Automatic feeding device for flat parts and machining equipment

By setting an elastic limiting device on the loading and unloading platform, the problem of position deviation during the suction process of the adsorption head is solved, achieving accurate positioning and efficient loading of glass substrates, avoiding positional deviation and damage, and improving work efficiency.

CN223547239UActive Publication Date: 2025-11-14BEIJING TESIDI SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202423236445.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-27
Publication Date
2025-11-14
Estimated Expiration
2034-12-27

AI Technical Summary

Technical Problem

During the processing of glass substrates, the suction head is prone to positional deviation during the suction process, which causes the glass substrate to shift in position in the next process. This requires manual calibration, which is time-consuming and labor-intensive, and may even damage the glass substrate.

Method used

An elastic limiting device is used to limit the glass substrate on the loading and unloading platform. The elastic limiting device deforms when the adsorption head is pressed down, ensuring that the adsorption head can accurately pick up the position of the glass substrate and return to the initial state after adsorption, ready for the next use.

Benefits of technology

It improves the efficiency of glass substrate loading, avoids positional misalignment and damage, reduces the time and labor required for manual calibration, and improves work efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an automatic feeding device for flat parts, and belongs to the technical field of flat part machining equipment. The automatic feeding device specifically comprises a fixed platform and a feeding and discharging platform; the feeding and discharging platform is used for placing flat parts, an elastic limiting device is arranged on the feeding and discharging platform, and a limiting space used for containing the flat parts and limiting the outer peripheries of the flat parts is formed in the feeding and discharging platform. Through the arrangement of the elastic limiting device, on one hand, the problems that in the suction process of an adsorption head, the position of a to-be-machined flat part on a placement platform is likely to change, consequently, the adsorption position of the adsorption head deviates, the position of the flat part deviates when the flat part is transferred to the next working procedure, and the flat part is damaged are solved; the position of the flat part needs to be calibrated, time and labor are wasted, and even the flat part is damaged; and on the other hand, after the adsorption head sucks the flat part, the elastic limiting device can recover to the initial state for the next suction action, and the working efficiency is further improved.
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Description

Technical Field

[0001] This application relates to the field of flat part processing equipment technology, and more specifically, to an automatic feeding device and processing equipment for flat parts. Background Technology

[0002] Flat components to be processed in industry include wafers and glass substrates. Wafers are widely used in semiconductor manufacturing, optoelectronic devices, and sensor manufacturing, while glass substrates are widely used in display technology, electronic product protection, and optical devices. Taking glass substrates as an example, a glass substrate is a thin glass sheet with an extremely flat surface and is one of the key basic materials in the flat panel display (FPD) industry.

[0003] In the processing of glass substrates, the glass substrates are usually moved from one process to the next. Currently, this is usually done by using a suction head to pick up the glass substrates from the placement platform to the next process. However, during the suction process, the position of the glass substrate on the placement platform may change, causing the suction head to deviate in position. When the glass substrate is transferred to the next process, its position may shift, requiring manual or calibration equipment to calibrate the position of the glass substrate. This is time-consuming, labor-intensive, and may even damage the glass substrate. Utility Model Content

[0004] The purpose of this application is to provide an automatic feeding device, which aims to solve the problem that in the related technology, the position of the flat part to be processed on the placement platform may change during the suction process, resulting in a deviation in the position of the suction head. When the flat part is transferred to the next process, the position of the flat part will shift, requiring the position of the flat part to be calibrated, which is time-consuming and labor-intensive, and may even damage the flat part.

[0005] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description or may be learned by practice of this application.

[0006] According to a first aspect of this application, an automatic feeding device is provided, comprising:

[0007] Fixed platform;

[0008] A loading / unloading platform is installed on the fixed platform, and the surface of the loading / unloading platform is used to place flat parts.

