Carrier plate

Abstract

The utility model relates to the technical field of photovoltaic cells, in particular to a carrier plate, which comprises a carrier plate frame, a temperature measuring sheet, a longitudinal clamping rod and a transverse clamping rod. The longitudinal clamping rods and the transverse clamping rods are vertically arranged on the carrier plate frame in a sliding mode, the at least two longitudinal clamping rods are arranged in parallel, the at least two transverse clamping rods are arranged in parallel, and the longitudinal clamping rods and the transverse clamping rods define a temperature measuring frame; the longitudinal clamping rods and the transverse clamping rods are encircled to form the position and size adjustable temperature measuring frame capable of arranging the temperature measuring sheets, so that the temperature measuring sheets with different sizes can be adapted, and the problem that in the prior art, when the PVD carrier plate is used for measuring the temperature, due to the limitation of a clamping groove frame, the temperature measuring glass sheets of a single model can only be borne at a fixed position is solved; adjustment can be carried out conveniently according to needs, and different temperature measurement requirements are met.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic cell and technical field, especially involve a carrier plate. BACKGROUND

[0002] In photovoltaic cell production, a uniform and dense ITO film can be deposited on the surface of photovoltaic material by PVD (Physical Vapor Deposition) magnetron sputtering coating technology to improve the photoelectric conversion efficiency and stability of the cell. In the PVD production process, the uniformity of temperature is crucial to the uniformity of the deposited film. If the substrate temperature is not uniform, it will lead to different growth rates of the film at different positions, thus affecting the performance and appearance of the cell. Therefore, strict detection and control of temperature are required. The existing PVD production temperature detection is mainly realized by the cooperation of a carrier plate, a temperature detector and a temperature measuring sheet. When measuring temperature, the temperature measuring sheet is fixed in the clamping groove of the carrier plate to measure temperature.

[0003] However, the size of the existing PVD carrier plate clamping groove is designed according to the size of the corresponding type of cell, while the temperature measuring glass sheet is provided with multiple types according to different temperature measuring needs. The existing PVD carrier plate can only carry a single type of temperature measuring glass sheet due to the limitation of the clamping groove frame when measuring temperature, which is difficult to meet different temperature measuring needs. In addition, the position of the carrier plate clamping groove is fixed and cannot be arbitrarily selected to set the temperature measuring sheet according to the needs of temperature measurement. SUMMARY

[0004] The utility model aims at providing a carrier plate to solve the technical problem that the PVD carrier plate in the prior art can only carry a single type of temperature measuring glass sheet due to the limitation of the clamping groove frame when measuring temperature, which is difficult to meet different temperature measuring needs, and the position of the carrier plate clamping groove is fixed and cannot be arbitrarily selected to set the temperature measuring sheet according to the needs of temperature measurement.

[0005] The utility model embodiment provides a carrier plate, which comprises a carrier plate frame, a temperature measuring sheet, a longitudinal clamping rod and a transverse clamping rod.

[0006] The longitudinal clamping rod is slidably arranged in the carrier plate frame along a first direction, and at least two longitudinal clamping rods are arranged in parallel.

[0007] The transverse clamping rod is slidably arranged in the carrier plate frame along a second direction, the first direction is perpendicular to the second direction, and at least two transverse clamping rods are arranged in parallel.

[0008] The longitudinal clamping rod and the transverse clamping rod form a temperature measuring frame, and the temperature measuring sheet is arranged in the temperature measuring frame and can move along the first direction or the second direction.

[0009] Further, the carrier frame comprises four frame rods connected in sequence and end to end, wherein two of the frame rods are arranged in parallel along a first direction, and the other two frame rods are arranged in parallel along a second direction.

[0010] Further, the frame rod is arranged in a C shape in a cross section perpendicular to the extension direction thereof.

[0011] Further, the frame rod is arranged with a frame guide groove in the extension direction thereof.

[0012] The two ends of the longitudinal clamping rod are respectively arranged in the frame guide groove in a sliding manner.

[0013] The two ends of the transverse clamping rod are respectively arranged in the frame guide groove in a sliding manner.

[0014] Further, the longitudinal clamping rod is arranged with a limiting groove in the extension direction thereof, and the transverse clamping rod is arranged through the limiting groove.

[0015] Further, the carrier frame further comprises a support beam, two ends of the support beam are respectively connected with two frame rods arranged opposite to each other, so as to improve the structural strength of the carrier frame.

[0016] Further, the temperature measuring frames are arranged in an array in the carrier frame, and a plurality of temperature measuring sheets are respectively arranged in a plurality of temperature measuring frames.

[0017] Further, the carrier further comprises a temperature measuring instrument and a temperature measuring wire, the temperature measuring instrument is fixed to the temperature measuring frame, and two ends of the temperature measuring wire are respectively connected with the temperature measuring instrument and the temperature measuring sheet.

