Silicon diaphragm side edge parallelism detection device

Abstract

The utility model discloses a silicon diaphragm side edge parallelism detection device, which relates to the technical field of parallelism detection and is characterized by comprising a base and supporting leg columns fixedly mounted at four corners of the top of the base, a detection table is fixedly mounted at the top ends of the supporting leg columns, and a position adjusting mechanism is arranged at the center of the top of the detection table. The top of the position adjusting mechanism is provided with a distance measuring mechanism, the distance measuring mechanism comprises supports fixedly installed at the four corners of the top of the detection table, and through the arrangement of the position adjusting mechanism and the distance measuring mechanism, automatic parallelism detection of the side edge of the silicon diaphragm is achieved. The position adjusting mechanism drives a rotating plate through a motor to drive a silicon diaphragm to rotate, so that four side edges can be comprehensively measured. The distance measuring mechanism drives an infrared distance measuring instrument to move accurately through a double-shaft motor, and high-precision distance measurement is achieved. The measuring efficiency is remarkably improved, the complexity and physical output of manual measurement are reduced, the dependence on professional skills of operators is reduced, and the method is more suitable for practice of the large-scale manufacturing industry.

Description

TECHNICAL FIELD

[0001] The utility model relates to parallelism detection technical field, concretely is a kind of silicon window piece side parallelism detection device. BACKGROUND

[0002] Parallelism is a key index to measure the parallelism accuracy of two planes or two straight lines, which specifically refers to the maximum allowable error value of a plane (or an edge) relative to another plane (or another edge) in parallel direction. This parameter is widely used to evaluate the parallel state between straight lines, between planes or between straight lines and planes, wherein a straight line or a plane is set as the evaluation reference, and the straight line usually represents the straight line part of the measured sample or its straight line motion trajectory, and the plane corresponds to the plane part of the measured sample or the plane formed by the motion trajectory. In current manufacturing practice, silicon window piece, as an important optical element, after completing the production process, the parallelism measurement of its side edge becomes an indispensable link.

[0003] However, the existing measurement method mostly relies on manual operation, which is not only inefficient, but also requires operators to have high professional skills and experience. Since the four side edges of silicon window piece need to be accurately measured, this further aggravates the complexity and physical consumption of manual measurement. Therefore, we propose a new type of silicon window piece side parallelism detection device. UTILITY MODEL CONTENT

[0004] (I) Technical problem solved

[0005] In view of the shortcomings of the prior art, the utility model provides a silicon window piece side parallelism detection device, which solves the problems of manual operation, low efficiency and high professional skill requirement in the prior art.

[0006] (II) Technical scheme

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a silicon window piece side parallelism detection device, comprising a base and support foot columns fixedly installed at the top four corners of the base, the top end of the support foot column is fixedly installed with a detection table, the center of the top of the detection table is provided with a position adjusting mechanism, and the top of the position adjusting mechanism is provided with a distance measuring mechanism.

[0008] The ranging mechanism comprises a support fixedly installed at the four corners of the top of the detection table, a connecting column fixedly installed at the center of the bottom of the support, a concave bracket fixedly installed at the lower end of the connecting column, a double-shaft motor fixedly installed at the center of the bottom of the concave bracket, a screw rod fixedly installed at the output end of the double-shaft motor and rotationally connected with the concave bracket, a ball screw block threadedly connected with the outer side of the screw rod, a measuring instrument mounting piece fixedly installed at the bottom of the ball screw block, an infrared distance meter fixedly installed in the measuring instrument mounting piece, and a guide frame fixedly installed at the outer side of the ball screw block and slidingly connected with the concave bracket.

[0009] Preferably, the support is composed of four vertical columns and a cross-shaped frame, wherein the connecting column is fixedly installed at the center of the bottom of the cross-shaped frame.

[0010] Preferably, the position adjusting mechanism comprises a position adjusting motor fixedly installed at the top of the detection table, a rotating plate fixedly installed at the output end of the position adjusting motor, a pad plate fixedly installed at the top of the rotating plate, and a plurality of bearing columns fixedly connected with the rotating plate and arranged at the bottom of the rotating plate.

[0011] Preferably, the plurality of bearing columns are fixedly installed on the detection table in a circumferential and uniform manner, wherein the bearing columns are in contact with the rotating plate but do not affect the rotation of the rotating plate.