[0009] An elastic limiting device is disposed on the loading and unloading platform. The elastic limiting device has an initial state in which it extends a certain height from the surface of the loading and unloading platform, and the extension height is not less than the thickness of the flat part. The interior of the elastic limiting device forms a limiting space for accommodating the flat part and limiting the outer periphery of the flat part. The elastic limiting device has elasticity in the vertical direction and is configured to undergo adaptive elastic deformation when subjected to the downward pressure of the suction head, and to return to the initial state after the downward pressure of the suction head is removed.

[0010] In one exemplary embodiment of this application, the elastic limiting device includes a plurality of elastic limiting components, which are disposed around the flat member and the inner sides of the plurality of elastic limiting components enclose the limiting space.

[0011] In an exemplary embodiment of this application, the elastic limiting component includes a limiting seat, a limiting rod, and an elastic element. The limiting seat is fixedly installed on the loading and unloading platform, the limiting rod is slidably installed in the limiting seat, and the elastic element is disposed between the limiting rod and the limiting seat. In its natural state, the elastic element keeps the limiting rod extending out of the surface of the loading and unloading platform so that the limiting rod limits the outer periphery of the flat part.

[0012] In an exemplary embodiment of this application, the limiting rod has an upper rod with a larger diameter and a lower rod with a smaller diameter. The limiting seat is provided with a countersunk hole. The diameter of the first section of the countersunk hole matches the diameter of the upper rod, and the diameter of the second section of the countersunk hole matches the diameter of the lower rod. The limiting rod is slidably installed in the countersunk hole. The gap between the lower rod and the first section of the countersunk hole forms an installation space for accommodating the elastic element. The elastic element is sleeved on the lower rod. One end of the elastic element abuts against the upper end face of the second section of the countersunk hole, and the other end abuts against the boundary position between the lower rod and the upper rod.

[0013] In one exemplary embodiment of this application, a position sensor is further included, which is disposed corresponding to the limiting rod. The position sensor is used to detect the position where the limiting rod is pressed downward by the adsorption head, so as to determine whether the adsorption head has reached the adsorption position.

[0014] In one exemplary embodiment of this application, the position sensor is disposed directly below the limiting rod. When the limiting rod is pressed downward by the suction head and moves to a preset position, it contacts the position sensor to trigger the sensing of the position sensor.

[0015] In one exemplary embodiment of this application, a retaining ring is further included, disposed between the bottom end of the limiting rod and the bottom surface of the limiting seat.

[0016] In one exemplary embodiment of this application, the loading and unloading platform is provided with a negative pressure air passage for adsorbing flat parts.

[0017] In one exemplary embodiment of this application, the flat component is a glass substrate or a wafer.

[0018] In one exemplary embodiment of this application, the glass substrate is a square glass substrate, and the limiting space is a square limiting space adapted to the outer contour of the square glass substrate.

[0019] In one exemplary embodiment of this application, a moving mechanism is further included. The loading and unloading platform is mounted on the fixed platform via the moving mechanism. The moving mechanism includes a left-right moving mechanism, a front-back moving mechanism, and a vertical moving mechanism. The left-right moving mechanism is mounted on the fixed platform. The front-back moving mechanism is mounted on the drive end of the left-right moving mechanism. The vertical moving mechanism is mounted on the drive end of the front-back moving mechanism. The loading and unloading platform is fixedly mounted on the drive end of the vertical moving mechanism.

[0020] According to a second aspect of this application, a processing apparatus is provided, including the above-described automatic feeding device for flat parts.

[0021] The exemplary embodiments of this application may have some or all of the following beneficial effects:

