Adjustable polarization mechanism and optical detection device

Abstract

According to the adjustable polarization mechanism and the optical detection device, the polaroids with different polarization characteristics and the optical filters with different parameters are installed, the polaroids and the optical filters at different stations are transferred to an optical path through the driving component, switching of the polaroids and the optical filters can be rapidly completed, and the adjusting difficulty of optical elements is reduced. Meanwhile, the light shielding cover plate is arranged in the assembly of the optical detection device, the optical assembly can be cleaned or parts can be replaced at any time only by dismounting the light shielding cover plate, and the maintenance time is shortened.

Description

Technical Field

[0001] This utility model relates to the field of wafer measurement technology, specifically to an adjustable polarization mechanism and optical detection device. Background Technology

[0002] With the development of advanced semiconductor manufacturing processes, the tolerance for wafer surface defects is becoming increasingly lower. Wafer surface defects mainly include scratches, particles, and cracks. These defects will adversely affect subsequent chip manufacturing, reducing chip yield. To prevent wafers with surface defects from entering subsequent production processes, optical inspection methods are often used to check wafer surface quality. This method has advantages such as high precision, speed, and no contamination.

[0003] Although optical inspection equipment has made significant progress, some shortcomings still exist in its light acquisition devices. For example, adjusting optical components is difficult, requiring different polarizers to handle light with varying polarization characteristics, making it hard to quickly adapt to different inspection needs. Furthermore, there are technical challenges such as external light interference and difficulties in device maintenance. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model proposes an adjustable polarization mechanism and an optical detection device. By setting polarizers with different polarization characteristics in the polarization mechanism, and using an adjustment component to change different polarizers in the optical path, it can quickly adapt to different optical detection requirements.

[0005] To achieve the above objectives, the adjustable polarization mechanism of this utility model includes a polarization component, which includes a lens holder and a driving component. The lens holder contains multiple polarizer lens tubes, and polarizers with different polarization characteristics are installed in the polarizer lens tubes. The driving component drives the lens holder to move so as to transfer polarizers at different positions to the optical path to meet different light polarization requirements.

[0006] Furthermore, in wafer defect inspection, a specific wavelength of detection light is required for surface defects of a certain size to improve detection accuracy. This necessitates the placement of filters in the optical path to allow the detection light meeting the wavelength requirements to pass through. Preferably, the adjustable polarization mechanism of this invention also includes a filtering component, comprising a filter plate and a second driving component. The filter plate also has multiple lens holes, each housing a filter with different parameters to filter detection light of different wavelengths. The second driving component similarly drives the filter plate to move, transferring filters from different positions onto the optical path.

[0007] Another objective of this invention is to provide an optical detection device including the aforementioned adjustable polarization mechanism.

[0008] The technical effects of this utility model are as follows:

[0009] The adjustable polarization mechanism of this invention is equipped with polarizers of different polarization characteristics. A driving component moves the polarizers from different positions onto the optical path, enabling rapid switching between polarizers. Similarly, the filter assembly in the adjustable polarization mechanism also uses a driving component to move the filter plate, moving the filter from different positions onto the optical path and quickly switching between filters to allow detection light meeting wavelength requirements to pass through. Attached Figure Description

[0010] Figure 1 This is a structural diagram of an optical detection device.

[0011] Figure 2 This is a structural diagram of the polarization component.

[0012] Figure 3 This is a structural diagram of a polarization component without a light-shielding cover.

[0013] Figure 4 This is another structural diagram of the polarization component without the light-shielding cover.

[0014] Figure 5 This is a structural diagram of a cross roller guide.

[0015] Figure 6 This is a structural diagram of the filter component.

[0016] Figure 7 This is a structural diagram of the filter component without the light-shielding cover.

[0017] Figure 8 This is a structural diagram of the focused component.

[0018] Figure 9 This is a structural diagram of the attenuation component.

[0019] Figure 10 This is a structural diagram of the attenuation component without the light-shielding cover.

[0020] Figure 11 This is a structural diagram of a photoelectric conversion component.

[0021] Figure 12 This is a structural diagram of the lens assembly.

