Semiconductor detection tool

Abstract

The utility model discloses a semiconductor detection tool comprising a mounting rack, a rotating cylinder arranged on the mounting rack, and a clamping assembly arranged at one end of the rotating cylinder. The clamping assembly comprises a plurality of hinge blocks fixed to one end of the rotating cylinder, a plurality of clamping rods hinged to one sides of the hinge blocks and a plurality of worm wheels fixed to the inner sides of the clamping rods. The clamping assembly is arranged at one end of the rotating cylinder, the clamping edge of a to-be-detected semiconductor element is arranged among the multiple clamping rods, the clamping rods can be driven to synchronously turn over around a hinge point on one side of the hinge block through cooperation of the power source, the rotating cylinder, the worm, the worm gear, the clamping rods and the hinge block, and then the function of clamping or releasing the semiconductor element is achieved. By utilizing the self-locking characteristic of the worm gear and the worm, the clamping mechanism can keep a stable clamping state even under the condition that a power source loses efficacy, and falling off or displacement of a semiconductor in the detection process is effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a semiconductor testing fixture. Background Technology

[0002] In the semiconductor manufacturing industry, ensuring product quality is of paramount importance. Due to their highly integrated and precise nature, semiconductor devices require rigorous testing processes during production to identify defective products and ensure that the final products meet high quality standards. To guarantee the quality of semiconductors leaving the factory, testing fixtures are used to assist in the testing process.

[0003] Chinese utility model patent CN216051872U discloses a third-generation automatic flipping device for semiconductor testing. In use, the two ends of the semiconductor to be tested are placed in two connecting discs respectively. Each clamping cylinder extends and, through relatively arranged clamping blocks, stably clamps the semiconductor. Then, a drive motor drives the drive shaft to rotate, thereby achieving automatic flipping of the semiconductor during the testing process. Furthermore, the driven shaft of this utility model is mounted on a movable and adjustable platform. Before clamping the semiconductor, the extension distance of the adjusting cylinders is determined according to the length specifications of the semiconductor to be tested, and the platform is moved to the corresponding position. Adjustment is convenient and quick, with high applicability, which helps to improve testing efficiency.

[0004] When clamping a semiconductor to be tested, the device uses a clamping cylinder to drive a clamping block to achieve stable clamping of the semiconductor. However, in actual use, the clamping cylinder usually relies on an external air supply. If there is a problem with the air supply, the power maintained during clamping may fail, causing the clamping block to be unable to maintain stable clamping of the semiconductor. This makes the semiconductor very easy to fall off, causing damage to the semiconductor itself. Summary of the Invention

[0005] This invention overcomes the shortcomings of the prior art and provides a semiconductor testing fixture.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a semiconductor testing fixture, comprising: a mounting frame, a rotating cylinder disposed on the mounting frame, and a clamping assembly disposed at one end of the rotating cylinder;

[0007] The clamping assembly includes: a plurality of hinge blocks fixed to one end of the rotating cylinder, a plurality of clamping rods hinged to one side of the plurality of hinge blocks, and a plurality of worm gears fixed to the inner side of the plurality of clamping rods; a worm is provided on the inner side of the rotating cylinder, and the worm is located on the side of one end of the rotating cylinder and meshes with the side of the plurality of worm gears.

[0008] One end of the rotating cylinder is equipped with a power source for driving the worm gear to rotate, and the side of the rotating cylinder is equipped with a drive mechanism for driving the rotating cylinder to rotate.

[0009] In a preferred embodiment of this utility model, the side of the rotating cylinder is rotatably connected to the inner side of the mounting bracket, and the side of the worm gear is rotatably connected to the inner side of the rotating cylinder; the worm wheel is disposed at the hinge point between the clamping rod and the hinge block.

[0010] In a preferred embodiment of this utility model, a plurality of the hinge blocks, a plurality of the clamping rods, and a plurality of the worm gears are circumferentially and evenly distributed at one end of the rotating cylinder; the included angle between adjacent clamping rods is one of 90°, 120°, or 180°.

[0011] In a preferred embodiment of this utility model, a rubber pad is fixed to one end of the clamping rod.

[0012] In a preferred embodiment of this utility model, the power source includes: a servo motor installed on one end of the rotating cylinder located on the back of the mounting frame; the output end of the servo motor is fixed to one end of the worm gear.

[0013] In a preferred embodiment of the present invention, the driving mechanism includes: a rotating shaft disposed on the back of the mounting bracket, an active synchronous pulley fixed to the side of the rotating shaft, and a driven synchronous pulley fixed to the side of the rotating cylinder; the active synchronous pulley and the driven synchronous pulley are meshed with toothed belts on their sides, and a driving source for driving the rotating shaft to rotate is disposed at the bottom of the mounting bracket.

