Chip test probe device
The automated probe-changing testing mechanism solves the problem of manual probe changing required in existing chip testing probe devices, achieving automated probe switching and improving testing efficiency.
Patent Information
- Application Number
- CN202423033372.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-09
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-09
AI Technical Summary
Existing chip testing probe devices require manual operation when changing probes, resulting in wasted manpower and time costs and reduced testing efficiency.
A chip test probe device was designed, which adopts a probe-changing test mechanism to automatically complete the probe loading and unloading operation through motors and mechanical structures. The device includes components such as electric push rods, rotary motors, inclined blocks and pulleys to realize automatic probe switching.
No manual probe removal or installation is required, saving labor costs, significantly shortening probe replacement time, and improving chip detection efficiency.
Smart Images
Figure CN223565758U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the related technical field of semiconductor test especially, a kind of chip test probe device. BACKGROUND
[0002] In the field of semiconductor manufacturing, with the continuous improvement of chip integration, the function and performance of chip are increasingly complex and diverse, and chip testing, as a key link to ensure chip quality and reliability, is self-evident in importance. The initial chip testing mainly relies on manual operation of simple test tools. By manually connecting the probe to the pins or test points of the chip, and then using basic electrical measuring instruments such as multimeter, some basic electrical parameters of the chip such as resistance, capacitance value and simple circuit continuity are detected. This original testing method is extremely inefficient and requires high skills of the testing personnel, because any slight carelessness may damage the chip due to improper operation. Therefore, there is a particular need for a chip testing probe device.
[0003] However, the existing chip testing probe device often needs to be replaced with a probe during use. Due to the limitations of design, manual dismounting and mounting of the probe are often required during the probe replacement process, which not only wastes manpower and time costs, but also reduces the detection efficiency. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a kind of chip testing probe device to solve the problem of the existing chip testing probe device in the above background technology, which often needs to be replaced with a probe during use. Due to the limitations of design, manual dismounting and mounting of the probe are often required during the probe replacement process, which not only wastes manpower and time costs, but also reduces the detection efficiency.
[0005] To achieve the above purpose, the utility model provides the following technical scheme: a kind of chip testing probe device, including support leg, the upper surface of the support leg is fixedly connected with base, the upper surface of the base is fixedly connected with fixed pad, the upper surface of the base is fixedly connected with amplifier base, the side surface of the amplifier base is rotatably connected with chip amplifier, the upper surface of the base is fixedly connected with displacement support, the side surface of the displacement support is fixedly connected with bearing, the side surface of the bearing is fixedly connected with x displacement shaft, the side surface of the x displacement shaft is fixedly connected with x displacement motor, the side surface of the x displacement shaft is slidably connected with x displacement block, the upper surface of the x displacement block is fixedly connected with y displacement motor, the side surface of the y displacement motor is fixedly connected with y displacement shaft, the side surface of the y displacement shaft is slidably connected with y displacement block, the lower surface of the y displacement block is provided with needle replacement test mechanism;
[0006] The needle changing test mechanism comprises an electric push rod, a motor shell, a rotating motor, a motor rotating shaft, an inclined block, a rotating disc, a supporting block, a spring, a pulley, a connecting column, a telescopic test device and a probe, the lower surface of the y displacement block is fixedly connected with the electric push rod, the lower surface of the electric push rod is fixedly connected with the motor shell, the inner surface of the motor shell is fixedly connected with the rotating motor, the lower surface of the rotating motor is fixedly connected with the motor rotating shaft, the lower surface of the motor shell is fixedly connected with the inclined block, the lower surface of the motor rotating shaft is fixedly connected with the rotating disc, one side surface of the rotating disc is fixedly connected with the supporting block, the upper surface of the supporting block is fixedly connected with the spring, the upper surface of the spring is fixedly connected with the pulley, the lower surface of the pulley is fixedly connected with the connecting column, the lower surface of the connecting column is fixedly connected with the telescopic test device, and the lower surface of the telescopic test device is fixedly connected with the probe.
[0007] Preferably, the supporting feet are symmetrically arranged on the lower surface of the base, and there are four groups of supporting feet.
