Lower furnace cover locking mechanism and vertical crystal growing furnace

Abstract

The utility model discloses a lower furnace cover locking mechanism and a vertical crystal growing furnace, which comprise a bottom plate, the top of the bottom plate is fixedly connected with a growing furnace body through a group of L-shaped rods, the top of the bottom plate is provided with a lower furnace cover body, the top of the furnace cover body is provided with a sealing cover, the top of the bottom plate is provided with a sliding groove, and the sliding groove is provided with a sliding block. A placing groove is formed in the top of the bottom plate, placing blocks are placed in the placing groove, the lower furnace cover body is located at the top of the set of placing blocks, a fastening mechanism is arranged on the growth furnace body and used for driving the lower furnace cover body to ascend and descend, and the fastening mechanism comprises a lifting assembly and a clamping assembly; the lifting mechanism is arranged on the growth furnace body and used for driving the lower furnace cover body to ascend and descend. According to the locking mechanism, the problems that in the prior art, a plurality of power sources are needed to provide power for the locking mechanism, so that the overall energy consumption is improved, the maintenance cost is higher, and a more complex control system is needed to coordinate work of all the power sources are solved.

Description

Technical Field

[0001] This utility model relates to the field of locking mechanism technology, specifically a lower furnace cover locking mechanism and a vertical crystal growth furnace. Background Technology

[0002] Silicon carbide (SiC), as a representative of third-generation semiconductor materials, occupies an important position in the field of electronic device manufacturing due to its excellent physical and chemical properties. SiC's wide bandgap characteristics enable it to operate stably in high-temperature environments, while also possessing high-frequency, high-power, and high-voltage electrical properties, making it very suitable for manufacturing high-performance electronic devices. In addition, SiC also has excellent radiation resistance, which is particularly important in the military and aerospace fields, as these application environments are often accompanied by high radiation levels.

[0003] Existing locking mechanisms still have the following problems. Referring to the locking mechanism for the lower furnace cover of a vertical crystal growth furnace disclosed in publication number CN218059294U, which relates to the field of locking mechanism technology, it includes a locking assembly and a drive system mounted on a frame. The locking assembly includes a linkage block, a mounting base, a connecting rod seat, and a drive structure. The mounting base is used to connect to the frame or furnace body. The drive structure is located at one end of the mounting base, and the connecting rod seat is located at the other end of the mounting base. The linkage block is movably connected to the connecting rod seat, the drive structure is drively connected to the linkage block, and the drive system is power-connected to the drive structure. 1. Automatic locking of the lower furnace cover is achieved through a simple mechanism, avoiding the tedious and time-consuming manual operation and potential risks. 2. By designing and adding a redundant protection system in the drive system, a self-locking function for the furnace cover is achieved in the event of loss of driving force, power failure, pipeline damage, or damage to the drive reversing valve.

[0004] However, while the aforementioned technology can achieve the locking effect by locking the lower furnace cover with multiple locking components, it requires multiple power sources to provide power, resulting in increased overall energy consumption and higher maintenance costs. It also requires a more complex control system to coordinate the operation of each power source. Therefore, this utility model provides a lower furnace cover locking mechanism and a vertical crystal growth furnace. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a lower furnace cover locking mechanism and a vertical crystal growth furnace, which solves the problems in existing technologies that require multiple power sources to power the locking mechanism, resulting in increased overall energy consumption, higher maintenance costs, and the need for a more complex control system to coordinate the operation of each power source.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a lower furnace cover locking mechanism and a vertical crystal growth furnace, comprising a base plate, a growth furnace body fixedly connected to the top of the base plate by a set of L-shaped rods, a lower furnace cover body provided on the top of the base plate, a sealing cover provided on the top of the furnace cover body, a sliding groove provided on the top of the base plate, a placement groove provided on the top of the base plate, a placement block placed in the placement groove, and the lower furnace cover body located on top of the set of placement blocks; a fastening mechanism provided on the growth furnace body for driving the lower furnace cover body to rise and fall, the fastening mechanism comprising:

[0007] A lifting assembly is installed on the growth furnace body to drive the lower furnace cover body to rise and fall. The lifting assembly includes a fixing block. A set of the fixing blocks are fixed to the outer circular wall of the growth furnace body. The bottom of the fixing block is connected to the bottom of the placement groove through a rectangular rod. The placement block is slidably connected to the rectangular rod through the rectangular groove.

