Electronic-grade hydrofluoric acid sampling device

Abstract

According to the electronic-grade hydrofluoric acid sampling device provided by the utility model, the heating cavity and the liquid storage cavity are arranged in the shell, air is input into the heating cavity through the air pump to be heated by the heating wire and then enters the extraction pipe through the hot air pipe to be heated, and a pollution source is taken away through hot air flow, so that the pollution source in the extraction pipe is effectively cleaned; a large amount of sampled hydrofluoric acid is prevented from being polluted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of chemical industry especially relates to a sampling device of electronic grade hydrofluoric acid. BACKGROUND

[0002] Electronic grade hydrofluoric acid is one of the key chemicals for cleaning and etching in semiconductor process, and trace impurity metals in electronic grade hydrofluoric acid have great influence on device quality, integration, performance and yield. Accurate monitoring of metal impurity content is particularly important for subsequent use of products.

[0003] The traditional electronic grade hydrofluoric acid sampling system directly samples in a clean cabinet with a sampling bottle aligned with a sampling port, and then adjusts the concentration according to the acidity and test quality. This method can meet the sampling requirements of chemical pure, analytical pure, superior pure, EL grade and UP grade.

[0004] However, for sampling of ultra-pure electronic grade hydrofluoric acid (UPS, UPSS), the above method can barely meet the requirements of small amount sampling, and if it is large amount sampling, there may be pollution problems. Since there are pollution sources such as containers and air in the sampling process of large amount of samples, the sampling samples will be seriously polluted, which cannot meet the requirements of sampling of ultra-pure hydrofluoric acid.

[0005] There are sampling devices that can realize the operations of bottle washing, sampling and concentration setting in the prior art, for example, a patent with publication number CN204731062U discloses a sampling device of electronic grade hydrofluoric acid. The utility model has an open bottle body and a cover body, the cover body is arranged at the opening position of the bottle body, the cover body is respectively provided with a sampling pipe, an exhaust pipe and a liquid discharge pipe, the sampling pipe and the exhaust pipe respectively extend into the bottle body from the cover body, the liquid discharge pipe extends into the bottle body from the cover body and reaches the bottom of the bottle body, the sampling pipe is respectively provided with a water inlet pipe, an air inlet pipe and an acid inlet pipe, and the water inlet pipe, the air inlet pipe and the acid inlet pipe are respectively connected with the bottle body through the sampling pipe.

[0006] In actual use, the applicant found that the cleaning ability of the foregoing sampling device is limited, and the normal temperature cleaning cannot effectively clean the pollution sources in the sampling pipe, resulting in that the large amount of sampled hydrofluoric acid is polluted, and further affecting the subsequent process. UTILITY MODEL CONTENT

[0007] Therefore, it is necessary to provide a sampling device of electronic grade hydrofluoric acid to solve the problem that the cleaning ability of the existing sampling device is limited, the normal temperature cleaning cannot effectively clean the pollution sources in the sampling pipe, resulting in that the large amount of sampled hydrofluoric acid is polluted, and further affecting the subsequent process.

[0008] To achieve the above purpose, the utility model provides a sampling device of electronic grade hydrofluoric acid, which comprises a shell, a heating cavity, an equipment cavity, a liquid storage cavity, an air pump, an air inlet pipe, an air outlet pipe, a purification valve, a hot gas pipe, a suction valve, a suction pipe and a heating wire.

[0009] The heating cavity, the device cavity and the liquid storage cavity are arranged in the interior of the shell and are not communicated with each other;

[0010] One end of the hot air pipe is communicated with the heating cavity, and the other end is communicated with the middle section of the extraction pipe, and a purification valve is arranged on the hot air pipe;

[0011] The air pump is arranged in the interior of the device cavity, an air inlet pipe is connected to the air inlet end of the air pump, the air inlet pipe penetrates through the outer wall of the shell and is connected to an external air source, and the air outlet end of the air pump is communicated with the heating cavity through the air outlet pipe;

[0012] The heating wire is fixed in the interior of the heating cavity, one end of the extraction pipe is communicated with the liquid storage cavity, and the other end is connected to the rear sampling container.