[0012] Preferably, the pad plate and the rotating plate are kept in a horizontal state, wherein the pad plate is made of a flexible material.

[0013] Preferably, the infrared distance meters are located directly above the pad plate and the rotating plate, and the number of the infrared distance meters is two.

[0014] (Three) beneficial effects

[0015] Compared with the prior art, the utility model provides a kind of, with following beneficial effects:

[0016] The utility model discloses a position adjusting mechanism and ranging mechanism are set, realize the automation parallelism detection of the side of silicon window piece. Position adjusting mechanism is driven rotating plate rotation by position adjusting motor, and then drive pad plate and the silicon window piece on it rotate, it is convenient to measure four side edges of silicon window piece one by one. Ranging mechanism is driven screw rotation by double-shaft motor, and the side of silicon window piece is accurately ranged by infrared distance meter driven by the movement of ball screw block on screw, realize the high accuracy and high efficiency of measurement. This automatic detection mode not only improves detection efficiency, reduces the complexity and physical exertion of manual measurement, and the professional skill requirement of operator is lower, more applicable to large-scale manufacturing practice. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 It is the structural schematic diagram of the utility model;

[0018] Fig. 2 The utility model discloses a position adjusting motor structure schematic view.

[0019] Fig. 3 The utility model discloses a distance measuring mechanism structure schematic view.

[0020] Fig. 4 The utility model discloses an infrared range finder structure schematic view.

[0021] In the drawing,

[0022] 1, base;

[0023] 2, support column;

[0024] 3, detection table;

[0025] 4, position adjusting mechanism;

[0026] 41, position adjusting motor; 42, rotating plate; 43, backing plate; 44, bearing column;

[0027] 5, distance measuring mechanism;

[0028] 51, support; 52, connecting column; 53, concave frame; 54, double-shaft motor; 55, screw rod; 56, ball screw block; 57, measuring instrument mounting piece; 58, infrared range finder; 59, guide frame. DETAILED DESCRIPTION

[0029] In the utility model, under the condition of not making opposite statement, the direction such as " upper, lower " that using is usually for the direction shown in the drawing, or it is for vertical, perpendicular or gravity direction; Similarly, for the convenience of understanding and description, " left, right " usually is for the left, right shown in the drawing, " inner, outer " refers to the inner, outer of the contour of each component itself, but the above-mentioned direction word is not used to limit the utility model.

[0030] The utility model provides a technical scheme:

[0031] Please refer to Figs. 1-4 A silicon window piece side parallelism detection device, including base 1 and the support column 2 of fixed installation at the top four corners of base 1, the top of support column 2 is fixedly installed with detection table 3, and the center of the top of detection table 3 is provided with position adjusting mechanism 4, and the top of position adjusting mechanism 4 is provided with distance measuring mechanism 5.

[0032] The distance measuring mechanism 5 comprises a support 51 fixedly installed at the top of the detection table 3, a connecting column 52 fixedly installed at the center of the bottom of the support 51, a concave bracket 53 fixedly installed at the lower end of the connecting column 52, a double-shaft motor 54 fixedly installed at the center of the bottom of the concave bracket 53, a screw rod 55 fixedly installed at the output end of the double-shaft motor 54 and rotationally connected with the concave bracket 53, a ball screw block 56 threadedly connected with the outer side of the screw rod 55, a measuring instrument mounting piece 57 fixedly installed at the bottom of the ball screw block 56, an infrared distance meter 58 fixedly installed in the measuring instrument mounting piece 57, and a guide bracket 59 fixedly installed at the outer side of the ball screw block 56 and slidingly connected with the concave bracket 53. The double-shaft motor 54 and the screw rod 55 are stably installed through the support 51, the connecting column 52 and the concave bracket 53, the screw rod 55 is threadedly connected with the ball screw block 56, the guide bracket 59 is slidingly matched, the accurate movement and positioning of the infrared distance meter 58 are realized, the high-precision distance measurement of the side edge of the silicon window piece is ensured, and the measurement efficiency and accuracy are improved.