[0018] Further, the carrier frame is arranged with a protective box, and the temperature measuring instrument is arranged in the protective box.

[0019] Further, the temperature measuring wire is bonded to the longitudinal clamping rod,

[0020] and / or, the temperature measuring wire is bonded to the transverse clamping rod.

[0021] The utility model provides a kind of carrier plate, including carrier plate frame, temperature measuring sheet, longitudinal clamping rod and transverse clamping rod;Longitudinal clamping rod is slidably arranged in carrier plate frame along first direction, transverse clamping rod is slidably arranged in carrier plate frame along second direction, first direction and second direction are perpendicularly arranged, at least two longitudinal clamping rods are parallelly arranged, at least two transverse clamping rods are parallelly arranged, longitudinal clamping rod and transverse clamping rod are enclosed to form temperature measuring frame, temperature measuring sheet is arranged in temperature measuring frame.The size of temperature measuring frame can be adjusted by the sliding of longitudinal clamping rod and transverse clamping rod, can adapt to different models, size of temperature measuring sheet, can satisfy different temperature measuring needs;And, by the sliding of longitudinal clamping rod and transverse clamping rod, the relative position of temperature measuring frame in carrier plate can also be conveniently adjusted, and temperature measuring position can be arbitrarily selected according to temperature measuring needs.In short, the carrier plate provided by the utility model can adapt to different models, size of temperature measuring sheet according to temperature measuring needs, and temperature measuring position can be conveniently adjusted according to temperature measuring needs. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the drawings needed to be used in the specific embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0023] Figure 1 The overall structure schematic diagram of the carrier plate provided by the embodiments of the utility model is shown in the figure.

[0024] Figure 2 The partial enlarged view of A in the figure provided by the embodiments of the utility model is shown in the figure. Figure 1

[0025] Reference signs:

[0026] 100, carrier plate frame;110, frame rod;111, frame guide slot;

[0027] 200, longitudinal clamping rod;210, limiting slot;

[0028] 300, transverse clamping rod;

[0029] 400, temperature measuring sheet;

[0030] 500, temperature measuring instrument;

[0031] 600, temperature measuring line. DETAILED DESCRIPTION

[0032] ​In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0033] Some embodiments of the present application will be described in detail below in combination with the drawings. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0034] As shown in Figure 1 and Figure 2 The embodiments of the present application provide a carrier plate, which comprises a carrier plate frame 100, a temperature measuring sheet 400, a longitudinal clamping rod 200 and a transverse clamping rod 300. The longitudinal clamping rod 200 is arranged in the carrier plate frame 100 in sliding mode along a first direction, and the transverse clamping rod 300 is arranged in the carrier plate frame 100 in sliding mode along a second direction. The first direction is arranged perpendicularly to the second direction. At least two longitudinal clamping rods 200 are arranged in parallel. At least two transverse clamping rods 300 are arranged in parallel. The longitudinal clamping rod 200 and the transverse clamping rod 300 form a temperature measuring frame. The temperature measuring sheet 400 is arranged in the temperature measuring frame.

[0035] That is, the carrier plate provided by the embodiments of the present application forms a temperature measuring frame capable of arranging the temperature measuring sheet 400 by surrounding the longitudinal clamping rod 200 and the transverse clamping rod 300. The position of the temperature measuring frame is adjusted by sliding the longitudinal clamping rod 200 and the transverse clamping rod 300, so that the temperature measuring position is adjusted in real time. The size of the temperature measuring frame can be adjusted in real time to adapt to temperature measuring sheets of different models and sizes. The problem that the temperature measuring position cannot be adjusted and it is difficult to adapt to temperature measuring sheets of multiple models in the prior art PVD carrier plate is solved. The flexibility of PVD temperature measurement is improved, which provides favorable conditions for strict detection and control of temperature in PVD production.

[0036] Specifically, the carrier frame 100 is in the shape of a rectangle as a whole, and a cavity is arranged at the center of the carrier frame 100. The longitudinal clamping rods 200 and the transverse clamping rods 300 can be specifically arranged in the shape of long bar members. The two ends of the longitudinal clamping rods 200 are respectively arranged in the edge frame slots 111 of the two edge frame members 110 arranged in parallel along the first direction, and the two ends of the transverse clamping rods 300 are respectively arranged in the edge frame slots 111 of the two edge frame members 110 arranged in parallel along the second direction.

[0037] Further, the carrier frame 100 comprises four edge frame members 110 connected in sequence in a head-to-tail manner, wherein two edge frame members 110 are arranged in parallel along the first direction, and the other two edge frame members 110 are arranged in parallel along the second direction.

