Test handler

By setting up multiple conveying positions and independently moving test heads on the test sorting machine, simultaneous pressure testing is achieved, solving the problems of low pressure testing efficiency and easy IC chip spillage in the existing technology, and improving pressure testing efficiency and stability.

CN223587772UActive Publication Date: 2025-11-25HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202423043859.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-10
Publication Date
2025-11-25
Estimated Expiration
2034-12-10

AI Technical Summary

Technical Problem

In existing testing and sorting machines, the test head for subsequent material pick-up needs to wait for the test head for previous material pick-up to complete the test before it can perform the test, resulting in low test efficiency and the problem of IC chips flying out during material handling.

Method used

Two conveying positions are set on the machine base of the test sorting machine. Each conveying position is equipped with a conveying component. The test base is equipped with two test areas. At least two test heads can move independently to pick up the test pieces from different conveying components and perform pressure tests, so as to achieve simultaneous pressure testing. The stability of conveying and picking is ensured by the separator and heating components.

Benefits of technology

It improves the efficiency of pressure testing by 40%, ensures the stability of the device under test (DUT) during the transport and pick-up process, and avoids damage to the IC chip. The efficiency improvement is even more significant for DUTs with long test times.

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Abstract

The utility model discloses a test sorting machine, and relates to the technical field of semiconductor test. The test sorting machine comprises a machine table, a conveying mechanism, a test seat and at least two test pressure heads, conveying positions and a test position are arranged on the machine table, and the conveying positions are arranged on the two sides of the test position. The conveying mechanism comprises at least two conveying assemblies, each conveying position is provided with at least one conveying assembly, and the conveying assemblies are used for conveying to-be-tested pieces. The testing seat is arranged in the testing position, and at least two testing areas are arranged on the testing seat. The at least two test pressure heads are arranged above the machine table and can move independently from each other. Each test pressure head corresponds to one test area, and the test pressure head can pick up the to-be-tested piece from the conveying assembly on one conveying position and move the to-be-tested piece to the corresponding test area for pressure testing. According to the test sorting machine, the at least two test pressure heads can perform pressure testing at the same time, and the pressure testing efficiency and the stability of the to-be-tested piece in the moving process are improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor test, especially relates to test handler. BACKGROUND

[0002] With IC chip function module gradually complexification, IC chip's test pressure and test time show the trend of gradually increasing. In order to improve test efficiency, test handler includes two test pressure heads, and test pressure head can take and place IC chip and carry out under pressure test.

[0003] However, the test handler of two test pressure heads, when testing, the test pressure head of rear material taking needs to wait for the test pressure head of front material taking to carry out pressure test after completing pressure test, and the efficiency of pressure test is affected. In the prior art, the efficiency of pressure test is improved by improving the running speed of motor or optimizing the motion curve, but too high running speed is easy to cause unstable material taking and inaccurate material placing and other problems; IC chip is too small and too light, and flying material is easy to occur in material running. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a test handler, which can improve the efficiency of pressure test and the stability of the moving process of the tested piece.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] The test handler comprises:

[0007] A machine table is provided with conveying positions and test positions, and the test positions are provided with conveying positions on both sides;

[0008] A conveying mechanism comprises at least two conveying assemblies, each conveying position is provided with at least one conveying assembly, and the conveying assembly is used for conveying a tested piece;

[0009] A test seat is arranged in the test position, and the test seat is provided with at least two test areas;

[0010] At least two test pressure heads are arranged above the machine table, the test pressure heads can move independently, each test pressure head corresponds to a test area, the test pressure head can pick up the tested piece from the conveying assembly on one of the conveying positions and move the tested piece to the corresponding test area for pressure test.

[0011] As an optional scheme of the test handler, the test seat comprises a test plate, the middle part of the test plate is provided with a first partition, the first partition is arranged between adjacent two test areas, and extends along the conveying direction parallel to the conveying assembly.

[0012] As an optional solution of the test sorting machine, a second partition is arranged along the extension direction of the conveying position, the second partition is arranged perpendicularly to the first partition, and the second partition is arranged between two adjacent test areas.

[0013] As an optional solution of the test sorting machine, a plurality of conveying assemblies are arranged at intervals between the conveying positions, and the plurality of conveying assemblies move at a uniform speed at fixed intervals.

