Drawer bin of automatic wafer box receiving device

Abstract

The utility model relates to the technical field of semiconductor wafer film pasting equipment, and provides a drawer bin of an automatic wafer box receiving device, which comprises a loading plate, and is characterized in that the loading plate comprises an upper-layer plate and a lower-layer plate which are arranged from top to bottom and are attached to each other, and a plurality of loading grooves which are arranged in a step shape from bottom to top are formed in the upper-layer plate; first mounting holes are formed in the two sides of the bottom wall of each loading groove respectively, a wire arrangement groove is formed in the lower layer plate, first sensors are mounted in the first mounting holes, and connecting wires of the first sensors are arranged in the wire arrangement groove. The loading plate overcomes the defects in the prior art, is reasonable in design and compact in structure, and solves the technical problem that an existing loading plate is single in adaptation.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor wafer film pasting equipment technical field, concretely relates to a drawer bin of wafer box automatic material receiving device. BACKGROUND

[0002] Semiconductor wafer is one of the most basic and important parts in microelectronic device manufacturing and packaging. Wafer surface circuit is a very critical part of semiconductor transistors, integrated circuits and other microelectronic devices.

[0003] After the wafer and wafer ring film pasting operation link, the wafer and wafer ring film pasted assembly product needs to be put into the wafer box, i.e. the material box, and automatically collected in the automatic production process. The material box is loaded on the loading plate, and when the material box is full, it needs to be removed and reloaded with an empty material box. Because the existing loading plate only adapts to a single specification size of material box, when the wafer and material box size change synchronously, the appropriate loading plate needs to be reinstalled, which will affect the production efficiency.

[0004] Therefore, we propose a drawer bin of wafer box automatic material receiving device. UTILITY MODEL CONTENTS

[0005] (I) Technical problem solved

[0006] In view of the shortcomings of the prior art, the utility model provides a drawer bin of wafer box automatic material receiving device, which overcomes the shortcomings of the prior art, is reasonable in design, compact in structure and solves the technical problem of single adaptation of the existing loading plate.

[0007] (II) Technical scheme

[0008] To achieve the above purpose, the utility model is realized by the following technical scheme:

[0009] A drawer bin of wafer box automatic material receiving device, comprising a loading plate, characterized in that: the loading plate comprises an upper layer plate and a lower layer plate arranged from top to bottom and attached to each other, a plurality of loading grooves are arranged on the upper layer plate in a stepped manner from bottom to top, first mounting holes are arranged on both sides of the bottom wall of each loading groove, a wire arranging groove is arranged on the lower layer plate, a first sensor is mounted in the first mounting hole, and the connecting line of the first sensor is arranged in the wire arranging groove.

[0010] Further, the first sensor is a contact sensor, and the contact sensing end of the first sensor extends out of the first mounting hole upward.

[0011] Further, a third mounting hole matched with the first sensor is arranged on the upper surface of the pad block, and the lower part of the first sensor is seated in the third mounting hole.

[0012] Further, the front end of the lower layer plate is provided with a front end positioning plate extending upward, the upper surface of the lower layer plate is provided with a plurality of threaded holes, the upper layer plate is provided with a plurality of waist-shaped holes corresponding to the threaded holes, the long axis of the waist-shaped hole extends along the left-right direction, and the upper layer plate and the lower layer plate are locked and fixed by bolts penetrating the waist-shaped holes and being screwed with the threaded holes.

[0013] Further, the drawer compartment further comprises a guide rail assembly and a linear moving assembly, the loading plate is slidably installed on the bottom plate through the guide rail assembly and is driven by the linear moving assembly, and the linear moving assembly can drive the loading plate to move out of the partition plate.

[0014] Further, the linear moving assembly comprises a motor, a gear and a rack, the motor is installed on the bottom plate and is provided with the gear at the output end, the rack is installed on the loading plate and is arranged in parallel with the guide rail assembly between the guide rail assemblies, the front end of the rack is positioned by a front end positioning block, the side of the rack is positioned by a pair of positioning pins arranged at intervals, the gear is engaged with the rack, and the front end positioning block and the positioning pins are installed on the lower end surface of the lower layer plate.

[0015] Preferably, the upper surface of the bottom plate is provided with a pair of second sensors arranged at intervals in the front-rear direction, the second sensor is a U-groove photoelectric switch, the second sensor is electrically connected with the motor, and the lower surface of the lower layer plate is provided with a light shielding plate matched with the second sensor.