[0008] Preferably, the displacement supports are symmetrically arranged on the upper surface of the base, and there are two groups of displacement supports on the left and right edges of the base, the bearing, the x displacement shaft and the x displacement motor are arranged in the displacement groove on the upper surface of the displacement support, the two motors on the left and right displacement supports are of the same type, have slow rotating speed and are started at the same time during use, and the x displacement block can be smoothly displaced on the x displacement shaft.
[0009] Preferably, the y displacement motor, the y displacement shaft and the y displacement block are symmetrically arranged in the x displacement block, the two y displacement motors on the x displacement block are of the same type, have slow rotating speed and are started at the same time during use, and the y displacement block can be smoothly displaced on the y displacement shaft.
[0010] Preferably, the electric push rod satisfies the smooth displacement of the needle changing test mechanism in the z axis direction, and the supporting block, the spring, the pulley, the connecting column, the telescopic test device and the probe are arranged on the upper surface of the rotating disc.
[0011] Preferably, the surface of the inclined block is inclined at an angle of 45 degrees, and the upper surface of the inclined block is provided with a limiting sliding rail for the pulley, and the lowermost end of the limiting sliding rail on the upper surface of the inclined block is provided with a fixed notch, and the pulley is clamped and limited upward when the pulley moves to the fixed notch.
[0012] Preferably, the rotating motor is rotatably connected with the pulley through the motor rotating shaft and the rotating disc, the telescopic test device can drive the probe to stretch and retract at a high frequency, and the probe can detect the chip.
[0013] Compared with the prior art, the chip test probe device has the advantages that: the needle changing test mechanism is provided, in use, the user first observes through the chip amplifier, then starts the x displacement motor, the y displacement motor and the electric push rod to move the needle changing test mechanism, after moving to a suitable position, starts the rotating motor, the rotating motor drives the telescopic test device and the probe to rotate through the motor shaft, the rotating disc support block, the spring, the pulley and the connecting column, the user rotates the probe to the lowest end of the inclined block according to the required probe, at this time, the probe will be clamped on the inner side of the slot because the lowest end of the inclined block is provided with the fixed slot, meanwhile, the motor is completed and fixed, if the probe needs to be switched again, the motor is started again, the same motor rotates the probe to the bottom end of the inclined block for clamping and connecting, the switching of the probe is completed, in this way, the tedious needle unloading and loading operation is not needed to be manually performed, the labor cost is saved, the needle changing time is greatly saved, and the overall chip detection efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS
[0014] Figure 1 It is a side view appearance structure schematic view of the utility model;
[0015] Figure 2 It is a base, amplifier base and chip amplifier mutual cooperation structure schematic view of the utility model;
[0016] Figure 3 It is an x, y and z axis displacement device structure schematic view of the utility model;
[0017] Figure 4 It is an electric push rod, motor housing and probe mutual cooperation schematic view of the utility model;
[0018] Figure 5 It is a needle changing test mechanism internal structure schematic view of the utility model;
[0019] Figure 6 It is a single probe structure schematic view of the needle changing test mechanism of the utility model.
[0020] In the drawing: 1, support foot; 2, base; 3, fixed pad; 4, amplifier base; 5, chip amplifier; 6, displacement support; 7, bearing; 8, x displacement shaft; 9, x displacement motor; 10, x displacement block; 11, y displacement motor; 12, y displacement shaft; 13, y displacement block; 14, needle changing test mechanism; 1401, electric push rod; 1402, motor housing; 1403, rotating motor; 1404, motor shaft; 1405, inclined block; 1406, rotating disc; 1407, support block; 1408, spring; 1409, pulley; 1410, connecting column; 1411, telescopic test device; 1412, probe. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.