[0022] Figure 13 This is another structural diagram of the lens assembly. Detailed Implementation

[0023] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0024] Example 1

[0025] See Figure 1 An optical detection device includes, in sequence along the optical path propagation direction, a lens assembly 1, an adjustable polarization mechanism, a focusing assembly 4, an attenuation assembly 5, and a photoelectric conversion assembly 6, wherein the adjustable polarization mechanism includes a polarization assembly 2 and a filtering assembly 3.

[0026] Example 2

[0027] An adjustable polarization mechanism, such as Figure 2-5 As shown, the polarization assembly 2 includes a polarization base 21, a driving component 22, and a lens barrel mount 23. A slide rail 24 is installed between the polarization base 21 and the lens barrel mount 23. The driving component 22 is mounted on the polarization base 21 and drives the lens barrel mount 23 to move along the slide rail 24 on the polarization base 21. Three polarizer barrels 25 are provided on the lens barrel mount 23, each containing a polarizer with three different polarization characteristics. Preferably, one of the polarizer barrels 25 does not contain a polarizer. A photoelectric sensor 26 is also installed on the polarization base 21 to detect the specific position of the lens barrel mount 23.

[0028] Preferably, the drive component 22 is a servo screw motor; the slide rail 24 is two cross roller guides, and a groove is provided on the bottom surface of the polarizing base 21. The fixed part of the cross roller guide is installed in the groove, and the sliding part is connected to the lens barrel base 23. The servo screw motor drives the lens barrel base 23 to slide relative to the polarizing base 21, switching the polarizers at different positions into the optical path. A rib 211, a second rib 212, and a third rib 213 are provided on the top surface of the polarizing base 21. The two ends of the servo screw motor are mounted on the ribs 211 and 212. A light-transmitting hole 214 is provided on the polarizing base 21 between the ribs 212 and 213.

[0029] The polarization assembly 2 also includes a light-shielding cover 27, a second light-shielding cover 28, and a third light-shielding cover 29. The light-shielding cover 27 is installed on the upper side of the polarization base 21, and the second light-shielding cover 28 and the third light-shielding cover 29 are installed on the lower side of the polarization base 21. A second light-transmitting hole is provided on the third light-shielding cover 29 at a position corresponding to the light-transmitting hole 33. The light-shielding cover 27, the second light-shielding cover 28, and the third light-shielding cover 29 are installed on the polarization base 21 to prevent ambient light from interfering with the detection.

[0030] like Figure 6-7As shown, the filter assembly 3 includes a filter base 31, a filter plate 32, and a second driving component 33. A second slide rail (not shown) is installed between the filter base 31 and the filter plate 32. The second driving component 33 is mounted on the filter base 31 and drives the filter plate 32 to move along the second slide rail on the filter base 31. The filter plate 32 has two lens holes 35, and two different types of filter plates with different parameters are installed in the two lens holes 35. Preferably, no filter plate is installed in one of the lens holes 35.

[0031] Preferably, the second driving component 33 selects a cylinder. A mounting plate 311 is provided at the end of the filter base 31. The cylinder is mounted on the mounting plate 311 and connected to the filter plate 32 through a floating joint 36. A buffer 37 is also installed on the mounting plate 40, with one end of the buffer 37 abutting against the filter plate 32. The cylinder drives the filter plate 32 to slide relative to the filter base 31, switching the filters at different positions into the optical path. The buffer 37 is used to reduce the impact on the filter plate 32 during the cylinder recovery process. At the same time, the floating joint 36 also reduces the impact of the cylinder on the filter plate 32.

[0032] The filter assembly 3 also includes a fourth light-shielding cover plate 38 and a fifth light-shielding cover plate 39. The fourth and fifth light-shielding cover plates 38 and 39 are mounted on the bottom surface of the filter base 31. A base plate is provided between the mounting plate 311, the fourth and fifth light-shielding cover plates 38 and 39, respectively. The fourth and fifth light-shielding cover plates 38 and 39 are connected to the second and third protruding ribs 212 and 213, respectively, connecting the filter assembly 3 to the polarization assembly 2. A fourth protruding rib 312 is also provided on the top surface of the filter base 31, and a second light-transmitting hole 313 corresponding to the light-transmitting hole 214 is provided on the filter base 31 and the fourth protruding rib 312.

