Photomask box capable of being vertically placed
By setting support columns and slots on the photomask box and fitting a fixing cap, the problem of instability when the photomask box is placed vertically in multiple layers is solved, improving connection stability and applicability.
Patent Information
- Application Number
- CN202423243823.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2034-12-26
AI Technical Summary
The existing photomask boxes are unstable when placed vertically in multiple layers, and are prone to tipping over, which can damage the photomasks.
Support columns and slots are provided on the photomask box. The support columns can be inserted into the slots to achieve connection. The shapes of the support columns and slots are compatible, and fixing caps can be fitted to enhance the connection stability.
It improves the connection stability of the photomask box when placed vertically, reduces the probability of tipping over, and is suitable for photomask box storage needs in different application scenarios.
Smart Images
Figure CN223539106U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a photomask box that can be placed vertically. Background Technology
[0002] A photomask is an indispensable component in semiconductor device manufacturing processes. During IC fabrication, patterns are formed on semiconductors using photolithography. To replicate these patterns onto a wafer, a photomask is necessary. Also known as a mask in the industry, a photomask consists of a quartz glass substrate coated with a layer of chromium metal and photosensitive emulsion, becoming a photosensitive material.
[0003] Therefore, a photomask box is needed to hold the photomask in order to prevent the photomask from being placed in the external environment, which could cause wear and tear on the pattern on the substrate and affect subsequent photolithography processes.
[0004] Currently, most photomask boxes can only be placed horizontally, which takes up space and is very inconvenient to handle. If the photomask box is placed vertically, it will be unstable when multiple layers are placed because there are no locking slots. Accidental contact can cause it to tip over and damage the photomasks inside.
[0005] Therefore, how to reduce the instability of photomask boxes when they are placed vertically in multiple layers, and prevent accidental tipping and damage, has become a technical problem that needs to be solved by those skilled in the art. Utility Model Content
[0006] The purpose of this invention is to provide a photomask box that can be placed vertically, so as to solve the problem that the existing multi-layer vertically placed photomask boxes are unstable and easily tip over and damage the photomask due to accidental touch.
[0007] To achieve the above objectives, this utility model provides a vertically oriented light cover box, comprising: a box body;
[0008] The box has a first surface and a second surface that are arranged opposite each other in a direction perpendicular to the ground; the first surface is provided with an outwardly protruding support column, and the second surface is provided with an inwardly recessed groove that matches the support column; when two adjacent boxes are placed in a direction perpendicular to the ground, at least a portion of the support column extends into the groove to achieve connection between the two boxes.
[0009] Optionally, the cross-sectional area of the side of the support column that extends into the slot is smaller than the cross-sectional area of the side of the support column that is away from the slot, and the shape of the slot is adapted to the shape of the support column.
[0010] Optionally, the support column and the slot are frustum-shaped, and the cross-sectional area of the support column gradually increases from the side extending into the slot to the side away from the slot.
[0011] Optionally, the support column has an insertion section and a support section, the insertion section is connected to the support section, the insertion section is located close to the slot, and the support section is located away from the slot;
[0012] The insert section and at least a portion of the support section extend into the slot when the support column is connected to the slot; the cross-sectional area of the insert section is smaller than the cross-sectional area of the slot;
[0013] The outer periphery of the support column is also fitted with a fixing cap. The cross-sectional area of the extension section fitted with the fixing cap is larger than the cross-sectional area of the slot. When the extension section extends into the slot, the fixing cap is squeezed and fills the gap between the edge of the extension section and the inner wall of the slot to achieve engagement.
[0014] Optionally, the cross-sectional area of the extended section is larger than the cross-sectional area of the support section.
[0015] Optionally, the fixing cap has an opening, and the fixing cap is fitted over the outer periphery of the extended section from the opening.
[0016] Optionally, the fixing cap has a first segment and a second segment; the cross-sectional area of the first segment is adapted to the cross-sectional area of the extension segment, and the cross-sectional area of the second segment is larger than the cross-sectional area of the first segment.
[0017] Optionally, the fixing cap has an opening, and the fixing cap is fitted onto the outer periphery of the support column through the opening;
[0018] The first segment is fitted around the outer periphery of the support segment, and at least a portion of the second segment is fitted around the outer periphery of the extension segment.
[0019] Optionally, the material of the fixing cap includes: antistatic optical resin.
[0020] Optionally, the height of the support column in the direction perpendicular to the ground is greater than or equal to the depth of the slot in the direction perpendicular to the ground; the support column and the slot are respectively disposed at corresponding positions on the first surface and the second surface.