[0022] The automatic feeding device for flat parts provided in the example embodiment of this application has an elastic limiting device on the loading and unloading platform. The elastic limiting device has an initial state in which it extends a certain height from the surface of the loading and unloading platform, and the extension height is not less than the thickness of the flat part. The elastic limiting device forms a limiting space inside to accommodate the flat part and limit the outer periphery of the flat part. When the flat part to be processed is placed inside the limiting space, the elastic limiting device is used to limit the flat part placed on the loading and unloading platform so that the position of the flat part on the loading and unloading platform remains unchanged. This ensures that the suction head can suction the same position when suctioning the flat part, and ensures the consistency of the position when the suction head moves the flat part to the next process. When the thickness of the flat part to be processed is equal to the height of the elastic limiting device extending from the surface of the loading and unloading platform in its initial state, the suction head moves from top to bottom towards the loading and unloading platform to the suction position, directly sucking up the flat part from the limiting space. The elastic limiting device is not pressured and does not produce adaptive elastic deformation. When the thickness of the flat part to be processed is less than the height of the elastic limiting device extending from the surface of the loading and unloading platform in its initial state, the suction head moves from top to bottom towards the loading and unloading platform. The suction head will first press down on the elastic limiting device. Under the pressure of the suction head, the elastic limiting device will undergo adaptive elastic deformation until the suction head moves down to the suction position to suck up the flat part. The elastic limiting device, which has undergone elastic deformation, maintains the limitation of the flat part. When the suction head completes the sucking up of the flat part and moves to the next process, the suction head gradually releases the pressure on the elastic limiting device, and the elastic limiting device gradually recovers its deformation and returns to its initial state for the next sucking action of the suction head. By using the aforementioned elastic limiting device, the following problems are solved: First, the position of the flat part to be processed on the placement platform may change during the suction process of the suction head, resulting in a deviation in the suction position. When the flat part is transferred to the next process, its position may shift, requiring calibration, which is time-consuming, labor-intensive, and may even damage the flat part. Second, after the suction head finishes suctioning the flat part, the elastic limiting device can return to its initial state for use in the next suction action, further improving work efficiency.

[0023] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0024] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0025] Figure 1 A schematic diagram of the structure of an automatic feeding device for flat parts in an embodiment of this application is shown;

[0026] Figure 2 A top view of an automatic feeding device for flat parts in an embodiment of this application is shown;

[0027] Figure 3 A schematic diagram of the elastic limiting component in an embodiment of this application is shown.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Fixed platform; 2. Servo motor; 3. First guide rail; 4. Left and right moving platform; 5. Third cylinder; 6. Second guide rail; 7. Front and rear moving platform; 8. First cylinder; 9. Up and down moving platform; 10. Second cylinder; 11. Loading and unloading platform; 12. Elastic limit component; 13. Negative pressure air passage; 14. Limit rod; 15. Elastic element; 16. Limit seat; 17. Position sensor. Detailed Implementation

[0030] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore their detailed descriptions will be omitted. Furthermore, the drawings are merely illustrative of this application and are not necessarily drawn to scale.

[0031] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples in the accompanying drawings. It is understood that if the device of the icon is flipped so that it is upside down, the component described as "upper" will become the component described as "lower." When a structure is "upper" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" mounted on the other structure, or that the structure is "indirectly" mounted on the other structure through another structure.

[0032] The terms “a,” “one,” “the,” and “at least one” are used to indicate the existence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to the listed elements / components / etc.; the terms “first” and “second” are used only as markers and are not a limitation on the number of objects.

[0033] Example

[0034] This embodiment provides a specific implementation of an automatic feeding device for flat parts, such as... Figure 1 and Figure 2 As shown, it includes a fixed platform 1 and a loading / unloading platform 11. The loading / unloading platform 11 is installed on the fixed platform 1 and is used to place flat parts. An elastic limiting device is provided on the loading / unloading platform 11 extending from the surface of the loading / unloading platform 11. The elastic limiting device forms a limiting space for accommodating the flat parts and limiting the outer periphery of the flat parts. When the flat parts are placed on the loading / unloading platform 11, they are placed in the limiting space. By limiting the position of the flat parts on the loading / unloading platform 11 by the elastic limiting device, the position of the suction head carrying the flat parts to the next process is consistent, thereby improving the transfer efficiency of the flat parts.

[0035] Furthermore, the elastic limiting device has an initial state in which it extends a certain height from the surface of the loading / unloading platform 11 in its natural state. The height at which the elastic limiting device extends from the surface of the loading / unloading platform 11 is not less than the thickness of the flat part, so as to limit the outer periphery of the flat part.

