Silicon wafer conveying equipment

Abstract

The utility model relates to silicon wafer conveying equipment which comprises a rack, a feeding conveying belt, a transition conveying belt, a reversing conveying belt and an output conveying belt. The feeding conveying belt, the transition conveying belt and the output conveying belt are all arranged on the rack and are sequentially connected in the linear direction. The reversing conveying belt is arranged below the transition conveying belt and is perpendicular to the transition conveying belt. The reversing conveying belt is of a lifting structure and comprises a first roller set and a second roller set. The first roller group is distributed on the left side of the transition conveyor belt; the second roller group is distributed in the middle and on the right side of the transition conveyor belt; the first roller set is sleeved with a reversing belt, and the second roller set can make contact with the silicon wafers on the transition conveying belt when rising, so that the silicon wafers are transferred to the reversing belt. The silicon wafers judged as waste products can be output in a reversing mode through lifting of the reversing conveying belt, classified detection of good products and defective products is achieved in the assembly line conveying process of the silicon wafers, the production efficiency of the silicon wafers is improved, and the idler wheel is simple and reliable in structure, easy to achieve and stable in application.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon wafer production, in particular to a silicon wafer conveying device. BACKGROUND

[0002] A silicon wafer refers to a thin sheet or sheet-shaped substrate made of high-purity silicon material, which is a direct downstream product of polycrystalline silicon. According to different application scenarios, silicon wafers can be divided into photovoltaic silicon wafers and semiconductor silicon wafers. In the photovoltaic field, silicon wafers are mainly used for the manufacture of downstream photovoltaic cell sheets, using solar-grade polycrystalline silicon as raw material, and at present, photovoltaic silicon wafers are mainly in the form of single crystals. In the semiconductor field, semiconductor silicon wafers are usually made of electronic-grade polycrystalline silicon as raw material, and after processes such as crystal pulling and slicing, they become single crystal silicon wafers, which are further processed into wafers, and are the basic materials for integrated circuits, transistors and other semiconductor devices. No matter which kind of silicon wafer, its production process needs to convey the silicon wafer to flow between different processes. For example, Chinese patent 202221170492.5 discloses a conveying device for silicon wafers, which automatically conveys the silicon wafers through a conveying belt. However, when the silicon wafer has quality defects and needs to be screened out, the existing conveying line cannot well sort the good and bad products, and cannot timely remove the bad products, affecting the production efficiency of the silicon wafer. CONTENT OF THE UTILITY MODEL

[0003] The present application provides a silicon wafer conveying device to solve the problem that the ordinary silicon wafer conveying device in the prior art cannot remove the bad products, affecting the production of silicon wafers.

[0004] According to the silicon wafer conveying device provided by the present application, it comprises a rack, a feeding conveying belt, a transition conveying belt, a reversing conveying belt and an output conveying belt.

[0005] The feeding conveying belt, the transition conveying belt and the output conveying belt are all arranged on the rack and are sequentially connected in a straight line. The reversing conveying belt is arranged below the transition conveying belt and is arranged perpendicularly to the transition conveying belt.

[0006] The reversing conveying belt is of a lifting structure and comprises a first roller set and a second roller set. The first roller set is distributed on the left side of the transition conveying belt, and the second roller set is distributed in the middle and on the right side of the transition conveying belt. A reversing belt is sleeved on the first roller set, and when the second roller set is raised, it can contact the silicon wafer on the transition conveying belt and transfer the silicon wafer to the reversing belt.

[0007] In some embodiments, the reversing conveying belt further comprises a reversing motor, a first rotating shaft and a second rotating shaft. The first rotating shaft is connected to drive the first roller set, the second rotating shaft is connected to drive the second roller set, and the first rotating shaft and the second rotating shaft are jointly driven by the reversing motor.

[0008] In some embodiments, the first rotating shaft is provided with a first belt, and the first rotating shaft is connected with the second rotating shaft synchronously through the first belt; the second rotating shaft is provided with a second belt, and the second rotating shaft is connected with the reversing motor synchronously through the second belt.