[0022] Please refer to Figures 1-6 The utility model provides a kind of technical scheme: a kind of chip test probe device, the upper surface of support leg 1 is fixedly connected with base 2, the upper surface of base 2 is fixedly connected with fixed pad 3, the upper surface of base 2 is fixedly connected with amplifier base 4, the side surface of amplifier base 4 is rotatably connected with chip amplifier 5, the upper surface of base 2 is fixedly connected with displacement support 6, the side surface of displacement support 6 is fixedly connected with bearing 7, the side surface of bearing 7 is fixedly connected with x displacement shaft 8, the side surface of x displacement shaft 8 is fixedly connected with x displacement motor 9, the side surface of x displacement shaft 8 is slidably connected with x displacement block 10, the upper surface of x displacement block 10 is fixedly connected with y displacement motor 11, the side surface of y displacement motor 11 is fixedly connected with y displacement shaft 12, the side surface of y displacement shaft 12 is slidably connected with y displacement block 13, the lower surface of y displacement block 13 is provided with needle changing test mechanism 14;
[0023] The needle changing test mechanism 14 comprises an electric push rod 1401, a motor housing 1402, a rotating motor 1403, a motor rotating shaft 1404, an inclined block 1405, a rotating disc 1406, a supporting block 1407, a spring 1408, a pulley 1409, a connecting column 1410, a telescopic test device 1411 and a probe 1412. The lower surface of the y displacement block 13 is fixedly connected with the electric push rod 1401. The lower surface of the electric push rod 1401 is fixedly connected with the motor housing 1402. The inner surface of the motor housing 1402 is fixedly connected with the rotating motor 1403. The lower surface of the rotating motor 1403 is fixedly connected with the motor rotating shaft 1404. The lower surface of the motor housing 1402 is fixedly connected with the inclined block 1405. The lower surface of the motor rotating shaft 1404 is fixedly connected with the rotating disc 1406. One side surface of the rotating disc 1406 is fixedly connected with the supporting block 1407. The upper surface of the supporting block 1407 is fixedly connected with the spring 1408. The upper surface of the spring 1408 is fixedly connected with the pulley 1409. The lower surface of the pulley 1409 is fixedly connected with the connecting column 1410. The lower surface of the connecting column 1410 is fixedly connected with the telescopic test device 1411. The lower surface of the telescopic test device 1411 is fixedly connected with the probe 1412. Through the setting of the electric push rod 1401, the motor housing 1402, the rotating motor 1403, the motor rotating shaft 1404, the inclined block 1405, the rotating disc 1406, the supporting block 1407, the spring 1408, the pulley 1409, the connecting column 1410, the telescopic test device 1411 and the probe 1412, when in use, the rotating motor 1403 is started. The rotating motor 1403 drives the rotation of the telescopic test device 1411 and the probe 1412 through the motor rotating shaft 1404, the rotating disc block 1406, the spring 1408, the pulley 1409 and the connecting column 1410. The user rotates the probe 1412 to the bottom end of the inclined block 1405 according to the required probe 1412. At this time, since the bottom end of the inclined block 1405 is provided with a fixed slot, the probe 1412 will be clamped in the inner side of the slot. At the same time, the motor is stopped. If it is necessary to switch the probe 1412 again, the motor is started again. The same motor rotates the probe 1412 to the bottom end of the inclined block 1405 for clamping and connection. The switching of the probe 1412 is completed. Through the setting, manual and tedious needle unloading and loading operations are not required. The labor cost is saved. The needle changing time is greatly saved. The overall chip detection efficiency is improved.
[0024] Further, the supporting legs 1 are symmetrically arranged on the lower surface of the base 2. There are four groups. The fixed pads 3 are fixedly connected to the upper surface of the base 2 through bolts. Through the setting of the supporting legs 1, when in use, the symmetrical distribution can provide uniform support for the whole chip test probe device, maintain the stability of the device as a whole, and ensure that the probe can accurately contact the chip test points, thereby reducing the test errors caused by the shaking of the device.
[0025] Further, the displacement bracket 6 is provided with two groups symmetrically on the left and right edges of the upper surface of the base 2, the bearing 7, the x displacement shaft 8 and the x displacement motor 9 are arranged in the displacement groove opened above the displacement bracket 6, the motor models on the left and right two displacement brackets 6 are the same, the rotating speed is slow and they are started at the same time in use, when the x displacement shaft 8 rotates, the x displacement block 10 can be smoothly displaced above it, through the arrangement of the displacement bracket 6, the bearing 7, the x displacement shaft 8 and the x displacement motor 9, in use, this layout provides a relatively closed and regular space for the movement of the x displacement block 10, so that the x displacement block 10 can be smoothly displaced above it, which can ensure that the needle replacement test mechanism can accurately move to the target position.