[0021] Compared with existing photomask boxes, the vertically oriented photomask box provided in this application has the following advantages:
[0022] The vertically oriented photomask box provided in this application has support columns and slots respectively set on the first and second surfaces of the box body. When adjacent boxes are placed in a direction perpendicular to the ground, the support columns can partially extend into the slots to achieve connection, thereby improving the connection stability between multiple boxes when placed vertically. At the same time, the support columns and slots are respectively set at corresponding positions on the first and second surfaces, which also allows multiple boxes to be aligned with each other and is not easy to tip over when affected by external forces.
[0023] Furthermore, by setting support columns and slots of different shapes, and fitting fixing caps of different shapes around the support columns, the photomask box can use support columns, slots and fixing caps of different shapes for different application scenarios, which can expand the scope of application of the photomask box and improve its usability.
[0024] Furthermore, the fixing cap is made of anti-static optical resin, which prevents the fixing cap from being affected by static electricity during the mutual compression with the card slot. The use of resin material also gives the fixing cap a certain degree of elasticity, allowing it to be squeezed into the card slot to achieve a snap-fit connection when the cross-sectional area is larger than the card slot. Attached Figure Description
[0025] Figure 1 A schematic diagram of the slot structure of the first type of box body provided in this embodiment of the utility model;
[0026] Figure 2 A schematic diagram of the structure of the support column of the first type of box body provided in this embodiment of the utility model;
[0027] Figure 3 This is a schematic diagram of the structure of the slot of the second type of box body provided in the embodiment of this utility model;
[0028] Figure 4 A schematic diagram of the structure of the support column of the second type of box body provided in this embodiment of the utility model;
[0029] Figure 5 This is a schematic diagram of the structure of the first type of fixing cap provided in the embodiment of this utility model;
[0030] Figure 6 This is a schematic diagram of the structure of the second type of fixing cap provided in an embodiment of the present utility model;
[0031] The explanations of the reference numerals in the accompanying drawings are as follows:
[0032] 10 - Box body; 100 - First side; 110 - Second side;
[0033] 20 - Support column; 200 - Extension section; 210 - Support section;
[0034] 30-Card slot;
[0035] 40 - Fixed cap; 400 - Open opening; 410 - First section; 420 - Second section;
[0036] X - The direction perpendicular to the ground. Detailed Implementation
[0037] To make the objectives, advantages, and features of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the objectives of the embodiments of this utility model. Furthermore, the structures shown in the drawings are often part of the actual structure. In particular, different drawings may emphasize different aspects and sometimes use different scales.
[0038] As used herein, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “distal end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Furthermore, as used in this specification, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements, and the connection, coupling, cooperation, or transmission between the two elements can be direct or indirect through an intermediate element. It should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to the side of another element, unless otherwise explicitly stated. The terms "above," "below," "top," and "bottom" generally refer to relative positional relationships arranged according to the direction of gravity; the terms "vertical" or "vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground; "horizontal" or "horizontal plane direction" generally refers to a direction parallel to the ground. Those skilled in the art can understand the specific meaning of the above terms in this specification according to the specific circumstances.
[0039] The purpose of this invention is to provide a photomask box that can be placed vertically, so as to solve the problem that the existing multi-layer vertically placed photomask boxes are unstable and easily tip over and damage the photomask due to accidental touch.
[0040] Please refer to Figures 1 to 2 This utility model provides a vertically oriented photomask box, comprising: a box body 10; the box body 10 having a first surface 100 and a second surface 110 arranged opposite each other along a direction X perpendicular to the ground; a support column 20 protruding outwardly is provided on the first surface 100, and a groove 30 recessed inwardly to fit the support column 20 is provided on the second surface 110; when two adjacent box bodies 10 are placed along a direction X perpendicular to the ground, at least a portion of the support column 20 extends into the groove 30 to achieve connection between the two box bodies 10. Those skilled in the art will understand that the box body 10 of the photomask box is typically a cuboid component, with the area of its side parallel to the ground being larger than the area of its side perpendicular to the ground. The photomask is typically placed in the photomask box along a direction parallel to the ground. In this embodiment, the first surface 100 and the second surface 110 can be understood as the top and bottom surfaces of the box body 10, and the direction X perpendicular to the ground can be understood as the direction of gravity. In this configuration, the first surface 100 can be either the top or the bottom surface, and the second surface 110 is the other surface. The support column 20 can be located on either the top or bottom surface, and correspondingly, the slot 30 can be located on either the bottom or the top surface. When a box 10 is placed perpendicular to the ground (X), the support column 20 on the upper box 10 can be inserted into the slot 30 on the lower box 10, or vice versa. With this configuration, when operators stack multiple boxes 10 perpendicular to the ground (X), they can secure adjacent boxes 10 by engaging the support column 20 with the slot 30, saving space wasted on horizontal placement and reducing the probability of tipping over when placed vertically.