[0008] The drive assembly, located on the growth furnace body, is used to drive a set of placement blocks to rise and fall.

[0009] Preferably, the drive assembly includes threaded rods, a set of threaded rods are rotatably connected to the bottom of a set of placement slots and the bottom of a set of fixing blocks, and the top of the set of threaded rods passes through the top of the set of fixing blocks, and a first sprocket is fixedly connected to the top of each set of threaded rods.

[0010] Preferably, a motor is fixedly connected to the outer circular wall of the growth furnace body via a circular block. The output end of the motor is provided with a drive rod, and a second sprocket is fixedly connected to the bottom of the drive rod. The second sprocket and the first sprocket are connected by chain drive.

[0011] Preferably, an annular plate is fixedly connected to the top of the lower furnace cover body, a rubber ring is fitted on the annular plate, and an annular groove is opened at the bottom of the growth furnace body.

[0012] Preferably, a rectangular block is fixed to the top of the placement block, a limiting rod is fixed to the side wall of the rectangular block, and a limiting groove is provided on the lower furnace cover body.

[0013] Preferably, the limiting rod has a through groove, and a locking block is fixed to the side wall of the through groove by a spring. The top of the locking block has a locking groove, and an arc-shaped plate is placed in the locking groove.

[0014] Beneficial effects

[0015] This invention provides a lower furnace cover locking mechanism and a vertical crystal growth furnace. Compared with the prior art, it has the following advantages:

[0016] (1) The locking mechanism places the lower furnace cover body in the sliding groove and on top of the placement block, and then drives the second sprocket to rotate through the motor. This drives a set of first sprockets to rotate through the chain, which in turn drives a set of threaded rods to rotate. This allows a set of placement blocks to slide on the rectangular rods, which in turn drives the lower furnace cover body placed on the set of placement blocks to rise and close with the bottom of the growth furnace body. This allows the lower furnace cover body to rise through a single power source, thus avoiding the need for multiple power sources to provide power to the locking mechanism, which would otherwise lead to increased overall energy consumption, higher maintenance costs, and a more complex control system to coordinate the operation of each power source.

[0017] (2) The locking mechanism is fixed to the top of the lower furnace cover body with an annular plate, which can be inserted into the annular groove at the bottom of the growth furnace body, thereby improving the sealing effect. In addition, the rubber ring can prevent gaps and improve the sealing effect. Attached Figure Description

[0018] Figure 1 This is a perspective view of the present utility model;

[0019] Figure 2 This is a schematic diagram of the placement block of this utility model;

[0020] Figure 3 This is a schematic diagram of the placement groove of this utility model;

[0021] Figure 4 This is a schematic diagram of the lower furnace cover body of this utility model;

[0022] Figure 5 This is a schematic diagram of the annular groove of this utility model.

