Silica powder feeding unit and cold hydrogenation system
By introducing transport gas into the catalyst storage tank or pipeline, the problem of catalyst wall deliquescence was solved, enabling accurate addition and uniform dispersion of the catalyst and improving the cold hydrogenation conversion rate of polysilicon production.
Patent Information
- Application Number
- CN202423200390.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-24
AI Technical Summary
Catalysts are prone to deliquescence and adhesion to the walls during polysilicon production, affecting the accuracy of the addition amount and altering their properties, leading to a decrease in cold hydrogenation conversion rate.
A silicon powder feeding unit was designed. By introducing a transport gas, such as compressed nitrogen, into the catalyst storage tank or transport pipeline, the wall-mounted catalyst is driven into the delivery tank, which reduces the water vapor content, prevents the catalyst from deliquescing and agglomerating, and ensures uniform dispersion.
This ensures the accuracy of catalyst addition, prevents catalyst deliquescence and agglomeration, and improves the cold hydrogenation conversion rate.
Smart Images
Figure CN223587096U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of polysilicon, and particularly relates to a silicon powder feeding unit and a cold hydrogenation system. BACKGROUND
[0002] In the process of polysilicon production, trichlorosilane is generated through a cold hydrogenation process. Silicon powder and a catalyst need to be added to a reaction furnace in the cold hydrogenation process.
[0003] At present, in the process of polysilicon production, silicon powder and a catalyst are added to a reaction furnace of a cold hydrogenation system through a silicon powder feeding unit. The catalyst is anhydrous copper chloride. The silicon powder feeding unit includes a silicon powder storage tank, a catalyst storage tank, and a sending tank. The silicon powder storage tank and the catalyst storage tank are respectively connected to the sending tank through pipelines. The silicon powder and the catalyst are dispersed and mixed in the sending tank and can then enter the reaction furnace of the cold hydrogenation from the sending tank.
[0004] However, the catalyst is prone to wall-hanging deliquescence. This affects the accuracy of the amount of catalyst added and easily changes the properties of the catalyst. CONTENT OF THE INVENTION
[0005] Based on this, the present application provides a silicon powder feeding unit and a cold hydrogenation system to solve the problem that in the related art, the catalyst is prone to wall-hanging deliquescence. This affects the accuracy of the amount of catalyst added and easily changes the properties of the catalyst.
[0006] In a first aspect, an embodiment of the present application provides a silicon powder feeding unit, comprising:
[0007] a first storage tank configured to store silicon powder;
[0008] a second storage tank configured to store a catalyst;
[0009] a sending tank;
[0010] a connecting pipeline including a main pipeline, a first branch pipeline, and a second branch pipeline. One end of the main pipeline is connected to a feeding port of the sending tank. The other end of the main pipeline is respectively connected to an end of the first branch pipeline and an end of the second branch pipeline. The end of the first branch pipeline away from the main pipeline is connected to a discharging port of the first storage tank. The end of the second branch pipeline away from the main pipeline is connected to a discharging port of the second storage tank.
[0011] an auxiliary pipeline. A first end of the auxiliary pipeline is connected to the second storage tank or the end of the second branch pipeline away from the main pipeline. The auxiliary pipeline is configured to introduce a conveying gas so that the conveying gas enters the sending tank along the second branch pipeline and the main pipeline.
[0012] In a possible implementation manner, a first valve is arranged on the second branch pipeline, and a second valve is arranged on the auxiliary pipeline.
[0013] In a possible implementation, the first valve is an on-off valve, and the second valve is a regulating valve, and the second valve is configured to open or close the auxiliary pipeline and regulate the flow of the auxiliary pipeline.
[0014] In a possible implementation, the second storage tank includes a tank body and a cover body, the discharge port of the second storage tank is arranged on the tank body, and an opening is further arranged on the tank body, and the cover body covers the opening and is fixed with the tank body.
[0015] In a possible implementation, the silicon powder feeding unit further includes a gas supply pipeline connected with the first storage tank to introduce conveying gas into the first storage tank, and the second end of the auxiliary pipeline is in communication with the gas supply pipeline.
[0016] In a possible implementation, the first storage tank, the second storage tank, the sending tank, the connecting pipeline and the auxiliary pipeline form a silicon powder feeding module, and the number of the silicon powder feeding modules is multiple.
