Adjusting assembly and machining equipment
By adjusting the combination of components and infrared sensors, the problems of large space occupation, high cost and short lifespan of thermocouples when measuring silicon wafer temperature have been solved, achieving the effect of accurate measurement and cost reduction.
Patent Information
- Application Number
- CN202423203080.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-23
AI Technical Summary
In existing technologies, thermocouples occupy a large space, are costly, and have a short lifespan when measuring silicon wafer temperature, which increases the temperature control and maintenance costs of processing equipment and results in inaccurate temperature measurements.
An adjustment component is used to transmit infrared light to the detection component. The position and angle of the detection component are adjusted through the base, universal joint and steering seat. Combined with the infrared sensor, non-contact temperature measurement is performed, which reduces the influence of the temperature inside the cavity on the measurement and extends the life of the sensor.
It enables precise measurement of silicon wafer temperature, reduces the temperature control and maintenance costs of processing equipment, and improves measurement accuracy and the lifespan of sensing devices.
Smart Images
Figure CN223548094U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of battery cell processing technology, and in particular to an adjustment component and processing equipment. Background Technology
[0002] In the production of solar cells, a coating (thin film deposition) process can be completed using processing equipment. This equipment has a cavity containing a quartz boat, boat support, paddle, and heating elements. Multiple silicon wafers are carried on the quartz boat. In existing technology, high-temperature thermocouples are typically used for temperature measurement. These thermocouples are positioned along the direction of the cavity. Placing or replacing them requires considerable space. Furthermore, a certain space must be left between the thermocouple and the silicon wafer, and the measured temperature is not the true temperature on the silicon wafer. When the temperature inside the cavity exceeds 1000 degrees Celsius, the thermocouple wires are usually made of precious metals. With a large number of wires, the temperature control cost of the processing equipment is high. Simultaneously, the short lifespan of the thermocouples further increases the maintenance cost of the processing equipment. Utility Model Content
[0003] In view of the above, it is necessary to provide an adjustment component and processing equipment that can accurately measure the temperature of silicon wafers in the processing equipment and reduce the temperature control cost and maintenance cost of the processing equipment.
[0004] The first aspect of this application provides an adjustment assembly for mounting a detection assembly onto a cavity of a processing equipment and transmitting infrared light from the cavity to the detection assembly; the adjustment assembly includes:
[0005] The base is assembled onto the outer wall of the cavity;
[0006] Universal joint, assembled onto base by fasteners; and
[0007] The steering mount is mounted on the universal joint and is used to mount the detection assembly onto the universal joint;
[0008] When the universal joint rotates in a plane perpendicular to the cavity, it adjusts the tilt angle of the detection component relative to the cavity; the base and universal joint can also be used to adjust the relative position between the detection component and the cavity.
[0009] In some embodiments, the cavity extends along a first direction; the base is also used to adjust the relative position of the detection component with respect to the cavity along a second direction; wherein the second direction is perpendicular to the first direction and both are located in a horizontal plane; the base includes a base plate and two positioning members; two symmetrically arranged positioning grooves are provided on the base plate; the positioning members are respectively fixed to the cavity by passing through one positioning groove; the positioning members can move within the positioning groove.
[0010] In some embodiments, the universal joint is also used to adjust the relative position of the detection component to the cavity along a first direction; the universal joint is placed above the base plate and between two side walls; the base also includes two opposing side walls; the side walls extend vertically from the edge of the base plate; each side wall has an assembly groove; the adjustment component also includes a fixing member; the fixing member includes a plurality of fixing parts; at least two fixing parts pass through the assembly groove and are fixed to the universal joint; the fixing parts passing through the assembly groove can move within the assembly groove.
[0011] In some embodiments, the steering seat includes a top plate and two opposing positioning walls; the positioning walls extend vertically downward from the edge of the top plate; the side walls and positioning walls respectively cover different sides of the universal joint; at least two fixing parts are positioned on the universal joint through the positioning walls, and the top plate contacts the upper surface of the universal joint.