[0013] Further, the inner wall surface of the liquid storage cavity is made of plastic material.

[0014] Further, an air filter is further arranged, and the air inlet pipe is connected to the external air source through the air filter.

[0015] Further, a replaceable filter element is arranged in the air filter.

[0016] Further, the purification valve and the extraction valve are both electromagnetic valves.

[0017] Further, a control unit is further arranged, and the control unit is electrically connected with the air pump, the heating wire, the purification valve and the extraction valve.

[0018] Further, the heating wire has a plurality of heating wires, and the plurality of heating wires are uniformly distributed in the heating cavity.

[0019] Further, a liquid extraction pump is further arranged, and the liquid extraction pump is connected to the other end of the extraction pipe.

[0020] Different from the prior art, the above technical scheme sets the heating cavity and the liquid storage cavity in the shell, the air pump is used to input air into the heating cavity which is heated by the heating wire, then the hot air enters the extraction pipe to heat, and the pollution source is carried away by the hot air flow, so that the pollution source in the extraction pipe is effectively cleaned, and a large amount of sampling hydrogen fluoride is prevented from being polluted. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 The structure perspective view of the sampling device according to the embodiment;

[0022] Figure 2 The structure front view of the sampling device according to the embodiment;

[0023] Figure 3Structure top view of the sampling device described in the detailed description;

[0024] Figure 4 Structure left view of the sampling device described in the detailed description;

[0025] Figure 5 Structure right view of the sampling device described in the detailed description.

[0026] Explanation of reference signs:

[0027] 2, purifying valve; 3, hot gas pipe; 4, shell; 5, air inlet pipe; 6, suction valve; 7, suction pipe; 8, heating cavity; 9, equipment cavity; 10, liquid storage cavity; 11, air pump; 12, heating wire; 13, air outlet pipe. DETAILED DESCRIPTION

[0028] In order to make the technical content, structural features, purposes and effects of the technical scheme clear, the following will be described in detail in combination with specific embodiments and the accompanying drawings.

[0029] In this document, the term "embodiment" means that the specific features, structures or characteristics described in connection with the embodiment can be included in at least one embodiment of the present application. The term "embodiment" appearing in various places in the specification does not necessarily refer to the same embodiment, and does not particularly limit the independence or association between other embodiments. In principle, in this application, as long as there is no technical contradiction or conflict, each technical feature mentioned in each embodiment can be combined in any way to form a corresponding implementable technical scheme.

[0030] Unless otherwise defined, the meaning of the technical terms used in this document is the same as that generally understood by those skilled in the art to which the present application belongs; the use of related terms in this document is only for the purpose of describing specific embodiments, and is not intended to limit the present application.

[0031] In the description of the present application, the phrase "and / or" is used to describe the logical relationship between the objects, which means that there can be three relationships, for example, A and / or B, which means that there are three cases: A exists, B exists, and A and B exist at the same time. In addition, the character " / " in this document generally represents the logical relationship of "or" between the associated objects before and after it.

[0032] In this application, such as "first" and "second", the phrases are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual quantity, primary and secondary or order relationship between the entities or operations.

[0033] In the present application, the terms "comprise", "contain", "include", or other similar phrases used in the statements mean to encompass non-exclusive inclusion, and the terms do not exclude additional elements or additional steps from the processes, methods or products that include the stated elements, so that the processes, methods or products that include a series of elements can include not only those defined elements, but also other elements not explicitly listed, or also include elements inherent to such processes, methods or products.

[0034] In the present application, the terms "greater than", "less than", "exceed" and the like are understood as not including the number itself, and the terms "above", "below", "within" and the like are understood as including the number itself. In addition, in the description of the embodiments of the present application, the meaning of "multiple" is more than two (including two), and similar expressions related to "multiple" are also understood in this way, for example, "multiple groups", "multiple times" and the like, unless otherwise explicitly specified.