[0017] In a possible implementation, the silicon powder feeding unit further includes a gas storage tank in communication with the sending tank through a gas pipeline.
[0018] In a possible implementation, the discharge port of the sending tank is connected with a feeding pipeline, and the feeding pipeline is configured to provide raw materials to a reaction furnace.
[0019] The gas pipeline includes a first branch pipeline connected with the sending tank and a second branch pipeline connected with the feeding pipeline.
[0020] In a possible implementation, the silicon powder feeding unit further includes a vibration mechanism installed on the main pipeline and / or the second branch pipeline.
[0021] In a second aspect, the embodiments of the present application provide a cold hydrogenation system, including the silicon powder feeding unit.
[0022] The silicon powder feeding unit and the cold hydrogenation system provided by the application, the silicon powder feeding unit comprises a first storage tank, a second storage tank, a sending tank, a connecting pipeline and an auxiliary pipeline. The first storage tank can be used for storing silicon powder, and the second storage tank can be used for storing a catalyst. The silicon powder and the catalyst can enter the sending tank through the connecting pipeline. The first end of the auxiliary pipeline is connected with the second storage tank or the second branch away from the main branch. When the catalyst in the second storage tank enters the sending tank through the second branch and the main branch of the connecting pipeline, the auxiliary pipeline can transport conveying gas (such as compressed nitrogen) to the second storage tank or the second branch, so that the catalyst hanging on the connecting pipeline is driven by the conveying gas to enter the sending tank through the second branch and the main branch. The conveying gas entering the sending tank can also reduce the water vapor content in the sending tank, so that the catalyst in the sending tank is not easy to deliquesce. In this way, the accuracy of the catalyst addition amount can be ensured, and the catalyst in the sending tank is not easy to deliquesce and agglomerate, and the catalyst and the silicon powder can be uniformly dispersed in the sending tank, which is beneficial to ensuring the conversion rate of cold hydrogenation. BRIEF DESCRIPTION OF DRAWINGS
[0023] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.
[0024] Figure 1 The structure schematic diagram of the silicon powder feeding unit provided by the embodiments of the application is shown in the figure.
[0025] Figure 2 For Figure 1 The partial structure schematic diagram of the silicon powder feeding unit is shown in the figure.
[0026] Explanation of reference signs:
[0027] 100 - first storage tank;
[0028] 200 - second storage tank; 210 - tank body; 220 - cover body;
[0029] 300 - sending tank;
[0030] 400 - connecting pipeline; 410 - main branch; 420 - first branch; 430 - second branch; 431 - first valve;
[0031] 500 - auxiliary pipeline; 510 - second valve;
[0032] 600 - gas supply pipeline;
[0033] 700 - gas storage tank;
[0034] 800 - gas line; 810 - first branch; 820 - second branch;
[0035] 910 - feed line; 920 - vibration mechanism. DETAILED DESCRIPTION
[0036] In order to make the objects, technical solutions and advantages of the present application clearer, the following will be combined with the drawings of the preferred embodiments of the present application to describe the technical solutions in the embodiments of the present application in a further detailed manner. In the drawings, identical or similar reference numerals are used to represent identical or similar components or components with identical or similar functions throughout. The described embodiments are part of the embodiments of the present application, rather than all the embodiments. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative effort fall within the scope of protection of the present application. The embodiments of the present application will be described in detail below with reference to the drawings.
[0037] In the description of the present application, it should be noted that, unless specifically defined and limited, the terms “mounting”, “connection”, “connecting” should be understood in a broad sense, for example, can be fixed connection, can be indirectly connected through an intermediate medium, can be internal communication of two elements or interaction relationship between two elements. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0038] In the description of the present application, it should be understood that the terms “upper”, “lower”, “front”, “rear”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer” and the like indicate the orientation or positional relationship based on the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0039] The terms “first”, “second”, “third” (if present) in the specification and claims of the present application and the above drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence.
[0040] In addition, the terms “include” and “have” and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or display including a series of steps or units does not have to be limited to only those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to the process, method, product or display.