[0026] Further, the y displacement motor 11, the y displacement shaft 12 and the y displacement block 13 are symmetrically provided with two groups in the x displacement block 10, the two y displacement motors 11 on the x displacement block 10 are the same in model, the rotating speed is slow and they are started at the same time in use, when the y displacement shaft 12 rotates, the y displacement block 13 can be smoothly displaced above it, through the arrangement of the y displacement motor 11, the y displacement shaft 12 and the y displacement block 13 in the x displacement block 10, in use, the structure can realize more accurate positioning on the y axis, ensuring that the y displacement block 13 can smoothly move with the needle replacement test mechanism 14, ensuring the smooth progress of the test.
[0027] Further, the electric push rod 1401 meets the smooth displacement of the needle replacement test mechanism 14 in the z axis direction, and the support block 1407, the spring 1408, the pulley 1409, the connecting column 1410, the telescopic test device 1411 and the probe 1412 are provided with four groups on the upper surface of the rotating disc 1406, through the arrangement of the electric push rod 1401, in use, the electric push rod 1401 can bring accurate displacement to the needle replacement test mechanism 14, its accurate and smooth z axis displacement can ensure the accuracy and reliability of the test.
[0028] Further, the surface of the inclined block 1405 is inclined at forty-five degrees, and the upper surface of the inclined block 1405 is provided with a limiting slide rail for the pulley 1409, and the bottom end of the limiting slide rail above the inclined block 1405 is provided with a fixed notch, and when the pulley 1409 moves to the fixed notch, it will be upwardly clamped and limited, through the arrangement of the inclined block 1405, in use, the inclined block 1405 can make the probes 1412 at different positions at different heights, so that when the probe 1412 needs to be replaced, only the required probe 1412 needs to be rotated to the lowermost position to be used, realizing the automatic switching of the probe 1412.
[0029] Further, the rotating motor 1403 is rotatably connected with the pulley 1409 through the motor rotating shaft 1404 and the rotating disc 1406, and the telescopic testing device 1411 can drive the probe 1412 to high-frequency telescopic, so as to realize the detection of the probe 1412 on the chip, and through the setting of the telescopic testing device 1411, when in use, a large number of chips or multiple test points of the same chip need to be quickly detected, the telescopic testing device 1411 can realize rapid and continuous detection, shorten the test time of a single chip, and help to improve the production efficiency of the whole chip test production line.
[0030] Working principle: the user first observes through the chip amplifier 5, and then starts the x displacement motor 9, the y displacement motor 11 and the electric push rod 1401 to move the needle changing test mechanism 14, after moving to the appropriate position, the rotating motor 1403 is started, the rotating motor 1403 drives the telescopic testing device 1411 and the probe 1412 to rotate through the motor rotating shaft 1404, the rotating disc support block 1406, the spring 1408, the pulley 1409 and the connecting column 1410, the user rotates the probe 1412 to the bottom end of the inclined block 1405 according to the required probe 1412, at this time, since the bottom end of the inclined block 1405 is provided with a fixed slot, the probe 1412 will be clamped in the inner side of the slot, and the motor is ended and started to be fixed, if the probe 1412 needs to be switched again, the motor is started again, the same motor rotates the probe 1412 to the bottom end of the inclined block 1405 to be clamped and connected, the switching of the probe 1412 is completed, in this way, the tedious needle unloading and loading operation is not needed to be manually operated, the labor cost is saved, the needle changing time is greatly saved, and the overall chip detection efficiency is improved, wherein the model of the x displacement motor 9 and the y displacement motor 11 is YE2-132S-4, the model of the rotating motor 1403 is Y315S-2, and the model of the electric push rod 1401 is XYDHA24-800.
[0031] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.