[0016] (Three) beneficial effects

[0017] The utility model provides a drawer compartment of wafer box automatic material receiving device, has the following

[0018] Beneficial effects:

[0019] 1, different loading grooves can load different size material boxes, can reduce even avoid the replacement of loading plate, effectively improve production efficiency;

[0020] 2, each loading groove of the loading plate is distributed in a ladder shape, that is, adopts the layout of one ring in one ring, on the one hand, the structure is more compact, the size of the loading plate can be controlled, on the other hand, the first sensor between each loading groove is not interfered with each other by setting the first sensor on both sides;

[0021] 3, the loading plate is spliced by upper layer plate and lower layer plate, the connecting line of the first sensor is arranged in the wire arranging groove, the use of wire harness fixing bracket, adhesive tape and other connecting components is reduced, and the wire harness is built-in, the structure is more reliable and beautiful. DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the utility model;

[0023] Figure 2 is a schematic diagram of explosion of the utility model;

[0024] Figure 3 is a schematic diagram of section of the utility model;

[0025] Figure 4 is a schematic diagram of the structure of cooperation of the first sensor and the cushioning block in the utility model.

[0026] In the drawing:

[0027] 11, upper layer plate;

[0028] 111, first loading groove;

[0029] 112, second loading groove;

[0030] 113, first mounting hole;

[0031] 114, waist-shaped hole;

[0032] 12, lower layer plate;

[0033] 121, second mounting hole;

[0034] 122, wire arranging groove;

[0035] 123, threaded hole;

[0036] 13, front end positioning plate;

[0037] 31, first sensor;

[0038] 32, cushioning block;

[0039] 321, third mounting hole;

[0040] 33, second sensor;

[0041] 34, light shielding plate;

[0042] 35, tank chain;

[0043] 41, insertion strip assembly;

[0044] 42, insertion slot plate;

[0045] 43, rack;

[0046] 44, gear;

[0047] 45, motor;

[0048] 46, front end positioning block. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described in the following with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0050] Referring to the drawings Figures 1-4 The drawer bin of the wafer box automatic material collecting device comprises a loading plate, the loading plate comprises upper layer plates 11 and lower layer plates 12 arranged from top to bottom and abutting against each other, two loading grooves are formed in the upper layer plates 11 in a stepped manner from bottom to top, and the two loading grooves are a first loading groove 111 and a second loading groove 112, first mounting holes 113 are formed in the both sides of the bottom wall of each loading groove, second mounting holes 121 corresponding to the first mounting holes 113 are formed in the lower layer plates 12, and wire arranging grooves 122 communicating with the second mounting holes 121 are formed in the lower layer plates 12, a first sensor 31 is mounted in the hole formed by the first mounting holes 113 and the second mounting holes 121 through a pad 32, a third mounting hole 321 matched with the first sensor 31 is formed in the upper surface of the pad 32, the lower part of the first sensor 31 is located in the third mounting hole 321, and the connecting line of the first sensor 31 is arranged in the wire arranging groove 122 and led out through the same hole, and a tank chain 35 (i.e. a drag chain) is arranged between the lower layer plates 12 and the bottom plate to protect the connecting line.

[0051] In the embodiment, the first sensor 31 is a contact sensor, the contact sensing end of the first sensor 31 extends out of the first mounting hole 113 upwards, when the material box is placed down, the bottom wall thereof is in contact with the contact sensing end of the first sensor 31, so that the bearing condition of the material box and the size specification of the material box are conveniently judged.

[0052] In the embodiment, the front end of the lower layer plate 12 is provided with a front end positioning plate 13 extending upwards, the upper surface of the lower layer plate 12 is provided with a plurality of threaded holes 123, the upper layer plate 11 is provided with a plurality of waist-shaped holes 114 corresponding to the threaded holes 123 one by one, the long axis of the waist-shaped hole 114 extends along the left-right direction, and the upper layer plate 11 and the lower layer plate 12 are locked and fixed through the threaded connection of the threaded holes 123 and the bolts penetrating through the waist-shaped holes 114, and the front end positioning plate 13 and the waist-shaped hole 114 are arranged, so that the upper layer plate 11 and the lower layer plate 12 are conveniently and quickly positioned and spliced.