[0041] In the prior art, silicon powder and catalyst are added to the cold hydrogenation reaction furnace through a silicon powder feeding unit, and the catalyst is anhydrous copper chloride. The silicon powder feeding unit includes a silicon powder storage tank, a catalyst storage tank, and a sending tank. The silicon powder storage tank and the catalyst storage tank are connected to the sending tank through pipelines. The silicon powder and the catalyst are dispersed and mixed in the sending tank and then enter the cold hydrogenation reaction furnace from the sending tank. Since the anhydrous copper chloride is a dark brown yellow crystalline powder, it is easy to deliquesce in humid air and is easily soluble in water. The catalyst is prone to wall hanging and deliquesce. This affects the accuracy of the catalyst addition amount, and the deliquesced catalyst is prone to caking and uneven dispersion with the silicon powder, which affects the conversion rate of cold hydrogenation.
[0042] After repeated thinking and verification, the inventors found that if the catalyst is added to the sending tank through the pipeline, the delivery gas is introduced into the storage tank storing the catalyst or the pipeline conveying the catalyst, and the catalyst attached to the conveying pipeline is blown into the sending tank by the delivery gas. The delivery gas entering the sending tank reduces the water vapor content in the sending tank, protects the catalyst from deliquescence, and prevents the catalyst from caking. This ensures the accuracy of the catalyst addition amount, and the catalyst can be uniformly dispersed in the sending tank, thereby avoiding affecting the conversion rate of cold hydrogenation.
[0043] Therefore, the inventors designed a silicon powder feeding unit and a cold hydrogenation system. The first storage tank for storing silicon powder and the second storage tank for storing catalyst are connected to the sending tank through the connecting pipeline. The connecting pipeline is connected to the second storage tank through the second branch. The first end of the auxiliary pipeline is connected to the second storage tank or the end of the second branch away from the main pipeline. The delivery gas can be introduced into the second storage tank or the second branch through the auxiliary pipeline, so that the catalyst attached to the connecting pipeline enters the sending tank, the water vapor content in the sending tank is reduced, the addition amount of the catalyst is ensured, and the catalyst is not prone to deliquescence and caking.
[0044] The technical solutions of the silicon powder feeding unit and the cold hydrogenation system provided by the embodiments of the present application are described in detail below with reference to the accompanying drawings.
[0045] Referring to FIGS. 1 to 5, Figure 1 and Figure 2 The silicon powder feeding unit provided by the embodiments of the present application includes a first storage tank 100, a second storage tank 200, a sending tank 300, a connecting pipeline 400, and an auxiliary pipeline 500.
[0046] The first storage tank 100 is configured to store silicon powder. The silicon block can be ground into silicon powder of a certain particle size through a silicon block grinding process, and then the ground silicon powder can be stored in the interior of the first storage tank 100. Illustratively, the feed inlet of the first storage tank 100 is located at the top of the first storage tank 100, and the discharge outlet of the first storage tank 100 is located at the bottom of the first storage tank 100.
[0047] The second storage tank 200 is configured to store the catalyst. Illustratively, the bottom of the second storage tank 200 is a tapered portion, and the discharge port of the second storage tank 200 is located at the bottom end of the tapered portion. Optionally, a fixed amount of catalyst can be stored in the second storage tank 200 each time, and the second storage tank 200 is emptied when the catalyst is added to achieve the quantitative addition of the catalyst.
[0048] The silicon powder and the catalyst can be mixed in the sending tank 300.
[0049] The connecting pipeline 400 includes a main line 410, a first branch line 420, and a second branch line 430. One end of the main line 410 is connected to the feeding port of the sending tank 300, and the other end of the main line 410 is connected to the end of the first branch line 420 and the end of the second branch line 430, respectively. The end of the first branch line 420 away from the main line 410 is connected to the discharge port of the first storage tank 100, and the end of the second branch line 430 away from the main line 410 is connected to the discharge port of the second storage tank 200. Those skilled in the art can understand that the silicon powder stored in the first storage tank 100 can enter the sending tank 300 through the first branch line 420 and the main line 410, and the catalyst in the second storage tank 200 can enter the sending tank 300 through the second branch line 430 and the main line 410. Those skilled in the art can set the pipe diameters and lengths of the main line 410, the first branch line 420, and the second branch line 430 as needed, which are not limited herein.