[0041] Furthermore, the support column 20 and the slot 30 are preferably positioned at corresponding locations on the first surface 100 and the second surface 110. With this configuration, when multiple boxes 10 are placed along the direction X perpendicular to the ground, simply aligning the support column 20 and the slot 30 will achieve alignment of the multiple boxes 10 in the direction X perpendicular to the ground. This further improves the neatness of vertical multi-layer placement and reduces the probability of the vertically placed boxes 10 tipping over under external disturbances, thus avoiding damage to the photomask in the photomask box.
[0042] Please continue to refer to this. Figures 1 to 2The cross-sectional area of the support column 20 extending into the slot 30 is smaller than the cross-sectional area of the support column 20 away from the slot 30, and the shape of the slot 30 matches the shape of the support column 20. Furthermore, the support column 20 and the slot 30 are frustum-shaped, and the cross-sectional area of the support column 20 gradually increases from the side extending into the slot 30 to the side away from the slot 30. It should be noted that in... Figures 1 to 2 In the illustrated example, the cross-sectional shape of the support column 20 and the slot 30 along the direction X perpendicular to the ground is trapezoidal. The diameter of the side of the support column 20 that extends into the slot 30 is smaller than the diameter of the side of the support column 20 that is away from the slot 30. Correspondingly, to ensure that the support column 20 can extend into the slot 30, the diameter of the side of the slot 30 near the support column 20 is larger than the diameter of the side of the slot 30 that is away from the support column 20, so that the support column 20 can extend into the slot 30 from the side of the slot 30 near the support column 20. At the same time, the diameter of the side of the support column 20 that extends into the slot 30 matches the diameter of the side of the slot 30 that is away from the support column 20. With this configuration, the part of the support column 20 that extends into the slot 30 can engage with the slot 30 and abut against the inner wall of the slot 30, thereby providing support to the box 10 located above. In other embodiments, the support post 20 and the slot 30 may also be in other shapes, such as cylindrical, prismatic, or other irregular shapes, but all must satisfy the requirement that the cross-sectional area of the side of the support post 20 extending into the slot 30 is smaller than the cross-sectional area of the side of the support post 20 away from the slot 30. It should be noted that the cross-section mentioned herein refers to the cross-section along the direction X perpendicular to the ground.
[0043] As an optional embodiment, such as Figures 1 to 2 In the example shown, the frustum-shaped support column 20 and slot 30 do not need to be used with the fixing cap 40, which has the advantage of being easy to pick up and is suitable for short-term placement scenarios, such as short-term stacking of multiple photomask boxes containing photomasks that will be used soon, or short-term stacking of multiple photomask boxes containing photomasks that have been used up. The support column 20 and slot 30 of the above type can be used in both cases.
[0044] Optionally, the diameter of the side of the slot 30 away from the support post 20 is 5.5mm ± 0.5mm, and correspondingly, the diameter of the side of the support post 20 extending into the slot 30 is also 5.5mm ± 0.5mm. Simultaneously, the height of the support post 20 in the direction perpendicular to the ground (X) is greater than or equal to the depth of the slot 30 in the same direction. In this embodiment, the height of the support post 20 in the direction perpendicular to the ground (X) is 14mm ± 0.5mm, and the depth of the slot 30 in the same direction is 5mm ± 0.5mm. In other embodiments, the dimensions of the support post 20 and the slot 30 can also be other reasonable dimensions.
[0045] In an alternative embodiment, the operator conducted 100 repeated stability tests on photomask boxes with different vertical placement configurations, obtaining the following results: using photomask boxes in the prior art, the stability rate was only 27% when two layers were vertically placed; while using... Figures 1 to 2 The photomask box shown, when vertically arranged with 5 layers, still maintains a stability rate of 73%. Compared to existing technologies, the vertically arranged photomask box provided in this embodiment exhibits significantly improved performance. Figure 1 and Figure 2 The stability of the photomask array shown decreases significantly when more than five layers are vertically arranged. Therefore, experiments have proven that using... Figure 1 and Figure 2 The photomask box shown is suitable for applications involving small quantities and short-term placement.