[0033] Further, the support 51 is composed of four columns and a cross, wherein the connecting column 52 is fixedly installed at the center of the bottom of the cross. The support 51 is composed of four columns and a cross, the connecting column 52 is fixedly installed at the center of the bottom of the cross, which enhances the structural stability and load-bearing capacity of the distance measuring mechanism 5, ensures the stability and accuracy of the infrared distance meter 58 during movement and position adjustment, and improves the overall measurement precision and reliability.

[0034] Further, the position adjusting mechanism 4 comprises a position adjusting motor 41 fixedly installed at the top of the detection table 3, a rotating plate 42 fixedly installed at the output end of the position adjusting motor 41, a pad plate 43 fixedly installed at the top of the rotating plate 42, and a plurality of bearing columns 44 fixedly connected with the rotating plate 42 and arranged at the bottom of the rotating plate 42. The silicon window piece on the rotating plate 42 and the pad plate 43 is driven to rotate by the position adjusting motor 41, the bearing columns 44 ensure stable rotation without affecting the rotation, the overall measurement of the side edge of the silicon window piece is realized, the measurement efficiency and accuracy are improved, and the difficulty of manual operation is reduced.

[0035] Further, the plurality of bearing columns 44 are fixedly installed on the detection table 3 in a circumferential and uniform manner, wherein the bearing columns 44 are in contact with the rotating plate 42 but do not affect the rotation of the rotating plate 42. The bearing columns 44 are circumferentially and uniformly installed on the detection table 3 and are in contact with the rotating plate 42 but do not interfere with the rotation of the rotating plate 42. This design ensures the stable support and smooth rotation of the rotating plate 42, provides a basis for accurate measurement of the parallelism of the side edge of the silicon window piece, and improves the stability and reliability of the detection device.

[0036] Further, the cushion plate 43 and the rotating plate 42 are kept in a horizontal state, wherein the cushion plate 43 is made of flexible material, and the horizontal state of the cushion plate 43 and the rotating plate 42 ensures the stability of the measurement reference surface, and the flexible material of the cushion plate 43 can effectively absorb the impact force generated when the silicon window piece is placed, prevent the deformation, and further ensure the measurement accuracy, which overcomes the defect that the manual measurement in the prior art is prone to error due to improper operation.

[0037] Further, the infrared range finder 58 is located directly above the cushion plate 43 and the rotating plate 42, and the number of the infrared range finder 58 is two, which can measure the height of the silicon window piece at different positions at the same time, and the measurement data are compared to accurately determine the parallelism of the side edges of the silicon window piece, thereby improving the measurement efficiency and accuracy.

[0038] In specific use, the working principle of the utility model is as follows:

[0039] Firstly, the operator places the silicon window piece to be measured on the cushion plate 43. The cushion plate 43 is made of flexible material, which can ensure that the silicon window piece will not deform due to uneven force during the measurement process, thereby ensuring the accuracy of the measurement result.

[0040] Then, according to the size of the silicon window piece to be measured, the operator needs to adjust the position of the infrared range finder 58. At this time, the double-shaft motor 54 is started, and the motor drives the screw rod 55 to start rotating. Since the screw rod 55 and the ball screw block 56 are connected by threads, the rotation of the screw rod 55 drives the ball screw block 56 to move on the screw rod 55. At the same time, the guide frame 59 on the outside of the ball screw block 56 is slidingly connected with the recessed frame 53, which ensures the stability of the ball screw block 56 during movement. By adjusting the rotation direction and speed of the double-shaft motor 54, the operator can accurately move the two infrared range finders 58 to the appropriate position on the top of the silicon window piece.

[0041] When the infrared range finder 58 reaches the predetermined position, it measures the distance from the point on the silicon window piece directly below it to the infrared range finder 58, and the two distances are recorded as H1 and H2 respectively. The two distance values reflect the height information of the silicon window piece at the current position.

[0042] At this time, the operator starts the positioning motor 41. The output end of the positioning motor 41 is fixedly installed with the rotating plate 42, and the top of the rotating plate 42 is fixedly installed with the cushion plate 43 and the silicon window piece to be measured. Therefore, when the positioning motor 41 rotates, it drives the rotating plate 42 and the silicon window piece on the cushion plate 43 to rotate together. In order to ensure the comprehensiveness of the measurement, the positioning motor 41 usually rotates 180 degrees, so that the other side of the silicon window piece is aligned with the infrared range finder 58.