[0033] Example 3

[0034] The specific structure of the focusing component 4 in Embodiment 1 is as follows: Figure 8-9 As shown, the lens includes a focusing assembly end plate 41, two focusing assembly side plates 42, a light-shielding cover plate 43, a lens frame 44, and a focusing lens 45. The focusing assembly end plate 41, the two focusing assembly side plates 42, and the light-shielding cover plate 43 form a space for mounting the lens frame 44. The lens frame 44 is mounted on the focusing assembly end plate 41, and the focusing lens 45 is mounted on the lens frame 44. The two focusing assembly side plates 42 are connected to the ribs 312, connecting the focusing assembly 4 and the filter assembly 3 together.

[0035] Example 4

[0036] The specific structure of attenuation component 5 in Example 1 is as follows: Figure 10As shown, the attenuation component includes a base plate 51, a motor 52, and an attenuator mounting wheel 53. The motor 52 is mounted on the top surface of the base plate 51, and the attenuator mounting wheel 53 is mounted on the bottom surface of the base plate 51. The drive shaft of the motor 52 drives the attenuator mounting wheel 53 to rotate. The attenuator mounting wheel 53 has multiple attenuator holes 54; in this embodiment, five holes are provided, each for attenuators with different parameters. Preferably, no attenuator is installed in one of the attenuator holes 54. A position sensor 55 is also mounted on the bottom surface of the base plate 51 to control the motor 52 to rotate the attenuator mounting wheel 53, thereby switching the attenuators in the optical path. The position of the attenuator is fed back by the position sensor 55; preferably, the position sensor 55 is a photoelectric sensor.

[0037] A rib 56 is provided on the top surface of the attenuation component base plate 51, and a light-shielding shell 57 is installed on the bottom surface of the attenuation component base plate 51. A light-transmitting hole 3 is provided on the light-shielding shell 57, corresponding to the light-transmitting hole 313. A light-transmitting hole 4 59 is provided on the attenuation component base plate 51 and the rib 56, corresponding to the light-transmitting hole 3 58.

[0038] Example 5

[0039] The specific structure of the photoelectric conversion component 6 in Example 1 is as follows: Figure 11 As shown, along the optical path propagation direction, the optical conversion component base 61, aperture 62, shutter 64 and optical converter 65 are sequentially included. A servo motor 60 is installed on the top surface of the aperture 62. The servo motor 60 is used to control the size of the aperture's light passage. The bottom end of the optical conversion component base 61 is connected to the protruding rib 56, connecting the optical conversion component 6 and the attenuation component 5 together.

[0040] Example 6

[0041] The specific structure of lens assembly 1 in Embodiment 1 is as follows: Figure 12-13 As shown, the system includes a lens barrel 11 and a lens barrel adjustment device. The lens barrel adjustment device includes a fixed base 12, an adjustment sleeve 13, an elastic connector 14, and an adjustment component. The lens barrel 11 is connected to the adjustment sleeve 13. The adjustment sleeve 13 includes a cylinder 16 and an end plate 17. The cylinder 16 extends into the fixed base 12, and the end plate 17 is located below the fixed base 12. An elastic connector 14 is provided between the fixed base 12 and the end plate 17. The elastic connector 14 includes two rods 141 and an elastic body 142 located between the rods 141. The rods 141 are located in grooves opposite to the fixed base 12 and the end plate 17, and the elastic body 142 is located in through holes in the fixed base 12 and the end plate 17. The adjustment component includes a plurality of tightening screws 18 screwed into the fixed base 12, preferably three. The heads of the tightening screws 18 abut against the outer wall of the cylinder 16. The pitch angle of the lens barrel 11 can be adjusted by rotating the tightening screws 18.

[0042] The aforementioned mounting bracket 12 is connected to the light-shielding cover plate 29, connecting the lens assembly 1 and the polarizing assembly 2 together.

[0043] The optical inspection device includes a light-shielding cover, which can be removed to clean the optical components or replace parts at any time, reducing maintenance time.

[0044] The basic principles, main features, and advantages of this utility model in the explored field have been described in detail above, and some usage examples have been detailed. Finally, it should be noted that the examples given above are only for illustrative purposes and are not intended to limit this utility model. Although we have described this utility model in detail with reference to the examples, those skilled in the art can still modify the described examples and solutions, or replace related technical parts. Therefore, any modifications or equivalent substitutions made within the spirit and principles of this utility model are within the protection scope of the claims of this utility model patent.