[0046] In another embodiment, please refer to Figures 3 to 6 The support column 20 has an insertion section 200 and a support section 210. The insertion section 200 is connected to the support section 210. The insertion section 200 is located near the slot 30, and the support section 210 is located away from the slot 30. The insertion section 200 and at least part of the support section 210 extend into the slot 30 when the support column 20 is connected to the slot 30. The cross-sectional area of the insertion section 200 is smaller than the cross-sectional area of the slot 30. A fixing cap 40 is also fitted around the outer periphery of the support column 20. The cross-sectional area of the insertion section 200 fitted with the fixing cap 40 is larger than the cross-sectional area of the slot 30. When the insertion section 200 extends into the slot 30, the fixing cap 40 is compressed and fills the gap between the edge of the insertion section 200 and the inner wall of the slot 30 to achieve engagement. It should be noted that in Figures 3 to 4 In the illustrated example, the support column 20 is a columnar member with a variable diameter structure, comprising an insertion section 200 and a support section 210, wherein the cross-sectional area of the insertion section 200 is larger than that of the support section 210. Correspondingly, the slot 30 is a cylindrical cavity, and the diameter of the insertion section 200 is smaller than the diameter of the slot 30. Therefore, in this embodiment, simply inserting the support column 20 into the slot 30 is insufficient to meet the fixing requirements, and additional components are needed. Figures 5 to 6 The fixing cap 40 shown is used. The fixing cap 40 is sleeved on the outer periphery of the support column 20 from the extension section 200. The diameter of the extension section 200 on which the fixing cap 40 is sleeved is slightly larger than the diameter of the groove 30. Therefore, during the process of the support column 20 extending into the groove 30, the fixing cap 40 is squeezed and deformed by the groove 30, and after being squeezed into the groove 30, it fills the gap between the extension section 200 and the inner wall of the groove 30. A certain frictional force is formed between the fixing cap 40 and the inner wall of the groove 30, thereby achieving the locking effect.
[0047] As an optional embodiment, the fixing cap 40 is made of antistatic optical resin. Those skilled in the art will understand that antistatic optical resin is a transparent, permanent antistatic coating developed using carbon nanotubes as conductive fillers. This coating is precisely applied to the surface of the optical resin to form an antistatic material that possesses antistatic properties, is unaffected by external environmental factors, has a long and stable lifespan, and is scratch-resistant. It also has a certain degree of ductility and can undergo some deformation. Of course, in some other embodiments, the fixing cap 40 can be made of other materials with the same properties; this embodiment does not limit this.
[0048] Please refer to Figures 3 to 5 The fixing cap 40 has an opening 400, and the fixing cap 40 is fitted over the outer periphery of the extending section 200 from the opening 400. It should be noted that... Figures 3 to 4 In this design, the diameter of the slot 30 is 10mm ± 0.5mm, and the depth of the slot 30 in the direction X perpendicular to the ground is 5mm ± 0.5mm; the diameter of the extension section 200 is 9mm ± 0.5mm, and the height of the extension section 200 in the direction X perpendicular to the ground is 2mm ± 0.5mm; the diameter of the support section 210 is 6mm ± 0.5mm, and the height of the support column 20 in the direction X perpendicular to the ground is 14mm ± 0.5mm. Figure 5 In the illustrated example, the fixing cap 40 is ellipsoidal, and the opening 400 is formed on the surface of the ellipsoid, such that one side of the ellipsoid is flat. Figure 5 In the left-hand view, the major axis length of the fixing cap 40 is 11mm ± 0.5mm, and the maximum height of the fixing cap 40 along the X direction perpendicular to the ground is 4mm ± 0.5mm; Figure 5 In the view on the right, the opening 400 of the fixing cap 40 has a size of 8.5mm ± 0.5mm. Based on this, during the process of fitting the fixing cap 40 onto the support column 20, the opening 400 needs to be opened first, and the extension section 200 is fitted onto the support column 20, with the fixing cap 40 covering the extension section 200 and part of the support section 210.
[0049] In an alternative embodiment, such as Figures 3 to 5 In the illustrated example, the ellipsoidal fixing cap 40 is used in conjunction with the variable-diameter support column 20. The fixing cap 40 has a loose contact with the cylindrical slot 30, making it easy to remove and suitable for short-term placement. Compared to... Figures 1 to 2 The frustum-shaped support column 20 and slot 30 shown in the figure have a better fixing effect when placed in this embodiment.