[0009] In some embodiments, the reversing conveyor further comprises a mounting frame, which is arranged under the transition conveyor in a liftable manner; the first roller set, the second roller set, the reversing motor, the first rotating shaft and the second rotating shaft are all mounted on the mounting frame and are lifted synchronously with the mounting frame.

[0010] In some embodiments, on the mounting frame, the first rotating shaft is arranged below the first roller set, and the second rotating shaft is arranged below the second roller set; the first rotating shaft is further provided with a first driving belt set, and the first driving belt set is connected with the first roller set upward; the second rotating shaft is further provided with a second driving belt set, and the second driving belt set is connected with the second roller set upward.

[0011] In some embodiments, the second roller set comprises inner rollers and outer rollers, and both the inner rollers and the outer rollers are provided with multiple sets; the multiple sets of inner rollers are distributed in the middle of the two side belts of the transition conveyor in a parallel direction, and the multiple sets of outer rollers are distributed on the right side of the transition conveyor in a parallel direction.

[0012] In some embodiments, the reversing conveyor further comprises a lifting motor, and an eccentric shaft is connected to the output end of the lifting motor, the eccentric shaft is connected with the mounting frame to drive the mounting frame to lift.

[0013] In some embodiments, one or more of the feeding conveyor, the transition conveyor, the reversing conveyor and the output conveyor adopts a circular belt structure, the circular belt is symmetrically arranged on two sides, and each side comprises two parallel circular belts, and the circular belt is driven by a belt wheel with a double-U-shaped groove structure.

[0014] In some embodiments, the feeding conveyor further comprises a tensioner set.

[0015] In some embodiments, the rack is assembled by aluminum profiles and aluminum plates.

[0016] The technical scheme of the present application, the silicon wafer conveying device comprises: a rack, a feeding conveying belt, a transition conveying belt, a reversing conveying belt and an output conveying belt; the feeding conveying belt, the transition conveying belt and the output conveying belt are all arranged on the rack and are sequentially connected in a straight line direction; the reversing conveying belt is arranged below the transition conveying belt and is arranged perpendicularly to the transition conveying belt; the reversing conveying belt is of a lifting structure and comprises: a first roller group and a second roller group; the first roller group is distributed on the left side of the transition conveying belt, and the second roller group is distributed in the middle and on the right side of the transition conveying belt; a reversing belt is sleeved on the first roller group, and when the second roller group is lifted, the second roller group can contact the silicon wafer on the transition conveying belt and transfer the silicon wafer to the reversing belt. The silicon wafer conveying device of the present application can lift and reverse the output of the silicon wafer determined as a defective product by the reversing conveying belt, so as to realize the classification and detection of good products and defective products in the flow line conveying process of the silicon wafer, improve the production efficiency of the silicon wafer, and the roller structure is simple and reliable, easy to realize and stable in application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The drawings incorporated into the specification and forming a part of the specification, show embodiments consistent with the present application, and together with the specification serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required to be used in the embodiments or the prior art description will be briefly introduced as follows, and obviously, other drawings can also be obtained by those skilled in the art without creative labor.

[0019] Figure 1 A top view structural schematic diagram of a silicon wafer conveying device of an embodiment of the present application is shown;

[0020] Figure 2 A front view structural schematic diagram of a silicon wafer conveying device of an embodiment of the present application is shown;

[0021] Figure 3 A left view structural schematic diagram of a silicon wafer conveying device of an embodiment of the present application is shown;

[0022] Among the above drawings, the following reference signs are included:

[0023] 1, rack; 2, feeding conveyor belt; 21, feeding motor; 22, feeding pulley; 23, feeding belt; 24, tensioner set; 3, transition conveyor belt; 31, transition motor; 32, transition pulley; 33, transition belt; 4, reversing conveyor belt; 41, first roller set; 411, reversing belt; 42, second roller set; 43, reversing motor; 431, drive wheel; 44, first rotating shaft; 441, first belt; 45, second rotating shaft; 451, second belt; 46, mounting frame; 47, lifting motor; 5, output conveyor belt; 51, output motor; 52, output pulley; 53, output belt. DETAILED DESCRIPTION

[0024] It should be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0025] It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs.