[0012] Another aspect of this application provides a processing apparatus, which includes:
[0013] A cavity containing sheet-like material;
[0014] A detection component used to detect the temperature of sheet materials;
[0015] An adjustment assembly is used to mount the detection component onto the cavity and to transmit infrared light from the cavity to the detection component. The adjustment assembly includes a base, a universal joint, and a steering seat. The base is mounted on the outer wall of the cavity. The universal joint is mounted on the base via a fastener. The steering seat is mounted on the universal joint and is used to mount the detection component onto the universal joint. When the universal joint rotates in a plane perpendicular to the cavity, it adjusts the tilt angle of the detection component relative to the cavity. The base and universal joint can also be used to adjust the relative position between the detection component and the cavity.
[0016] In some embodiments, a light guide tube is provided inside the cavity; the light guide tube penetrates the side wall of the cavity and is completely housed within the side wall of the cavity; the light guide tube is used to conduct infrared light generated during the processing of the sheet material to the detection component; a light guide channel is provided inside the adjustment component, and the light guide channel is coaxially arranged with the light guide tube.
[0017] In some embodiments, the detection component includes an adjustment member and an infrared sensor; the adjustment member is disposed above the universal joint through a top plate; the adjustment member is used to adjust the relative distance between the infrared sensor and the cavity in a third direction; wherein the third direction and the first direction are located in a vertical plane; the infrared sensor is used to detect the temperature of the infrared light emitted by the sheet material and output a temperature sensing signal.
[0018] In some embodiments, the processing equipment further includes a direction correction rod; the direction correction rod is used to simulate infrared light emitted by the sheet material before assembling the infrared sensor; the direction correction rod passes through the adjustment member and the adjustment assembly and is disposed in the light guide channel, and partially extends into the light guide tube.
[0019] In some embodiments, the cavity further includes a furnace body and a heating layer; the heating layer is sleeved on the outer surface of the furnace body; the light guide tube is also used to isolate the heating layer from the light guide channel.
[0020] In some embodiments, in the third direction Z, a through hole is provided on the base, a through hole is provided on the universal joint, and a center hole is provided on the steering seat. The through hole, through hole, and center hole constitute the light guide channel of the adjustment assembly; wherein, the third direction and the first direction are located in a vertical plane.
[0021] The adjustment components and processing equipment provided in this application enable precise temperature measurement of the sheet material via a detection component located outside the cavity. Furthermore, the sensing method is non-contact, reducing the impact of the internal cavity temperature on the sensed temperature. Simultaneously, the long lifespan of the infrared sensor lowers the temperature control and maintenance costs of the processing equipment. Attached Figure Description
[0022] Figure 1 A three-dimensional schematic diagram of the processing equipment provided in this application.
[0023] Figure 2 for Figure 1 A schematic cross-sectional view of the processing equipment along the II-II direction.
[0024] Figure 3 for Figure 1 A partial exploded view of the adjustment components.
[0025] Figure 4 for Figure 3 A three-dimensional schematic diagram of the center adjustment component and the direction correction rod.
[0026] Figure 5 for Figure 4 A three-dimensional schematic diagram of the center alignment rod and adjusting components assembled on the adjustment assembly.
[0027] Figure 6 for Figure 5 A schematic diagram showing the center alignment rod, adjusting component, and adjustment assembly tilted in one direction within a vertical plane.
[0028] Figure 7 for Figure 5 A schematic diagram showing the center alignment rod, adjusting element, and adjustment assembly tilted in another direction within a vertical plane.
[0029] Explanation of main component symbols
[0030] 1. Processing equipment; 2. Sheet material; 3. Direction correction rod; 10. Cavity; 20. Adjustment component; 201. Light guide channel; 30. Detection component; 11. Furnace body; 12. Heating layer; 13. Insulation layer; 14. Light guide tube; 21. Base; 211. Bottom plate; 212. Side wall; 213. Positioning component; 2110. Through hole; 2111. Positioning groove; 2120. Assembly groove; 22. Universal joint; 221. Through hole; 222. Locking hole; 23. Steering seat; 231. Top plate; 232. Positioning wall; 2310. Center hole; 2321. Through hole; 24. Fixing component; 241. Fixing part; 31. Locking component; 32. Adjusting component; 33. Infrared sensing component; 320. Shaft hole.