[0014] In a preferred embodiment of this utility model, one end of the rotating shaft is rotatably connected to the back of the mounting bracket.

[0015] In a preferred embodiment of the present invention, the driving source includes: a stepper motor mounted on the back of the mounting bracket, a driving bevel gear fixed to the output end of the stepper motor located at the top of the mounting bracket, and a driven bevel gear fixed to one end of the rotating shaft; the driving bevel gear meshes with the driven bevel gear.

[0016] In a preferred embodiment of this utility model, the surface of the mounting bracket is provided with a plurality of positioning holes for mounting the mounting bracket in a working position by means of a connector.

[0017] In a preferred embodiment of this utility model, the positioning hole is either an internal threaded hole or a smooth hole.

[0018] This utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0019] (1) This utility model provides a semiconductor testing fixture. By setting a clamping assembly at one end of a rotating cylinder, the clamping edge of the semiconductor element to be tested is placed between several clamping rods. Through the cooperation of a power source, rotating cylinder, worm gear, worm wheel, clamping rod and hinge block, the clamping rod can be driven to rotate synchronously at the hinge point on one side of the hinge block, thereby realizing the function of clamping or releasing the semiconductor element. By utilizing the self-locking characteristics of the worm gear, it is ensured that even if the power source fails, the clamping mechanism can maintain a stable clamping state, effectively preventing the semiconductor from falling off or shifting during the testing process.

[0020] (2) In this utility model, by installing a drive mechanism on the side of the rotating cylinder, the rotating cylinder can be driven to rotate during the detection by the cooperation of the drive source, rotating shaft, active synchronous pulley, driven synchronous pulley and toothed belt, so that the semiconductor to be tested held at one end of the rotating cylinder can rotate synchronously when the semiconductor is detected, thereby realizing the flexible flipping of the semiconductor in the clamping state and providing all-round detection. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0022] Figure 1 This is a frontal perspective view of a preferred embodiment of the present invention.

[0023] Figure 2 This is a structural diagram showing the preferred embodiment of the present invention where adjacent clamping rods form a 180° angle.

[0024] Figure 3 This is a rear-view perspective structural diagram of a preferred embodiment of the present invention;

[0025] Figure 4 This is a structural diagram showing the preferred embodiment of the present invention where adjacent clamping rods form a 120° included angle.

[0026] Figure 5 This is a structural diagram showing the adjacent clamping rods at a 90° angle to each other, representing a preferred embodiment of this utility model.

[0027] In the diagram: 1. Mounting bracket; 11. Rotating cylinder; 2. Clamping assembly; 21. Hinge block; 22. Clamping rod; 23. Worm gear; 24. Worm; 3. Rubber pad; 4. Servo motor; 5. Rotating shaft; 51. Driving synchronous pulley; 52. Driven synchronous pulley; 53. Toothed belt; 6. Stepper motor; 61. Driving bevel gear; 62. Driven bevel gear; 7. Positioning hole. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams, which are only used to illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0029] like Figure 1 and Figure 2 As shown, a semiconductor testing fixture includes: a mounting frame 1, a rotating cylinder 11 mounted on the mounting frame 1, and a clamping assembly 2 disposed at one end of the rotating cylinder 11; the clamping assembly 2 includes: a plurality of hinge blocks 21 fixed to one end of the rotating cylinder 11, a plurality of clamping rods 22 hinged to one side of the plurality of hinge blocks 21, and a plurality of worm gears 23 fixed to the inner side of the plurality of clamping rods 22; a worm 24 is disposed on the inner side of the rotating cylinder 11, and the worm 24 is located on the side of one end of the rotating cylinder 11 and meshes with the side of the plurality of worm gears 23; a power source for driving the worm 24 to rotate is installed at one end of the rotating cylinder 11, and a drive mechanism for driving the rotating cylinder 11 to rotate is installed on the side of the rotating cylinder 11.

[0030] It should be noted that the side of the rotating cylinder 11 is rotatably connected to the inside of the mounting frame 1, and the side of the worm gear 24 is rotatably connected to the inside of the rotating cylinder 11; the worm wheel 23 is located at the hinge point between the clamping rod 22 and the hinge block 21; after the mounting frame 1 is fixed in the working position, the clamping edge of the semiconductor element to be tested is placed between several clamping rods 22. With the cooperation of the power source, the worm gear 24 is driven to rotate inside the rotating cylinder 11. Since the side of the worm gear 24 located at one end of the rotating cylinder 11 meshes with the side of several worm wheels 23, and the worm wheels 23 are fixed inside the clamping rod 22, it can drive the clamping rod 22 to rotate synchronously at the hinge point on one side of the hinge block 21, thereby realizing the function of clamping or releasing the semiconductor element. By utilizing the self-locking characteristics of the worm wheel 23 and the worm gear 24, it is ensured that even if the power source fails, the clamping mechanism can maintain a stable clamping state, effectively preventing the semiconductor from falling off or shifting during the testing process.