[0038] Specifically, the four edge frame members 110 are connected in sequence in a head-to-tail manner by means of bolts or welding, thereby forming a rectangular frame. Thus, the carrier frame 100 can be used to carry a substrate. The two edge frame members 110 arranged in parallel along the first direction and the other two edge frame members 110 arranged in parallel along the second direction can be used in cooperation with the sliding of the longitudinal clamping rods 200 and the transverse clamping rods 300 to facilitate the adjustment of the position of the temperature measurement frame.

[0039] Further, the edge frame member 110 is arranged in the shape of a C along the cross section perpendicular to the extending direction of the edge frame member 110.

[0040] Specifically, the edge frame member 110 is arranged in the shape of a C along the cross section perpendicular to the extending direction of the edge frame member 110, and the opening direction of the edge frame member 110 is arranged to be away from the center of the carrier frame 100, thereby forming an edge frame slot on the carrier frame 100, which facilitates the transportation of the carrier.

[0041] Further, the edge frame member 110 is arranged with an edge frame guide slot 111 along the extending direction of the edge frame member 110; the two ends of the longitudinal clamping rod 200 are respectively arranged in the edge frame guide slots 111 of the two edge frame members 110 arranged in parallel along the first direction; and the two ends of the transverse clamping rod 300 are respectively arranged in the edge frame guide slots 111 of the two edge frame members 110 arranged in parallel along the second direction.

[0042] Specifically, the frame guide groove 111 is arranged at the middle of the frame rod 110, and the two ends of the longitudinal clamping rod 200 are respectively arranged in the frame guide grooves 111 of the two frame rods 110 and slide along the frame guide grooves 111. The longitudinal clamping rod 200 can be arranged as a square rod, and threads are arranged at the two ends thereof, and the two ends thereof pass through the frame guide grooves 111 and are fixed in the carrier plate frame 100 by bolts. The structure of the transverse clamping rod 300 is the same as that of the longitudinal clamping rod 200, and the transverse clamping rod 300 is arranged in the frame guide grooves 111 of the two frame rods 110 in the second direction. By arranging the frame guide grooves 111, the sliding of the longitudinal clamping rod 200 and the transverse clamping rod 300 can be more conveniently adjusted.

[0043] Preferably, the longitudinal clamping rod 200 is provided with a limiting groove 210 in the extending direction thereof, and the transverse clamping rod 300 passes through the limiting groove 210.

[0044] Specifically, the limiting groove 210 is arranged at the middle of the longitudinal clamping rod 200, and the size of the longitudinal clamping rod 200 is greater than that of the longitudinal clamping rod 200. The longitudinal clamping rod 200 passes through the limiting groove 210 perpendicularly and slides along the limiting groove 210. In this way, the longitudinal clamping rod 200 and the transverse clamping rod 300 can be arranged to form a temperature measuring frame in the same horizontal plane, so as to facilitate the fixation of the temperature measuring sheet 400.

[0045] Further, the carrier plate frame 100 further comprises a support beam, and the two ends of the support beam are respectively connected with the two frame rods 110 arranged in parallel.

[0046] Specifically, in the embodiment, the two support beams are arranged in a cross shape, and the intersection centers of the two support beams are arranged at the center of the plane of the carrier plate frame 100. The two ends of the support beam are respectively fixedly connected with the two frame rods 110 arranged oppositely by bolts. By arranging the support beam, the strength of the carrier plate frame 100 can be effectively improved, and the service life of the carrier plate can be improved.

[0047] Further, the temperature measuring frame and the temperature measuring sheet 400 are both arranged in a plurality of forms, and the plurality of temperature measuring sheets 400 are uniformly arranged on the carrier plate.

[0048] Specifically, in the embodiment, the longitudinal clamping rod 200 and the transverse clamping rod 300 are both arranged in a plurality of forms, so that a plurality of temperature measuring frames arranged in a matrix are formed in the carrier plate frame 100, and simultaneous temperature measurement at a plurality of temperature measuring positions can be realized.

[0049] Further, the carrier plate further comprises a temperature measuring instrument 500 and a temperature measuring line 600, the temperature measuring instrument 500 is fixed to the temperature measuring frame, and the two ends of the temperature measuring line 600 are respectively connected with the temperature measuring instrument 500 and the temperature measuring sheet 400.

[0050] Specifically, the temperature measuring instrument 500 is arranged in the temperature measuring frame through bolts and enters the machine table together with the carrier plate. The temperature measuring wire is specifically a connecting wire, and all the temperature measuring pieces 400 can be connected with the temperature measuring instrument through the temperature measuring wire, so that the temperature measurement of multiple temperature measuring positions is ensured.

[0051] Preferably, a protective box is arranged on the carrier plate, the protective box is arranged in the temperature measuring frame, and the temperature measuring instrument 500 is arranged in the protective box.