[0035] In the description of the embodiments of the present application, the spatial-related terms used, such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "perpendicular", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the specific embodiments or the drawings, and are only for the convenience of describing the specific embodiments of the present application or for the reader to understand, and do not indicate or imply that the indicated device or component must have a particular position, a particular orientation, or be constructed or operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0036] Unless otherwise explicitly specified or limited, in the description of the embodiments of the present application, the terms "mount", "connect", "connect", "fix", "set", and the like should be understood broadly. For example, the "connection" can be a fixed connection, or a detachable connection, or an integral setting; it can be a mechanical connection, or an electrical connection, or a communication connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art to which the present application belongs, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0037] Please refer to Figures 1 to 5The embodiment provides an electronic-grade hydrofluoric acid sampling device, which comprises a shell 4, a heating cavity 8, a device cavity 9, a liquid storage cavity 10, a gas pump 11, an air inlet pipe 5, an air outlet pipe 13, a purification valve 2, a hot air pipe 3, a suction valve 6, a suction pipe 7 and a heating wire 12; the heating cavity 8, the device cavity 9 and the liquid storage cavity 10 are arranged in the interior of the shell 4 and are not communicated with each other; one end of the hot air pipe 3 is communicated with the heating cavity 8, the other end is communicated with the middle section of the suction pipe 7, and the purification valve 2 is arranged on the hot air pipe 3; the gas pump 11 is arranged in the interior of the device cavity 9, the air inlet end of the gas pump 11 is connected with the air inlet pipe 5, the air inlet pipe 5 penetrates through the outer wall of the shell 4 and is connected to an external air source, and the air outlet end of the gas pump 11 is communicated with the heating cavity 8 through the air outlet pipe 13; the heating wire 12 is fixed in the interior of the heating cavity 8; one end of the suction pipe 7 is communicated with the liquid storage cavity 10, and the other end is connected to a rear-end sampling container.

[0038] The heating cavity 8 is located above the device cavity 9, and the liquid storage cavity 10 is located at the side of the heating cavity 8 and the device cavity 9.

[0039] The shell 4 can be designed as a compact cube or cuboid shape, so as to facilitate integration and operation. In terms of materials, considering the high-purity requirement and corrosiveness of the electronic-grade hydrofluoric acid, the shell 4 can be made of corrosion-resistant materials, such as polytetrafluoroethylene (PTFE) or polyfluoroethylene propylene (FEP), which have good chemical stability and chemical corrosion resistance. In order to improve the rigidity of the shell 4 and not affect its ability to store hydrofluoric acid, further, the inner wall surface of the liquid storage cavity 10 is made of plastic material, and the shell 4 itself can be made of metal material, such as stainless steel or aluminum alloy.

[0040] Since the overall volume of the device is not large, and the device cavity 9 has limited space, a small or micro gas pump 11 in the prior art can be selected, for example, a "airtight double-air-inlet micro gas pump 11", which has a double-air-inlet structure and can provide stable air flow, and is suitable for occasions that require precise control of gas flow. The specific model can be KNF Lab pump series. The size can also be adjusted according to the specific device size, and the embodiment is only an example and does not make a specific limitation on the volume.

[0041] The air inlet pipe 5, the air outlet pipe 13 and the hot air pipe 3 only need to transport normal temperature or hot air, and can select stainless steel (such as 316L stainless steel) or a conventional heat-resistant plastic pipe. Since the suction pipe 7 directly contacts the hydrofluoric acid, it must be made of high-corrosion-resistant material. For example, polytetrafluoroethylene (PTFE).

[0042] The purge valve 2 and the extraction valve 6 need to contact hydrofluoric acid, so polytetrafluoroethylene (PTFE) or polyfluoroethylene propylene (FEP) can be used as the main structure material. These plastics have excellent chemical resistance and low permeability, which can effectively prevent corrosion by hydrofluoric acid. Preferably, the purge valve 2 and the extraction valve 6 are both solenoid valves. Compared with mechanical or pneumatic devices, solenoid valves have very fast response speed, which is convenient for controlling the cleaning process and the extraction process.