[0031] In some embodiments, a plurality of hinge blocks 21, a plurality of clamping rods 22 and a plurality of worm gears 23 are circumferentially evenly distributed at one end of the rotating cylinder 11; the included angle between adjacent clamping rods 22 is one of 90°, 120° or 180°.

[0032] It should be noted that the included angle between adjacent clamping rods 22 can be selected as needed, such as 90° (e.g., Figure 5 (as shown), 120° (as shown) Figure 4 (as shown) or 180° (as shown) Figure 2 As shown, this design accommodates semiconductor devices of different sizes or shapes, ensuring a uniform distribution of clamping force and improving clamping stability and reliability.

[0033] In some embodiments, a rubber pad 3 is fixed to one end of the clamping rod 22; the rubber pad 3 increases the friction during clamping, preventing the semiconductor device from slipping or being damaged during clamping. Simultaneously, the rubber pad 3 has a certain degree of elasticity and cushioning, protecting the semiconductor device from impact and damage during clamping.

[0034] In some embodiments, the power source includes a servo motor 4 installed on one end of the rotating cylinder 11 located on the back of the mounting bracket 1; the output end of the servo motor 4 is fixed to one end of the worm gear 24; by using the servo motor 4 as the power source to drive the worm gear 24 to rotate, the high precision, high reliability and easy control characteristics can be utilized to achieve precise control of the rotation speed and direction of the worm gear 24, thereby meeting the requirements for clamping force and clamping speed in the semiconductor testing process.

[0035] like Figure 3 As shown, in some embodiments, the drive mechanism includes: a rotating shaft 5 disposed on the back of the mounting frame 1, a driving synchronous pulley 51 fixed on the side of the rotating shaft 5, and a driven synchronous pulley 52 fixed on the side of the rotating cylinder 11; the driving synchronous pulley 51 and the driven synchronous pulley 52 are meshed with toothed belts 53 on their sides, and a drive source for driving the rotating shaft 5 to rotate is disposed at the bottom of the mounting frame 1.

[0036] It should be noted that one end of the rotating shaft 5 is rotatably connected to the back of the mounting bracket 1; the rotating shaft 5 is driven to rotate by the drive source, which in turn drives the active synchronous pulley 51 to rotate, and the power is transmitted to the driven synchronous pulley 52 through the toothed belt 53, which finally drives the rotating cylinder 11 to rotate. This allows the semiconductor to be tested, which is held at one end of the rotating cylinder 11, to rotate synchronously during semiconductor testing, thereby enabling the semiconductor to be flexibly flipped in the clamping state and providing all-round testing.

[0037] In some embodiments, the drive source includes: a stepper motor 6 mounted on the back of the mounting bracket 1, a drive bevel gear 61 fixed to the output end of the stepper motor 6 at the top of the mounting bracket 1, and a driven bevel gear 62 fixed to one end of the rotating shaft 5; the drive bevel gear 61 meshes with the driven bevel gear 62.

[0038] It should be noted that the rotational motion of the stepper motor 6 is transmitted to the rotating shaft 5 through the meshing of the driving bevel gear 61 and the driven bevel gear 62, thereby realizing the power output to the rotating shaft 5.

[0039] In some embodiments, the surface of the mounting bracket 1 is provided with a plurality of positioning holes 7 for mounting the mounting bracket 1 in the working position by means of a connector.

[0040] It should be noted that the positioning hole 7 is either an internal threaded hole or a smooth hole; by opening the positioning hole 7 on the surface of the mounting bracket 1, the mounting bracket 1 can be fixed in the working position by means of connectors (such as bolts, nuts, etc.). The positioning hole 7 can be an internal threaded hole or a smooth hole. The appropriate connection method can be selected according to actual needs, which facilitates installation and disassembly and improves the flexibility and applicability of the tooling.