Claims
1. A chip test probe device comprising a support foot (1), characterized in that: The upper surface of the supporting leg (1) is fixedly connected with a base (2), the upper surface of the base (2) is fixedly connected with a fixed pad (3), the upper surface of the base (2) is fixedly connected with an amplifier base (4), one side surface of the amplifier base (4) is rotatably connected with a chip amplifier (5), the upper surface of the base (2) is fixedly connected with a displacement support (6), one side surface of the displacement support (6) is fixedly connected with a bearing (7), one side surface of the bearing (7) is fixedly connected with an x displacement shaft (8), one side surface of the x displacement shaft (8) is fixedly connected with an x displacement motor (9), one side surface of the x displacement shaft (8) is slidably connected with an x displacement block (10), the upper surface of the x displacement block (10) is fixedly connected with a y displacement motor (11), one side surface of the y displacement motor (11) is fixedly connected with a y displacement shaft (12), one side surface of the y displacement shaft (12) is slidably connected with a y displacement block (13), and the lower surface of the y displacement block (13) is provided with a needle changing test mechanism (14). The needle changing test mechanism (14) comprises an electric push rod (1401), a motor housing (1402), a rotating motor (1403), a motor rotating shaft (1404), an inclined block (1405), a rotating disc (1406), a supporting block (1407), a spring (1408), a pulley (1409), a connecting column (1410), a stretch test device (1411) and a probe (1412), the lower surface of the y displacement block (13) is fixedly connected with the electric push rod (1401), the lower surface of the electric push rod (1401) is fixedly connected with the motor housing (1402), the inner side surface of the motor housing (1402) is fixedly connected with the rotating motor (1403), the lower surface of the rotating motor (1403) is fixedly connected with the motor rotating shaft (1404), the lower surface of the motor housing (1402) is fixedly connected with the inclined block (1405), the lower surface of the motor rotating shaft (1404) is fixedly connected with the rotating disc (1406), one side surface of the rotating disc (1406) is fixedly connected with the supporting block (1407), the upper surface of the supporting block (1407) is fixedly connected with the spring (1408), the upper surface of the spring (1408) is fixedly connected with the pulley (1409), the lower surface of the pulley (1409) is fixedly connected with the connecting column (1410), the lower surface of the connecting column (1410) is fixedly connected with the stretch test device (1411), and the lower surface of the stretch test device (1411) is fixedly connected with the probe (1412).
2. A chip test probe apparatus according to claim 1, wherein: The supporting leg (1) is vertically symmetrically arranged in the base (2), and four groups of the base (2) are arranged on the lower surface thereof, and the fixed pad (3) is fixedly connected with the upper surface of the base (2) through bolts.
3. The chip test probe apparatus according to claim 1, wherein: The displacement bracket (6) is provided with two groups symmetrically on the left and right edges of the upper surface of the base (2), the bearing (7), the x displacement shaft (8) and the x displacement motor (9) are arranged in the displacement groove opened above the displacement bracket (6), the motor models on the left and right displacement brackets (6) are same, the rotating speed is slow and the motors are started simultaneously during use, when the x displacement shaft (8) rotates, the x displacement block (10) can be smoothly displaced above it.
4. The chip test probe apparatus according to claim 1, wherein: The y displacement motor (11), the y displacement shaft (12) and the y displacement block (13) are symmetrically provided with two groups in the x displacement block (10), the two y displacement motors (11) on the x displacement block (10) are same in model, the rotating speed is slow and the motors are started simultaneously during use, when the y displacement shaft (12) rotates, the y displacement block (13) can be smoothly displaced above it.
5. The chip test probe apparatus according to claim 1, wherein: The electric push rod (1401) meets the smooth displacement of the needle changing test mechanism (14) in the z axis direction, and the support block (1407), the spring (1408), the pulley (1409), the connecting column (1410), the telescopic test device (1411) and the probe (1412) are provided with four groups on the upper surface of the rotating disc (1406).
6. The chip test probe apparatus according to claim 1, wherein: The surface of the inclined block (1405) is inclined at forty-five degrees, and the upper surface of the inclined block (1405) is provided with a limiting slide rail of the pulley (1409), and the bottom end of the limiting slide rail of the inclined block (1405) is provided with a fixed slot, when the pulley (1409) moves to the fixed slot, it will be upwardly clamped and limited.
7. The chip test probe apparatus according to claim 1, wherein: The rotating motor (1403) is rotatably connected with the pulley (1409) through the motor rotating shaft (1404) and the rotating disc (1406), the telescopic test device (1411) can drive the probe (1412) to high-frequency telescopic, and realizes the detection of the probe (1412) on the chip.