Temperature control system
By designing a temperature control system, using a single refrigeration and circulation system combined with valve control, precise temperature control between multiple loads is achieved, solving the cost problem of multiple refrigeration equipment in existing technologies, and realizing precise temperature control and reducing equipment requirements.
Patent Information
- Application Number
- CN202423239777.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Existing technology cannot achieve precise temperature control between multiple loads with a single refrigeration system, especially when the temperature requirements of the loads are different, which leads to the need for multiple refrigeration equipment and increases costs.
Design a temperature control system that uses a refrigeration system and a circulation system, along with a first heat exchanger, a refrigeration system and a circulation pump, combined with valve control between multiple loads, to achieve selective flow of the circulating liquid and ensure precise temperature control for each load.
This system enables precise temperature control of multiple loads using a single refrigeration system, reducing equipment costs, meeting the temperature requirements of different loads, and improving the accuracy and efficiency of temperature control.
Smart Images
Figure CN223526662U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor temperature control, specifically, relates to a temperature control system. BACKGROUND
[0002] In the production process of the chip, the circulating liquid with stable temperature needs to be provided to the load end, and the circulating liquid temperature required by the chip processing process is different according to the different process temperature requirements. Meanwhile, the change of the load in the specific process is also various, and the device can stably output temperature control precision of ±0.1 DEG C to the load end.
[0003] However, in the case that the circulating liquid channel has multiple loads and the temperature requirements of the multiple loads are different, the temperature control of the multiple loads cannot be realized by a set of refrigeration system. UTILITY MODEL CONTENTS
[0004] The utility model discloses a temperature control system, which can realize temperature control of multiple loads by only one set of refrigeration system, circulating liquid can be heated after passing through the load to enter the load with higher temperature requirement, precise temperature control is realized, multiple sets of refrigeration equipment are not needed, and cost is reduced.
[0005] The embodiment of the utility model can be realized as follows:
[0006] A temperature control system, comprising a first heat exchanger, a refrigeration system and a circulating system;
[0007] The first heat exchanger comprises a first side and a second side; the first side and the second side exchange heat;
[0008] The refrigeration system is in communication with the second side of the first heat exchanger;
[0009] The circulating system comprises a circulating pump, a liquid storage tank and a load pipeline, the first heat exchanger comprises a first side and a second side, the outlet of the first side of the first heat exchanger is in communication with the inlet of the liquid storage tank, the outlet of the liquid storage tank is in communication with the inlet of the circulating pump, the outlet of the circulating pump is used for being in communication with the inlet of the load pipeline, and the outlet of the load pipeline is in communication with the inlet of the first side of the first heat exchanger;
[0010] The load pipeline comprises multiple loads, the loads are in communication with each other in pairs, each load is in communication with the outlet of the circulating pump and the inlet of the first side of the first heat exchanger, and a valve is arranged between the loads, between the loads and the outlet of the circulating pump and between the loads and the inlet of the first side of the first heat exchanger.
[0011] The temperature control system provided by the embodiment of the utility model has the beneficial effects that:
[0012] The temperature control system of the utility model discloses through the intercommunication of multiple loads two by two, the load is also communicated with circulating pump and first heat exchanger, make the circulating liquid of circulating system can flow into one of the load after the pressurization of circulating pump, heat exchange to the load, can heat exchange again after other temperature demand higher load and heat exchange again. Through the valve between the load, the outlet between the load and circulating pump, the first side import between the load and first heat exchanger are all set up, can selectively make the circulating liquid flow through all loads in turn, or flow through partial load and return to first heat exchanger. The temperature control system of the utility model can realize the temperature control of multiple loads with only one set of refrigeration system, the circulating liquid can enter the load with higher temperature demand after the load and heat exchange, realize accurate temperature control, do not need multiple refrigeration equipment, reduce cost. BRIEF DESCRIPTION OF DRAWINGS
[0013] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be needed to use the drawing in the embodiment briefly introduced, should understand, the following drawing only shows some certain embodiment of the utility model, therefore should not be regarded as the limited scope, for the ordinary skill in the art person, under the premise of not paying the creative labor, can also obtain other relevant drawings according to these drawings.
