HVPE-GaN tail gas filtering treatment device and multistage HVPE-GaN tail gas filtering treatment equipment

Abstract

The utility model provides an HVPE-GaN tail gas filtration treatment device and multistage HVPE-GaN tail gas filtration treatment equipment, which comprises a condensation tank, the side surface of the condensation tank is communicated with a gas outlet, the top of the condensation tank is fixedly provided with a condensation flow guide pipe communicated with the inner cavity of the condensation tank, the peripheral side of the condensation flow guide pipe is fixedly provided with a filtration piece, and the filtration piece is fixedly provided with a gas outlet. The filter part is located at the top end of an inner cavity of the condensation tank, a partition plate is arranged at the bottom of the filter part, one end of the partition plate is fixedly connected with the inner side wall of the condensation tank, a second filter screen is fixedly arranged in the condensation tank and located at the lower end of the partition plate, and a dust collecting barrel is fixedly arranged in the condensation tank and located at the lower end of the second filter screen. The device is simple in structure and convenient to use, a large number of NH4Cl particles can be filtered and intercepted, the NH4Cl particles do not block or corrode an exhaust pipeline any more, and the service life of the device is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, specifically to an HVPE-GaN exhaust gas filtration treatment device and a multi-stage HVPE-GaN exhaust gas filtration treatment equipment. Background Technology

[0002] HVPE (Hydride Vapor Phase Epitaxy) is a chemical vapor deposition process developed based on vapor phase epitaxy (VPE). In the HVPE process, group III nitrides (such as GaN, AlN) are formed by the reaction of hot gaseous metal chlorides (such as GaCl or AlCl) with ammonia, while the metal chlorides are generated by hot HCl gas passing through hot group III metals. All reactions are carried out in a temperature-controlled quartz furnace.

[0003] In practice, it has been found that existing HVPE systems not only suffer from parasitic deposition of polycrystalline GaN during GaN growth, affecting the lifespan of quartz components, but also exhibit significant drawbacks. Furthermore, residual HCl readily reacts with NH3 to form the byproduct NH4Cl, which crystallizes at the reactor's low temperature into a white or slightly yellow powdery or granular solid. This NH4Cl easily accumulates in the pipes during growth, readily absorbing moisture, thus clogging and corroding the pipes, reducing equipment lifespan, affecting gas flow within the reactor, disrupting airflow distribution, and ultimately impacting the quality and efficiency of GaN crystal preparation. Therefore, it is necessary to separate the NH4Cl powder generated during the growth process from the equipment to the outside environment to prevent it from affecting GaN crystal preparation.

[0004] Therefore, we propose an HVPE-GaN exhaust gas filtration treatment device and a multi-stage HVPE-GaN exhaust gas filtration treatment equipment. Utility Model Content

[0005] The purpose of this invention is to provide an HVPE-GaN exhaust gas filtration treatment device and a multi-stage HVPE-GaN exhaust gas filtration treatment equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] In a first aspect, this utility model provides an HVPE-GaN exhaust gas filtration and treatment device, including a condenser tank, an outlet connected to the side of the condenser tank, a condensation guide pipe fixedly provided at the top of the condenser tank and communicating with the inner cavity of the condenser tank, a filter element fixedly provided on the outer periphery of the condensation guide pipe, the filter element being located at the top of the inner cavity of the condenser tank, a partition plate provided at the bottom of the filter element, one end of the partition plate being fixedly connected to the inner wall of the condenser tank, a second filter screen fixedly provided inside the condenser tank and at the lower end of the partition plate, and a dust collection bucket fixedly provided inside the condenser tank and at the lower end of the second filter screen.

[0008] Furthermore, the condenser tank includes, from top to bottom, an upper condenser cover, a condenser tank body, and a lower condenser cover. A rubber ring is provided between the upper condenser cover and the condenser tank body, and a rubber ring is provided between the lower condenser cover and the condenser tank body.

[0009] Furthermore, the air outlet is located on the side of the condenser tank, and a support is fixedly provided at the lower end of the condenser tank, which has a funnel-shaped structure.