[0036] The thickness of the flat parts to be processed may vary depending on their intended use. When the thickness of the flat part is equal to the height of the elastic limiting device extending from the surface of the loading / unloading platform 11 in its initial state, the suction head moves from top to bottom toward the loading / unloading platform 11 to the suction position, directly picking up the flat part from the limiting space. The elastic limiting device is not compressed and does not undergo adaptive elastic deformation. The suction position can be understood as the position where the suction surface of the suction head moves to just contact the upper surface of the flat part. At this time, since the extension height of the elastic limiting device is equal to the thickness of the flat part, the suction head does not press down on the elastic limiting device when picking up the flat part.

[0037] When the thickness of the flat part to be processed is less than the height of the elastic limiting device extending from the surface of the loading / unloading platform 11 in its initial state, when the suction head moves over to suction the flat part, the elastic limiting device will first be pressed down around the suction head. The elastic limiting device will undergo adaptive deformation, which is manifested in that the height of the elastic limiting device will decrease as the suction head is pressed down, so that the suction head can get closer to the flat part until the suction head is pressed down to the suction position, where the flat part can be suctioned. At the same time, during the process of being pressed down by the suction head, the upper end of the elastic limiting device always remains in contact with the suction head under the action of its own elastic force. Thus, during the process of the suction head being pressed down to the suction position, the elastic limiting device maintains the limitation of the flat part. After the suction head suctions the flat part and moves away, the elastic limiting device returns to the position when it was not pressed by the suction head, that is, the initial state position, under the action of its own elastic force, to wait for the next round of flat part loading. The elastic limiting device not only realizes the position limitation of the flat part, but can also be reused repeatedly, greatly improving the loading efficiency of the flat part.

[0038] By using the aforementioned elastic limiting device, the following problems are solved: First, the position of the flat part to be processed on the placement platform may change during the suction process of the suction head, resulting in a deviation in the suction position. When the flat part is transferred to the next process, its position may shift, requiring calibration, which is time-consuming, labor-intensive, and may even damage the flat part. Second, after the suction head finishes suctioning the flat part, the elastic limiting device can return to its initial state for use in the next suction action, further improving work efficiency.

[0039] In this embodiment, the flat component is preferably a glass substrate, but this is not limiting. In other embodiments, the flat component can also be a wafer or other flat component.

[0040] The automatic feeding device of this embodiment will be further described below, taking a flat glass substrate as an example.

[0041] In this embodiment, the elastic limiting device includes multiple elastic limiting components 12, which are disposed around the glass substrate, so that a limiting space for accommodating the glass substrate is formed between the multiple elastic limiting components 12. When the glass substrate is placed on the loading and unloading platform 11, it is placed between the multiple elastic limiting components 12, and the multiple elastic limiting components 12 limit the outer periphery of the glass substrate.

[0042] In other embodiments, the elastic limiting device can also be an integral structure, such as an annular structure that matches the shape of the glass substrate. When the glass substrate is placed on the loading / unloading platform 11, it is perfectly embedded in the annular structure. The annular structure limits the outer periphery of the glass substrate. At the same time, an elastic element 15 can also be provided at the bottom of the annular structure to allow the annular structure to extend onto the surface of the loading / unloading platform 11 and to provide elastic force to the annular structure.

[0043] In this embodiment, the glass substrate is a square glass substrate, and the limiting space formed by the elastic limiting device is a square limiting space that matches the outer contour of the square glass substrate. In other embodiments, the glass substrate may also be other shapes, such as circular or polygonal, as long as the elastic limiting device can form a limiting space shape that matches the outer contour of the glass substrate.

[0044] Furthermore, such as Figure 3 As shown, the elastic limiting component 12 includes a limiting seat 16, a limiting rod 14, and an elastic element 15. The limiting seat 16 is fixedly installed on the loading and unloading platform 11, and the limiting rod 14 is slidably installed in the limiting seat 16. The elastic element 15 is disposed between the limiting rod 14 and the limiting seat 16. In its natural state, the elastic element 15 keeps the limiting rod 14 in a limiting position that keeps it protruding from the surface of the loading and unloading platform 11. The limiting rod 14 protruding from the surface of the loading and unloading platform 11 can limit the glass substrate and prevent the glass substrate from moving on the loading and unloading platform 11. At the same time, when the suction head presses down close to the glass substrate, the edge of the suction head will squeeze the limiting rod 14, causing the limiting rod 14 to squeeze the elastic element 15 and move downward against the elastic force of the elastic element 15. When the limiting rod 14 moves to the preset position, it means that the suction head has pressed down to the suction position and can pick up the glass substrate.