[0043] After the silicon window piece is rotated into position, the infrared distance meter 58 will again take measurements, and the two distance values measured at this time are recorded as H3 and H4. By comparing the differences between H1 and H3 and between H2 and H4, it can be preliminarily determined whether the height change of the silicon window piece before and after rotation is consistent, thereby indirectly reflecting the parallelism of the side edges thereof.

[0044] However, in order to obtain more accurate measurement results, it is also necessary to perform a reverse-side measurement of the silicon window piece. The operator removes the silicon window piece from the base plate 43, and then places it on the base plate 43 after turning it over. Then, the above-described measurement operation is repeated: on the reverse side, four points are again selected at the four positions of up, down, left and right, and the distances of these four points from the infrared distance meter 58 are recorded as H5, H6, H7 and H8.

[0045] Finally, the operator compares the eight sets of data (H1, H2, H3, H4, H5, H6, H7 and H8) obtained. If these eight data values are equal, it can be proved that the side edges of the silicon window piece are parallel. Conversely, if there are differences between these data values, it indicates that the side edges of the silicon window piece are not parallel, and further analysis and processing are required.

[0046] Through the above workflow, the silicon window piece side edge parallelism detection device can achieve accurate measurement of the parallelism of the side edges of the silicon window piece, thereby not only improving the measurement efficiency, but also reducing the requirement for the professional skills of the operator.

[0047] The above is merely a specific embodiment of the present application, but the technical features of the present application are not limited thereto. Any simple change, equivalent replacement or modification made on the basis of the present application to solve the same technical problem and achieve the same technical effect is also covered by the protection scope of the present application.

Claims

1. A silicon window sheet side edge parallelism detection device, comprising a base (1) and support columns (2) fixedly installed at the top four corners of the base (1), characterized in that: The top end of the support column (2) is fixedly installed with a detection table (3), the top center of the detection table (3) is provided with a positioning mechanism (4), and the top of the positioning mechanism (4) is provided with a distance measuring mechanism (5); The distance measuring mechanism (5) comprises a support (51) fixedly installed at the top four corners of the detection table (3), a connecting column (52) fixedly installed at the center of the bottom of the support (51), a recessed frame (53) fixedly installed at the lower end of the connecting column (52), a double-shaft motor (54) fixedly installed at the center of the bottom of the recessed frame (53), a screw rod (55) fixedly installed at the output end of the double-shaft motor (54) and rotatably connected with the recessed frame (53), a ball screw block (56) threadedly connected to the outer side of the screw rod (55), a measuring instrument mounting piece (57) fixedly installed at the bottom of the ball screw block (56), an infrared range finder (58) fixedly installed in the measuring instrument mounting piece (57), and a guide frame (59) fixedly installed on the outer side of the ball screw block (56) and slidingly connected with the recessed frame (53).

2. The device for detecting parallelism of side edges of a silicon window sheet according to claim 1, wherein: The support (51) is composed of four vertical columns and a cross frame, and the connecting column (52) is fixedly installed at the center of the bottom of the cross frame.

3. The device for detecting parallelism of side edges of a silicon window sheet according to claim 1, wherein: The positioning mechanism (4) comprises a positioning motor (41) fixedly installed at the top of the detection table (3), a rotating plate (42) fixedly installed at the output end of the positioning motor (41), a backing plate (43) fixedly installed at the top of the rotating plate (42), and a plurality of bearing columns (44) fixedly connected with the rotating plate (42) and arranged at the bottom of the rotating plate (42).

4. The apparatus for detecting parallelism of side edges of a silicon window sheet according to claim 3, wherein: The plurality of bearing columns (44) are fixedly installed on the detection table (3) in a circumferential and uniform manner, wherein the bearing columns (44) are in contact with the rotating plate (42) but do not affect the rotation of the rotating plate (42).

5. The apparatus for detecting parallelism of side edges of a silicon window sheet according to claim 4, wherein: The backing plate (43) and the rotating plate (42) are both kept in a horizontal state, wherein the backing plate (43) is made of flexible material.

6. The apparatus of claim 5, wherein: The infrared range finder (58) is located directly above the backing plate (43) and the rotating plate (42), and the number of the infrared range finder (58) is two.

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