Anti-shaking and coaxiality-adjustable seed rod device

Abstract

The utility model belongs to the field of crystal growth equipment, and discloses an anti-shake and coaxiality-adjustable seed crystal rod device, which comprises a seed crystal rod and an anti-shake and coaxiality mechanism, and the seed crystal rod is used for connecting a lifting rod and fixing a T-shaped seed crystal; the anti-shake and coaxiality mechanisms are distributed in the circumferential directions of the top and the bottom of the T-shaped seed crystal, and when vibration generated by a lifting rod is transmitted to the device, the vibration in the horizontal direction and the axial direction is absorbed by a damping pressing piece and a spring of each anti-shake and coaxiality mechanism in a matched mode; the influence of environmental vibration on the crystal growth process is effectively reduced, the probability that the crystal growth ridge is bifurcated in the shouldering process is reduced, the yield of the crystals is ensured, the production efficiency is improved, the coaxiality of the seed crystals can be freely adjusted in the horizontal direction through the cooperation of a plurality of groups of screw-in assemblies in the circumferential direction of the bottom of the seed crystal rod, and the production efficiency is improved. And the coaxiality of the seed rod can be accurately adjusted in the crystal growth process, so that the working efficiency and operability of seeding work are improved, and the shape consistency and size precision of the crystal after the growth is finished are ensured.

Description

Technical Field

[0001] This utility model belongs to the field of crystal growth equipment technology, specifically relating to the field of lithium niobate crystal growth equipment based on the Czochralski method, and particularly to a seed crystal rod device with anti-vibration and adjustable coaxiality. Background Technology

[0002] Lithium niobate crystals possess excellent electro-optic, nonlinear optical, and piezoelectric properties, and are widely used in optical communications, laser devices, and surface acoustic wave devices. Two characteristics of lithium niobate crystals are particularly noteworthy: first, lithium niobate crystals exhibit a wide range of photoelectric effects, including piezoelectricity, electro-optics, nonlinear optical effects, photorefractive effects, photovoltaic effects, photoelasticity, and acousto-optic effects; second, the performance of lithium niobate crystals is highly tunable, due to their lattice structure and abundant defect structures. Many properties of lithium niobate crystals can be significantly controlled through crystal composition, elemental doping, and valence state adjustment.