[0026] For ease of description, spatial relative terms such as "over", "above", "upper surface", "upper", and the like can be used herein to describe the spatial relationship of one device or feature to another device or feature as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawings is inverted, the device described as "above" or "over" other devices or structures will be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The device can also be positioned at 90 degrees or in other orientations in other different ways, and the spatial relative descriptions used herein are interpreted accordingly.

[0027] It should be noted that the terms used herein are only for the purpose of describing the specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should also be understood that when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, operation, device, component, and / or combination thereof.

[0028] It should be noted that the terms "first", "second", and the like in the description and in the claims of the present application and the above-described accompanying drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units does not necessarily have to be limited to only those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to the process, method, product, or device.

[0029] Figures 1 to 3 An embodiment of the wafer conveying device of the present application is schematically shown.

[0030] As Figures 1 to 3 shown, the present application discloses a wafer conveying device, which comprises a rack 1, an input conveying belt 2, a transition conveying belt 3, a reversing conveying belt 4, and an output conveying belt 5. The input conveying belt 2, the transition conveying belt 3, and the output conveying belt 5 are all arranged on the rack 1 and are sequentially connected in a straight line. The reversing conveying belt 4 is arranged below the transition conveying belt 3 and is arranged perpendicularly to the transition conveying belt 3. The reversing conveying belt 4 is of a lifting structure and comprises a first roller set 41 and a second roller set 42. The first roller set 41 is distributed on the left side of the transition conveying belt 3, and the second roller set 42 is distributed in the middle and on the right side of the transition conveying belt 3. A reversing belt 411 is sleeved on the first roller set 41, and when the second roller set 42 is lifted, it can contact the wafer on the transition conveying belt 3 and transfer the wafer to the reversing belt 411.

[0031] Through the above structural design, the wafer conveying device of the present application can output the wafers determined as defective products in the vertical direction of the original conveying direction by using the reversing conveying belt 4, so as to realize the classification and detection of good products and defective products in the wafer pipeline conveying process and improve the wafer production efficiency. Moreover, the reversing conveying belt 4 realizes wafer transfer by lifting and does not affect the good wafers on the transition conveying belt 3, and the structure of the roller set is simple and reliable, easy to realize, and stable in application. In the embodiment of the present application, as Figure 1 shown, the first roller set 41 comprises six rollers and forms three columns to sleeve three reversing belts 411; the second roller set 42 also comprises six rollers and forms three columns to align three reversing belts 411 for wafer transfer.

[0032] In some embodiments of the present application, as Figure 1 and Figure 3As shown, the reversing conveyor 4 further comprises a reversing motor 43, a first rotating shaft 44 and a second rotating shaft 45. The first rotating shaft 44 is connected to drive the first roller set 41, the second rotating shaft 45 is connected to drive the second roller set 42, and the first rotating shaft 44 and the second rotating shaft 45 are jointly driven by the reversing motor 43. By means of the first rotating shaft 44 and the second rotating shaft 45, the same reversing motor 43 is used to simultaneously drive the first roller set 41 and the second roller set 42, which can effectively ensure the movement synchronization of the reversing belt 411 and the second roller set 42, facilitate the stable transfer of the silicon wafer from the transition conveyor 3 to the reversing belt 411 for rejection, and is also conducive to reducing the equipment cost.