[0052] Specifically, the protective box is in the same shape as the temperature measuring instrument 500, and a cavity for accommodating the temperature measuring instrument 500 is arranged in the protective box. The protective box can be fixed on the carrier plate frame 100 through bolts, and the temperature measuring instrument is arranged in the protective box. A through hole is arranged on the protective box, so that the temperature measuring wire 600 can pass through the through hole to connect the temperature measuring instrument 500 and the temperature measuring piece 400. By arranging the temperature measuring box, the temperature measuring instrument 600 can be protected in the temperature measuring box, so as to avoid damage caused by exposure to a high-vacuum and high-temperature environment.

[0053] Preferably, the temperature measuring wire 600 is bonded to the longitudinal clamping rod 200 and / or the temperature measuring wire is bonded to the transverse clamping rod 300.

[0054] Specifically, the temperature measuring wire 600 is bonded to the bottom of the longitudinal clamping rod 200 and the transverse clamping rod 300 along the arrangement direction of the longitudinal clamping rod 200 and the transverse clamping rod 300. In this way, the temperature measuring wire 600 is arranged in an orderly manner, and damage to the temperature measuring piece 400 during installation and arrangement of the temperature measuring piece 400 is avoided.

[0055] The carrier plate provided in the embodiment of the utility model is used, first, the longitudinal clamping rod 200 and the transverse clamping rod 300 need to be adjusted to increase the size of the temperature measuring frame, so that the user can place the temperature measuring piece 400 in the temperature measuring frame. Then the temperature measuring piece 400 is clamped through the sliding of the longitudinal clamping rod 200 and the transverse clamping rod 300, so that the temperature measuring piece 400 can be fixed in the temperature measuring frame and enter the deposition chamber with the carrier plate to measure the temperature. When the temperature measuring position of the temperature measuring piece needs to be adjusted, the longitudinal clamping rod 200 is controlled to slide along the first direction or the transverse clamping rod 300 is controlled to slide along the second direction, so that the temperature measuring frame moves along the first direction or the second direction, and the position of the temperature measuring piece 400 on the carrier plate frame 100 is adjusted, so that the adjustment of the temperature measuring position is realized.

[0056] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A carrier plate, comprising a carrier plate frame (100), characterized in that, It also includes a temperature measuring plate (400), a longitudinal clamping rod (200), and a transverse clamping rod (300); The longitudinal clamping rod (200) is slidably disposed on the carrier frame (100) along the first direction, and at least two longitudinal clamping rods (200) are arranged in parallel. The transverse clamping rod (300) is slidably disposed on the carrier frame (100) along the second direction, the first direction is perpendicular to the second direction, and at least two transverse clamping rods (300) are arranged in parallel. The longitudinal clamping rod (200) and the transverse clamping rod (300) surround each other to form a temperature measuring frame, and the temperature measuring plate (400) is disposed on the temperature measuring frame and can move along a first direction or a second direction.

2. The carrier plate according to claim 1, characterized in that, The carrier frame (100) includes four side frame rods (110) connected end to end in sequence, wherein two of the side frame rods (110) are arranged parallel to each other along a first direction, and the other two side frame rods (110) are arranged parallel to each other along a second direction.

3. The carrier plate according to claim 2, characterized in that, The frame rod (110) is arranged in a C-shape along a section perpendicular to its extension direction.

4. The carrier plate according to claim 2, characterized in that, The frame rod (110) is provided with a frame guide groove (111) along its extension direction; The two ends of the longitudinal clamping rod (200) are respectively slidably disposed in the frame guide groove (111); The two ends of the transverse clamping rod (300) are respectively slidably disposed in the frame guide groove (111).

5. The carrier plate according to claim 4, characterized in that, The longitudinal clamping rod (200) is provided with a limiting groove (210) along its extension direction, and the transverse clamping rod (300) is provided through the limiting groove (210).

6. The carrier plate according to claim 2, characterized in that, The carrier frame (100) also includes a support beam, the two ends of which are respectively connected to two oppositely arranged side frame rods (110) to improve the structural strength of the carrier frame (100).

7. The carrier plate according to any one of claims 1-6, characterized in that, The temperature measuring frames are arranged in an array in the carrier plate frame (100), and multiple temperature measuring plates (400) are respectively disposed in multiple temperature measuring frames.

8. The carrier plate according to any one of claims 1-6, characterized in that, The carrier plate also includes a thermometer (500) and a temperature measuring wire (600). The thermometer (500) is fixed to the temperature measuring frame, and the two ends of the temperature measuring wire (600) are respectively connected to the thermometer (500) and the temperature measuring plate (400).

9. The carrier plate according to claim 8, characterized in that, A protective box is provided on the carrier frame (100), and the thermometer (500) is located inside the protective box.

10. The carrier plate according to claim 8, characterized in that, The temperature measuring wire (600) is bonded to the longitudinal clamping rod (200). And / or, the temperature measuring wire (600) is bonded to the transverse clamping rod (300).

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