[0010] Furthermore, the center of the condenser cover is provided with an air inlet, and the condenser guide pipe passes through the air inlet and communicates with the inner cavity of the condenser tank.

[0011] Furthermore, the condenser top cover, condenser tank body, and condenser bottom cover all adopt a hollow double-wall structure, and the hollow double-wall structure forms a water-cooling channel. The outer wall of the water-cooling channel of the condenser top cover, condenser tank body, and condenser bottom cover is provided with at least one water inlet and at least one water outlet.

[0012] Furthermore, the filter element includes a first filter screen and a filter core, the first filter screen being disposed on both sides of the filter core, and the first filter screen having micron-sized filter pores.

[0013] Furthermore, a condensation guide plate is fixedly provided between the filter element and the air outlet. The condensation guide plate is located at the top of the inner cavity of the condensation tank. The end of the condensation guide plate away from the condensation tank is fixedly connected to the partition. The structure of the condensation guide plate is a semi-circular arc structure, and the semi-circular arc concave surface of the condensation guide plate is opposite to the air outlet direction.

[0014] Furthermore, a condensation guide tube is fixedly connected to the end of the partition away from the condenser tank and above the second filter screen. The condensation guide tube has a conical structure and is provided with a dust inlet and a dust outlet. The dust inlet is located at the bottom of the conical structure, and the dust outlet is located at the top of the conical structure. The end of the condensation guide tube with the dust outlet faces the second filter screen.

[0015] Furthermore, the second filter screen has a structure with flat edges and an upward convex center. The center is conical. The flat part of the second filter screen has millimeter-level filter holes, and the edges of the millimeter-level filter holes have conical chamfers. The conical end of the conical chamfer faces the dust collection bin.

[0016] Secondly, this utility model provides a multi-stage HVPE-GaN exhaust gas filtration and treatment device, including the HVPE-GaN exhaust gas filtration and treatment device as described in the first aspect, wherein the multi-stage HVPE-GaN exhaust gas filtration and treatment device is composed of at least two HVPE-GaN exhaust gas filtration and treatment devices connected in series.

[0017] Compared with the prior art, the present invention has the following technical effects:

[0018] In this invention, the exhaust gas generated by the GaN crystal growth equipment is treated by this equipment. A large amount of NH4Cl particles generated by the reaction of HCl and NH3 gases in the exhaust gas, as well as NH4Cl particles generated during the GaN production process, self-precipitate. The NH4Cl particles are filtered and intercepted by this equipment and deposited into the dust collection bin, achieving a dust removal effect. This prevents NH4Cl particles from clogging and corroding the exhaust pipes, greatly improving the service life of the equipment, extending the maintenance cycle, reducing the maintenance frequency, and protecting subsequent equipment. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the HVPE-GaN exhaust gas filtration and treatment device according to an embodiment of the present invention;

[0020] Figure 2 This is a cross-sectional schematic diagram of the HVPE-GaN exhaust gas filtration treatment device according to an embodiment of the present invention;

[0021] Figure 3 This is a top view of the second filter screen according to an embodiment of the present utility model;

[0022] Figure 4 This is a cross-sectional schematic diagram of the second filter screen according to an embodiment of the present utility model;

[0023] Figure 5 This is a schematic diagram of the sealing between the lower condenser cover and the condenser tank body according to an embodiment of the present invention;

[0024] Figure 6 This is a cross-sectional schematic diagram of the filter element according to an embodiment of the present utility model;

[0025] Figure 7 This is a cross-sectional schematic diagram of the condenser cover according to an embodiment of the present utility model;

[0026] Figure 8 This is a top view of the condenser cover according to an embodiment of the present utility model;

[0027] Figure 9 This is a cross-sectional schematic diagram of the condenser tank according to an embodiment of the present utility model;

[0028] Figure 10 This is a top view of the condenser tank according to an embodiment of the present invention;

[0029] Figure 11 This is a cross-sectional schematic diagram of the condenser cover according to an embodiment of the present utility model;

[0030] Figure 12 This is a top view of the condenser cover according to an embodiment of the present utility model;

[0031] Figure 13 This is a schematic diagram of the HVPE-GaN exhaust gas filtration and treatment device connected in series according to an embodiment of this utility model.