[0003] The Czochralski method is the main method for preparing high-quality lithium niobate crystals. It mainly involves the following processes: (1) Preparing the material: The pre-synthesized polycrystalline material is placed in a platinum crucible soaked in 45% hydrochloric acid and heated in the furnace to above the melting point for preparing the material. (2) Seeding the crystal: The seed crystal rod containing the z-axis seed crystal is slowly lowered and stopped when it is 2-4 mm below the liquid surface. The change in the liquid surface is observed and the furnace temperature is adjusted until the seed crystal shows no obvious change and a necking of about 1 mm appears at the bottom. (3) Shouldering: The seed crystal is slowly pulled upward at a speed of 1-2 mm / h, while cooling at a rate of 1-2 °C / h. After the crystal diameter grows to a suitable size, the cooling is stopped. (4) Constant diameter: After the diameter expands to a suitable size, it is necessary to continue growing at a constant diameter. (5) Pulling out: After the crystal grows to a suitable size, the pulling is stopped and the cooling is stopped. The crystal is quickly lifted 5-8 mm using the operating system and pulled out of the liquid surface. (6) Cooling and annealing: After completing the above series of operations, the furnace cavity needs to be cooled. After crystal growth using the Czochralski method, a static discharge stage is required. During this stage, most of the charge inside the crystal will be concentrated on the seed crystal. If less of the seed crystal is retained, internal stress will be generated due to the large amount of charge concentrated inside the crystal, leading to crystal cracking. Currently, the fixture for detachable seed crystals is to carve grooves on the seed crystal with a file, use pins to hold the seed crystal, and then fix it with screws. Currently, the Czochralski method faces numerous challenges in crystal growth. For example, Chinese Patent Publication No. CN218465997U discloses a crystal furnace rod anti-shaking device. This device, while stabilizing the crystal, achieves seed crystal disassembly through a series of structures including a positioning post, a first positioning hole, a pull ring, a pull rod, and a spring. However, on the one hand, the seed crystals used for Czochralski growth are usually T-shaped, which is not suitable for the growth of lithium niobate crystals. Furthermore, the grooving method involves opening a hole inside the seed crystal. As the crystal mass increases, the axial tensile force gradually increases. A slight disturbance to the rotating crystal in the growth furnace can generate centrifugal force, which may cause the seed crystal to break and fall off at the grooving point. On the other hand, when removing the seed crystal from the fixture, the pin needs to be removed first, but the pin is prone to jamming during disassembly, making seed crystal disassembly quite troublesome.For example, Chinese Patent Publication No. CN213835624U discloses a single-crystal seed clamping structure. This seed clamping device has a clearance hole at the bottom for inserting the T-shaped end of the T-shaped seed crystal from bottom to top. The top of the clearance hole has a slot that mates with the T-shaped end of the T-shaped seed crystal. The slot and the clearance hole are connected and intersect to form an angle. In use, the T-shaped end of the T-shaped seed crystal is inserted into the seed clamping device from bottom to top through the clearance hole until the T-shaped end is located in the cavity. The T-shaped seed crystal is then rotated to align the T-shaped end with the slot and embed it into the slot. However, during the lifting process, the motor controlling the movement of the lifting rod starts or stops, and changes in its state generate overshoot. This overshoot is transmitted to the seed crystal via the lifting rod, causing the seed crystal to vibrate. Furthermore, external vibrations, hot airflow within the furnace, and other factors can cause minute vibrations in the lifting rod, which are transmitted to the seed crystal, causing it to oscillate. These vibrations are extremely detrimental during the crystal growth stage. During the seed crystal development stage, vibrations can easily lead to coaxiality deviations in the seed crystal, disrupting the local thermal field and temperature gradient of the contacting melt. During the shoulder formation stage, these minute vibrations are transmitted to the growing crystal, causing misalignment during crystal growth. At this time, the crystal experiences high stress, and the rapid change in diameter can easily form crystal growth ridges and bifurcations, ultimately causing cracks on the crystal surface. During the constant diameter growth stage, vibrations can cause eccentric movement of the crystal, easily resulting in irregular crystal morphology, disrupting the temperature field, and causing misjudgments.

[0004] It is evident that the growth process of lithium niobate crystals prepared by the Czochralski method suffers from crystal growth jitter and difficulty in controlling coaxiality, which seriously affects the growth quality and yield of lithium niobate crystals. Utility Model Content

[0005] This invention provides a seed crystal rod device with anti-vibration and adjustable coaxiality to solve the technical problem of crystal growth vibration and coaxiality being difficult to control during the lithium niobate crystal growth process based on the Czochralski method, which seriously affects the growth quality and yield of lithium niobate crystals.

[0006] To achieve the above objectives, the present invention adopts the following technical content:

[0007] A seed crystal rod device with anti-vibration and coaxiality adjustable includes a seed crystal rod for connection with a lifting rod; one end of the seed crystal rod is a rod body and the other end is a cylinder.

[0008] The other end of the seed crystal rod has a clearance hole from bottom to top for inserting a T-shaped seed crystal; the top of the clearance hole is provided with a slot that matches the top of the T-shaped seed crystal; when the T-shaped seed crystal is inserted from the bottom to the top of the clearance hole, the top of the T-shaped seed crystal is locked in the slot by rotating the T-shaped seed crystal.

[0009] The top of the other end of the seed crystal rod is provided with a chamber for providing rotation space for the T-shaped seed crystal; the chamber is located above the slot.

[0010] The cavity is provided with a first part of a vibration stabilization and coaxiality mechanism. The first part includes a first spring and a first damping plate connected together. The first damping plate abuts against the top of the T-shaped seed crystal.

[0011] The second part of the seed crystal rod is circumferentially inserted into the bottom of the other end. The second part includes a screw-in assembly, a second spring, and a second damping plate connected in sequence. The screw-in assembly is screwed into the bottom of the other end of the seed crystal rod and is connected to the second damping plate through the second spring. The second damping plate abuts against the bottom of the T-shaped seed crystal.

[0012] Furthermore, the seed crystal rod is connected to the lifting rod via a connecting mechanism; the connecting mechanism includes a connecting post, one end of the seed crystal rod is inserted into the connecting post, and the rod body and the connecting post are fixedly connected by a fixing screw and a nut.