[0031] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation
[0032] In the description of the embodiments of this application, when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an element centrally located simultaneously. When an element is considered to be "set" on another element, it can be directly set on the other element or there may be an element centrally located simultaneously. In this application, unless otherwise expressly specified and limited, the terms "installed," "connected," "attached," "fixed," etc., should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "up," "down," "top," "bottom," etc., are all based on the direction of the product in the actual use scenario.
[0033] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0034] In the production of solar cells, a coating (thin film deposition) process can be completed using processing equipment. This equipment has a cavity containing a quartz boat, boat support, paddle, and heating elements. Multiple silicon wafers are carried on the quartz boat. In existing technology, high-temperature thermocouples are typically used for temperature measurement. These thermocouples are positioned along the direction of the cavity. This requires considerable space for placement or replacement. When the temperature inside the cavity exceeds 1000 degrees Celsius, the thermocouple wires are usually made of precious metals, which increases the cost of the processing equipment when there are many wires. Furthermore, the short lifespan of thermocouples further increases the maintenance costs of the processing equipment. Additionally, a certain space needs to be left between the thermocouple and the silicon wafer, meaning the measured temperature is not the true temperature on the silicon wafer.
[0035] Therefore, this application provides a processing device that can achieve the technical effect of accurately measuring the temperature of silicon wafers in the processing device and reducing the temperature control cost and maintenance cost of the processing device.
[0036] Figure 1 This is a three-dimensional schematic diagram of the processing equipment 1 provided in this application. The processing equipment 1 is used to deposit a thin film on the surface of a sheet-like material 2. The sheet-like material 2 is a raw material for solar cells, including but not limited to silicon wafers, silicon carbide wafers, etc. The thin film deposition process can be, but is not limited to, plasma-enhanced chemical vapor deposition (PECVD). The processing equipment 1 includes at least one cavity 10, an adjustment component 20, and a detection component 30.
[0037] The cavity 10 provides a thermal field, allowing the sheet material 2 housed within it to deposit a thin film on its surface within the cavity 10. The sheet material 2 can be placed within the cavity 10 via a support assembly (not shown). The sheet material 2 emits infrared light when within the thermal field of the cavity 10. In at least one embodiment of this application, the cavity 10 is generally cylindrical and hollow inside. In other embodiments, the cavity 10 may have other shapes, such as a cuboid. In at least one embodiment of this application, the cavity 10 may be made of quartz. The cavity 10 extends along a first direction X.
[0038] Please refer to the following: Figure 2This is a cross-sectional view of the processing equipment 1 along the II-II direction. The cavity 10 includes a furnace body 11, a heating layer 12, a heat insulation layer 13, and a light guide tube 14. The furnace body 11 is a hollow cylindrical tube. The furnace body 11 is used to house multiple sheet materials 2. In at least one embodiment of this application, the furnace body 11 is made of quartz material; the sheet materials 2 can be disposed on a pusher structure and move within the furnace body 11 via the pusher structure. The furnace body 11 has opening and closing mechanisms at both ends, which can control whether the hollow part of the furnace body 11 is sealed or not, and also facilitate the entry and exit of the sheet materials 2. The heating layer 12 is a hollow cylindrical tube and is sleeved on the outer surface of the furnace body 11. The heating layer 12 is used to provide heat to the furnace body 11 when energized, so as to form a thermal field within the furnace body 11. The heating layer 12 includes multiple heating elements (not shown). In at least one embodiment of this application, the heating element can be a resistance wire. The heat insulation layer 13 is sleeved on the outer surface of the heating layer 12. The insulation layer 13 is used to reduce heat loss within the furnace body 11. The light guide tube 14 is generally a hollow cylindrical tube. The diameter of the light guide tube 14 is smaller than the diameter of the furnace body 11. The light guide tube 14 penetrates the furnace body 11, the heating layer 12, and the insulation layer 13, and is completely housed within the cavity 10. The light guide tube 14 is used to conduct the infrared light generated by the sheet material 2 to the detection component 30 disposed outside the cavity 10, and to isolate the light guide channel from the heating layer 12. In at least one embodiment of this application, the light guide tube 14 is an insulating ceramic tube.