[0053] In the embodiment, the drawer bin further comprises a guide rail assembly and a linear moving assembly, the loading plate is slidably mounted on the bottom plate by the pair of guide rail assemblies and is driven by the linear moving assembly, and the linear moving assembly can drive the loading plate to move out of the partition. Specifically, the guide rail assembly comprises a plug strip assembly 41 fixed on the bottom plate and a pair of plug slot plates 42 arranged on the lower surface of the lower layer plate 12, the plug strip assembly 41 is slidably inserted into the plug slot formed between the pair of plug slot plates 42, the linear moving assembly comprises a motor 45, a gear 44 and a rack 43, the motor 45 is mounted on the bottom plate and the output end of the motor 45 is provided with the gear 44, the rack 43 is mounted on the loading plate and is arranged between and parallel to the pair of guide rail assemblies, the front end of the rack 43 is positioned by a front end positioning block 46 and the side of the rack 43 is positioned by a pair of positioning pins arranged at intervals, the gear 44 and the rack 43 are engaged, and the front end positioning block 46 and the positioning pins are mounted on the lower end surface of the lower layer plate 12.

[0054] In the embodiment, the upper surface of the bottom plate is provided with a pair of second sensors 33 arranged at intervals in the front-rear direction, the second sensors 33 are U-slot photoelectric switches, the second sensors 33 are electrically connected with the motor 45, and the lower surface of the lower layer plate 12 is provided with a light shielding plate 34 matched with the second sensors 33. The cooperation of the U-slot photoelectric switch and the light shielding plate 34 can realize fast and accurate positioning of the moving-in and moving-out operation of the loading plate.

[0055] It should be noted that, in the present document, the relational terms such as first and second and the like can only be used to differentiate one entity or action from another, and do not necessarily require or imply that these entities or actions exist in any actual relationship or order. Moreover, the terms "comprising", "containing", or any other variant thereof are intended to cover a non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent in such process, method, article or apparatus. Without more limitations, an element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article or apparatus that includes the element.

[0056] The above embodiments are only used to illustrate the technical solutions of the present application, but not limit the present application; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A drawer bin of a wafer box automatic material receiving device, comprising a loading plate, characterized in that: The loading plate comprises an upper layer plate and a lower layer plate arranged from top to bottom and attached to each other, the upper layer plate is provided with a plurality of loading grooves arranged in a stepped manner from bottom to top, the bottom wall of each loading groove is provided with a first mounting hole on both sides, the lower layer plate is provided with a wire arranging groove, a first sensor is mounted in the first mounting hole, and the connecting wire of the first sensor is arranged in the wire arranging groove.

2. The drawer magazine of claim 1, wherein: The first sensor is a contact sensor, and a contact sensing end of the first sensor extends out of the first mounting hole upward.

3. The drawer bin of claim 1, wherein: A front end positioning plate extending upward is mounted at the front end of the lower layer plate, a plurality of threaded holes are formed in the upper surface of the lower layer plate, a plurality of waist-shaped holes corresponding to the threaded holes are formed in the upper layer plate, the long axis of the waist-shaped hole extends in the left-right direction, and the upper layer plate and the lower layer plate are locked and fixed by bolts.

4. The drawer bin of claim 1, wherein: The drawer bin further comprises a guide rail assembly and a linear moving assembly, the loading plate is slidably mounted on the bottom plate by a pair of guide rail assemblies and is driven by the linear moving assembly, and the linear moving assembly can drive the loading plate to move out of the partition plate.

5. The drawer magazine of claim 4, wherein: The linear moving assembly comprises a motor, a gear and a rack, the motor is mounted on the bottom plate and the output end of the motor is provided with the gear, the rack is mounted on the loading plate and is arranged in parallel with the guide rail assembly between the pair of guide rail assemblies, the front end of the rack is positioned by a front end positioning block, the side of the rack is positioned by a pair of positioning pins arranged at intervals, the gear and the rack are engaged, and the front end positioning block and the positioning pins are mounted on the lower end surface of the lower layer plate.

6. The drawer bin of claim 4, wherein: A pair of second sensors arranged at intervals in the front-rear direction are arranged on the upper surface of the bottom plate, the second sensor is a U-shaped groove photoelectric switch, the second sensor is electrically connected with the motor, and a light shielding plate matched with the second sensor is mounted on the lower surface of the lower layer plate.

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