[0014] As an optional solution of the test sorting machine, one end of the conveying position is provided with a feeding position, the other end is provided with a discharging position, the test position is arranged between the feeding position and the discharging position, one of the plurality of conveying assemblies is located at the test position, one of the remaining conveying assemblies is located at the feeding position, and / or one of the remaining conveying assemblies is located at the discharging position.

[0015] As an optional solution of the test sorting machine, the test seat further comprises a fixed frame, the fixed frame is fixed to the test position, the test plate is arranged in the fixed frame, and a first heating member is arranged on the fixed frame.

[0016] As an optional solution of the test sorting machine, a second heating member is arranged on the first partition.

[0017] As an optional solution of the test sorting machine, a first temperature sensor is further arranged on the fixed frame, and a second temperature sensor is further arranged on the first partition.

[0018] As an optional solution of the test sorting machine, a plurality of positioning pins and a plurality of locking holes are arranged in each test area, a plurality of positioning holes and a plurality of locking pins are arranged on the test piece, the plurality of positioning pins and the plurality of positioning holes are arranged one by one in a corresponding manner, and the positioning pins and the positioning holes are matched and positioned; the plurality of locking holes and the plurality of locking pins are arranged one by one in a corresponding manner, and the locking pins and the locking holes are matched and locked.

[0019] As an optional solution of the test sorting machine, the conveying assembly is provided with two, each of the conveying positions is provided with one of the conveying assemblies; the test pressure head is provided with two, the test seat is provided with two test areas, the two test pressure heads and the two test areas are arranged one by one in a corresponding manner, the test pressure head picks up the test piece from the conveying assembly on the conveying position close to the test pressure head and moves the test piece to the test area corresponding to the test pressure head for pressure testing.

[0020] The test sorting machine has the following beneficial effects:

[0021] The utility model provides a test sorting machine, through setting up the conveying position in the both sides of the test site of the machine table, each conveying position sets up at least one conveying assembly and conveys the piece to be tested, and sets up at least two test areas on the test seat of the test site, and at least two test pressure head sets in the top of the machine table. Each test pressure head corresponds a test area, and the test pressure head can pick up the piece to be tested from the conveying assembly on one conveying position and move the piece to be tested to the corresponding test area to carry out the pressure measurement, realizes the pressure measurement of at least two test pressure heads simultaneously, improves the pressure measurement efficiency, and does not need to improve the conveying speed of conveying assembly and the pickup speed of test pressure head greatly, guarantees the stability when conveying assembly conveys the piece to be tested and test pressure head picks up the piece to be tested, avoids the damage of the piece to be tested. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the layout schematic diagram of the test sorting machine provided by the utility model specific embodiment;

[0023] Figure 2 It is the structure schematic diagram of the test seat provided by the utility model specific embodiment;

[0024] Figure 3 It is the structure schematic diagram of the test plate provided by the utility model specific embodiment.

[0025] In the drawing:

[0026] 100, piece to be tested;

[0027] 1, machine table; 11, guide rail;

[0028] 2, conveying assembly;

[0029] 3, test seat; 31, test plate; 311, test area; 3111, positioning pin; 3112, locking hole; 3113, containing groove; 312, first separator; 32, fixed frame. PREFERRED EMBODIMENT

[0030] In order to make the technical problem solved by the utility model, the technical scheme adopted and the technical effect reached more clear, the technical scheme of the utility model will be further explained by specific embodiment in combination with the drawings.

[0031] In the description of the utility model, unless another explicit provision and limitation, the term "link", "connection", "fixing" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated, can be mechanical connection, also can be electrical connection, can be direct connection, also can be indirect connection through the intermediate medium, can be the communication of two elements or the interaction of two elements. For ordinary skilled in the art, the above-mentioned terms can be understood according to the specific meaning in the utility model.