[0032] Explanation of reference numerals in the attached drawings: 1. Condensation guide pipe; 2. Filter element; 211. First filter screen; 212. Filter core; 3. Condensation guide plate; 4. Baffle; 5. Condensation guide cylinder; 6. Second filter screen; 7. Dust collection bucket; 8. Lower condenser cover; 9. Condensation tank; 10. Upper condenser cover; 11. Air inlet; 12. Air outlet; 13. Support; 14. Exhaust gas; 15. NH4Cl particulate matter; 16. Water inlet of upper condenser cover; 17. Water outlet of upper condenser cover; 18. Water inlet of condenser tank; 19. Water outlet of condenser tank; 20. Water inlet of lower condenser cover; 21. Water outlet of lower condenser cover; 22. Rubber ring. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Example 1

[0035] Please see Figures 1 to 12This embodiment provides an HVPE-GaN exhaust gas filtration treatment device, including a condenser tank, which is cylindrical in shape. The condenser tank, from top to bottom, includes a condenser top cover 10, a condenser tank body 9, and a condenser bottom cover 8. An outlet 12 is connected to the side of the condenser tank body 9. An inlet 11 is opened at the center of the condenser top cover 10. A condenser guide pipe 1, which is cylindrical in shape, is fixed inside the inlet 11. The condenser guide pipe 1 passes through the inlet 11 and communicates with the inner cavity of the condenser tank. A filter element 2 is fixed to the outside of the condenser guide pipe 1, extending to the lower end of the filter element 2. One end of the filter element 2 is in contact with the condenser cover 10, and the end of the filter element 2 away from the condenser cover 10 is fixedly connected to the partition 4. The partition 4 is located on the inner wall of the condenser tank 9. The end of the partition 4 away from the condenser tank 9 is fixedly connected to the condenser guide tube 5. The condenser guide tube 5 is provided with a dust inlet and a dust outlet. A second filter screen 6 is fixedly provided inside the condenser tank 9 and at the lower end of the condenser guide tube 5. A dust collection bucket 7 is fixedly provided inside the condenser tank 9 and at the lower end of the second filter screen 6.

[0036] During operation, the exhaust gas 14 generated by the GaN crystal growth equipment enters the inner cavity of the condenser tank through the condenser guide pipe 1. As the exhaust gas 14 flows through the condenser guide pipe 1, the NH4Cl particles 15 generated by the reaction of HCl and NH3 gases in the exhaust gas 14 condense. When the exhaust gas 14 passes through the filter element 2, the NH4Cl particles 15 cannot pass through the filter element 2 and flow downwards through the condenser guide cylinder 5, falling into the dust collection bin 7 after passing through the second filter screen 6. After being treated by this equipment, a large amount of the NH4Cl particles 15 generated by the reaction of HCl and NH3 gases in the exhaust gas 14, as well as the NH4Cl particles 15 generated during GaN production, self-precipitate. The NH4Cl particles 15 are filtered and intercepted by this equipment and deposited in the dust collection bin 7, achieving a dust removal effect. This prevents the NH4Cl particles 15 from clogging and corroding the exhaust pipes, greatly improving the service life of the equipment, extending the maintenance cycle, reducing the maintenance frequency, and protecting downstream equipment.

[0037] Specifically, a rubber ring 22 is provided between the condenser top cover 10 and the condenser tank body 9, and a rubber ring 22 is provided between the condenser bottom cover 8 and the condenser tank body 9. The rubber ring 22 can be made of fluororubber or Teflon gasket. The rubber ring 22 can effectively prevent the intrusion of external media (such as air, dust, moisture, etc.) and ensure the stability of the internal environment of the condenser tank.

[0038] Specifically, the lower end of the condenser tank 9 has a funnel-shaped structure, which facilitates the collection of NH4Cl particles 15. In addition, the lower end of the condenser tank 9 is detachably connected to a fixed support 13, which provides support for this filtration device.