[0041] In use, the mounting bracket 1 is fixed in the working position by a connector. Then, the clamping edge of the semiconductor component to be tested is placed inside the clamping assembly 2 at one end of the rotating cylinder 11 in the fixture. The clamping assembly 2 consists of several hinge blocks 21 evenly distributed at one end of the rotating cylinder 11, a clamping rod 22 hinged to one side of the hinge blocks 21, and a worm gear 23 fixed inside the clamping rod 22. A servo motor 4 installed at one end of the back of the rotating cylinder 11 is activated as a power source, driving the worm 24, which meshes with the side of the worm gear 23, to rotate inside the rotating cylinder 11. This, in turn, causes the clamping rod 22 to rotate synchronously around the hinge point, achieving stable clamping of the semiconductor component. The rubber pad 3 at one end of the clamping rod 22 increases friction during clamping, while also providing elasticity and cushioning to protect the semiconductor component from damage. Furthermore, utilizing the self-locking characteristics of the worm gear 23 and worm 24, the clamping mechanism can maintain a stable clamping state even if the power source fails. Meanwhile, the stepper motor 6 on the back of the mounting bracket 1 drives the active bevel gear 61 and the driven bevel gear 62 to mesh, thereby driving the rotating shaft 5 to rotate. Then, through the transmission of the active synchronous pulley 51, the toothed belt 53 and the driven synchronous pulley 52, the rotating cylinder 11 and the semiconductor components on it are driven to rotate synchronously, so as to realize the flexible flipping of the semiconductor in the clamping state for all-round detection.

[0042] Based on the above description and the preferred embodiments of this utility model, it will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0043] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor testing fixture, characterized in that, include: Mounting bracket (1), rotating cylinder (11) disposed on the mounting bracket (1), and clamping assembly (2) disposed at one end of the rotating cylinder (11); The clamping assembly (2) includes: a plurality of hinge blocks (21) fixed to one end of the rotating cylinder (11), a plurality of clamping rods (22) hinged to one side of the plurality of hinge blocks (21), and a plurality of worm gears (23) fixed to the inner side of the plurality of clamping rods (22); a worm (24) is provided on the inner side of the rotating cylinder (11), and the worm (24) is located on the side of one end of the rotating cylinder (11) and meshes with the side of the plurality of worm gears (23); One end of the rotating cylinder (11) is equipped with a power source for driving the worm (24) to rotate, and the side of the rotating cylinder (11) is equipped with a drive mechanism for driving the rotating cylinder (11) to rotate.

2. The semiconductor testing fixture according to claim 1, characterized in that: The side of the rotating cylinder (11) is rotatably connected to the inside of the mounting bracket (1), and the side of the worm (24) is rotatably connected to the inside of the rotating cylinder (11); the worm wheel (23) is located at the hinge of the clamping rod (22) and the hinge block (21).

3. The semiconductor testing fixture according to claim 1, characterized in that: A plurality of the hinge blocks (21), a plurality of the clamping rods (22) and a plurality of the worm gears (23) are all circumferentially and evenly distributed at one end of the rotating cylinder (11); the included angle between adjacent clamping rods (22) is one of 90°, 120° or 180°.

4. A semiconductor testing fixture according to claim 1, characterized in that: A rubber pad (3) is fixed to one end of the clamping rod (22).

5. A semiconductor testing fixture according to claim 1, characterized in that: The power source includes a servo motor (4) installed on one end of the rotating cylinder (11) on the back of the mounting bracket (1); the output end of the servo motor (4) is fixed to one end of the worm gear (24).

6. A semiconductor testing fixture according to claim 1, characterized in that: The drive mechanism includes: a rotating shaft (5) disposed on the back of the mounting bracket (1), a driving synchronous pulley (51) fixed on the side of the rotating shaft (5), and a driven synchronous pulley (52) fixed on the side of the rotating cylinder (11); the driving synchronous pulley (51) and the driven synchronous pulley (52) are meshed with toothed belts (53) on their sides, and the bottom of the mounting bracket (1) is provided with a drive source for driving the rotating shaft (5) to rotate.

7. A semiconductor testing fixture according to claim 6, characterized in that: One end of the rotating shaft (5) is rotatably connected to the back of the mounting bracket (1).

8. A semiconductor testing fixture according to claim 6, characterized in that: The drive source includes: a stepper motor (6) mounted on the back of the mounting bracket (1), a drive bevel gear (61) fixed to the output end of the stepper motor (6) at the top of the mounting bracket (1), and a driven bevel gear (62) fixed to one end of the rotating shaft (5); the drive bevel gear (61) meshes with the driven bevel gear (62).

9. A semiconductor testing fixture according to claim 1, characterized in that: The surface of the mounting bracket (1) is provided with a plurality of positioning holes (7) for mounting the mounting bracket (1) in the working position by means of a connector.

10. A semiconductor testing fixture according to claim 9, characterized in that: The positioning hole (7) is either an internal threaded hole or a smooth hole.

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