[0039] Please refer to the following: Figure 3 This is a partially exploded view of the adjustment assembly 20. The adjustment assembly 20 is used to assemble the detection assembly 30 onto the outer wall of the cavity 10, and can adjust the relative position and tilt angle between the detection assembly 30 and the cavity 10. The adjustment assembly 20 includes a base 21, a universal joint 22, a steering seat 23, and a fixing member 24.
[0040] The base 21 contacts the outer wall of the cavity 10. The base 21 is used to adjust the relative position of the detection assembly 30 relative to the cavity 10 along the second direction Y. The base 21 includes a base plate 211, two opposing side walls 212, and two positioning elements 213. A through hole 2110 and two positioning grooves 2111 are provided in the middle of the base plate 211. The base plate 211 is generally a rounded cuboid. The through hole 2110 is used to allow infrared light generated by the sheet material 2 inside the cavity 10 to pass through the base plate 211. The through hole 2110 is coaxially arranged with the light guide tube 14. The two positioning grooves 2111 are symmetrically arranged on both sides of the through hole 2110 along the first direction X. The positioning grooves 2111 are used to allow the position of the base 21 on the cavity 10 to be adjusted along the second direction Y. The second direction Y is perpendicular to the first direction X and both are located in the horizontal plane. The side walls 212 are formed by two edges of the base plate 211 extending vertically upward along its length. A mounting groove 2120 is provided on the side wall 212. The mounting groove 2120 is used to allow adjustment of the position of the universal joint 22 within the base 21 along a first direction X. In at least one embodiment of this application, both the positioning groove 2111 and the mounting groove 2120 are generally elliptical. Two positioning elements 213 pass through the positioning groove 2111 and are threadedly locked to the cavity 10. In at least one embodiment of this application, the positioning elements 213 are screws.
[0041] Universal joint 22 is mounted on base 21 via fastener 24. Universal joint 22 is placed above base plate 211 and located between two side walls 212. Universal joint 22 is used to adjust the tilt angle of detection assembly 30 relative to cavity 10. Universal joint 22 is approximately cubic. Universal joint 22 has through holes 221 and multiple locking holes 222. Through holes 221 penetrate the upper and lower surfaces of universal joint 22 and are coaxially arranged with light guide tube 14 and through hole 2110. Locking holes 222 are provided on four adjacent sides of universal joint 22. In at least one embodiment of this application, the locking holes 222 are screw holes.
[0042] A steering seat 23 is positioned above the universal joint 22. The steering seat 23 includes a top plate 231 and two symmetrically arranged positioning walls 232. The top plate 231 is circular. A central hole 2310 is formed on the top plate 231. The top plate 231 is placed on the upper surface of the universal joint 22. The central hole 2310 communicates with the light guide tube 14, the through hole 2110, and the through hole 221 to form a light guide channel 201. The positioning walls 232 extend vertically downwards from the edge of the top plate 231. The positioning walls 232 and the side walls 212 respectively cover different sides of the universal joint 22. Each positioning wall 232 has a through hole 2321.
[0043] The fastener 24 includes four fastening portions 241. Two fastening portions 241 arranged along a first direction pass through through holes 2321 and are locked in locking holes 222 to position the steering seat 23 onto the universal joint 22. Two fastening portions 241 arranged along a second direction Y pass through mounting grooves 2120 and are locked in locking holes 222 to position the universal joint 22 onto the base 21.