[0033] In some embodiments of the present application, as shown in Figure 1 As shown, the first rotating shaft 44 is provided with a first belt 441, and the first rotating shaft 44 is synchronously connected to the second rotating shaft 45 through the first belt 441. The second rotating shaft 45 is provided with a second belt 451, and the second rotating shaft 45 is synchronously connected to the reversing motor 43 through the second belt 451. Through the transmission connection of the first belt 441 and the second belt 451, the reversing motor 43 can simultaneously drive the first rotating shaft 44 and the second rotating shaft 45 to synchronously rotate, so as to control the movement of the reversing belt 411 and the second roller set 42, and realize the transfer and reversing transportation of the silicon wafer. Wherein, the reversing motor 43 is connected to the second belt 451 through the driving wheel 431 on the motor shaft.

[0034] In some embodiments of the present application, as shown in Figures 1 to 3 As shown, the reversing conveyor 4 further comprises a mounting frame 46, which is arranged below the transition conveyor 3 in a lifting manner. The first roller set 41, the second roller set 42, the reversing motor 43, the first rotating shaft 44 and the second rotating shaft 45 are all mounted on the mounting frame 46 and synchronously lifted with the mounting frame 46. The mounting frame 46 is used to realize the positioning installation of each part structure of the reversing conveyor 4, so as to keep the relative position of the reversing belt 411 and the second roller set 42 fixed, and facilitate the overall position adjustment and installation of the reversing conveyor 4.

[0035] In some embodiments of the present application, as shown in Figure 3As shown, on the mounting bracket 46, a first rotating shaft 44 is positioned below the first roller assembly 41, and a second rotating shaft 45 is positioned below the second roller assembly 42. A first drive belt assembly is also mounted on the first rotating shaft 44, connecting upwards to the first roller assembly 41. Similarly, a second drive belt assembly is mounted on the second rotating shaft 45, connecting upwards to the second roller assembly 42. By positioning the first rotating shaft 44 and the second rotating shaft 45 below, and connecting them to the upper roller assembly 41 and the second roller assembly 42 via the upwardly extending first and second drive belt assemblies respectively, efficient space utilization is achieved, the upper structure is simplified, and sufficient installation space is provided for the first roller assembly 41 and the second roller assembly 42, preventing them from being too compact and avoiding interference with the transition conveyor belt 3 during lifting and lowering.

[0036] In some embodiments of this application, the second roller group 42 includes inner rollers and outer rollers, with multiple sets of both inner and outer rollers to increase the contact points with the silicon wafer and ensure smooth and accurate transfer of the silicon wafer. Multiple sets of inner rollers are distributed along the direction parallel to the transition conveyor belt 3, between the two sides of the belt, while multiple sets of outer rollers are distributed along the direction parallel to the transition conveyor belt 3 on the right side of the transition conveyor belt 3 (i.e.,...). Figure 1 (Below) When the reversing conveyor belt 4 is raised, the inner and outer rollers rotate synchronously, and the defective silicon wafers are transferred from the transition conveyor belt 3 to the reversing belt 411 by friction. Then, the reversing belt 411, which moves synchronously at this time, transports the defective silicon wafers laterally, realizing the automatic rejection of defective silicon wafers.

[0037] In some embodiments of this application, such as Figures 1 to 3 As shown, the reversing conveyor belt 4 also includes a lifting motor 47. The output end of the lifting motor 47 is connected to an eccentric shaft, which is connected to a mounting frame 46, driving the mounting frame 46 to rise and fall. When a defective silicon wafer is detected, the lifting motor 47 starts, lifting the mounting frame 46 to make the first roller group 41 and the second roller group 42 float, transferring and reversing the transport of the defective silicon wafer. When no defective silicon wafer is detected, the lifting motor 47 remains inactive, so that the entire reversing conveyor belt 4 is located below the transition conveyor belt 3, without causing any interference to the transition conveyor belt 3. This method is simple to apply, easy to control, and energy-saving.

[0038] In some embodiments of this application, such as Figure 1 As shown, the feeding conveyor belt 2, the transition conveyor belt 3 and the output conveyor belt 5 have similar structures, all including a motor, pulley and belt structure, namely: feeding motor 21, feeding pulley 22 and feeding belt 23, transition motor 31, transition pulley 32 and transition belt 33, output motor 51, output pulley 52 and output belt 53.