[0032] As Figure 1 shown, the embodiment provides a test handler, which includes a machine table 1, a conveying mechanism, a test seat 3 and at least two test mechanisms. The conveying mechanism and the test seat 3 are arranged on the machine table 1, and the test mechanisms are arranged above the machine table 1. The conveying mechanism is used to convey the to-be-tested pieces 100 from the feeding position to the test seat 3, and after the test is completed, the to-be-tested pieces 100 after the test are conveyed from the test seat 3 to the discharging position. The test mechanism includes a horizontal driving assembly, a vertical driving assembly and a test pressure head. The vertical driving assembly is installed on the horizontal driving assembly and is driven by the horizontal driving assembly to move horizontally. The test pressure head is arranged on the vertical driving assembly and is driven by the vertical driving assembly to move vertically. In this way, through the control of the horizontal driving assembly and the vertical driving assembly, the test pressure head can move to the set position within the preset stroke range, so as to facilitate the test pressure head to pick up the to-be-tested pieces 100. After the test pressure head picks up the to-be-tested pieces 100 from the conveying mechanism, the to-be-tested pieces 100 are placed on the test seat 3 for compression test. After the test is completed, the to-be-tested pieces 100 after the test are picked up to the conveying mechanism, the conveying mechanism conveys the to-be-tested pieces 100 after the test to the discharging position, and the compression test of the to-be-tested pieces 100 is completed. The specific structure and working principle of the horizontal driving assembly and the vertical driving assembly can be designed according to the prior art, and will not be described here.

[0033] Specifically, the machine table 1 is provided with conveying positions and test positions, and the test positions are provided with conveying positions on both sides. The feeding position is arranged at one end of the conveying position, and the discharging position is arranged at the other end of the conveying position. The conveying mechanism includes at least two conveying assemblies 2, and each conveying position is provided with at least one conveying assembly 2. The conveying assembly 2 is used to convey the to-be-tested pieces 100. The test seat 3 is arranged in the test position, and the test seat 3 is provided with at least two test areas 311. At least two test pressure heads are arranged above the machine table 1, and each test pressure head corresponds to a test area 311. The test pressure head can pick up the to-be-tested pieces 100 from the conveying assembly 2 on one of the conveying positions and move the to-be-tested pieces 100 to the corresponding test area 311 for compression test, so that at least two test pressure heads can simultaneously perform compression test, improving the compression test efficiency. Moreover, it is not necessary to greatly increase the conveying speed of the conveying assembly 2 and the picking speed of the test pressure head, so as to ensure the stability of the conveying assembly 2 conveying the to-be-tested pieces 100 and the test pressure head picking the to-be-tested pieces 100, and avoid damaging the to-be-tested pieces 100.

[0034] The conveying position is provided with a guide rail 11, and the conveying assembly 2 is slidably arranged on the guide rail 11. One end of the guide rail 11 is arranged close to the feeding position, and the other end is arranged close to the discharging position. The testing position is arranged between the feeding position and the discharging position. The conveying assembly 2 comprises a conveying driving member and a conveying disc. The conveying disc is slidably arranged on the guide rail 11, and the conveying driving member is connected with the conveying disc and used for driving the conveying disc to move along the guide rail 11. The conveying disc receives the to-be-tested piece 100 carried by the mechanical arm at the feeding position. The conveying driving member drives the conveying disc to move along the guide rail 11 to the testing seat 3. The testing pressure head corresponding to the conveying disc picks up the to-be-tested piece 100 from the conveying disc under the driving of the horizontal driving assembly and the vertical driving assembly, and places the to-be-tested piece 100 in the testing area 311 corresponding to the to-be-tested piece 100, so as to perform the pressing test. After the test is completed, the testing pressure head places the to-be-tested piece 100 after the test in the conveying disc. The conveying disc conveys the to-be-tested piece 100 after the test to the discharging position. The mechanical arm carries away the to-be-tested piece 100 after the test from the discharging position. Without waiting, the two testing pressure heads and the two conveying assemblies 2 corresponding to the two testing pressure heads are not affected by each other in the pressing test process of the to-be-tested piece 100. Compared with the serial test structure in the prior art, the pressing test efficiency can be improved by 40%. The longer the test time of the to-be-tested piece 100, the more obvious the improvement of the pressing test efficiency.

[0035] In an embodiment, a plurality of conveying assemblies 2 are arranged at a fixed interval between each conveying position, and the plurality of conveying assemblies 2 move at a uniform speed. That is, a plurality of conveying discs can be arranged on each guide rail 11. After each testing pressure head tests a to-be-tested piece 100 and picks up the to-be-tested piece 100 to a previous conveying disc, the testing pressure head can then pick up a new to-be-tested piece 100 from a subsequent conveying disc for pressing test without waiting for the previous conveying disc to convey the to-be-tested piece 100 after the test to the discharging position and then return to the feeding position to take and convey the to-be-tested piece 100. The pressing test efficiency is further improved.