[0013] Furthermore, the end of the connecting column is provided with a thread, which connects it to the lifting rod.

[0014] Furthermore, the clearance hole is perpendicular to the slot.

[0015] Furthermore, one end of the first spring is fixed to the top wall of the chamber, and the other end is connected to the first damping plate; during use, the first damping plate abuts against the top end face of the T-shaped seed crystal.

[0016] Furthermore, the screw-in assembly includes a knob that is threaded to the outer wall of the device. The knob is threaded to the outer wall of the device via a stud. One end of the second spring is fixed to the end face of the stud, and the other end is connected to the second damping plate. During use, the side wall of the bottom of the T-shaped seed crystal abuts against the second damping plate.

[0017] Furthermore, a positioning hole is provided inside the stud; a connecting rod capable of moving horizontally is inserted into the positioning hole; the second spring is sleeved on the connecting rod, one end of the connecting rod is connected to the second damping plate, and the other end is inserted into the positioning hole.

[0018] Furthermore, a second part of the anti-shake and coaxiality mechanism is inserted around the bottom of the other end of the seed crystal rod.

[0019] Furthermore, the top of the T-shaped seed crystal adopts a cubical T-shaped seed crystal top and the bottom adopts a cubical T-shaped seed crystal bottom; the four sidewalls of the bottom of the T-shaped seed crystal respectively cooperate with the second part of the four sets of anti-shake and coaxiality mechanisms.

[0020] Furthermore, the seed crystal rod is made of tungsten or molybdenum.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] This invention provides a seed crystal rod device with adjustable anti-vibration and coaxiality. The device includes a seed crystal rod and an anti-vibration and coaxiality mechanism. The seed crystal rod connects to the lifting rod and fixes the T-shaped seed crystal. The anti-vibration and coaxiality mechanism is arranged circumferentially at the top and bottom of the T-shaped seed crystal. When the lifting rod vibrates, the vibration is transmitted to the device, and the horizontal and axial vibrations are absorbed by the damping plates and springs of the anti-vibration and coaxiality mechanism. This effectively reduces the impact of environmental vibration on the crystal growth process, reduces the probability of crystal growth ridge bifurcation during shoulder formation, ensures the yield rate of crystals, and improves production efficiency. Through the cooperation of multiple sets of screw-in components at the bottom of the seed crystal rod, the coaxiality of the seed crystal can be arbitrarily adjusted in the horizontal direction. During crystal growth, the coaxiality of the seed crystal rod can be precisely adjusted, improving the efficiency and operability of crystal pulling and ensuring the shape consistency and dimensional accuracy of the crystal after growth.

[0023] In addition, this device achieves the snap-fit ​​and fixation of T-shaped seed crystals through the cooperation of the clearance hole and the slot. The cavity set above the slot provides rotation space for the T-shaped seed crystals, which facilitates the rotation of the T-shaped seed crystals and their disassembly from the clearance hole, thus ensuring the yield rate.

[0024] Preferably, in this invention, a reliable connection between the seed crystal rod and the lifting rod is achieved through a connecting mechanism. The cooperation of the connecting post, fixing screw, and nut ensures that the seed crystal rod is firmly fixed to the lifting rod, preventing it from falling off or loosening during operation and ensuring the continuity and stability of the crystal growth process.

[0025] More preferably, in this invention, the connecting mechanism includes a connecting post, and the threaded design at the end of the connecting post allows the lifting rod to be easily connected to the seed crystal rod via a threaded connection. This connection method is not only simple and quick, but also provides sufficient connection strength to ensure the stability of the seed crystal rod during operation.

[0026] Preferably, in this invention, the clearance hole and the slot are set perpendicularly, which is conducive to the smooth insertion and fixation of the T-shaped seed crystal; this design avoids jamming or deflection of the T-shaped seed crystal during the insertion process, and improves the accuracy and efficiency of installation.

[0027] Preferably, in this invention, the first spring and the first damping plate provide additional support and anti-shaking function for the T-shaped seed crystal; during operation, the first damping plate can abut against the top of the T-shaped seed crystal to reduce its shaking and improve the stability and quality of crystal growth.