[0043] The heating wire 12 can use iron-chromium-aluminum heating wire or nickel-chromium heating wire. The working principle of the heating wire 12 is to generate heat through resistance. When current passes through the heating wire 12, the resistance generates heat, thereby heating the air. Preferably, the distribution of the heating wire can be adjusted according to the specific needs of the heating area. For example, the density of the heating wire can be increased in the edge area of the heating plate, because the edge area cools faster than the middle area, which can reduce heat accumulation and improve heating uniformity. A uniform temperature ring structure can also be used, which is arranged on the circumferential edge of the heating surface and consists of a heat-conducting layer and a heat-insulating layer. By arranging a reduced-thickness area of the heat-conducting layer and a thickened area of the heat-insulating layer in the low-temperature area of the edge of the heating surface, the circumferential and radial temperature uniformity of the heating surface can be effectively improved. Alternatively, the temperature uniformity of the heating cavity can be improved by arranging a wind splitter and a barrier inside the heating cavity, uniformly loading, and using hot air circulation technology, which can improve the temperature uniformity in the heating cavity.

[0044] When it is necessary to extract hydrofluoric acid, the air pump 11 is started, the air pump 11 extracts gas from the air inlet pipe 5 and leads it out of the air outlet pipe 13. The gas enters the inside of the heating cavity 8, the heating wire 12 is powered on, the gas contacts the surface of the heating wire 12, the gas is heated, the heated gas enters the hot gas pipe 3, the purge valve 2 is opened, the extraction valve 6 is closed, then the hot gas enters the inside of the extraction pipe 7, heats the inside of the extraction pipe 7, and carries away the pollution source through the continuously charged hot gas, achieving the cleaning effect. After the operation is completed, the air pump 11 and the purge valve 2 are closed, the extraction valve 6 is opened, and the liquid pump connected to the extraction pipe 7 is started, then the liquid in the liquid storage cavity 10 flows out along the extraction pipe 7.

[0045] The new type is provided with a heating cavity 8 and a liquid storage cavity 10 in the shell 4. The air pump 11 inputs air into the heating cavity 8, which is heated by the heating wire 12, and then enters the extraction pipe 7 through the hot gas pipe 3 to heat it. The hot gas flow carries away the pollution source, effectively cleaning the pollution source in the extraction pipe 7, and avoiding pollution of a large amount of sampled hydrofluoric acid.

[0046] Further, an air filter is further included, and the air inlet pipe 5 is connected to an external air source through the air filter. The external air source can be directly connected to the atmosphere or can be connected to a clean air container to directly extract clean air. The air filter can be a HEPA filter, an activated carbon filter or an electrostatic filter, or a combination of the above filters. By erecting an air filter, air can be directly extracted from the atmosphere, which is convenient, fast and cost-saving. Specifically, the HEPA filter, which stands for High Efficiency Particulate Air, is an air filter that can efficiently capture fine particulate matter. The filtering efficiency of the HEPA filter is usually above 99.97%, and it is particularly good at filtering particles with a diameter of 0.3 microns or more. This filter is widely used in medical, pharmaceutical, electronic, food processing and other fields where air quality requirements are extremely high. The model can refer to M-HI type of H13 level. The activated carbon filter uses filter material containing activated carbon, which can effectively adsorb odors and harmful gases, creating a healthier and more comfortable environment for the factory. The model can refer to Honeywell's C8000 type. The electrostatic filter can use an electrostatic field to filter particulate matter, which can filter out very fine particles such as ozone and sulfur dioxide, and has a very obvious effect on purifying highly polluted work environments. The model can refer to Elitolon's EF-28-90 type.

[0047] Further, the air filter is provided with a replaceable filter element. By directly replacing the filter element, the filtering capacity of the air filter can be ensured to meet the requirements, avoiding insufficient air supply, which can lead to a decrease in cleaning capacity and further pollution of hydrofluoric acid.