[0050] The first end of the auxiliary pipeline 500 is connected to the second storage tank 200 or the end of the second branch line 430 away from the main line 410. For example, a DN25 pipeline can be used as the auxiliary pipeline 500. Illustratively, the first end of the auxiliary pipeline 500 can be connected to the tapered portion of the second storage tank 200, or the first end of the auxiliary pipeline 500 can be connected to the end of the second branch line 430 close to the second storage tank 200. The auxiliary pipeline 500 is configured to introduce a conveying gas so that the conveying gas enters the sending tank 300 along the second branch line 430 and the main line 410. The compressed nitrogen or other inert gas can be used as the conveying gas, and the conveying gas introduced by the auxiliary pipeline 500 can blow the catalyst adhering to the second branch line 430 and the main line 410 into the sending tank 300. When the first end of the auxiliary pipeline 500 is connected to the tapered portion of the second storage tank 200, the conveying gas introduced by the auxiliary pipeline 500 can also blow the catalyst adhering to the tapered portion into the sending tank 300.
[0051] The first storage tank 100 can be used for storing silicon powder, and the second storage tank 200 can be used for storing catalyst. The silicon powder and the catalyst can enter the delivery tank 300 through the connecting pipeline 400. The first end of the auxiliary pipeline 500 is connected with the second storage tank 200 or the second branch 430 away from one end of the main pipeline 410. When the catalyst in the second storage tank 200 enters the delivery tank 300 through the second branch 430 and the main pipeline 410 of the connecting pipeline 400, the auxiliary pipeline 500 can transport conveying gas (such as compressed nitrogen) to the second storage tank 200 or the second branch 430. The catalyst hanging on the connecting pipeline 400 is driven by the conveying gas to enter the delivery tank 300 through the second branch 430 and the main pipeline 410. The conveying gas entering the delivery tank 300 can also reduce the water vapor content in the delivery tank 300, so that the catalyst in the delivery tank 300 is not easy to deliquesce. In this way, the accuracy of the catalyst addition amount can be ensured, and the catalyst in the delivery tank 300 is not easy to deliquesce and agglomerate. The catalyst and the silicon powder can be uniformly dispersed in the delivery tank 300, which is beneficial to ensure the conversion rate of cold hydrogenation.
[0052] In one embodiment, as shown in Figure 1 and Figure 2 The first valve 431 is arranged on the second branch 430, and the second valve 510 is arranged on the auxiliary pipeline 500. During use of the silicon powder feeding unit, the worker can first open the first valve 431 on the second branch 430. At this time, the catalyst in the second storage tank 200 enters the delivery tank 300 through the second branch 430 and the main pipeline 410. After the second storage tank 200 is emptied, the second valve 510 is opened. At this time, the conveying gas enters the second storage tank 200 or the second branch 430 through the auxiliary pipeline 500. After the second valve 510 is opened for a certain period of time, the first valve 431 and the second valve 510 are closed, and a certain amount of catalyst is added to the second storage tank 200 again.
[0053] That is to say, by controlling the first valve 431, the catalyst in the second storage tank 200 can be controlled to enter the delivery tank 300. By controlling the second valve 510, the conveying gas can enter the second storage tank 200 or the second branch 430 through the auxiliary pipeline 500.
[0054] In other embodiments, the second valve 510 can also not be arranged on the auxiliary pipeline 500. The second end of the auxiliary pipeline 500 can be connected with a gas generating device, such as a compressor. By controlling the state of the gas generating device, the conveying gas can enter the second storage tank 200 or the second branch 430 through the auxiliary pipeline 500.
[0055] In one embodiment, the first valve 431 is an on-off valve, and the second valve 510 is a regulating valve, which is configured to open or close the auxiliary pipeline 500 and regulate the flow rate of the auxiliary pipeline 500.
[0056] That is, the first valve 431 can control the connection state of the second branch 430, and the second valve 510 can control the connection state of the auxiliary pipeline 500 and the flow rate of the gas in the auxiliary pipeline 500. For example, a needle valve can be used as the second valve 510. The needle valve has high control accuracy as a regulating valve.