[0044] The detection component 30 is mounted on the cavity 10 via the adjustment component 20 and can be set at a certain angle to the cavity 10. The detection component 30 is used to detect the temperature of the sheet material 2 based on the received infrared light. The detection component 30 includes a locking member 31, an adjusting member 32, an infrared sensor 33, and a controller (not shown). The locking member 31 is placed on the top plate 231. The locking member 31 has a screw hole (not shown). The locking member 31 and the adjusting member 32 are threadedly locked to position the relative position of the adjusting member 32 and the steering seat 23. The adjusting member 32 is inserted into the steering seat 23 through the screw hole and the center hole 2310 of the locking member 31 and is threadedly locked to the screw hole and the center hole 2310 of the locking member 31. The adjusting member 32 is generally cylindrical. The adjusting member 32 is used to adjust the relative distance between the infrared sensor 33 and the cavity 10 in the third direction Z. Among them, the third direction Z and the second direction Y are located in a vertical plane; the adjusting member 32 is provided with a shaft hole 320 along the third direction Z (e.g., ...). Figure 4 (As shown). A shaft hole 320 allows infrared light to pass through. An infrared sensor 33 is mounted on the adjusting member 32. The infrared sensor 33 detects the temperature of the infrared light emitted by the sheet material 2 and outputs a temperature sensing signal. A controller is connected to the infrared sensor 33. The controller has high-resolution analog-to-digital conversion and digital-to-analog conversion functions, as well as high-speed data processing capabilities. The controller outputs a control signal to a solid-state relay (not shown) within the cavity 10 based on the received temperature sensing signal and the target temperature to adjust the operating power of the heating layer 12, thereby achieving temperature adjustment within the furnace body 11. In at least one embodiment of this application, the controller is a programmable logic controller (PLC).
[0045] Please refer to the following: Figure 4 This is a three-dimensional schematic diagram of the orientation correction rod 3 and the adjusting member 32. The processing equipment 1 further includes the orientation correction rod 3. The orientation correction rod 3 is generally cylindrical in shape. The orientation correction rod 3 can pass through the adjusting member 32 and the adjusting assembly 20, and is partially inserted into the light guide tube 14. The orientation correction rod 3 is used to simulate infrared light incident on the adjusting assembly 20 (such as infrared light) before the infrared sensing element 33 is installed. Figure 5 As shown), the relative position of the adjustment component 20 with respect to the cavity 10 is adjusted. The direction correction rod 3 passes through the adjustment member 32 and the adjustment component 20 and is disposed in the light guide channel 201, and partially extends into the light guide tube 14.
[0046] The assembly process of processing equipment 1 is roughly as follows:
[0047] The direction correction rod 3 is inserted into the adjusting member 32. The adjusting member 32, which has the direction correction rod 3, is inserted into the steering seat 23 through the screw hole and the center hole 2310 of the locking member 31, and is threadedly locked with the screw hole and the center hole 2310 of the locking member 31. When it is necessary to adjust the position of the adjusting component 20 on the cavity 10 along the second direction Y, the positioning screw 242 is loosened, so that the base 21 can move along the second direction Y within the positioning groove 2111. When it is necessary to adjust the position of the adjusting component 20 on the cavity 10 in the horizontal plane, all fixing parts 241 are loosened, so that the universal joint 22 can rotate at any angle in the horizontal plane. For example, when moving along the first direction X within the mounting groove 2120, the relative position of the adjusting component 20 and the cavity 10 in the first direction X can be adjusted; by rotating the universal joint 22, the tilt angle between the direction correction rod 3 and the cavity 10 can be adjusted. Figure 6 and Figure 7 As shown, the universal joint 22 moves within the plane defined by the first direction X and the third direction Z to adjust the tilt angle of the direction correction rod 3 relative to the cavity 10. When it is necessary to adjust the position of the adjustment component 20 on the cavity 10 along the third direction Z, the adjusting component 32 can be moved along the third direction Z by loosening the locking member 31. When the direction correction rod 3 can easily pass through the light guide tube 14, the adjustment of the relative position between the adjustment component 20 and the cavity 10 is completed. The direction correction rod 3 is removed, and the infrared sensor 33 is threadedly locked to the adjusting component 32. At this time, the infrared light generated by the sheet material 2 can enter the infrared sensor 33 through the light guide tube 14, the through hole 2110, the perforation 221, the center hole 2310, and the shaft hole 320.
[0048] The aforementioned processing equipment 1 accurately measures the temperature of the sheet material 2 using an infrared sensor 33 located outside the cavity 10. This non-contact measurement method reduces the impact of the temperature inside the cavity 10 on the sensed temperature. Furthermore, the infrared sensor 33 has a long lifespan, reducing the temperature control and maintenance costs of the processing equipment 1.
[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.