Claims

1. An adjustable polarization mechanism, comprising a polarization component, characterized in that: The polarization assembly includes a polarization base, a lens barrel mount, and a driving component. A slide rail is installed between the polarization base and the lens barrel mount. The driving component is mounted on the polarization base and connected to the lens barrel mount. The lens barrel mount contains multiple polarizer barrels, and polarizers with different parameters are installed in the polarizer barrels. The driving component drives the lens barrel mount to move to transfer polarizers at different positions onto the optical path.

2. The adjustable polarization mechanism as described in claim 1, characterized in that: The slide rail consists of two crossed roller guides. A groove is provided on the bottom surface of the polarizing base. The crossed roller guides are respectively disposed on both sides of the groove. The fixed part of the crossed roller guide is fixed in the groove, and the sliding part of the crossed roller guide is connected to the lens barrel base.

3. The adjustable polarization mechanism as described in claim 1, characterized in that: The adjustable polarization mechanism further includes a filtering component, which comprises a filtering base, a filter plate, and a second driving component. A second slide rail is installed between the filtering base and the filter plate. The second driving component is mounted on the filtering base and connected to the filter plate. The filter plate has multiple lens holes, and filters with different parameters are installed in the lens holes. The second driving component drives the filter plate to move to transfer filters at different positions onto the optical path.

4. An adjustable polarization mechanism as described in claim 3, characterized in that: The second driving component is a cylinder. A mounting plate is provided at the end of the filter base, and the cylinder is mounted on the mounting plate. The cylinder is connected to the filter plate through a floating joint. A buffer is also installed on the mounting plate, and one end of the buffer abuts against the filter plate.

5. An adjustable polarization mechanism as described in claim 3, characterized in that: The top surface of the polarization base is provided with rib two and rib three, and a light-transmitting hole is provided on the polarization base between rib two and rib three; the filtering assembly also includes a light-shielding cover plate four and a light-shielding cover plate five, which are installed on the bottom surface of the filtering base and are respectively connected to rib two and rib three; the polarization assembly also includes a light-shielding cover plate, a light-shielding cover plate two and a light-shielding cover plate three, with the light-shielding cover plate installed on the upper side of the polarization base, and the light-shielding cover plate two and the light-shielding cover plate three installed on the lower side of the polarization base, and a light-transmitting hole two is provided on the light-shielding cover plate three at a position corresponding to the light-transmitting hole.

6. An optical detection device, characterized in that: It includes the adjustable polarization mechanism as described in any one of claims 1-5, and comprises a lens assembly, an adjustable polarization mechanism, and a photoelectric conversion assembly along the optical path propagation direction.

7. The optical detection device as described in claim 6, characterized in that: The lens assembly includes a lens barrel and a lens barrel adjustment device. The lens barrel adjustment device includes a fixed base, an adjustment sleeve, an elastic connector, and an adjustment member. The lens barrel is connected to the adjustment sleeve. The adjustment sleeve includes a cylinder and an end plate. The cylinder extends into the fixed base, and the end plate is located below the fixed base. An elastic connector is provided between the fixed base and the end plate, and an adjustment member is provided between the fixed base and the adjustment sleeve.

8. The optical detection device as described in claim 7, characterized in that: The elastic connector includes two rods and an elastic body located between the two rods. The rods are disposed in grooves on opposite sides of the fixed seat and the end plate, and the elastic body is located in through holes in the fixed seat and the end plate.

9. An optical detection device as described in claim 7, characterized in that: The adjusting component includes a plurality of locking screws screwed inside the fixed base, the heads of which abut against the outer wall of the cylinder.

10. An optical detection device as described in claim 6, characterized in that: An attenuation component is also provided between the adjustable polarization mechanism and the photoelectric conversion component. The attenuation component includes an attenuation component base plate, a motor, and an attenuator mounting wheel. The motor is mounted on the top surface of the attenuation component base plate, and the attenuator mounting wheel is mounted on the bottom surface of the attenuation component base plate. The drive shaft of the motor drives the attenuator mounting wheel to rotate. The attenuator mounting wheel has multiple attenuator holes, and attenuators with different parameters are installed in the attenuator holes.

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