[0028] Preferably, in this invention, the design of the screw-in component allows the second part of the anti-shake and coaxiality mechanism to be easily installed on the seed crystal rod; through the threaded connection of the knob and stud, and the cooperation of the second spring and the second damping plate, stable support and coaxiality adjustment of the bottom of the T-shaped seed crystal are achieved.

[0029] More preferably, in this invention, the design of positioning holes and connecting rods provides good guidance for the connecting rods and provides stable connection and support for the second spring and the second damping pressure plate. This design not only enhances the stability of the anti-shake and coaxiality mechanism, but also makes the adjustment process more flexible and convenient.

[0030] Preferably, in this invention, a second part of the anti-shake and coaxiality mechanism is inserted around the bottom of the other end of the seed crystal rod. This design further enhances the stability and coaxiality of the seed crystal rod. Through the combined action of the four sets of anti-shake and coaxiality mechanisms, the T-shaped seed crystal can maintain a more stable posture during operation, thereby improving the quality of crystal growth.

[0031] More preferably, in this invention, the top and bottom of the T-shaped seed crystal are designed with a cuboid structure, which makes its cooperation with the seed crystal rod and the anti-shake and coaxiality mechanism more tight and stable; this design not only improves the accuracy and efficiency of installation, but also enhances the stability and coaxiality of the seed crystal rod during operation.

[0032] Preferably, in this invention, the seed crystal rod is made of tungsten or molybdenum, both of which have high-temperature stability and good mechanical properties. This design enables the seed crystal rod to maintain a stable shape and performance in a high-temperature environment, thereby ensuring the quality and efficiency of crystal growth. Attached Figure Description

[0033] Figure 1 A schematic diagram of a seed crystal rod device with anti-vibration and coaxiality adjustable provided for an embodiment of this utility model;

[0034] Figure 2 A schematic diagram of the connection mechanism of a seed crystal rod device with anti-vibration and coaxiality adjustable provided for an embodiment of this utility model;

[0035] Figure 3 A partial structural schematic diagram of the anti-shake and coaxiality mechanism of a seed crystal rod device with adjustable anti-shake and coaxiality provided for an embodiment of this utility model;

[0036] Figure 4 This is a schematic diagram of another part of the anti-shake and coaxiality mechanism of a seed crystal rod device with adjustable anti-shake and coaxiality provided for an embodiment of the present utility model;

[0037] Figure 5 A schematic diagram of a T-shaped seed crystal provided for an embodiment of this utility model.

[0038] Figure label:

[0039] 1-Connecting mechanism, 2-Seed crystal rod, 3-Cavity, 4-Slot, 5-Anti-shake and coaxiality mechanism, 6-T-type seed crystal, 7-Knob, 9-Slot body, 10-Outer wall of device, 11-Allowing hole, 12-Thread, 13-Fixing screw, 14-Nut, 15-Connecting post, 16-Rod body, 17-First spring, 18-First damping plate; 21-Stud, 22-Positioning hole, 23-Connecting rod, 24-Second spring, 25-Second damping plate, 26-Inner wall of device, 27-Top of T-type seed crystal, 28-Bottom of T-type seed crystal. Detailed Implementation

[0040] To make the technical problem solved by this utility model, the technical solution, and the beneficial effects clearer, the following specific embodiments provide a further detailed description of this utility model. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0043] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0044] In the description of the embodiments of this utility model, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use, they are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the utility model. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0045] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0046] In the description of the embodiments of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0047] The present invention will now be described in further detail with reference to the accompanying drawings:

[0048] Example

[0049] As mentioned in the background section, current clamping devices cannot simultaneously address the issues of crystal growth jitter and difficulty in controlling coaxiality, and are difficult to disassemble after growth, thus affecting the growth quality and yield of lithium niobate crystals.

[0050] To address the aforementioned issues, this embodiment provides a seed crystal rod device with anti-vibration and adjustable coaxiality. This device is suitable for easy installation and removal of seed crystals during the Czochralski method of crystal growth. It is simple to operate, highly practical, and effectively controls the device, thereby ensuring the growth quality and yield of lithium niobate crystals.

