Workshop secondary pipeline distribution structure
By introducing limiting grooves and limiting springs into the secondary piping structure, the position and rotation of hexagonal bolts are restricted, solving the problem of bolt loosening caused by equipment vibration and achieving stable sealing between equipment.
Patent Information
- Application Number
- CN202520152500.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2035-01-22
AI Technical Summary
When exposed to equipment vibration, the bolts in the existing secondary piping structure are prone to loosening, which can cause the gaskets to fail and potentially lead to leaks.
The structure employs a limiting groove and a limiting spring, which restricts the position and rotation of the hexagonal bolts through pressure plates and limiting discs to ensure bolt tightness. Combined with the sealing gasket design, it forms an effective seal.
It effectively prevents hexagonal bolts from loosening, maintains sealing performance, avoids leakage, and ensures airtight communication between equipment.
Smart Images
Figure CN223579217U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the pipeline design technical field of semiconductor workshop, specifically is a workshop secondary distribution pipeline structure. BACKGROUND
[0002] In the semiconductor workshop, the secondary distribution pipeline refers to the process that after the liquid pipeline primary project is completed, the user equipment arrives, and the pipeline introduced into the laboratory (or workshop, etc.) is connected to the user equipment respectively, so that the equipment can meet the feeding demand and be used normally.
[0003] Based on the above, the secondary distribution pipeline structure is actually a connecting pipeline for completing feeding. However, the existing secondary distribution pipeline structure uses bolts to fix the pipeline and the interface (user equipment and workshop equipment) after the pipeline and the interface are aligned. However, the user equipment and the workshop equipment may vibrate during work, which may cause the bolts to loosen. Since the main function of the bolts is to compress the gasket (for sealing) by applying sufficient pre-tightening force, deform the gasket to fill the small gap between the flange surfaces, and form an effective seal, once the bolts loosen, the gasket cannot maintain an appropriate compression state, and in extreme cases, if multiple bolts loosen simultaneously or sequentially, the flange surfaces may partially or completely separate, resulting in significant leakage. Therefore, the present application provides a workshop secondary distribution pipeline structure. SUMMARY
[0004] Based on the above description, the utility model provides a workshop secondary distribution pipeline structure, which solves the technical problems pointed out in the background technology.
[0005] The technical solution of the utility model to solve the above technical problems is as follows: a workshop secondary distribution pipeline structure, which is detachably connected between the interfaces of the workshop equipment and the user equipment, comprising:
[0006] A connecting pipe, both ends of which are integrally connected with a butt joint part, a hexagonal bolt is threadedly connected between the butt joint part and the interface, and a limiting groove is formed on the outside of the left and right sides of the connecting pipe;
[0007] A limiting structure, which includes a pressing sheet, a limiting spring sheet is fixed on one side of the pressing sheet, the limiting spring sheet is clamped on the outside of the connecting pipe through the corresponding limiting groove, and the side of the pressing sheet away from the limiting spring sheet can press the corresponding hexagonal bolt tightly.
[0008] On the basis of the above technical solution, the utility model can also be improved as follows.
[0009] Further, the limiting elastic sheet is composed of an elastic part and a fitting part, the elastic part is fixedly connected with the pressing sheet, the fitting part is integrally connected to the elastic part on the side close to the connecting pipe, and the fitting part is matched with the limiting groove.
[0010] Further, the number of the limiting elastic sheets is not less than one set.
[0011] Further, the side, away from the limiting elastic sheet, of the pressing sheet is provided with a limiting disc, a cavity matched with the head of the hexagonal bolt is formed on the side of the limiting disc, and the cavity is used for limiting the rotation of the hexagonal bolt.
[0012] Further, the butt joint part is composed of a flange disc, a transition disc and an inner disc which are integrally connected, the diameters of the flange disc, the transition disc and the inner disc are gradually reduced, a groove is formed on the outer side of the interface, the flange disc is matched with the end face of the interface, the transition disc is arranged in the groove, and the inner disc is arranged in the interface.
[0013] Further, the diameter of the flange disc is equal to the diameter of the end face of the interface, the diameter of the transition disc is equal to the diameter of the groove, and the diameter of the inner disc is equal to the inner diameter of the interface.
[0014] Further, the hexagonal bolt is threadedly connected between the flange disc and the interface.
[0015] Further, the sealing washer is arranged in the sealing cavity formed on the side, away from the flange disc, of the transition disc.