[0023] In the diagram: 1. Base plate; 2. Growth furnace body; 3. Lower furnace cover body; 4. Placement groove; 5. Placement block; 6. Fastening mechanism; 7. Lifting assembly; 8. Fixing block; 9. Rectangular rod; 10. Drive assembly; 11. Threaded rod; 12. First sprocket; 13. Motor; 14. Drive rod; 15. Second sprocket; 16. Chain; 17. Annular plate; 18. Rubber ring; 19. Annular groove; 20. Rectangular block; 21. Limiting rod; 22. Limiting groove; 23. Through groove; 24. Positioning block; 25. Positioning groove; 26. Arc plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-5 This utility model provides a technical solution: a lower furnace cover locking mechanism and a vertical crystal growth furnace, including a base plate 1, a growth furnace body 2 fixed to the top of the base plate 1 by a set of L-shaped rods, a lower furnace cover body 3 provided on the top of the base plate 1, a sealing cover provided on the top of the furnace cover body, a sliding groove provided on the top of the base plate 1, a placement groove 4 provided on the top of the base plate 1, a placement block 5 placed in the placement groove 4, and the lower furnace cover body 3 located on top of the set of placement blocks 5. A fastening mechanism 6 is provided on the growth furnace body 2 for driving the lower furnace cover body 3 to rise and fall. Structure 6 includes: a lifting assembly 7, mounted on the growth furnace body 2 for lifting the lower furnace cover body 3; the lifting assembly 7 includes a fixing block 8, a set of fixing blocks 8 being fixedly connected to the outer circular wall of the growth furnace body 2; the bottom of the fixing block 8 is connected to the bottom of the placement groove 4 via a rectangular rod 9; the placement block 5 is slidably connected to the rectangular rod 9 via the rectangular groove; and a driving assembly 10, mounted on the growth furnace body 2 for lifting the set of placement blocks 5; the driving assembly 10 includes a threaded rod 11, a set of threaded rods 11 being rotatably connected to the bottom of the placement groove 4 and the set of fixing blocks 5 respectively. The bottom of the fixed block 8 and the top of a set of threaded rods 11 pass through the top of the fixed block 8 respectively. The top of each set of threaded rods 11 is fixedly connected to a first sprocket 12. A motor 13 is fixedly connected to the outer circular wall of the growth furnace body 2 through a circular block. The output end of the motor 13 is provided with a drive rod 14. The bottom of the drive rod 14 is fixedly connected to a second sprocket 15. The second sprocket 15 and the first sprocket 12 are connected by a chain 16. By placing the lower furnace cover body 3 in the sliding groove and on top of the placement block 5, and then driving the second sprocket 15 to rotate through the motor 13, the first sprocket 12 can be driven to rotate through the chain 16, which in turn drives the set of threaded rods 11 to rotate. This allows the set of placement blocks 5 to slide on the rectangular rod 9, thereby causing the lower furnace cover body 3 placed on the set of placement blocks 5 to rise and close with the bottom of the growth furnace body 2. Thus, the lower furnace cover body 3 can be raised by a single power source, avoiding the need for multiple power sources to provide power to the locking mechanism, which would increase overall energy consumption, lead to higher maintenance costs, and require a more complex control system to coordinate the work of each power source.

[0026] In this embodiment, an annular plate 17 is fixedly connected to the top of the lower furnace cover body 3, and a rubber ring 18 is fitted on the annular plate 17. An annular groove 19 is opened at the bottom of the growth furnace body 2. A rectangular block 20 is fixedly connected to the top of the placement block 5, and a limiting rod 21 is fixedly connected to the side wall of the rectangular block 20. A limiting groove 22 is opened on the lower furnace cover body 3. The annular plate 17 fixedly connected to the top of the lower furnace cover body 3 can be inserted into the annular groove 19 opened at the bottom of the growth furnace body 2, thereby improving the sealing effect. The rubber ring 18 can prevent gaps and improve the sealing effect.

[0027] In this embodiment, a through groove 23 is provided on the limiting rod 21, and a locking block 24 is fixed to the side wall of the through groove 23 by a spring. A locking groove 25 is provided on the top of the locking block 24, and an arc plate 26 is placed in the locking groove 25. The locking block 24 is fixed to the through groove 23 by a spring, and the arc plate 26 can be placed in the locking groove 25 through the locking block 24. Thus, while the limiting rod 21 limits the lower furnace cover body 3 laterally, the arc plate 26 can be placed on it to compress it. This makes the lower furnace cover body 3 more stable when it rises and allows it to accurately close the bottom of the growth furnace body 2.