[0051] like Figure 1 As shown, this embodiment provides a seed crystal rod device with anti-vibration and adjustable coaxiality, including a seed crystal rod 2: used to connect the lifting rod and fix the T-shaped seed crystal 6, and to provide rotational motion to drive the T-shaped seed crystal 6 to grow crystals in the melt;

[0052] Anti-shake and coaxiality mechanism 5: used to prevent the T-type seed crystal from shaking and to ensure the coaxiality of the T-type seed crystal and the seed crystal rod 2.

[0053] Among them, the anti-vibration mechanism of the anti-vibration and coaxiality mechanism 5 is set at the top and side of the seed crystal rod to reduce the impact of environmental vibration on crystal growth during the crystal growth process; the anti-vibration mechanism includes multiple dampers, which are connected around the T-shaped seed crystal through elastic support members, and the vibration amplitude is controlled by adjusting the stiffness of the elastic support members.

[0054] The anti-shake and coaxiality mechanism 5 has a coaxiality adjustment mechanism: used to adjust the angle and position of the seed crystal rod 2 to ensure the coaxiality of the lifting rod during crystal growth.

[0055] More specific structures include the following:

[0056] like Figure 1 As shown, this embodiment provides a seed crystal rod device with anti-vibration and adjustable coaxiality, which includes a connecting mechanism 1 disposed on the top of the seed crystal rod 2, the seed crystal rod 2, the chamber 3, the slot 4, the anti-vibration and coaxiality mechanism 5, and the T-shaped seed crystal 6.

[0057] In this embodiment, the seed crystal rod 2 is made of tungsten or molybdenum. Both tungsten and molybdenum have high-temperature stability and good mechanical properties, which enables the seed crystal rod 2 to maintain a stable shape and performance in a high-temperature environment, thereby ensuring the quality and efficiency of crystal growth.

[0058] Combination Figure 3 As shown, in this embodiment, the bottom of the seed crystal rod 2 is cylindrical, and the bottom is provided with a clearance hole 11 for the T-shaped seed crystal tip 27 of the T-shaped seed crystal 6 to be inserted from bottom to top. The top of the clearance hole 11 is provided with a slot 4 that cooperates with the T-shaped seed crystal tip 27. The slot 4 adopts a rectangular slot body 9, and the slot body 9 is connected to the clearance hole 11 and perpendicular to each other. Above the slot 4 is a chamber 3 for the T-shaped seed crystal tip 27 to rotate. The chamber 3 is connected to the clearance hole 11 and the slot 4.

[0059] like Figure 2 As shown, Figure 2The connecting mechanism 1 at the top of the seed crystal rod 2 consists of a threaded rod 12 connected to the lifting rod, a screw 13 and a bolt 14 for fixing the seed crystal rod, and a connecting post 15. The threaded rod 12 and the connecting post 15 are an integral structure, and the connecting post 15 has a through hole inside for fixing the screw 13 and the nut 14. The threaded rod 12 at the upper end of the connecting post 15 is connected to the lifting rod in the growth furnace by thread; the screw 13 at the lower end passes through the corresponding opening position of the seed crystal rod 2 and cooperates with the nut 14 to fix the seed crystal rod 2, preventing the parts from falling off during crystal growth. Considering that the screw 13 will wear due to repeated disassembly and that the metal will deform under the influence of the axial tension of the crystal in a high-temperature environment, the seed crystal rod 2 and the connecting mechanism 1 are designed separately for easy maintenance and replacement.

[0060] like Figure 3 and Figure 4 As shown, the coaxiality mechanism of the anti-shake and coaxiality mechanism 5 is specifically as follows: the bottom cross-section of the seed crystal rod 2 is cylindrical, containing a chamber 3 for placing the top of the T-shaped seed crystal 6. Four knobs 7 for adjusting concentricity are evenly distributed on the outer wall 10 (outer wall of the seed crystal rod 2). The bottom of the seed crystal rod 2 is the outer wall 10 of the device, and four knobs 7 are evenly distributed on the surface of the outer wall 10, with the four knobs differing by 90°. The four knobs 7 engage with the threaded holes on the inner wall 26 of the device. Rotating the knobs 7 clockwise moves them inward, compressing the second spring 24. The second spring causes the connecting rod 23 to also move inward. The inner side of the connecting rod 23 has a second damping plate 25, which pushes the bottom of the T-shaped seed crystal 6 inward as well. Figure 5 As shown, the top 27 and bottom 28 of the T-type seed crystal are a cuboid. The four knobs 7 abut against the four faces of the bottom 28 of the T-type seed crystal, which can arbitrarily adjust the coaxiality of the T-type seed crystal in the horizontal direction.