[0045] In this embodiment, the limiting rod 14 is divided into two parts: an upper rod and a lower rod. The upper rod has a larger diameter, and the lower rod has a smaller diameter. A countersunk hole is provided in the limiting seat 16. The diameter of the first section of the countersunk hole matches the diameter of the upper rod, and the diameter of the second section of the countersunk hole matches the diameter of the lower rod. The limiting rod 14 is slidably installed in the countersunk hole, that is, the upper rod slides in the first section of the countersunk hole, and the lower rod slides in the second section of the countersunk hole. Because space needs to be left for the installation of the elastic element 15... The lower rod slides within the first section of the countersunk hole. The gap between the lower rod and the first section of the countersunk hole is used to install the elastic element 15. The elastic element 15 is sleeved on the lower rod, with one end of the elastic element 15 abutting against the upper end face of the second section of the countersunk hole, and the other end abutting against the boundary between the lower and upper rods. This allows the limiting rod 14 to compress the elastic element 15 when it moves downward. After the suction head picks up the glass substrate and removes it, the limiting rod 14 moves upward and returns to its initial position under the elastic force of the elastic element 15. Specifically, the elastic element 15 is a spring. Of course, the elastic element 15 can also be other elastic components, such as a bellows, rubber sleeve, etc. This embodiment does not impose specific limitations on this.

[0046] In some other embodiments, the elastic element 15 can also be disposed between the bottom end of the limiting rod 14 and the countersunk hole, without needing to be sleeved on the limiting rod 14.

[0047] In this embodiment, a position sensor 17 is also included, which is correspondingly arranged with the limiting rod 14. The position sensor 17 is used to detect the position of the limiting rod 14 being pressed down by the adsorption head to determine whether the adsorption head has reached the adsorption position. That is, by detecting the position of the limiting rod 14, it can be determined whether the adsorption head has been pressed down to the adsorption position so that the adsorption head can better pick up the glass substrate and avoid insufficient distance, resulting in uneven adsorption force and causing the glass substrate to be tilted and adsorbed on the adsorption head.

[0048] Furthermore, the position sensor 17 is positioned directly below the limiting rod 14. The position sensor 17 is connected to the bottom surface of the loading / unloading platform 11 via a connector. The position sensor 17 is positioned directly below the limiting rod 14 and is a contact sensor. When the limiting rod 14 is pressed down by the suction head and moves to contact the position sensor 17, it indicates that the suction head has been pressed down to the suction position and can pick up the glass substrate. The downward contact of the limiting rod 14 with the position sensor 17 allows the position sensor 17 to receive information that the limiting rod 14 has reached the preset position. The response is rapid and the information acquisition is accurate.

[0049] In this embodiment, a limiting member is also included, disposed between the bottom end of the limiting rod 14 and the bottom surface of the limiting seat 16. The limiting member can be engaged with the bottom surface of the limiting seat 16 when the limiting rod 14 returns to its initial position, preventing the limiting rod 14 from sliding out of the countersunk hole. More specifically, the limiting member is a retaining spring, disposed at the bottom end of the limiting rod 14. The retaining spring can prevent the limiting rod 14 from popping out of the countersunk hole when it returns to its initial position under the force of the elastic member 15. The retaining spring can be engaged with the bottom surface of the limiting seat 16, ensuring that the limiting rod 14 slides up and down within the countersunk hole.

[0050] In other embodiments, the limiting member can also be a rod, a stop, or other structure, as long as it can prevent the limiting rod 14 from sliding out of the countersunk hole when it slides upward.

