Inner container detection jig of front open type wafer transfer box

Abstract

The utility model relates to an inner container detection tool of a front open type wafer transmission box, which comprises a support bottom plate, a vertical installation side plate arranged on the rear side of the support bottom plate, a lifting assembly arranged on the front side of the support bottom plate, and a front open type wafer transmission box arranged on the lifting assembly. The height change of the front open type wafer conveying box relative to the supporting bottom plate is realized by the lifting assembly; four guide shaft sleeves distributed at four corners are vertically arranged on the mounting side plate, horizontal shaft rods are movably inserted into the guide shaft sleeves, the front ends of the horizontal shaft rods penetrate through the mounting side plate, a width detection block is jointly connected between the front ends of every two horizontally adjacent horizontal shaft rods, and the upper width detection block and the lower width detection block are in mirror symmetry; the bottom end of the width detection block horizontally extends outwards to form a flatness detection strip, and the rear ends of the four horizontal shaft rods are jointly connected with a push-pull plate. The inner container detection jig provided by the utility model is simple and practical in structure, and can be flexibly matched with manual detection operation so as to achieve the purpose of reducing the cost.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, specifically, it shows a front opening wafer transfer box's inner container detection fixture. BACKGROUND

[0002] Wafer is the silicon chip used for making silicon semiconductor integrated circuit, because its shape is circular, so it is called wafer. The raw material of wafer is silicon, high-purity polycrystalline silicon is dissolved and then added into silicon crystal seed, then slowly draw out to form cylindrical monocrystalline silicon, after grinding, polishing and slicing, silicon wafer is formed.

[0003] FOUP (Front Opening Unified Pod, front opening wafer transfer box) as an important container for protecting, transporting and storing wafers, the main function is to ensure that wafers are not polluted by impurities such as dust in the external environment during transmission between different production machines, so as to improve the production yield of wafers.

[0004] The front opening wafer transfer box is prone to deformation due to unstable raw material supply or long-term use, resulting in abnormal box pitch of the metal frame box. When the degree of deformation exceeds the allowable range, it will have adverse effects on the wafers stored therein. In order to prevent damage to the wafers and equipment caused by the deformation of the wafer transfer box, it is necessary to regularly detect the degree of deformation of the wafer transfer box. The current special detection equipment for automatic detection of front opening wafer transfer box is expensive, and the cost of equipment maintenance and personnel training is very high. INVENTION CONTENTS

[0005] The utility model aims at providing a front opening wafer transfer box's inner container detection fixture, simple and practical structure, can flexible cooperation manual detection operation.

[0006] The technical scheme is as follows:

[0007] A front opening wafer transfer box's inner container detection fixture, including support bottom plate, the rear side of support bottom plate is provided with vertical installation side plate, the front side of support bottom plate is provided with lifting assembly, and the front opening wafer transfer box is placed on lifting assembly, and the height change of front opening wafer transfer box relative to support bottom plate is realized by lifting assembly;Four four-corner distributed guide shaft sleeves are vertically arranged on the installation side plate, and horizontal shaft rods are movably inserted into the guide shaft sleeves, the front end of horizontal shaft rod penetrates through the installation side plate, and a width detection block is connected between the front ends of two adjacent horizontal shaft rods, the upper and lower width detection blocks are mirror-symmetric, the bottom end of width detection block extends outward to form a flatness detection strip, and the rear ends of four horizontal shaft rods are connected to a push-pull plate.

[0008] Further, one side of the width detection block is provided with a slot for inserting the end of the horizontal shaft rod, and the slot is tightly inserted with the horizontal shaft rod. Thus, the width detection block of different sizes can be replaced to match the width detection of the front opening unified pods of different widths.

[0009] Further, a sensor is embedded in the other side of the width detection block. Thus, the sensor can automatically identify the height position of the wafer placing groove in the front opening unified pod, and the width detection block can be accurately inserted into a wafer placing groove.

[0010] Further, the lifting assembly comprises a horizontal lifting plate, the bottom of the lifting plate is movably inserted with four vertical guide rods through four guide sleeves, the upper end of the vertical guide rod penetrates through the lifting plate, and the lower end of the vertical guide rod is connected to the supporting bottom plate, and the supporting bottom plate is further provided with a pneumatic cylinder for driving the lifting plate to move up and down. The pneumatic cylinder drives the lifting plate to move up and down, so that a wafer placing groove in the front opening unified pod corresponds to the width detection block.

[0011] Further, the surface of the lifting plate is further provided with four positioning pin columns protruding upward. The positioning pin columns realize the positioning of the front opening unified pod, and ensure that the front opening unified pod does not shake during the detection process.