[0061] like Figure 4 The diagram shows a cross-sectional view of the seed crystal rod device. The anti-vibration mechanism of the anti-vibration and coaxiality mechanism 5 includes a chamber 3 for accommodating the seed crystal. The top wall of the chamber 3 is provided with a top damping structure, consisting of a first spring 17 and a first damping plate 18. The left and right sides are both left and right damping structures, consisting of a second spring 24, a connecting rod 23, and a knob 7. The first damping plate 18 is provided at the bottom of the inner cavity 3, and the first spring 17 is placed at the top to absorb the axial vibration transmitted from the seed crystal rod 2 to the T-shaped seed crystal 6. The four sides of the T-shaped seed crystal 6 are in close contact with the second damping plate 25. The other end of the damping plate 25 is connected to the spring 24. The spring 24 is sleeved on the outer side of the outer wall of the connecting rod 23, and the connecting rod 23 is sleeved in the positioning hole 22 inside the knob 7. Through the above structure, the horizontal vibration of the seed crystal rod 2 can be effectively absorbed by the damping plate and the spring.

[0062] like Figure 5As shown, the T-type seed crystal 6 is a lithium niobate single crystal, which is cut into a T-type seed crystal top 27 by a wire cutting machine, and the T-type seed crystal bottom 28 is a square prism structure (or cuboid structure).

[0063] This embodiment provides a working principle for a seed crystal rod device with anti-vibration and adjustable coaxiality:

[0064] In use, the top of the seed crystal rod 2 is fixed to the growth furnace lifting rod via the connecting mechanism 1. The T-shaped seed crystal tip 27 of the T-shaped seed crystal 6 is inserted into the seed crystal rod 2 from bottom to top through the clearance hole 11 until the T-shaped seed crystal tip 27 is located in the chamber 3. Then, the T-shaped seed crystal 6 is rotated 90° so that the T-shaped seed crystal tip 27 corresponds to the slot 4 (slot body 9). The T-shaped seed crystal 6 is then lowered so that the T-shaped seed crystal tip 27 is embedded in the slot 4. The four knobs 7 of the anti-shake and coaxiality mechanism 5 are rotated clockwise to adjust the position of the T-shaped seed crystal 6. When the bottom end 28 of the T-shaped seed crystal 6 rotates stably instead of circling, the axis of the T-shaped seed crystal 6 is aligned with the axis of the lifting rod, thus enabling the device to adjust the axis of the seed crystal. After the crystal growth is complete and the furnace has cooled completely, this device can also facilitate the removal and disassembly of the crystal: First, rotate the four knobs 7 counterclockwise to lift or push the T-shaped seed crystal 6 along with the grown crystal upwards so that the top 27 of the T-shaped seed crystal leaves the slot 4 and enters the chamber 3. Then, rotate the T-shaped seed crystal 6 90° so that the top 27 of the T-shaped seed crystal aligns with the clearance hole 11. By moving the T-shaped seed crystal 6 downwards through the clearance hole 11, the T-shaped seed crystal 6 and the grown crystal can be completely removed.

[0065] This embodiment provides a seed crystal rod device with anti-vibration and adjustable coaxiality, which has the following advantages:

[0066] First, this device has an anti-vibration function. Shock-absorbing mechanisms are provided around the bottom and top of the T-shaped seed crystal. When the lifting rod generates vibration, it is transmitted to this device. The horizontal and axial vibrations are absorbed and supplemented by the damping plates and springs. This effectively reduces the impact of environmental vibration on the crystal growth process, reduces the probability of crystal growth ridge bifurcation during the shoulder formation process, ensures the yield of crystals, and improves production efficiency.

[0067] Secondly, this device has a coaxiality adjustment function. By adjusting the four knobs on the outer wall of the device, the coaxiality of the T-type seed crystal can be adjusted arbitrarily in the horizontal direction. The coaxiality of the seed crystal rod can be precisely adjusted during the crystal growth process, which improves the efficiency and operability of the crystal pulling work and ensures the shape consistency and dimensional accuracy of the crystal after growth.