[0051] In this embodiment, a sealing ring is provided between the upper rod and the first section of the countersunk hole. The sealing ring slides together with the upper rod in the first section. The addition of the sealing ring can ensure the sealing of the countersunk hole. At the same time, it can also prevent liquids in some processes from flowing into the elastic limiting component 12 through the countersunk hole.

[0052] In this embodiment, a negative pressure air channel 13 for adsorbing glass substrates is also provided on the loading and unloading platform 11. The negative pressure air channel 13 is connected to an external vacuum device, such as a vacuum pump. After the glass substrate is placed in the accommodating space on the loading and unloading platform 11, the negative pressure air channel 13 adsorbs the glass substrate, so as to prevent the glass substrate from moving or bumping when the loading and unloading platform 11 is moved by the moving mechanism.

[0053] In this embodiment, the loading / unloading platform 11 is mounted on the fixed platform 1 via a moving mechanism. This moving mechanism allows the loading / unloading platform 11 to move to a designated position after receiving the glass substrate, awaiting the suction head to pick it up. The moving mechanism includes a left-right moving mechanism, a front-back moving mechanism, and a vertical moving mechanism, enabling the loading / unloading platform 11 to move in six directions. The left-right moving mechanism is mounted on the fixed platform 1, the front-back moving mechanism is mounted on the drive end of the left-right moving mechanism, and the vertical moving mechanism is mounted on the drive end of the front-back moving mechanism. The loading / unloading platform 11 is fixedly mounted on the drive end of the vertical moving mechanism.

[0054] Furthermore, the left-right moving mechanism includes a left-right moving platform 4, a first guide rail 3, and a servo motor 2. The left-right moving platform 4 is slidably mounted on the first guide rail 3, and the servo motor 2 can control the left-right moving platform 4 to slide in the left-right direction on the first guide rail 3. The front-back moving mechanism includes a first cylinder 8, a second guide rail 6, and a front-back moving platform 7. The first cylinder 8 and the second guide rail 6 are both mounted on the left-right moving platform 4, and the front-back moving platform 7 is slidably mounted on the second guide rail 6. The first cylinder 8 can control the front-back moving platform 7 to slide in the front-back direction on the second guide rail 6. The up-down moving mechanism includes a third cylinder... The system includes cylinder 5 and vertical moving platform 9. The vertical moving platform 9 is mounted on the drive end of the third cylinder 5, which is mounted on the front and rear moving platform 7. The loading / unloading platform 11 is mounted on the vertical moving platform 9 via the second cylinder 10. The loading / unloading platform 11 and / or the vertical moving platform 9 can be controlled to move vertically by the drive of the second cylinder 10 and the third cylinder 5. Specifically, a telescopic rod is provided between the loading / unloading platform 11 and the vertical moving platform 9. The telescopic rod is used to assist the loading / unloading platform 11 in moving vertically and to prevent the loading / unloading platform 11 from tilting due to being supported only by the drive end of the second cylinder 10.

[0055] In other embodiments, the moving mechanism can also be a linkage mechanism, a series / parallel mechanism, etc., as long as it can realize multi-directional movement of the loading and unloading platform 11.

[0056] It should be noted that the above-described elastic limiting device is a preferred embodiment of this application and is not restrictive. In other embodiments of the elastic limiting device, the elastic limiting device can also be an elastic pad, such as a silicone pad, disposed on the loading / unloading platform 11. The elastic pad has a certain thickness, and its lower end is fixedly connected to the loading / unloading platform 11. The method of fixing is not limited; it can be adhesive or snap-fit, as long as it can be fixedly connected. There can be multiple elastic pads, distributed around the flat part. The inner sides of the multiple elastic pads enclose a limiting space, and the inner sidewalls of the elastic pads limit the outer periphery of the flat part. The elastic pad can also be a single, integral elastic pad that is ring-shaped, and the ring contour matches the outer contour of the flat part.

[0057] Example 2

[0058] This embodiment provides a specific implementation of the processing equipment, including the automatic feeding device for flat parts in Embodiment 1.