Claims
1. An adjustment assembly for mounting a detection assembly onto a cavity of a processing equipment and transmitting infrared light from the cavity to the detection assembly; characterized in that, The adjustment components include: The base is assembled onto the outer wall of the cavity; The universal joint is assembled onto the base by fasteners; and A steering seat, mounted on the universal joint, is used to assemble the detection component onto the universal joint; When the universal joint rotates in a plane perpendicular to the cavity, it adjusts the tilt angle of the detection component relative to the cavity; the base and the universal joint can also be used to adjust the relative position between the detection component and the cavity.
2. The adjustment component according to claim 1, characterized in that, The cavity extends along a first direction; the base is also used to adjust the relative position of the detection component with respect to the cavity along a second direction; wherein the second direction is perpendicular to the first direction and both are located in a horizontal plane; the base includes a base plate and two positioning members; two symmetrically arranged positioning grooves are provided on the base plate; the positioning members pass through one of the positioning grooves and are fixed to the cavity; the positioning members can move within the positioning grooves.
3. The adjustment component according to claim 2, characterized in that, The universal joint is also used to adjust the relative position of the detection component with respect to the cavity along the first direction; the universal joint is placed above the base plate and located between the two side walls; the base also includes two opposing side walls; the side walls extend vertically from the edge of the base plate; each side wall has an assembly groove; the adjustment component also includes a fixing member; the fixing member includes multiple fixing parts; at least two fixing parts pass through the assembly groove and are fixed to the universal joint; the fixing parts passing through the assembly groove can move within the assembly groove.
4. The adjustment component according to claim 3, characterized in that, The steering seat includes a top plate and two opposing positioning walls; the positioning walls extend vertically downward from the edge of the top plate; the side walls and the positioning walls respectively cover different sides of the universal joint; at least two of the fixing parts pass through the positioning walls and are positioned on the universal joint, and the top plate is in contact with the upper surface of the universal joint.
5. A processing equipment, characterized in that, The processing equipment includes: A cavity containing sheet material; A detection component is used to detect the temperature of the sheet material; An adjustment assembly is used to assemble the detection assembly onto the cavity and to transmit infrared light from the cavity to the detection assembly. The adjustment assembly includes a base, a universal joint, a steering seat, and a fixing member. The base is assembled to the outer wall of the cavity. The universal joint is assembled to the base via the fixing member. The steering seat is assembled to the universal joint and is used to assemble the detection assembly onto the universal joint. The universal joint is used to adjust the tilt angle of the detection assembly relative to the cavity when rotating in a plane perpendicular to the cavity.
6. The processing equipment according to claim 5, characterized in that, A light guide tube is provided inside the cavity; the light guide tube penetrates the side wall of the cavity and is completely housed within the side wall of the cavity; the light guide tube is used to conduct infrared light generated by the sheet material during processing to the detection component; a light guide channel is provided inside the adjustment component, and the light guide channel is coaxially arranged with the light guide tube.
7. The processing equipment according to claim 6, characterized in that, The cavity extends along a first direction; the detection component includes an adjustment member and an infrared sensor; the adjustment member passes through the steering seat and is disposed above the universal joint; the adjustment member is used to adjust the relative distance between the infrared sensor and the cavity in a third direction; wherein the third direction and the first direction are located in a vertical plane; the infrared sensor is used to detect the temperature of the infrared light emitted by the sheet material and output a temperature sensing signal.
8. The processing equipment according to claim 7, characterized in that, The processing equipment also includes a direction correction rod; the direction correction rod is used to simulate the infrared light emitted by the sheet material before assembling the infrared sensing element; the direction correction rod passes through the adjusting element and the adjusting assembly and is disposed in the light guide channel, and partially extends into the light guide tube.
9. The processing equipment according to claim 6, characterized in that, The cavity also includes a furnace body and a heating layer; the heating layer is sleeved on the outer surface of the furnace body; the light guide tube is also used to isolate the heating layer from the light guide channel.
10. The processing equipment according to claim 6, characterized in that, The cavity extends along a first direction; in a third direction Z, the base has a through hole, the universal joint has a through hole, and the steering seat has a central hole, the through hole, the through hole, and the central hole constitute the light guide channel of the adjustment assembly; wherein, the third direction and the first direction are located in a vertical plane.