[0050] Operators conducted 100 repeated stability tests on photomask boxes with different vertical placement configurations, obtaining the following results: Using existing photomask boxes, when two layers are vertically placed, the stability rate is only 27%; while using... Figures 3 to 5The photomask box and fixing cap 40 shown maintain a stability rate of 98% even when six layers are vertically arranged. Therefore, testing has proven that using... Figures 3 to 5 The photomask box and fixing cap 40 shown are suitable for applications involving a large number of short-term placements.
[0051] Please refer to Figures 3 to 4 as well as Figure 6 The fixing cap 40 has a first section 410 and a second section 420; the cross-sectional area of the first section 410 is adapted to the cross-sectional area of the extending section 200, and the cross-sectional area of the second section 420 is larger than the cross-sectional area of the first section 410. Figure 6 In the illustrated example, the fixing cap 40 has a variable diameter structure adapted to the support column 20. Figure 6 In the left-hand view, the diameter of the first segment 410 of the fixing cap 40 is 9mm ± 0.5mm, the diameter of the second segment 420 of the fixing cap 40 is 14.5mm ± 0.5mm, the height of the first segment 410 of the fixing cap 40 along the direction X perpendicular to the ground is 4.5mm ± 0.5mm, and the height of the second segment 420 of the fixing cap 40 along the direction X perpendicular to the ground is 2.5mm ± 0.5mm; Figure 6 In the right-hand view, the diameter of the opening 400 of the fixing cap 40 is 8.5 mm ± 0.5 mm. In this embodiment, the opening 400 of the fixing cap 40 is located on the first segment 410. Therefore, during the process of fitting the fixing cap 40 onto the support column 20, the opening 400 needs to be opened first, and then fitted onto the support column 20 from the insertion segment 200. The first segment 410 fits around the outer periphery of the support segment 210, and the second segment 420 fits around the outer periphery of the insertion segment 200 and part of the outer periphery of the support segment 210. Since the diameter of the second segment 420 differs significantly from the diameter of the slot 30, during use... Figure 6 The fixing cap 40 shown extends into the slot 30 and can provide greater support.
[0052] Optional, such as Figures 3 to 4 as well as Figure 6 In the illustrated example, the fixing cap 40 with a variable diameter structure is used in conjunction with the support column 20 with a variable diameter configuration. The fixing cap 40 makes tight contact with the slot 30, making it suitable for long-term placement, and compared to... Figures 1 to 2 The frustum-shaped support column 20 and the slot 30 shown in the figure, and Figures 3 to 5 The photomask box and ellipsoidal fixing cap 40 shown in the figure have a better fixing effect when placed in this embodiment.
[0053] Operators conducted 100 repeated stability tests on photomask boxes with different vertical placement configurations, obtaining the following results: Using existing photomask boxes, when two layers are vertically placed, the stability rate is only 27%; while using... Figures 3 to 4 as well as Figure 6 The photomask box and fixing cap 40 shown maintain a stability rate of 94% even when nine layers are vertically arranged. Therefore, experiments have proven that using... Figures 3 to 4 as well as Figure 6 The photomask box and fixing cap 40 shown are suitable for applications requiring long-term placement.
[0054] In another alternative embodiment, the above placement methods can also be used in combination, for example, when placing at the bottom layer... Figures 3 to 4 as well as Figure 6 The light mask box and fixing cap 40 shown enhance the fixing effect; and when placed on the top layer, they are used... Figures 1 to 2 The photomask box shown, or using Figures 3 to 5 The photomask box and fixing cap 40 shown are for easy handling. The operator conducted 100 repeated stability tests on the photomask boxes using different vertical placement configurations, obtaining the following results: When vertically placed in the bottom 4 layers, using... Figures 3 to 4 as well as Figure 6 The photomask box and fixing cap 40 shown are used when other layers are placed vertically, such as Figures 3 to 5 The photomask box and fixing cap 40 shown maintain a stability rate of 89% even when the total number of layers reaches 8. Therefore, experiments have proven that a mixed-use arrangement can be used to store photomasks that are not urgently needed, such as... Figures 3 to 4 as well as Figure 6 The light mask boxes shown are placed at the bottom layer for long-term storage; those that need to be used as soon as possible are placed using... Figures 3 to 5 The arrangement shown allows for short-term storage and easy access.