[0059] Other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of the embodiments thereof. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not claimed in this application. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the appended claims.

Claims

1. An automatic feeding device for flat parts, characterized in that, include: Fixed platform; A loading / unloading platform is installed on the fixed platform, and the surface of the loading / unloading platform is used to place flat parts. An elastic limiting device is disposed on the loading and unloading platform. The elastic limiting device has an initial state in which it extends a certain height from the surface of the loading and unloading platform, and the extension height is not less than the thickness of the flat part. The interior of the elastic limiting device forms a limiting space for accommodating the flat part and limiting the outer periphery of the flat part. The elastic limiting device has elasticity in the vertical direction and is configured to undergo adaptive elastic deformation when subjected to the downward pressure of the suction head, and to return to the initial state after the downward pressure of the suction head is removed.

2. The automatic feeding device for flat parts according to claim 1, characterized in that, The elastic limiting device includes multiple elastic limiting components, which are disposed around the flat part, and the inner sides of the multiple elastic limiting components enclose the limiting space.

3. The automatic feeding device for flat parts according to claim 2, characterized in that, The elastic limiting component includes a limiting seat, a limiting rod, and an elastic element. The limiting seat is fixedly installed on the loading and unloading platform. The limiting rod is slidably installed in the limiting seat. The elastic element is disposed between the limiting rod and the limiting seat. In its natural state, the elastic element keeps the limiting rod extending out of the surface of the loading and unloading platform so that the limiting rod limits the outer periphery of the flat part.

4. The automatic feeding device for flat parts according to claim 3, characterized in that, The limiting rod has an upper rod with a larger diameter and a lower rod with a smaller diameter. The limiting seat has a countersunk hole. The diameter of the first section of the countersunk hole matches the diameter of the upper rod, and the diameter of the second section of the countersunk hole matches the diameter of the lower rod. The limiting rod is slidably installed in the countersunk hole. The gap between the lower rod and the first section of the countersunk hole forms an installation space to accommodate the elastic element. The elastic element is sleeved on the lower rod. One end of the elastic element abuts against the upper end face of the second section of the countersunk hole, and the other end abuts against the boundary between the lower rod and the upper rod.

5. The automatic feeding device for flat parts according to claim 3, characterized in that, It also includes a position sensor, which is configured corresponding to the limiting rod. The position sensor is used to detect the position where the limiting rod is pressed downward by the adsorption head, so as to determine whether the adsorption head has reached the adsorption position.

6. The automatic feeding device for flat parts according to claim 5, characterized in that, The position sensor is located directly below the limiting rod. When the limiting rod is pressed down by the suction head and moves to a preset position, it contacts the position sensor to trigger the position sensor's sensing.

7. The automatic feeding device for flat parts according to claim 3, characterized in that, It also includes a retaining ring, which is disposed between the bottom end of the limiting rod and the bottom surface of the limiting seat.

8. The automatic feeding device for flat parts according to any one of claims 1-7, characterized in that, The loading and unloading platform is equipped with a negative pressure air passage for adsorbing flat parts.

9. The automatic feeding device for flat parts according to any one of claims 1-7, characterized in that, The flat component is a glass substrate or a wafer.

10. The automatic feeding device for flat parts according to claim 9, characterized in that, The glass substrate is a square glass substrate, and the limiting space is a square limiting space that matches the outer contour of the square glass substrate.

11. The automatic feeding device for flat parts according to any one of claims 1-7, characterized in that, It also includes a moving mechanism, and the loading and unloading platform is mounted on the fixed platform through the moving mechanism. The moving mechanism includes a left-right moving mechanism, a front-back moving mechanism, and a vertical moving mechanism. The left-right moving mechanism is mounted on the fixed platform, the front-back moving mechanism is mounted on the drive end of the left-right moving mechanism, the vertical moving mechanism is mounted on the drive end of the front-back moving mechanism, and the loading and unloading platform is fixedly mounted on the drive end of the vertical moving mechanism.

12. A processing equipment, characterized in that, Includes an automatic feeding device for flat parts according to any one of claims 1-11.