[0014] Figure 1 The structure schematic diagram of the temperature control system provided for the embodiment of the utility model is shown in the figure;
[0015] Figure 2 The structure schematic diagram of the circulating system provided for the embodiment of the utility model is shown in the figure;
[0016] Figure 3 The structure schematic diagram of the refrigeration system provided for the embodiment of the utility model is shown in the figure.
[0017] Icon: 100 - temperature control system; 110 - circulation system; 120 - refrigeration system; 130 - cooling water system; 1 - compressor; 2 - fourth temperature sensor; 3 - first pressure sensor; 4 - second heat exchanger; 5 - liquid accumulator; 6 - fifth temperature sensor; 7 - expansion valve; 8 - first heat exchanger; 9 - sixth temperature sensor; 10 - second pressure sensor; 11 - circulation pump; 12 - first valve; 13 - second valve; 14 - third valve; 15 - fourth valve; 16 - fifth valve; 17 - pipe heater; 18 - first temperature sensor; 19 - first load; 20 - second temperature sensor; 21 - sixth valve; 22 - seventh valve; 23 - eighth valve; 24 - ninth valve; 25 - tenth valve; 26 - liquid accumulator; 27 - third temperature sensor; 28 - second load; 30 - eleventh valve; 31 - twelfth valve; 32 - thirteenth valve; 33 - fourteenth valve; 34 - fifteenth valve; 37 - third load; 39 - sixteenth valve; 40 - seventeenth valve; 41 - eighteenth valve; 42 - nineteenth valve; 43 - twentieth valve; 46 - fourth load; 48 - twenty-first valve; 49 - twenty-second valve; 50 - twenty-third valve; 51 - twenty-fourth valve; 52 - twenty-fifth valve; 55 - fifth load; 57 - twenty-sixth valve; 58 - twenty-seventh valve; 59 - twenty-eighth valve; 60 - twenty-ninth valve; 61 - thirtieth valve. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0019] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.
[0020] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
[0021] In the description of the utility model, it needs to be explained that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, it is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.
[0022] In addition, if the terms "first", "second" and the like are used only to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0023] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.
[0024] Please refer to Figure 1 The temperature control system 100 provided by the utility model is applied to semiconductor technology. In the production process of the chip, the circulating liquid with stable temperature is provided to the load end.
[0025] The temperature control system 100 includes a first heat exchanger 8, a refrigeration system 120 and a circulating system 110. The circulating system 110 is used to make the circulating liquid reach the load end. The refrigeration system 120 is used to cool the circulating liquid in the circulating system 110. The first heat exchanger 8 includes a first side and a second side, and the first side and the second side exchange heat. The refrigeration system 120 communicates with the second side of the first heat exchanger 8. The circulating system 110 communicates with the first side of the first heat exchanger 8.
[0026] The circulating system 110 includes a circulating pump 11, a liquid storage tank 26 and a load pipeline. The first side outlet of the first heat exchanger 8 communicates with the inlet of the liquid storage tank 26. The outlet of the liquid storage tank 26 communicates with the inlet of the circulating pump 11. The outlet of the circulating pump 11 is used to communicate with the inlet of the load pipeline. The outlet of the load pipeline communicates with the first side inlet of the first heat exchanger 8.
[0027] It can be understood that the circulating system 110 and the refrigeration system 120 in the embodiment exchange heat through the first heat exchanger 8. The refrigerant flows in the refrigeration system 120. The circulating liquid flows in the circulating system 110. The temperature of the circulating liquid rises after heat exchange in the load, and then flows into the first heat exchanger 8. The refrigerant with lower temperature and the circulating liquid with higher temperature exchange heat in the first heat exchanger 8. After heat exchange, the temperature of the circulating liquid decreases, and the temperature of the refrigerant increases.
[0028] Optionally, in the embodiment, the first heat exchanger 8 is a plate evaporator. In other embodiments, the first heat exchanger 8 can adopt different structures according to needs, for example, the first heat exchanger 8 can be a tube evaporator. As long as heat exchange between the refrigeration system 120 and the circulating system 110 can be achieved, the specific structure of the first heat exchanger 8 is not limited in the present application.