[0039] Specifically, the condenser cover 10, condenser tank 9, and condenser cover 8 all adopt a hollow double-wall structure, forming a water-cooling channel between the hollow double-wall structures. The outer wall of the water-cooling channel of the condenser cover 10, condenser tank 9, and condenser cover 8 is provided with at least one inlet and at least one outlet. In this embodiment, the condenser cover 10 has a condenser cover inlet 16 and a condenser cover outlet 17; the condenser tank 9 has a condenser tank inlet 18 and a condenser tank outlet 19; and the condenser cover 8 has a condenser cover inlet 20 and a condenser cover outlet 21. Cooling circulating water is introduced into the water-cooling channel through the condenser cover 10, condenser tank 9, and condenser cover 8 through their respective inlets to cool the entire condenser tank, maintaining the reaction environment inside the condenser tank and allowing the HCl gas and NH3 gas in the exhaust gas 14 to react and produce NH4Cl particles 15.

[0040] Specifically, the filter element 2 is cylindrical in shape and includes a first filter screen 211 and a filter element 212. The first filter screen 211 is disposed on both sides of the filter element 212, and the first filter screen 211 has micron-sized filter pores. These micron-sized filter pores do not allow NH4Cl particles 15 to pass through, but allow other components of the exhaust gas 14 to pass through. The filter element 212 can be a stainless steel filter element, such as a metal wire mesh filter element, a sintered felt filter element, or a wedge-shaped filter element. It can also be a polytetrafluoroethylene filter element or a polypropylene pleated filter element. The manufacturing material of the filter element 212 is not fixed and can be made of metal or organic materials. The filter element 2 mainly filters out the NH4Cl particles 15 in the exhaust gas 14, causing the NH4Cl particles 15 to deposit in the dust collection bin 7.

[0041] Specifically, a condenser guide plate 3 is fixedly installed between the filter element 2 and the air outlet 12. One end of the condenser guide plate 3 is in contact with the condenser cover 10, and the other end of the condenser guide plate 3 away from the condenser cover 10 is fixedly connected to the partition 4. The structure of the condenser guide plate 3 is a semi-circular arc structure. The semi-circular arc concave surface of the condenser guide plate 3 is opposite to the air outlet 12. When the exhaust gas 14 flows through the filter element 2 and flows towards the air outlet 12, the condenser guide plate 3 provides a buffer for the exhaust gas 14, making the exhaust gas 14 flow evenly. In addition, the exhaust gas 14 flowing through the filter element 2 also contains extremely low concentrations of HCl gas and NH3 gas. The HCl gas and NH3 gas react to generate NH4Cl particles 15. When the NH4Cl particles 15 flow through the condenser guide plate 3, they condense and fall onto the partition 4. The condenser guide plate 3 further filters the exhaust gas 14, preventing the exhaust gas 14 from being directly discharged from the air outlet 12 and improving the filtration effect.

[0042] Specifically, the exhaust gas 14 flows through the condenser guide pipe 1 and the condenser guide cylinder 5, and then through the filter element 2. Almost all of the NH4Cl particles 15 generated during the GaN production process, which react with the HCl and NH3 gases in the exhaust gas 14, are condensed and deposited within the filter element 2. The exhaust gas 14 flowing outside the filter element 2 still contains extremely low concentrations of HCl and NH3 gases, which are negligible. Similarly, the extremely low concentration of NH4Cl particles 15 generated by these HCl and NH3 gases is also negligible. However, if the device is used long-term, these extremely low concentrations of NH4Cl particles 15 will be deposited on the baffle plate 4 after condensation and guidance by the condenser guide plate 3. These NH4Cl particles 15 can be appropriately cleaned during NH4Cl particle 15 recovery.

[0043] Specifically, the condenser guide tube 5 has a conical structure. This conical structure helps reduce turbulence and eddies within the NH4Cl particles 15, improving the uniformity and stability of their flow. The condenser guide tube 5 is equipped with a dust inlet and a dust outlet. The dust inlet is located at the bottom of the conical structure, and the dust outlet is located at the top. The end of the condenser guide tube 5 with the dust outlet faces the second filter screen 6. During operation, the exhaust gas 14 flowing from the condenser guide tube 1 condenses the NH4Cl particles 15 generated by the reaction of HCl and NH3 gases as it passes through the condenser guide tube 5. The condenser guide tube 5 guides the condensed NH4Cl particles 15, which then fall onto the second filter screen 6.

