one transverse cylinder (13) which can extend along the Y direction perpendicular to the X direction is arranged on the upper surface of the test carrier plate (4), a movable plate (14) connected with the piston rod of the transverse cylinder (13) is slidably arranged above the test carrier plate (4), at least two vertical cylinders (12) are arranged on the movable plate (14), the piston rod of each vertical cylinder (12) is connected with the pressing plate (10), when the pressing heads (11) on the pressing plate (10) move above the chip seats (9) along with the transverse cylinder (13) and the piston rod of the vertical cylinder (12) is in a retracted state, the pressing heads (11) are in extrusion contact with the chips (200) in the chip seats (9).

2. The chip spin test station of claim 1, wherein: The upper ends of the piston rods of the four vertical cylinders (12) are respectively connected with the four corners of the lower surface of the pressing plate (10).

3. The chip spin test station of claim 1, wherein: The two transverse cylinders (13) are respectively arranged on the outer sides of the two ends of the pressing plate (10).

4. The chip spin test station of claim 3, wherein: The two movable plates (14) connected with the piston rods of the two transverse cylinders (13) are respectively slidably arranged on the lower surface of the test plate (7) through at least one set of sliding rails (141) and sliding blocks (142).

5. The chip spin test station of claim 1, wherein: The pressing heads (11) are silica gel pressing heads, rubber pressing heads, or polyurethane pressing heads.