[0029] In the embodiment, the liquid accumulator 5 is arranged between the first heat exchanger 8 and the circulating pump 11, mainly used for adjusting the circulating amount of the circulating liquid, playing a buffering role, and maintaining the pressure balance of the circulating system 110.
[0030] It can be understood that, in the embodiment, after the circulating liquid is cooled by the first heat exchanger 8, it enters the liquid accumulator 5, and then enters the load pipeline after being pressurized by the circulating pump 11 to cool the load. After flowing through the load, the temperature of the circulating liquid rises, and finally it is cooled by the first heat exchanger 8 to realize the circulating flow of the circulating liquid.
[0031] Please refer to Figure 1 and Figure 2 In order to realize accurate temperature control of multiple loads by one set of refrigeration system 120, the load pipeline is modularly designed in the present application. The load pipeline includes multiple loads. The loads are in communication with each other. Each load is in communication with the outlet of the circulating pump 11 and the first side inlet of the first heat exchanger 8. Valves are arranged between the loads, between the loads and the outlet of the circulating pump 11, and between the loads and the first side inlet of the first heat exchanger 8.
[0032] Specifically, any two loads are connected by two pipelines, so that the circulating liquid can flow from one load to another load, or from another load to this load.
[0033] It can be understood that, after the circulating liquid flows out of the circulating pump 11, the valve between the circulating pump 11 and the load can be controlled to make the circulating liquid enter one of the loads to cool the first load. By controlling the valves between the loads and the valves between the loads and the first heat exchanger 8, the circulating liquid can be controlled to enter the next load or directly return to the first heat exchanger 8. When the circulating liquid enters the next load, the valves between the loads and the valves between the loads and the first heat exchanger 8 can be controlled to control the circulating liquid to enter the next load or directly return to the first heat exchanger 8. That is, by controlling these valves, the circulating liquid can flow through all or part of the loads and then flow back to the first heat exchanger 8, and the order in which the circulating liquid flows through the loads can be controlled.
[0034] It is easy to understand that the circulating liquid can be controlled to flow through the load with a lower temperature first, and then flow through the load with a higher temperature. After the circulating liquid flows through the load with a lower temperature, the temperature of the circulating liquid rises, which can meet the temperature requirement of the subsequent load.
[0035] Specifically, in the present embodiment, the load pipeline comprises five loads, which are respectively a first load 19, a second load 28, a third load 37, a fourth load 46 and a fifth load 55. The outlet of the circulating pump 11 is respectively communicated with the inlets of the first load 19, the second load 28, the third load 37, the fourth load 46 and the fifth load 55. The outlets of the first load 19, the second load 28, the third load 37, the fourth load 46 and the fifth load 55 are respectively communicated with the first side inlets of the first heat exchanger 8. The first load 19, the second load 28, the third load 37, the fourth load 46 and the fifth load 55 are communicated with each other in pairs. Specifically, the outlet of the first load 19 is respectively communicated with the inlets of the other loads and the first inlets of the first heat exchanger 8. The outlet of the second load 28 is respectively communicated with the inlets of the other loads and the first inlets of the first heat exchanger 8. The outlet of the third load 37 is respectively communicated with the inlets of the other loads and the first inlets of the first heat exchanger 8. The outlet of the fourth load 46 is respectively communicated with the inlets of the other loads and the first inlets of the first heat exchanger 8. The outlet of the fifth load 55 is respectively communicated with the inlets of the other loads and the first inlets of the first heat exchanger 8.