[0039] In some embodiments of this application, such asFigure 1 As shown, one or more of the feeding conveyor belt 2, transition conveyor belt 3, reversing conveyor belt 4, and output conveyor belt 5 adopt a circular belt structure. A circular belt is a belt with a circular cross-section and a circular outer surface, thus minimizing the actual contact area with the silicon wafer. This effectively reduces belt contamination of the silicon wafer, avoids the impact of the conveying process on the silicon wafer, and ensures the quality and safety of the silicon wafer. Furthermore, in some embodiments of this application, the circular belts are symmetrically arranged on both sides (as in the embodiments of this application). Figure 1 The system includes a transition conveyor belt 3), with two parallel circular belts on each side to form a four-belt conveyor structure on both sides, ensuring stable and reliable silicon wafer transport. The circular belts are driven by pulleys with a double U-groove structure.

[0040] In some embodiments of this application, the feeding conveyor belt 2 further includes a tensioning wheel assembly 24, which is used to redirect the feeding belt 23 and keep the feeding belt 23 taut, thereby playing a role in avoiding obstacles and facilitating the connection between the silicon wafer conveying equipment and the feeding device in the embodiments of this application.

[0041] In some embodiments of this application, the frame 1 is assembled from aluminum profiles and aluminum plates, which has a simple and stable structure, is easy to assemble, and is inexpensive.

[0042] In some embodiments of this application, the silicon wafer conveying equipment further includes an identification device, which is linked to the reversing conveyor belt 4. When the identification device identifies a defective silicon wafer, it triggers the reversing conveyor belt 4 to rise, transferring the corresponding defective silicon wafer to the reversing belt 411, where it is sorted and rejected along the vertical direction. The identification device can be a visual identification device, including a camera and an image comparison host computer. Visual identification technology is existing in the field, and this application does not involve improvements to the identification technology; therefore, it will not be described in detail.

[0043] The silicon wafer conveying equipment of this application allows the feeding conveyor belt 2 to receive incoming silicon wafers from upstream, which are then transferred via the transition conveyor belt 3 and the output conveyor belt 5. When a silicon wafer passes through the transition conveyor belt 3, if it is determined to be defective, the reversing conveyor belt 4 rises, and the defective silicon wafer is lifted by the second roller group 42. After being reversed, the defective silicon wafer is output by the reversing belt 411 and rejected. If it is determined to be good, the reversing conveyor belt 4 remains stationary, allowing the good silicon wafer to pass smoothly through the transition conveyor belt 3 and be unloaded by the output conveyor belt 5 and sent to the downstream station, completing the assembly line conveying of silicon wafers and realizing the sorting function of good and defective products. At the same time, each conveyor belt in contact with the silicon wafer can be a circular belt to effectively reduce belt contamination of the silicon wafer and ensure the quality and safety of the silicon wafers during the conveying process.

[0044] In summary, the silicon wafer conveying device comprises a rack, a feeding conveying belt, a transition conveying belt, a reversing conveying belt and an output conveying belt; the feeding conveying belt, the transition conveying belt and the output conveying belt are arranged on the rack and are sequentially connected in a straight line; the reversing conveying belt is arranged below the transition conveying belt and is arranged perpendicularly to the transition conveying belt; the reversing conveying belt is of a lifting structure and comprises a first roller set and a second roller set; the first roller set is distributed on the left side of the transition conveying belt, and the second roller set is distributed on the middle and right side of the transition conveying belt; a reversing belt is sleeved on the first roller set, and the second roller set can contact the silicon wafer on the transition conveying belt when being lifted to transfer the silicon wafer to the reversing belt. The silicon wafer conveying device can lift the silicon wafer determined as a defective product by the reversing conveying belt to reversely output, so that the classification and detection of good products and defective products can be realized in the flow line conveying process of the silicon wafer, the production efficiency of the silicon wafer is improved, and the roller structure is simple and reliable, easy to realize and stable in application.