[0012] Further, the push-pull plate is in the shape of "X", and the outer side of the push-pull plate is provided with a first pull handle. The first pull handle facilitates the operator to flexibly control the forward and backward movement of the width detection block.

[0013] Further, the surface of the supporting bottom plate is further provided with a second pull handle distributed on the outer sides of the two installation side plates. The second pull handle on the two sides facilitates the operator to flexibly carry the inner container detection jig.

[0014] Compared with the prior art, the utility model has the advantages of compact structure, high practicability, realization of the detection of the width and the symmetry of the left and right placing plates of the inner container of the front opening unified pod, fast detection efficiency, and the purpose of reducing cost. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a related structure diagram of the front opening unified pod;

[0016] Figure 2 is a structure diagram of the inner container detection jig of the front opening unified pod according to an embodiment of the utility model;

[0017] Figure 3 is a related diagram of the width detection block according to an embodiment of the utility model;

[0018] Corresponding marks in the drawings: 1-front opening wafer transfer box, 10-accommodation area, 11-placing plate; 2-supporting bottom plate, 3-mounting side plate, 4-lifting assembly, 5-width detection block, 6-flatness detection strip, 7-pushing and pulling plate, 21-second pull handle, 31-guide shaft sleeve, 32-horizontal shaft rod, 41-lifting plate, 42-guide sleeve, 43-vertical guide rod, 44-cylinder piece, 45-positioning pin column, 51-slot, 52-sensor, 71-first pull handle. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model

[0020] The utility model embodiment provides a kind of inner container detection fixture of front opening wafer transfer box, to solve the technical problem proposed in background art.

[0021] As Figure 1 Shown in the figure. Specifically, the object to be detected in the present embodiment is front opening wafer transfer box 1, which has an inner container, and the two sides of the inner container are provided with a plurality of pairs of left-right symmetrical placing plates 11, and the upper and lower pairs of placing plates 11 constitute an accommodation area 10 for placing a wafer. The inner container detection fixture of the present embodiment is mainly used to quickly judge whether the width of the accommodation area meets the specifications and whether the two placing plates on the left and right sides have deformation problems.

[0022] Please refer to Figure 2 , Figure 3As shown, the present embodiment proposes a kind of inner container detection jig for front opening wafer carrier, to cooperate with artificial detection operation.The inner container detection jig includes a horizontally arranged support base plate 2, a vertical mounting side plate 3 is arranged on the rear side of support base plate 2, a lifting assembly 4 is arranged on the front side of support base plate 2, front opening wafer carrier 1 is placed on lifting assembly 4, and the height of front opening wafer carrier 1 relative to support base plate 2 is changed by lifting assembly 4;Four guide shaft sleeves 31 vertically arranged on mounting side plate 3, horizontal shaft 32 can be movably inserted in guide shaft sleeve 31, the front end of horizontal shaft 32 penetrates through mounting side plate 3, the front end of horizontally adjacent two horizontal shafts 32 is commonly connected with a width detection block 5, for detecting whether the width of the containing area 10 in the inner container of front opening wafer carrier 1 meets the specification, the upper and lower two width detection blocks 5 are mirror-symmetric, the bottom end of width detection block 5 extends outward to form flatness detection strip 6, for detecting whether the deformation problem exists in the left and right two placing plates 11 in the inner container of front opening wafer carrier 1, the rear end of four horizontal shafts 32 is commonly connected with a push-pull plate 7, and the operator pushes and pulls the push-pull plate to make width detection block and flatness detection strip freely enter and exit the inner container of front opening wafer carrier.

[0023] The detection work of the inner container detection jig of the present embodiment to front opening wafer carrier is very simple and convenient, first, front opening wafer carrier 1 is placed on lifting assembly 4, so that the inner container of front opening wafer carrier 1 faces the direction of mounting side plate 3, the height of front opening wafer carrier is adjusted to ensure that width detection block 5 can smoothly enter single containing area 10 in the inner container;The operator pushes and pulls the above-mentioned push-pull plate 7 to make width detection block 5 horizontally move towards containing area 10, if width detection block 5 can just enter containing area 10, it indicates that the width of the inner container of front opening wafer carrier is qualified, otherwise it is not qualified;When width detection block 5 just enters containing area 10, observe the gap between the bottom end face of flatness detection strip 6 and the top face of placing plate 11, if the gap difference is very obvious, it indicates that there is deformation problem in placing plate;It can be seen that the detection efficiency of the inner container detection jig is fast, the detection method is simple and practical, and the cost is also low.