[0036] Further, the valve of the embodiment includes a first valve 12, a second valve 13, a third valve 14, a fourth valve 15, a fifth valve 16, a sixth valve 21, a seventh valve 22, an eighth valve 23, a ninth valve 24, a tenth valve 25, an eleventh valve 30, a twelfth valve 31, a thirteenth valve 32, a fourteenth valve 33, a fifteenth valve 34, a sixteenth valve 39, a seventeenth valve 40, an eighteenth valve 41, a nineteenth valve 42, a twentieth valve 43, a twenty-first valve 48, a twenty-second valve 49, a twenty-third valve 50, a twenty-fourth valve 51, a twenty-fifth valve 52, a twenty-sixth valve 57, a twenty-seventh valve 58, a twenty-eighth valve 59, a twenty-ninth valve 60, a thirtieth valve 61. The first valve 12 is connected between the first load 19 and the circulating pump 11. The second valve 13 is connected between the second load 28 and the first load 19. The third valve 14 is connected between the third load 37 and the first load 19. The fourth valve 15 is connected between the fourth load 46 and the first load 19. The fifth valve 16 is connected between the fifth load 55 and the first load 19. The sixth valve 21 is connected between the second load 28 and the circulating pump 11. The seventh valve 22 is connected between the first load 19 and the second load 28. The eighth valve 23 is connected between the third load 37 and the second load 28. The ninth valve 24 is connected between the fourth load 46 and the second load 28. The tenth valve 25 is connected between the fifth load 55 and the second load 28. The eleventh valve 30 is connected between the third load 37 and the circulating pump 11. The twelfth valve 31 is connected between the first load 19 and the third load 37. The thirteenth valve 32 is connected between the second load 28 and the third load 37. The fourteenth valve 33 is connected between the fourth load 46 and the third load 37. The fifteenth valve 34 is connected between the fifth load 55 and the third load 37. The sixteenth valve 39 is connected between the fourth load 46 and the circulating pump 11. The seventeenth valve 40 is connected between the first load 19 and the fourth load 46. The eighteenth valve 41 is connected between the second load 28 and the fourth load 46. The nineteenth valve 42 is connected between the third load 37 and the fourth load 46. The twentieth valve 43 is connected between the fifth load 55 and the fourth load 46. The twenty-first valve 48 is connected between the fifth load 55 and the circulating pump 11. The twenty-second valve 49 is connected between the first load 19 and the fifth load 55. The twenty-third valve 50 is connected between the second load 28 and the fifth load 55. The twenty-fourth valve 51 is connected between the third load 37 and the fifth load 55. The twenty-fifth valve 52 is connected between the fourth load 46 and the fifth load 55. The twenty-sixth valve 57 is connected between the fourth load 46 and the first heat exchanger 8. The twenty-seventh valve 58 is connected between the fifth load 55 and the first heat exchanger 8. The twenty-eighth valve 59 is connected between the third load 37 and the first heat exchanger 8. The twenty-ninth valve 60 is connected between the second load 28 and the first heat exchanger 8.The thirty-third valve 63 is connected between the first load 19 and the first heat exchanger 8.
[0037] Optionally, in the embodiment, the number of loads is five and the number of valves is thirty. In other embodiments, the number of loads and valves can be set as needed, for example, the number of loads is four, and the number of valves is twenty. The number of loads can also be more than five. After reducing or increasing the number of loads, the connection mode of the load circuit is the same as the above connection mode, which will not be described here. As long as the circulating liquid can flow between the loads, the specific number of loads and valves is not limited in the utility model.
[0038] Further, the outlet of the circulating pump 11 is connected with a first flow distribution plate. The inlet end and the outlet end of each load are respectively connected with a first flow collection plate and a second flow distribution plate. The first side inlet of the first heat exchanger 8 is connected with a second flow collection plate. The multiple outlets of the first flow distribution plate are respectively communicated with one of the inlets of the first flow collection plates of the multiple loads. The multiple inlets of the second flow collection plate are respectively communicated with one of the outlets of the second flow distribution plates of the multiple loads. The remaining outlets of the second flow distribution plates of the loads are respectively communicated with one of the inlets of the first flow collection plates of the other loads. It can be understood that the circulating liquid flows out of the outlet of the circulating pump 11, is distributed through the first flow distribution plate, respectively flows into the first flow collection plates of different loads, and then flows into the loads. After the circulating liquid flows through the loads, it flows into the second flow distribution plate for distribution, one of which flows back to the first heat exchanger 8 through the first flow collection plate, and the remaining flow paths flow to the first flow collection plates of other loads.