[0045] The preferred embodiments of the present application have been described above with reference to the drawings, but the present application is not limited to the above examples. It will be apparent to those skilled in the art that various changes and modifications can be made to the present application without departing from the spirit and scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A silicon wafer transfer apparatus, characterized by, Include: Rack (1), feeding conveyor (2), transition conveyor (3), reversing conveyor (4) and output conveyor (5); The feeding conveyor (2), the transition conveyor (3) and the output conveyor (5) are arranged on the rack (1), and are sequentially connected in a straight line; The reversing conveyor (4) is arranged below the transition conveyor (3) and is arranged perpendicular to the transition conveyor (3); The reversing conveyor (4) is of a lifting structure, comprising: a first roller group (41) and a second roller group (42); The first roller group (41) is distributed on the left side of the transition conveyor (3), and the second roller group (42) is distributed on the middle and right side of the transition conveyor (3); The first roller group (41) is sleeved with a reversing belt (411), and the second roller group (42) can contact the silicon wafer on the transition conveyor (3) when it is raised, and the silicon wafer is transferred to the reversing belt (411).

2. The silicon wafer transfer apparatus of claim 1, wherein The reversing conveyor (4) further comprises: a reversing motor (43), a first shaft (44) and a second shaft (45); The first shaft (44) is connected to drive the first roller group (41), and the second shaft (45) is connected to drive the second roller group (42), and the first shaft (44) and the second shaft (45) are driven by the reversing motor (43) together.

3. The silicon wafer transfer apparatus of claim 2, wherein The first shaft (44) is provided with a first belt (441), and the first shaft (44) is synchronously connected with the second shaft (45) through the first belt (441); The second shaft (45) is provided with a second belt (451), and the second shaft (45) is synchronously connected with the reversing motor (43) through the second belt (451).

4. The silicon wafer transfer apparatus of claim 2, wherein The reversing conveyor (4) further comprises: a mounting bracket (46), which is arranged below the transition conveyor (3) in a lifting manner; The first roller group (41), the second roller group (42), the reversing motor (43), the first shaft (44) and the second shaft (45) are all mounted on the mounting bracket (46) and are lifted synchronously with the mounting bracket (46).

5. The silicon wafer transfer apparatus of claim 2, wherein The first shaft (44) is arranged below the first roller group (41), and the second shaft (45) is arranged below the second roller group (42); The first shaft (44) is further provided with a first driving belt group, and the first driving belt group is connected to the first roller group (41) upward; The second shaft (45) is further provided with a second driving belt group, and the second driving belt group is connected to the second roller group (42) upward.

6. The silicon wafer transfer apparatus of claim 1, wherein The second roller group (42) comprises: inner rollers and outer rollers, and the inner rollers and the outer rollers are provided with multiple groups; Multiple groups of the inner rollers are distributed in the middle of the two side belts of the transition conveyor (3) in a parallel direction, and multiple groups of the outer rollers are distributed on the right side of the transition conveyor (3) in a parallel direction.

7. The silicon wafer transfer apparatus of claim 4, wherein The reversing conveyor belt (4) further comprises a lifting motor (47), an eccentric shaft is connected to an output end of the lifting motor (47), the eccentric shaft is connected to the mounting frame (46) to drive the mounting frame (46) to lift.

8. The silicon wafer transfer apparatus of claim 1, wherein One or more of the feeding conveyor belt (2), the transition conveyor belt (3), the reversing conveyor belt (4) and the output conveyor belt (5) adopts a circular belt structure, the circular belt is symmetrically arranged on two sides, and each side comprises two parallel circular belts, and the circular belts are driven by a belt wheel with a double-U-shaped groove structure.

9. The silicon wafer transfer apparatus of claim 1, wherein, The feeding conveyor belt (2) further comprises a tensioning wheel set (24).

10. The silicon wafer transfer apparatus according to any one of claims 1 to 9, wherein The rack (1) is assembled by aluminum profiles and aluminum plates.

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