[0016] Compared with the prior art, the technical scheme has the following beneficial technical effects:
[0017] When the limiting elastic sheet is clamped in the limiting groove, the pressing sheet can press and block the hexagonal bolt, so that the hexagonal bolt is prevented from being displaced, the cavity of the limiting disc can rotate and block the head of the hexagonal bolt, so that the hexagonal bolt is further prevented from being loosened, the sealing washer is prevented from being separated from the compressed sealing state, and good sealing performance is provided. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 Fig. 1 is a structural schematic view of a workshop secondary pipe distribution structure according to an embodiment of the present application;
[0019] Figure 2 Fig. 2 is a front view of the workshop secondary pipe distribution structure according to the embodiment of the present application; Figure 1 Fig. 3 is a front view of a cross section of the workshop secondary pipe distribution structure according to the embodiment of the present application;
[0020] Figure 3 Fig. 4 is a local structure schematic view of a half section of a connecting pipe and a connecting structure thereof according to the embodiment of the present application;
[0021] Figure 4It is the structure schematic view of the hexagon bolt not being pressed in the tablet pressing of the embodiment of the utility model;
[0022] Figure 5 It is the structure schematic view of the limiting structure of the embodiment of the utility model;
[0023] Figure 6 It is the scene schematic view of the embodiment of the utility model being installed between the workshop equipment and user equipment.
[0024] In the drawing, the component list represented by each sign is as follows:
[0025] 1, interface; 2, connecting pipe; 21, hexagon bolt; 22, limiting groove; 23, flange plate; 24, transition plate; 25, inner plate; 3, limiting structure; 31, pressing sheet; 32, limiting elastic sheet; 321, elastic part; 322, fitting part; 33, limiting plate; 4, sealing washer. Specific implementation
[0026] The technical scheme in the embodiment of the utility model will be clearly and completely described below in combination with the drawing in the embodiment of the utility model.
[0027] To ensure the precision of the related manufacturing of the existing semiconductor, the related manufacturing of the semiconductor usually needs to be completed in a dust-free workshop, the dust-free workshop provides good airtightness, and good airtightness is needed between the workshop equipment and user equipment, this connecting structure is a workshop secondary pipe routing structure, such as Figure 6 This is a schematic view of the workshop secondary pipe routing structure being installed between the workshop equipment and user equipment, and, to facilitate understanding of the workshop equipment and user equipment, it needs to be explained that the workshop equipment is, for example, a preparation machine for preparing cleaning liquid or deionized water, and the user equipment is, for example, a semiconductor machine.
[0028] To complete the above design, provide good sealing, and prevent leakage, such as Figures 1-6 The workshop secondary pipe routing structure in the embodiment can be detachably connected between the interface 1 of the workshop equipment and the user equipment, and is mainly used for completing the conduction of liquid, the workshop secondary pipe routing structure comprises a connecting pipe 2 and a limiting structure 3, wherein the connecting pipe 2 is integrally connected with a butt joint on both ends, the hexagon bolt 21 is threadedly connected between the butt joint and the interface 1, and is used for completing the detachable connection between the connecting pipe 2 and the interface 1.
[0029] And the outer sides of the left and right sides of the connecting pipe 2 are provided with limiting grooves 22, the limiting grooves 22 are used for allowing the limiting structure 3 to be clamped on the outer side of the connecting pipe 2, and allowing the side of the pressing sheet 31 away from the limiting elastic sheet 32 to press the corresponding hexagon bolt 21, specifically, such as Figure 2 And 3The number of the limiting structure 3 is two groups, and the two groups of limiting structure 3 are arranged on the outer side of the left and right sides of the connecting pipe 2. Any one group of the limiting structure 3 comprises a pressing sheet 31 which is slidingly connected to the outer side of the connecting pipe 2. A limiting elastic sheet 32 is fixed to one side of the pressing sheet 31. The limiting elastic sheet 32 is clamped to the outer side of the connecting pipe 2 through a corresponding limiting groove 22. Thus, after the hexagonal bolt 21 is fixed, the side of the pressing sheet 31 away from the limiting elastic sheet 32 can press the corresponding hexagonal bolt 21 tightly.
[0030] Firstly, as Figure 3 and 4 The limiting elastic sheet 32 is composed of an elastic part 321 and a matching part 322. The elastic part 321 is fixedly connected with the pressing sheet 31. The matching part 322 is integrally connected to one side of the elastic part 321 close to the connecting pipe 2. The matching part 322 is matched with the limiting groove 22. The number of the limiting elastic sheet 32 is not less than one group. In this embodiment, the number of the limiting elastic sheet 32 is two groups. The limiting elastic sheet 32 is made of thermoplastic plastic, such as polyethylene, polyvinyl chloride, polypropylene, polystyrene, acrylonitrile-butadiene-styrene, or other thermoplastic materials with high elasticity.
[0031] The following describes the abutment part as follows: Figure 3 The abutment part is composed of a flange plate 23, a transition plate 24 and an inner plate 25 which are integrally connected. The diameters of the flange plate 23, the transition plate 24 and the inner plate 25 are gradually reduced. A groove is formed on the outer side of the interface 1. The flange plate 23 is attached to the end face of the interface 1. The transition plate 24 is arranged in the groove. The inner plate 25 is arranged in the interface 1.