[0044] Specifically, the second filter screen 6 has a flat perimeter and a conical center. This design guides the NH4Cl particles 15 flowing out of the condenser guide tube 5, allowing them to slide down the conical slope to the millimeter-sized filter holes. The center of the second filter screen 6 faces the condenser guide tube 5, and the flat bottom of the second filter screen 6 has millimeter-sized filter holes that allow the NH4Cl particles 15 to pass through. During operation, the NH4Cl particles 15 fall onto the conical slope of the conical structure, then slide down the conical slope to the millimeter-sized filter holes and fall into the dust collection bin 7.

[0045] Specifically, the second filter 6 above the dust collection bin 7 effectively prevents NH4Cl particles 15 from being drawn back into the furnace chamber from the dust collection bin 7. The edges of the millimeter-level filter holes are provided with a tapered chamfer, which faces the dust collection bin 7, further preventing NH4Cl particles 15 from being drawn back into the furnace chamber from the dust collection bin 7.

[0046] Specifically, the condenser guide pipe 1, the condenser guide plate 3, and the condenser guide cylinder 5 all have two functions: condensation and flow guidance. When the exhaust gas 14 flows through the condenser guide pipe 1, the condenser guide plate 3, and the condenser guide cylinder 5, the NH4Cl particles 15 generated by the reaction of HCl gas and NH3 gas in the exhaust gas 14, as well as the NH4Cl particles 15 generated during the GaN production process, are condensed. Then, the condenser guide pipe 1, the condenser guide plate 3, and the condenser guide cylinder 5 guide the condensed NH4Cl particles 15.

[0047] Specifically, all components of this device are detachable, making it easy for staff to clean after long-term use. Furthermore, if a part of the device malfunctions, it is convenient for staff to maintain and repair it without replacing the entire device, which reduces maintenance costs and extends the overall service life of the equipment.

[0048] Specifically, elastic rubber rings are placed at the gaps between the various components inside the device to prevent the leakage of NH4Cl particulate matter 15 and exhaust gas 14, as well as the entry of air.

[0049] Specifically, all components of this device, except for the filter element 212 and the rubber ring 22, can be made of stainless steel. Stainless steel has high corrosion resistance to NH4Cl particles 15, and the equipment manufactured can be used for a long time.

[0050] Specifically, the working principle of this utility model is as follows: When the exhaust gas 14 generated by the GaN crystal growth equipment flows through the condenser guide pipe 1 and the condenser guide cylinder 5, the NH4Cl particles 15 generated by the reaction of HCl gas and NH3 gas in the exhaust gas 14, as well as the NH4Cl particles 15 generated during the GaN production process, are condensed. When the exhaust gas 14 passes through the filter element 2, the NH4Cl particles 15 cannot pass through the filter element 2. The NH4Cl particles 15 flow downward through the condenser guide cylinder 5, fall into the dust collection bucket 7 after passing through the second filter screen 6, and the exhaust gas 14 after being filtered by the filter element 2 flows to the outlet 12 after being buffered by the condenser guide plate 3, and then flows to the subsequent device. After the device is used, the lower cover 8 of the condenser tank is opened and the dust collection bucket 7 is taken out for cleaning.

[0051] Example 2

[0052] This embodiment provides a multi-stage HVPE-GaN exhaust gas filtration treatment device, which adopts the HVPE-GaN exhaust gas filtration treatment device as described in Embodiment 1.

[0053] Please see Figure 13 To enhance the filtration effect on exhaust gas 14, at least two HVPE-GaN exhaust gas filtration treatment devices can be connected in series through pipelines to form a multi-stage HVPE-GaN exhaust gas filtration treatment equipment.

[0054] When two HVPE-GaN exhaust gas filtration devices are connected in series through a pipeline, the beginning of the pipeline is connected to the outlet 12 of the preceding HVPE-GaN exhaust gas filtration device, and the end of the pipeline is connected to the condenser guide pipe 1 of the following HVPE-GaN exhaust gas filtration device.