[0048] Further, a control unit is further included, and the control unit is electrically connected to the air pump 11, the heating wire 12, the purification valve 2 and the extraction valve 6 respectively. The control unit is a PLC controller or a CPU, etc. The control unit can include a control panel, a micro processing unit, a circuit board and other structures, which directly control the air pump 11 to extract air, control the heating time or heating efficiency of the heating wire 12, control the opening and closing of the purification valve 2 and the extraction valve 6, etc., which is convenient to operate and improves work efficiency.

[0049] Further, the heating wire 12 has a plurality of heating wires 12, and the plurality of heating wires 12 are uniformly distributed in the heating cavity 8. The heating wire 12 can be arranged up and down, or a partition can be provided in the heating cavity 8 to form a zigzag air duct, and the heating wire 12 is uniformly distributed in the air duct to uniformly heat the air and improve the heating efficiency.

[0050] Further, a liquid pump is also included, which is connected with the other end of the extraction tube 7. The liquid pump can be a plunger pump, a gear pump, a peristaltic pump or a centrifugal pump, etc. Preferably, a peristaltic pump can be used, which can be used to accurately control the sampling volume. Specifically, the plunger pump is a reciprocating pump that moves fluid by the reciprocating motion of the plunger in the pump cylinder. It is suitable for high pressure and small flow conditions, commonly used in hydraulic systems and chemical industry, and the model can be A10VSO series. The gear pump transports fluid by rotating two intermeshing gears in the pump body, suitable for medium pressure and flow conditions. The model can be PBG series, which is known for its high efficiency and low noise, suitable for a variety of industrial applications. The peristaltic pump moves fluid by squeezing the hose, suitable for situations that require precise control of flow and prevent fluid contamination. The model can be YZ2515x of Lang's peristaltic pump, which is suitable for the delivery of a variety of fluids, with a wide range of flow rates and good control accuracy.

[0051] It should be noted that although the above embodiments have been described in this paper, the patent protection scope of the utility model is not limited thereby. Therefore, based on the innovative concept of the utility model, the changes and modifications of the embodiments described in this paper, or the equivalent structure or equivalent process transformation made by using the contents of the utility model specification and drawings, directly or indirectly apply the above technical solutions to other related technical fields, are all included in the protection scope of the utility model patent.

Claims

1. An electronic grade hydrofluoric acid sampling device, characterized by: The shell, heating cavity, device cavity, liquid storage cavity, air pump, air inlet pipe, air outlet pipe, purification valve, hot air pipe, extraction valve, extraction pipe and heating wire are included. The heating cavity, device cavity and liquid storage cavity are arranged in the interior of the shell and are not communicated with each other. One end of the hot air pipe is communicated with the heating cavity, and the other end is communicated with the middle section of the extraction pipe. The air pump is arranged in the interior of the device cavity. The heating wire is fixed in the interior of the heating cavity.

2. An electronic grade hydrofluoric acid sampling device as claimed in claim 1, wherein: One end of the extraction pipe is communicated with the liquid storage cavity, and the other end is connected to the rear sampling container.

3. An electronic grade hydrofluoric acid sampling device as defined in claim 1, wherein: The inner wall surface of the liquid storage cavity is made of plastic material.

4. An electronic grade hydrofluoric acid sampling device as defined in claim 3, wherein: The air filter is further included.

5. An electronic grade hydrofluoric acid sampling device as defined in claim 1, wherein: The replaceable filter element is arranged in the air filter.

6. An electronic grade hydrofluoric acid sampling device as defined in claim 5, wherein: The purification valve and the extraction valve are both electromagnetic valves.

7. An electronic grade hydrofluoric acid sampling device as defined in claim 1, wherein: The control unit is further included.

8. An electronic grade hydrofluoric acid sampling device as defined in claim 1, wherein: The multiple heating wires are uniformly distributed in the heating cavity. The liquid extraction pump is further included. The other end of the extraction pipe is connected to the liquid extraction pump.

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