[0039] Still further, the first temperature sensor 18 is arranged between the first flow collection plate and the inlet of the load. The second temperature sensor 20 is arranged between the outlet of the load and the second flow distribution plate. It can be understood that the first temperature sensor 18 is used for detecting the temperature of the circulating liquid flowing into the load. The second temperature sensor 20 is used for detecting the temperature of the circulating liquid flowing out of the load.
[0040] In the embodiment, the pipe heater 17 is also arranged between the first flow collection plate and the inlet of the load. It can be understood that the pipe heater 17 can adjust the temperature of the circulating liquid entering the load, so that the circulating liquid meets the temperature requirement of the load.
[0041] Please refer to Figure 1 The third temperature sensor 27 is also arranged between the liquid storage tank 26 and the circulating pump 11. The third temperature sensor 27 is used for detecting the temperature of the circulating liquid flowing out of the liquid storage tank 26.
[0042] Please refer to Figure 1 and Figure 3The refrigeration system 120 comprises a compressor 1, a second heat exchanger 4, a liquid accumulator 5 and an expansion valve 7. The second heat exchanger 4 comprises a first side and a second side. The first side and the second side of the second heat exchanger 4 exchange heat. The outlet of the compressor 1 is connected with the inlet of the first side of the second heat exchanger 4. The outlet of the first side of the second heat exchanger 4 is connected with the inlet of the liquid accumulator 5. The outlet of the liquid accumulator 5 is connected with the inlet of the expansion valve 7. The outlet of the expansion valve 7 is connected with the second side inlet of the first heat exchanger 8. The second side outlet of the first heat exchanger 8 is connected with the inlet of the compressor 1.
[0043] It can be understood that the flowing medium in the refrigeration system 120 is refrigerant. The refrigerant is pressurized by the compressor 1, and then cooled by the second heat exchanger 4. The cooled refrigerant enters the liquid accumulator 5 for storage, and then enters the first heat exchanger 8 after being throttled and depressurized by the expansion valve 7 to exchange heat with the circulating liquid. The heated refrigerant returns to the compressor 1 again to realize the circulation of the refrigerant and continuously refrigerate the circulating system 110.
[0044] Further, the temperature control system 100 further comprises a cooling water system 130. The cooling water system 130 comprises a cooling water pipeline. The cooling water pipeline is connected with the second side of the second heat exchanger 4. It can be understood that the cooling water system 130 is used for introducing cooling water into the second heat exchanger 4 to cool the refrigerant introduced into the second heat exchanger 4. It should be noted that the cooling water system 130 is connected with an external cooling water source.
[0045] In the embodiment, a fourth temperature sensor 2 and a first pressure sensor 3 are arranged between the compressor 1 and the second heat exchanger 4. The fourth temperature sensor 2 is used for detecting the temperature of the refrigerant flowing out of the compressor 1. The first pressure sensor 3 is used for detecting the pressure of the refrigerant flowing out of the compressor 1.
[0046] A fifth temperature sensor 6 is arranged between the liquid accumulator 5 and the expansion valve 7. The fifth temperature sensor 6 is used for detecting the temperature of the refrigerant flowing out of the liquid accumulator 5.
[0047] A sixth temperature sensor 9 and a second pressure sensor 10 are arranged between the first heat exchanger 8 and the compressor 1. The sixth temperature sensor 9 is used for detecting the temperature of the refrigerant flowing into the compressor 1. The second pressure sensor 10 is used for detecting the pressure of the refrigerant flowing into the compressor 1.
[0048] Specifically, in the embodiment, the liquid accumulator 5 mainly plays a role of gas-liquid separation, separates the gas and the liquid, and ensures the stable flow of the liquid.
[0049] The working principle and process of the temperature control system 100 in the embodiment of the utility model are as follows:
[0050] The circulating liquid flows through the first heat exchanger 8, is cooled, and is returned to the storage tank 26 after reaching the target temperature. The liquid is then pressurized and divided into five paths.