[0068] Third, the entire device has a simple structure, and the T-shaped seed crystal is easy to disassemble, protecting the T-shaped end of the seed crystal and reducing the probability of cracking caused by internal charge disorder in the crystal. This device is easy to operate and maintain and can be widely used in the industrial production of high-precision lithium niobate crystals.

[0069] The above embodiments are merely one of the implementation methods to achieve the technical solution of this utility model. The scope of protection claimed by this utility model is not limited to this embodiment, but also includes any variations, substitutions and other implementation methods that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this utility model.

Claims

1. A seed crystal rod device with anti-vibration and adjustable coaxiality, characterized in that, Includes a seed crystal rod (2) for connection with the lifting rod; one end of the seed crystal rod (2) is a rod body (16), and the other end is a cylinder; The bottom of the other end of the seed crystal rod (2) is provided with a clearance hole (11) for inserting a T-shaped seed crystal (6) from bottom to top; the top of the clearance hole (11) is provided with a slot (4) that matches the top of the T-shaped seed crystal (6); when the T-shaped seed crystal (6) is inserted from the bottom to the top of the clearance hole (11), the top of the T-shaped seed crystal (6) is engaged in the slot (4) by rotating the T-shaped seed crystal (6); The top of the other end of the seed crystal rod (2) is provided with a chamber (3) for providing rotation space for the T-shaped seed crystal (6); the chamber (3) is located above the slot (4); The chamber (3) is provided with a first part of a stabilization and coaxiality mechanism (5). The first part includes a first spring (17) and a first damping plate (18) connected together. The first damping plate (18) abuts against the top of the T-shaped seed crystal (6). The second part of a plurality of anti-shake and coaxiality mechanisms (5) is inserted circumferentially into the bottom of the other end of the seed crystal rod (2). The second part includes a screw-in assembly, a second spring (24) and a second damping plate (25) connected in sequence. The screw-in assembly is screwed into the bottom of the other end of the seed crystal rod (2) and is connected to the second damping plate (25) through the second spring (24). The second damping plate (25) abuts against the bottom of the T-shaped seed crystal (6).

2. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, The seed crystal rod (2) is connected to the lifting rod through the connecting mechanism (1); the connecting mechanism (1) includes a connecting post (15), one end of the rod body (16) of the seed crystal rod (2) is inserted into the connecting post (15), and the rod body (16) and the connecting post (15) are fixedly connected by the fixing screw (13) and the nut (14).

3. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 2, characterized in that, The end of the connecting column (15) is provided with a thread (12), which is connected to the lifting rod through the thread (12).

4. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, The clearance hole (11) is perpendicular to the slot (4).

5. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, One end of the first spring (17) is fixed to the top wall of the chamber (3), and the other end is connected to the first damping plate (18); during use, the first damping plate (18) abuts against the top end face of the T-shaped seed crystal (6).

6. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, The screw-in assembly includes a knob (7) that is threaded to the outer wall (10) of the device. The knob (7) is threaded to the outer wall (10) of the device via a stud (21). One end of the second spring (24) is fixed to the end face of the stud (21), and the other end is connected to the second damping plate (25). During use, the side wall at the bottom of the T-shaped seed crystal (6) abuts against the second damping plate (25).

7. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 6, characterized in that, The stud (21) has a positioning hole (22) inside; a connecting rod (23) that can move horizontally is inserted into the positioning hole (22); the second spring (24) is sleeved on the connecting rod (23), one end of the connecting rod (23) is connected to the second damping plate (25), and the other end is inserted into the positioning hole (22).

8. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, The second part of the anti-shake and coaxiality mechanism (5) is inserted around the bottom of the other end of the seed crystal rod (2).

9. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 8, characterized in that, The top of the T-shaped seed crystal (6) adopts a cubic structure T-shaped seed crystal top (27), and the bottom adopts a cubic structure T-shaped seed crystal bottom (28); the four sides of the bottom of the T-shaped seed crystal (28) are respectively matched with the second part of the four sets of anti-shake and coaxiality mechanisms (5).

10. The seed crystal rod device with anti-vibration and coaxiality adjustable according to claim 1, characterized in that, The seed crystal rod (2) is made of tungsten or molybdenum.

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