[0057] The second valve 510 is configured as a regulating valve, so that the delivery gas entering through the auxiliary pipeline 500 can be accurately controlled, and the flexibility of the silicon powder feeding unit is improved.
[0058] As shown in Figure 2 The second tank 200 includes a tank body 210 and a cover body 220. The discharge port of the second tank 200 is arranged on the tank body 210, and an opening is further arranged on the tank body 210. The cover body 220 is arranged on the opening and fixed to the tank body 210.
[0059] For example, the bottom of the tank body 210 is a conical portion, and the discharge port of the second tank 200 is arranged at the bottom end of the conical portion. The opening of the tank body 210 can be located at the top end of the tank body 210, and the opening can be closed after the cover body 220 is arranged on the opening. Optionally, a sealing ring can be arranged between the cover body 220 and the tank body 210 to ensure the sealing between the tank body 210 and the cover body 220.
[0060] In this structure, the catalyst in the tank body 210 can be added to the second tank 200 through the opening of the tank body 210, and the catalyst in the tank body 210 can be prevented from deliquescing by closing the opening with the cover body 220. In addition, when the delivery gas enters the second tank 200 or the second branch 430 through the auxiliary pipeline 500, the opening of the tank body 210 can be closed by arranging the cover body 220 on the tank body 210, so that the delivery gas enters the delivery tank 300 through the second branch 430 and the main pipeline 410.
[0061] In one embodiment, as shown in Figure 1 and Figure 2 The silicon powder feeding unit further includes a gas supply pipeline 600, which is connected to the first tank 100 to introduce the delivery gas into the first tank 100. The second end of the auxiliary pipeline 500 is in communication with the gas supply pipeline 600.
[0062] Illustratively, the gas supply pipeline 600 is connected with the top end of the first storage tank 100, and the conveying gas in the gas supply pipeline 600 can enter the first storage tank 100. It should be noted that the conveying gas entering the first storage tank 100 through the gas supply pipeline 600 is used to push the silicon powder in the first storage tank 100 to enter the delivery tank 300 through the first branch pipeline 420 and the main pipeline 410.
[0063] It can be understood that when the second valve 510 on the auxiliary pipeline 500 is opened, part of the conveying gas flowing in the gas supply pipeline 600 can enter the second branch pipeline 430 or the second storage tank 200 through the auxiliary pipeline 500.
[0064] In the embodiment, the second end of the auxiliary pipeline 500 is in communication with the gas supply pipeline 600, that is, the gas generating device does not need to be connected with the second end of the auxiliary pipeline 500, which facilitates the arrangement of the silicon powder feeding unit and can reduce the cost of the silicon powder feeding unit.
[0065] In a possible implementation, the first storage tank 100, the second storage tank 200, the delivery tank 300, the connecting pipeline 400 and the auxiliary pipeline 500 form a silicon powder feeding module, and the number of silicon powder feeding modules is multiple.
[0066] It can be understood that the silicon powder feeding unit adds silicon powder and catalyst into the cold hydrogenation reaction furnace through multiple silicon powder feeding modules, that is, the silicon powder and catalyst required by the reaction furnace can be provided by the delivery tanks 300 of multiple silicon powder feeding modules, and the silicon powder and catalyst in each delivery tank 300 are less, which is beneficial to the full dispersion and mixing of the silicon powder and catalyst in the delivery tank 300, thereby ensuring the conversion rate of cold hydrogenation.
[0067] In an embodiment, as shown in Figure 1 The silicon powder feeding unit further includes a gas storage tank 700, and the gas storage tank 700 is in communication with the delivery tank 300 through a gas pipeline 800.
[0068] Illustratively, the gas storage tank 700 can be connected with a compressor, and the nitrogen compressed by the compressor can be stored in the gas storage tank 700. In a possible implementation, a valve can be installed on the gas pipeline 800, and the gas in the gas storage tank 700 can enter the delivery tank 300 through the gas pipeline 800 through the valve.
[0069] The gas storage tank 700 and the gas pipeline 800 can inject gas into the delivery tank 300, so as to ensure that the pressure in the delivery tank 300 is greater than the pressure in the cold hydrogenation reaction furnace, and ensure that the silicon powder and catalyst in the delivery tank 300 can stably enter the cold hydrogenation reaction furnace.