[0051] The first path passes through the first valve 12 and enters the first load 19, is heated, and is divided into five paths: one path returns to the first heat exchanger 8 through the thirtieth valve 61; one path enters the third load 37 through the twelfth valve 31; one path enters the second load 28 through the seventh valve 22; one path enters the fourth load 46 through the seventeenth valve 40; and one path enters the fifth load 55 through the twenty-second valve 49.
[0052] The second path passes through the sixth valve 21 and enters the second load 28, is heated, and is divided into five paths: one path enters the first load 19 through the second valve 13; one path enters the third load 37 through the fourteenth valve 33; one path returns to the first heat exchanger 8 through the twenty-ninth valve 60; one path enters the fifth load 55 through the twenty-fifth valve 52; and one path enters the fourth load 46 through the sixteenth valve 39.
[0053] The third path passes through the eleventh valve 30 and enters the third load 37, is heated, and is divided into five paths: one path returns to the first heat exchanger 8 through the twenty-eighth valve 59; one path enters the second load 28 through the ninth valve 24; one path enters the first load 19 through the third valve 14; one path enters the fifth load 55 through the twenty-third valve 50; and one path enters the fourth load 46 through the eighteenth valve 41.
[0054] The fourth path passes through the twentieth valve 43 and enters the fourth load 46, is heated, and is divided into five paths: one path enters the first load 19 through the fifth valve 16; one path enters the third load 37 through the thirteenth valve 32; one path enters the second load 28 through the eighth valve 23; one path enters the fifth load 55 through the twenty-fourth valve 51; and one path returns to the first heat exchanger 8 through the twenty-sixth valve 57.
[0055] The fifth path passes through the twenty-first valve 48 and enters the fifth load 55, is heated, and is divided into five paths: one path enters the third load 37 through the fifteenth valve 34; one path enters the second load 28 through the tenth valve 25; one path enters the first load 19 through the fourth valve 15; one path enters the fourth load 46 through the nineteenth valve 42; and one path returns to the first heat exchanger 8 through the twenty-seventh valve 58.
[0056] The opening and closing conditions of each valve are as follows:
[0057] When the temperature of the circulating liquid entering each load is the same, the first valve 12, the sixth valve 21, the eleventh valve 30, the twentieth valve 43, the twenty-first valve 48, the twenty-sixth valve 57, the twenty-seventh valve 58, the twenty-eighth valve 59, the twenty-ninth valve 60 and the thirtieth valve 61 are opened, and the remaining valves are closed.
[0058] When the temperature of the circulating liquid entering each load is different, and the temperature sequence from the first load 19 to the fifth load 55 is from low to high, the first valve 12, the seventh valve 22, the fourteenth valve 33, the eighteenth valve 41, the twenty-third valve 50 and the twenty-eighth valve 59 are opened, and the remaining valves are closed, at this time the circulating liquid is heated after passing through the load and then flows to the next load for heat exchange.
[0059] The embodiment can adjust the flow path of the circulating liquid according to the temperature demand gradient of the first load 19 to the fifth load 55. It is not limited to the temperature demand of the first load 19 to the fifth load 55 gradually increasing, and other arrangements can also be adopted, which are not listed here. The temperature demand of the load is different, and the flow path of the circulating liquid between the loads can be changed as needed. The specific flow path of the circulating liquid can be realized by controlling the above-mentioned valves.
[0060] The beneficial effects of the temperature control system 100 of the utility model are:
[0061] The temperature control system 100 of the utility model communicates with each other by a plurality of loads, and the load is communicated with the circulating pump 11 and the first heat exchanger 8, so that the circulating liquid of the circulating system 110 can flow into one of the loads after being pressurized by the circulating pump 11, heat exchange is carried out on the load, and heat exchange can be carried out again on other loads with higher temperature demand. By setting valves between the loads, between the outlet of the circulating pump 11 and the first side inlet of the first heat exchanger 8, the circulating liquid can be selectively made to flow through all the loads in turn, or flow through part of the loads and then return to the first heat exchanger 8. The temperature control system 100 of the utility model can realize temperature control of multiple loads with only one set of refrigeration system 120, the circulating liquid can enter the load with higher temperature demand after passing through the load, precise temperature control is realized, multiple sets of refrigeration equipment are not needed, and the cost is reduced.