[0028] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0029] During operation, the lower furnace cover body 3 is placed in the sliding groove and on top of the placement block 5. The motor 13 drives the second sprocket 15 to rotate, which in turn drives a set of first sprockets 12 via the chain 16. This, in turn, drives a set of threaded rods 11 to rotate, causing the placement blocks 5 to slide on the rectangular rod 9. This lifts the lower furnace cover body 3, which is placed on the placement blocks 5, to the bottom of the growth furnace body 2, thus sealing it. This allows the lower furnace cover body 3 to rise using a single power source, avoiding the need for multiple power sources to power the locking mechanism, which would otherwise increase overall energy consumption, lead to higher maintenance costs, and require a more complex control system. To address the coordination of various power sources, an annular plate 17 is fixed to the top of the lower furnace cover body 3, which can be inserted into the annular groove 19 at the bottom of the growth furnace body 2, thereby improving the sealing effect. The rubber ring 18 prevents gaps and further enhances the sealing effect. A locking block 24 is fixed to the through groove 23 by a spring, and the locking block 24 can place an arc-shaped plate 26 through the locking groove 25. This allows the lower furnace cover body 3 to be laterally limited by the limiting rod 21, while the arc-shaped plate 26 presses it, making the lower furnace cover body 3 more stable when rising and accurately sealing the bottom of the growth furnace body 2.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A lower furnace cover locking mechanism and a vertical crystal growth furnace, comprising a base plate (1), characterized in that: The bottom plate (1) is fixed to the top of the growth furnace body (2) by a set of L-shaped rods. The bottom plate (1) is provided with a lower furnace cover body (3) on the top. The furnace cover body is provided with a sealing cover on the top. The bottom plate (1) is provided with a sliding groove and a placement groove (4) on the top. A placement block (5) is placed in the placement groove (4), and the lower furnace cover body (3) is located on top of a set of placement blocks (5). The growth furnace body (2) is provided with a fastening mechanism (6) for driving the lower furnace cover body (3) to rise and fall. The fastening mechanism (6) includes: The lifting assembly (7) is set on the growth furnace body (2) to drive the lower furnace cover body (3) to lift. The lifting assembly (7) includes a fixing block (8). A set of the fixing blocks (8) are fixed to the outer circular wall of the growth furnace body (2). The bottom of the fixing block (8) is connected to the bottom of the placement groove (4) through a rectangular rod (9). The placement block (5) is slidably connected to the rectangular rod (9) through the rectangular groove. A drive assembly (10) is installed on the growth furnace body (2) to drive a set of placement blocks (5) to rise and fall.

2. The lower furnace cover locking mechanism and vertical crystal growth furnace according to claim 1, characterized in that: The drive assembly (10) includes threaded rods (11), a set of threaded rods (11) are rotatably connected to the bottom of a set of placement slots (4) and the bottom of a set of fixing blocks (8), and the top of a set of threaded rods (11) passes through the top of a set of fixing blocks (8), and a first sprocket (12) is fixedly connected to the top of each set of threaded rods (11).

3. The lower furnace cover locking mechanism and vertical crystal growth furnace according to claim 2, characterized in that: A motor (13) is fixed to the outer circular wall of the growth furnace body (2) by a circular block. The output end of the motor (13) is provided with a drive rod (14). A second sprocket (15) is fixed to the bottom of the drive rod (14). The second sprocket (15) and the first sprocket (12) are connected by a chain (16).

4. The lower furnace cover locking mechanism and vertical crystal growth furnace according to claim 1, characterized in that: The top of the lower furnace cover body (3) is fixed with an annular plate (17), and a rubber ring (18) is fitted on the annular plate (17). An annular groove (19) is opened at the bottom of the growth furnace body (2).

5. The lower furnace cover locking mechanism and vertical crystal growth furnace according to claim 1, characterized in that: A rectangular block (20) is fixed to the top of the placement block (5), a limiting rod (21) is fixed to the side wall of the rectangular block (20), and a limiting groove (22) is provided on the lower furnace cover body (3).

6. The lower furnace cover locking mechanism and vertical crystal growth furnace according to claim 5, characterized in that: The limiting rod (21) has a through groove (23), and a locking block (24) is fixed to the side wall of the through groove (23) by a spring. The top of the locking block (24) has a locking groove (25), and an arc plate (26) is placed in the locking groove (25).

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