[0070] In a specific embodiment, as shown inFigure 1 As shown, the discharge port of the sending tank 300 is connected with the feeding pipeline 910, and the feeding pipeline 910 is configured to provide raw materials to the reaction furnace. That is to say, one end of the feeding pipeline 910 is connected with the discharge port of the sending tank 300, and the other end of the feeding pipeline 910 is connected with the reaction furnace. When the silicon powder feeding unit includes a plurality of silicon powder feeding modules, the feeding pipeline 910 can be provided with a plurality of branches, and the plurality of branches are connected with the sending tanks 300 of the plurality of silicon powder feeding modules one by one.
[0071] The gas pipeline 800 includes a first branch pipe 810 and a second branch pipe 820, the first branch pipe 810 is connected with the sending tank 300, and the second branch pipe 820 is connected with the feeding pipeline 910. As an example, Figure 1 As shown, the number of the first branch pipe 810 can be two, and one of the first branch pipes 810 can be connected to the bottom end of the sending tank 300 to avoid the deposition of silicon powder and catalyst at the bottom of the sending tank 300.
[0072] Specifically, the second branch pipe 820 can be connected with the feeding pipeline 910 near the position of the sending tank 300, and the gas entering the feeding pipeline 910 through the second branch pipe 820 can drive the materials attached in the feeding pipeline into the reaction furnace. That is to say, the gas entering through the second branch pipe 820 can also play a cleaning role on the feeding pipeline 910.
[0073] As shown in Figure 1 and Figure 2 As shown in a possible implementation, the silicon powder feeding unit further includes a vibration mechanism 920, and the vibration mechanism 920 is installed on the main pipeline 410 and / or the second branch pipeline 430.
[0074] The vibration mechanism 920 can be installed only on the main pipeline 410 or only on the second branch pipeline 430, or the vibration mechanism 920 can be installed on the main pipeline 410 and the second branch pipeline 430 respectively.
[0075] The specific structure of the vibration mechanism 920 is not limited in this embodiment, for example, a vibrator such as an eccentric block vibrator or an electromagnetic vibrator can be used as the vibration mechanism 920, or a linear vibration motor can also be used as the vibration mechanism 920, which is not limited herein.
[0076] By installing the vibration mechanism 920 on the main pipeline 410 and / or the second branch pipeline 430, when the auxiliary pipeline 500 introduces the conveying gas, the worker can control the vibration mechanism 920 to vibrate, so that the conveying gas can more fully and quickly drive the catalyst in the connecting pipeline 400 into the sending tank 300, thereby improving the efficiency.
[0077] The application also provides a cold hydrogenation system, which includes the above-mentioned silicon powder feeding unit.
[0078] The discharge port of the sending tank 300 can provide silicon powder and catalyst for the reaction furnace of the cold hydrogenation system through the feeding pipe 910. The cold hydrogenation system provided by the embodiment has the advantages that the catalyst addition amount is accurate, the catalyst is not easy to deliquesce and cake, and the catalyst can be uniformly dispersed with the silicon powder, thereby ensuring the conversion rate of cold hydrogenation.
[0079] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A silicon powder charging unit, characterized by, The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit.
2. The silicon powder charging unit according to claim 1, characterized in that The application relates to a silicon powder feeding unit.
3. The silicon powder charging unit according to claim 2, characterized in that The application relates to a silicon powder feeding unit.
4. The silicon powder charging unit according to claim 2, characterized in that The application relates to a silicon powder feeding unit.
5. The silicon powder charging unit of claim 2, wherein The application relates to a silicon powder feeding unit.
6. A silicon powder charging unit according to any one of claims 1-5, characterized in that The application relates to a silicon powder feeding unit.
7. A silicon powder charging unit according to any one of claims 1-5, characterized in that The application relates to a silicon powder feeding unit.
8. The silicon powder charging unit according to claim 7, characterized in that The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. 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The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding unit. The application relates to a silicon powder feeding 9. A silicon powder charging unit according to any one of claims 1-5, characterized in that The silicon powder feeding unit further comprises a vibrating mechanism (920) installed on the main path (410) and / or the second branch path (430).
10. A cold hydrogenation system characterized by, The silicon powder feeding unit according to any one of claims 1-9.