[0055] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An HVPE-GaN exhaust gas filtration and treatment device, characterized in that, The condenser includes a condenser tank with an air outlet (12) connected to its side. A condenser guide pipe (1) connected to the inner cavity of the condenser tank is fixedly provided on the top of the condenser tank. A filter element (2) is fixedly provided on the outer periphery of the condenser guide pipe (1). The filter element (2) is located at the top of the inner cavity of the condenser tank. A partition (4) is provided at the bottom of the filter element (2). One end of the partition (4) is fixedly connected to the inner wall of the condenser tank. A second filter screen (6) is fixedly provided inside the condenser tank and at the lower end of the partition (4). A dust collection bucket (7) is fixedly provided inside the condenser tank and at the lower end of the second filter screen (6).

2. The HVPE-GaN tail gas filtration and treatment device according to claim 1, characterized in that, The condenser includes, from top to bottom, a condenser top cover (10), a condenser body (9), and a condenser bottom cover (8). A rubber ring (22) is provided between the condenser top cover (10) and the condenser body (9), and a rubber ring (22) is provided between the condenser bottom cover (8) and the condenser body (9).

3. The HVPE-GaN tail gas filtration and treatment device according to claim 2, characterized in that, The air outlet (12) is located on the side of the condenser tank (9), and a support (13) is fixedly provided at the lower end of the condenser tank (9). The lower end of the condenser tank (9) has a funnel-shaped structure.

4. The HVPE-GaN tail gas filtration and treatment device according to claim 2, characterized in that, The condenser cover (10) has an air inlet (11) at its center, and the condenser guide pipe (1) passes through the air inlet (11) and communicates with the inner cavity of the condenser tank.

5. The HVPE-GaN exhaust gas filtration and treatment device according to claim 2, characterized in that, The condenser cover (10), condenser tank (9) and condenser cover (8) all adopt a hollow double-wall structure, and the hollow double-wall structure forms a water cooling channel. The outer wall of the water cooling channel of the condenser cover (10), condenser tank (9) and condenser cover (8) is provided with at least one water inlet and at least one water outlet.

6. The HVPE-GaN tail gas filtration and treatment device according to claim 1, characterized in that, The filter element (2) includes a first filter screen (211) and a filter core (212). The first filter screen (211) is located on both sides of the filter core (212), and the first filter screen (211) has micron-sized filter holes.

7. The HVPE-GaN exhaust gas filtration and treatment device according to claim 1, characterized in that, A condenser guide plate (3) is fixedly provided between the filter element (2) and the air outlet (12). The condenser guide plate (3) is located at the top of the inner cavity of the condenser tank. The end of the condenser guide plate (3) away from the condenser tank is fixedly connected to the partition plate (4). The structure of the condenser guide plate (3) is a semi-circular arc structure. The semi-circular arc concave surface of the condenser guide plate (3) is opposite to the air outlet (12) air outlet direction.

8. The HVPE-GaN tail gas filtration and treatment device according to claim 1, characterized in that, The partition (4) is fixedly connected to a condensation guide tube (5) at the end away from the condenser tank and at the upper end of the second filter screen (6). The condensation guide tube (5) has a conical structure and is provided with a dust inlet and a dust outlet. The dust inlet is located at the bottom of the conical structure and the dust outlet is located at the top of the conical structure. The end of the condensation guide tube (5) with the dust outlet faces the second filter screen (6).

9. The HVPE-GaN tail gas filtration and treatment device according to claim 1, characterized in that, The second filter screen (6) has a flat structure on all sides and an upward convex center. The center is conical. The flat structure of the second filter screen (6) has millimeter-level filter holes. The edges of the millimeter-level filter holes have conical chamfers. The conical end of the conical chamfer faces the dust collection bucket (7).

10. A multi-stage HVPE-GaN exhaust gas filtration and treatment device, comprising the HVPE-GaN exhaust gas filtration and treatment apparatus as described in any one of claims 1-9, characterized in that, The multi-stage HVPE-GaN exhaust gas filtration and treatment equipment consists of at least two HVPE-GaN exhaust gas filtration and treatment devices connected in series.

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