[0062] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the technical field can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered within the protection scope of the utility model.
Claims
1. A temperature control system (100), characterized by, The application relates to a temperature control system (100) comprising: a first heat exchanger (8) comprising a first side and a second side, the first side and the second side being in heat exchange; a refrigeration system (120) in communication with the second side of the first heat exchanger (8); a circulating system (110) comprising a circulating pump (11), a liquid storage tank (26) and a load pipeline, the outlet of the first side of the first heat exchanger (8) being in communication with the inlet of the liquid storage tank (26), the outlet of the liquid storage tank (26) being in communication with the inlet of the circulating pump (11), the outlet of the circulating pump (11) being used for being in communication with the inlet of the load pipeline, the outlet of the load pipeline being in communication with the inlet of the first side of the first heat exchanger (8); the load pipeline comprises a plurality of loads, the loads are in communication with each other in pairs, each of the loads is in communication with the outlet of the circulating pump (11) and the inlet of the first side of the first heat exchanger (8), and valves are arranged between the loads, between the loads and the outlet of the circulating pump (11) and between the loads and the inlet of the first side of the first heat exchanger (8).
2. The temperature control system (100) according to claim 1, characterized in that The outlet of the circulating pump (11) is connected with a first shunt plate, the inlet end and the outlet end of each of the loads are respectively connected with a first collecting plate and a second shunt plate, and the inlet of the first side of the first heat exchanger (8) is connected with a second collecting plate, a plurality of outlets of the first shunt plate are respectively in communication with one of the inlets of the first collecting plates of a plurality of the loads, a plurality of inlets of the second collecting plate are respectively in communication with one of the outlets of the second shunt plates of a plurality of the loads, and the remaining outlets of the second shunt plates of the loads are respectively in communication with one of the inlets of the first collecting plates of other loads.
3. The temperature control system (100) according to claim 2, characterized in that A first temperature sensor (18) is arranged between the first collecting plate and the inlet of the load, and a second temperature sensor (20) is arranged between the outlet of the load and the second shunt plate.
4. The temperature control system (100) according to claim 2, characterized in that A pipeline heater (17) is arranged between the first collecting plate and the inlet of the load.
5. The temperature control system (100) of claim 1, wherein, A third temperature sensor (27) is arranged between the liquid storage tank (26) and the circulating pump (11).
6. The temperature control system (100) of claim 1, wherein, The refrigeration system (120) comprises a compressor (1), a second heat exchanger (4), a liquid storage device (5) and an expansion valve (7), the outlet of the compressor (1) is in communication with the first side inlet of the second heat exchanger (4), the first side outlet of the second heat exchanger (4) is connected with the inlet of the liquid storage device (5), the outlet of the liquid storage device (5) is in communication with the inlet of the expansion valve (7), the outlet of the expansion valve (7) is in communication with the second side inlet of the first heat exchanger (8), and the second side outlet of the first heat exchanger (8) is in communication with the inlet of the compressor (1).
7. The temperature control system (100) according to claim 6, characterized in that The temperature control system (100) further comprises a cooling water system (130), the cooling water system (130) comprises a cooling water pipeline, the cooling water pipeline is in communication with the second side of the second heat exchanger (4), and the first side and the second side of the second heat exchanger (4) are in heat exchange.
8. The temperature control system (100) according to claim 6, characterized in that A fourth temperature sensor (2) and a first pressure sensor (3) are arranged between the compressor (1) and the second heat exchanger (4).
9. The temperature control system (100) of claim 6, wherein, A fifth temperature sensor (6) is arranged between the liquid accumulator (5) and the expansion valve (7).
10. The temperature control system (100) of claim 6, wherein, A sixth temperature sensor (9) and a second pressure sensor (10) are arranged between the first heat exchanger (8) and the compressor (1).