[0024] In the present embodiment, one side of width detection block 5 is provided with insertion slot 51 for inserting the end of horizontal shaft 32, and insertion slot 51 is closely inserted with horizontal shaft 32. Thus, different sizes of width detection block can be replaced to match the width detection of front opening wafer carrier with different inner container sizes, and the length and height of width detection block are designed according to the inner container of qualified front opening wafer carrier, so as to facilitate the detection of the difference between the measured product and the qualified product, and quickly judge whether the inner container of the measured product has abnormal problem.

[0025] The other side of the width detection block 5 is embedded with a sensor 52. In this way, the height position of the wafer placing groove in the FOUP can be automatically identified by the sensor, and after alignment adjustment, the width detection block can be accurately inserted into a certain wafer placing groove.

[0026] In the embodiment, the lifting assembly 4 includes a horizontal lifting plate 41, the bottom of the lifting plate 41 is movably inserted with four vertical guide rods 43 through four guide sleeves 42, the upper end of the vertical guide rod 43 penetrates through the lifting plate 41, and the lower end of the vertical guide rod 43 is connected to the supporting bottom plate 2. The supporting bottom plate 2 is also provided with a micro pneumatic cylinder 44 for driving the lifting plate 41 to move up and down. The pneumatic cylinder is used to realize the up-and-down movement of the lifting plate, and the height of the lifting plate is adjusted so that a certain wafer placing groove in the FOUP corresponds to the width detection block.

[0027] The surface of the lifting plate 41 is also provided with four positioning pin columns 45 upwardly protruding. The four positioning pin columns correspond to the four reserved holes at the bottom end of the FOUP one by one. Through the action of the positioning pin columns and the reserved holes, the positioning of the FOUP is realized, and the shaking phenomenon during detection is avoided.

[0028] The pushing and pulling plate 7 is in the shape of "X", which saves manufacturing materials, and the first pull handle 71 is arranged on the outer side of the pushing and pulling plate 7. This facilitates the operator to flexibly control the forward and backward movement of the width detection block through the first pull handle.

[0029] The surface of the supporting bottom plate 2 is also provided with the second pull handle 21 distributed on the two outer sides of the mounting side plate 3. This facilitates the operator to flexibly carry out the flexible carrying work of the inner container detection jig through the second pull handles on both sides.

[0030] The above only describes some embodiments of the present application. For those skilled in the art, without departing from the inventive concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application.

Claims

1. A testing fixture for the inner chamber of a front-opening wafer transfer box, characterized in that, The device includes a supporting base plate, a vertical mounting side plate on the rear side of the supporting base plate, and a lifting assembly on the front side of the supporting base plate. The lifting assembly is used to place a front-opening wafer transfer box, and the height of the front-opening wafer transfer box relative to the supporting base plate is changed by the lifting assembly. Four guide bushings are vertically arranged at the four corners on the mounting side plate. Horizontal shafts are movably inserted into the guide bushings. The front ends of the horizontal shafts pass through the mounting side plate. A width detection block is connected between the front ends of two horizontally adjacent horizontal shafts. The upper and lower width detection blocks are mirror-symmetrical. The bottom end of the width detection block extends horizontally outward to form a flatness detection strip. The rear ends of the four horizontal shafts are connected to a push-pull plate.

2. The inner inspection fixture for a front-opening wafer transfer box according to claim 1, characterized in that, One side of the width detection block has a slot for inserting the end of the horizontal shaft, and the slot is tightly fitted with the horizontal shaft.

3. The inner testing fixture for a front-opening wafer transfer box according to claim 2, characterized in that, A sensor is embedded in the other side of the width detection block.

4. The inner testing fixture for a front-opening wafer transfer box according to claim 1, characterized in that, The lifting assembly includes a horizontal lifting plate. The bottom of the lifting plate is movably inserted with four guide sleeves, each with a vertical guide rod. The upper end of the vertical guide rod passes through the lifting plate, and the lower end of the vertical guide rod is connected to the supporting base plate. The supporting base plate is also provided with a cylinder for driving the lifting plate to move up and down.

5. The inner testing fixture for a front-opening wafer transfer box according to claim 4, characterized in that, The surface of the raised plate is also provided with four positioning pins protruding upwards.

6. The inner testing fixture for a front-opening wafer transfer box according to claim 1, characterized in that, The push-pull plate is "X" shaped, and a first handle is provided on the outer side of the push-pull plate.

7. The inner testing fixture for a front-opening wafer transfer box according to claim 1, characterized in that, The surface of the support base plate is also provided with second handles distributed on the two outer sides of the mounting side plate.

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