[0055] With this configuration, by setting support columns 20 and slots 30 of different shapes, and by fitting fixing caps 40 of different shapes around the support columns 20, the photomask box can use support columns 20, slots 30 and fixing caps 40 of different shapes for different application scenarios, thereby expanding the scope of application of the photomask box and improving its usability.
[0056] In summary, the vertically oriented photomask box provided in this embodiment of the present invention includes: a box body; the box body has a first surface and a second surface arranged opposite to each other in a direction perpendicular to the ground; an outwardly protruding support column is provided on the first surface, and an inwardly recessed slot adapted to the support column is provided on the second surface; when two adjacent boxes are placed in a direction perpendicular to the ground, at least a portion of the support column extends into the slot to achieve connection between the two boxes.
[0057] This configuration, with support columns and slots respectively set on the first and second surfaces of the box, allows the support columns to partially extend into the slots when adjacent boxes are placed perpendicular to the ground, thus connecting them and improving the stability of the connection between multiple boxes when placed vertically. At the same time, the support columns and slots are set at corresponding positions on the first and second surfaces, which also allows multiple boxes to be aligned with each other, making them less likely to tip over when subjected to external forces.
[0058] Furthermore, by setting support columns and slots of different shapes, and fitting fixing caps of different shapes around the support columns, the photomask box can use support columns, slots and fixing caps of different shapes for different application scenarios, which can expand the scope of application of the photomask box and improve its usability.
[0059] Furthermore, the fixing cap is made of anti-static optical resin, which prevents the fixing cap from being affected by static electricity during the mutual compression with the card slot. The use of resin material also gives the fixing cap a certain degree of elasticity, allowing it to be squeezed into the card slot to achieve a snap-fit connection when the cross-sectional area is larger than the card slot.
[0060] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.
Claims
1. A photomask box that can be placed vertically, characterized in that, include: Box body; The box has a first surface and a second surface that are arranged opposite each other in a direction perpendicular to the ground; the first surface is provided with an outwardly protruding support column, and the second surface is provided with an inwardly recessed groove that matches the support column; when two adjacent boxes are placed in a direction perpendicular to the ground, at least a portion of the support column extends into the groove to achieve connection between the two boxes.
2. The vertically oriented photomask box as described in claim 1, characterized in that, The cross-sectional area of the side of the support column that extends into the slot is smaller than the cross-sectional area of the side of the support column that is away from the slot, and the shape of the slot is adapted to the shape of the support column.
3. The vertically oriented photomask box as described in claim 2, characterized in that, The support column and the slot are frustum-shaped, and the cross-sectional area of the support column gradually increases from the side extending into the slot to the side away from the slot.
4. The vertically oriented photomask box as described in claim 1, characterized in that, The support column has an extension section and a support section, the extension section is connected to the support section, the extension section is located close to the slot, and the support section is located away from the slot; The insert section and at least a portion of the support section extend into the slot when the support column is connected to the slot; the cross-sectional area of the insert section is smaller than the cross-sectional area of the slot; The outer periphery of the support column is also fitted with a fixing cap. The cross-sectional area of the extension section fitted with the fixing cap is larger than the cross-sectional area of the slot. When the extension section extends into the slot, the fixing cap is squeezed and fills the gap between the edge of the extension section and the inner wall of the slot to achieve engagement.
5. The vertically oriented photomask box as described in claim 4, characterized in that, The cross-sectional area of the extended section is larger than the cross-sectional area of the support section.
6. The vertically oriented photomask box as described in claim 4, characterized in that, The fixing cap has an opening, and the fixing cap is fitted over the outer periphery of the extended section from the opening.
7. The vertically oriented photomask box as described in claim 4, characterized in that, The fixing cap has a first section and a second section; the cross-sectional area of the first section is adapted to the cross-sectional area of the extension section, and the cross-sectional area of the second section is larger than the cross-sectional area of the first section.
8. The vertically oriented photomask box as described in claim 7, characterized in that, The fixing cap has an opening, and the fixing cap is fitted onto the outer periphery of the support column through the opening; The first segment is fitted around the outer periphery of the support segment, and at least a portion of the second segment is fitted around the outer periphery of the extension segment.
9. The vertically oriented photomask box as described in claim 4, characterized in that, The material of the fixing cap includes: antistatic optical resin.
10. The vertically oriented photomask box as described in claim 2 or 4, characterized in that, The height of the support column in the direction perpendicular to the ground is greater than or equal to the depth of the slot in the direction perpendicular to the ground; the support column and the slot are respectively disposed at corresponding positions on the first surface and the second surface.