[0032] It should be noted that the diameter of the flange plate 23 is equal to the diameter of the end face of the interface 1. The diameter of the transition plate 24 is equal to the diameter of the groove. The diameter of the inner plate 25 is equal to the inner diameter of the interface 1. The hexagonal bolt 21 is threadedly connected between the flange plate 23 and the interface 1.
[0033] In order to strengthen the sealing, as Figure 3 The workshop secondary pipe line structure further comprises a sealing washer 4. A sealing cavity is formed on the side of the transition plate 24 away from the flange plate 23. The sealing washer 4 is arranged in the sealing cavity.
[0034] When the hexagonal bolt 21 is gradually assembled, the sealing washer 4 can be deformed to fill the gap and form effective sealing to ensure the sealing performance and prevent leakage. In the above design, the pressing sheet 31 is used to press the hexagonal bolt 21 tightly to prevent displacement of the hexagonal bolt 21.
[0035] On the basis of pressing and blocking the hexagonal bolt 21, the rotation of the hexagonal bolt 21 is limited.Figures 3-5 In some embodiments, the pressing piece 31 is provided with a limiting disc 33 away from one side of the limiting elastic sheet 32, a cavity is formed on one side of the limiting disc 33, the cavity is adapted to the head of the hexagonal bolt 21, the number of the cavity is determined according to the number of the hexagonal bolt 21, the shape and size of the cavity are the same as the shape and size of the head of the hexagonal bolt 21, and the cavity is used to limit the rotation of the hexagonal bolt 21.
[0036] In this way, the pressing piece 31 can press and block the hexagonal bolt 21, and the cavity of the limiting disc 33 can rotate and block the head of the hexagonal bolt 21, so that the hexagonal bolt 21 is further prevented from loosening.
[0037] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.
Claims
1. A plant secondary piping line structure which is detachably connected between an interface (1) of a plant device and a user device, characterized by, Include: The on-pipe (2) is integrally connected with the butt joint at both ends of the on-pipe (2), the butt joint is threadedly connected with the hexagonal bolt (21) between the interface (1), and the outer part of the left and right sides of the on-pipe (2) is provided with a limiting groove (22); The limiting structure (3) is two groups, any one group of the limiting structure (3) comprises a pressing sheet (31), the pressing sheet (31) is slidably connected to the outer side of the on-pipe (2), a limiting spring sheet (32) is fixed on one side of the pressing sheet (31), the limiting spring sheet (32) is clamped on the outer side of the on-pipe (2) through the corresponding limiting groove (22), and the side of the pressing sheet (31) away from the limiting spring sheet (32) can press the corresponding hexagonal bolt (21).
2. A structure of a secondary piping line in a plant according to claim 1, characterized by: The limiting spring sheet (32) is composed of an elastic part (321) and a fitting part (322), the elastic part (321) is fixedly connected with the pressing sheet (31), the fitting part (322) is integrally connected to one side of the elastic part (321) close to the on-pipe (2), and the fitting part (322) is matched with the limiting groove (22).
3. A structure of a secondary piping line in a plant according to claim 2, characterized by: The number of the limiting spring sheet (32) is not less than one group.
4. A secondary piping structure for a vehicle cabin according to any one of claims 1 to 3, characterized in that: The side of the pressing sheet (31) away from the limiting spring sheet (32) is provided with a limiting disc (33), a cavity matched with the head of the hexagonal bolt (21) is formed on one side of the limiting disc (33), and the rotation of the hexagonal bolt (21) is limited.
5. A secondary piping structure in a plant according to claim 4, characterized by: The butt joint is composed of an integral flange plate (23), a transition disc (24) and an inner disc (25), the diameters of the flange plate (23), the transition disc (24) and the inner disc (25) are gradually reduced, a groove is formed on the outer side of the interface (1), the flange plate (23) is attached to the end face of the interface (1), the transition disc (24) is arranged in the groove, and the inner disc (25) is located in the interface (1).
6. A secondary piping structure in a plant according to claim 5, characterized by: The diameter of the flange plate (23) is equal to the diameter of the end face of the interface (1), the diameter of the transition disc (24) is equal to the diameter of the groove, and the diameter of the inner disc (25) is equal to the inner diameter of the interface (1).
7. A secondary piping structure in a plant according to claim 6, characterized by: The hexagonal bolt (21) is threadedly connected between the flange plate (23) and the interface (1).
8. A secondary piping structure in a plant according to claim 7, characterized by: Further comprising a sealing washer (4), a sealing cavity is formed on the side of the transition disc (24) away from the flange plate (23), and the sealing washer (4) is arranged in the sealing cavity.