[0036] Further, one of the plurality of conveying assemblies 2 is located at the test position, and one of the remaining conveying assemblies 2 is located at the feeding position; and / or, one of the remaining conveying assemblies 2 is located at the discharging position. That is, during the operation of the test handler, the first conveying assembly 2 receives the test piece 100 from the feeding position first, and then moves along the guide rail 11 to the test position. At this time, the second conveying assembly 2 has already been located at the feeding position to start receiving the test piece 100, and the test press head picks up the test piece 100 in the first conveying assembly 2 for pressure testing. After the pressure testing is completed, the test piece 100 is placed in the first conveying assembly 2. When the first conveying assembly 2 receives the test piece 100 after the test is completed and moves away from the test position to the discharging position, the second conveying assembly 2 just reaches the test position, and the test press head can pick up the test piece 100 from the second conveying assembly 2. At this time, the third conveying assembly 2 has already been located at the feeding position to start receiving the test piece 100. When the first conveying assembly 2 moves to the discharging position, the second conveying assembly 2 receives the test piece 100 after the test is completed and moves away from the test position to the discharging position, and the third conveying assembly 2 just moves to the test position at this time. In this way, the pressure testing rhythm is accelerated, and the pressure testing efficiency is further improved.

[0037] As shown in Figure 2 and Figure 3 The test seat 3 includes a test plate 31, and a first partition 312 is arranged at the middle of the test plate 31. The first partition 312 is arranged between two adjacent test areas 311 and extends along a direction parallel to the conveying direction of the conveying assembly 2.

[0038] In this embodiment, two conveying assemblies 2 are arranged, and one conveying assembly 2 is arranged at each conveying position. Two test press heads are arranged, and two test areas 311 are arranged on the test seat 3. The two test press heads and the two test areas 311 are arranged one by one, and the test press head picks up the test piece 100 from the conveying assembly 2 at the conveying position close to it and moves the test piece 100 to the test area 311 corresponding to it for pressure testing. That is, the first partition 312 divides the test plate 31 into two test areas 311. One of the test areas 311 corresponds to the conveying assembly 2 and the test press head close to one side thereof, and the other test area 311 corresponds to the conveying assembly 2 and the test press head close to the other side thereof. In this way, the movement path of the test press head when picking up the test piece 100 is shortened, and the pressure testing efficiency is improved.

[0039] Specifically, each test area 311 is distributed with a plurality of positioning pins 3111 and a plurality of locking holes 3112, and the to-be-tested piece 100 is distributed with a plurality of positioning holes and a plurality of locking pins, the plurality of positioning pins 3111 and the plurality of positioning holes are one-to-one corresponding and arranged, and the positioning pin 3111 and the positioning hole are matched and positioned; the plurality of locking holes 3112 and the plurality of locking pins are one-to-one corresponding and arranged, and the locking pin and the locking hole 3112 are matched and locked. Through the cooperation of the plurality of positioning pins 3111 and the plurality of positioning holes, the accurate positioning of the to-be-tested piece 100 when the test head picks up the to-be-tested piece 100 and places it on the test area 311 is realized, so as to avoid the inaccurate position of the to-be-tested piece 100 and affect the test result. The test circuit and the connecting plug are arranged in the test plate 31 corresponding to each test area 311, and the connecting plug is connected to the power supply to supply power to the test circuit. After the to-be-tested piece 100 is placed, the locking hole 3112 and the locking pin are matched and fixed to ensure the stability of the connection between the to-be-tested piece 100 and the test circuit.

[0040] The test area 311 is also provided with a plurality of accommodating grooves 3113, the to-be-tested piece 100 is an IC chip, the IC chip is provided with a plurality of components, and the plurality of accommodating grooves 3113 are used to accommodate the plurality of components.

[0041] In an embodiment, a second partition is arranged along the extension direction of the conveying position, the second partition is perpendicular to the first partition 312, and the second partition is arranged between the adjacent two test areas 311. That is, the first partition 312 divides the test plate 31 into a first test area and a second test area, and the second partition divides the first test area and the second test area into two test areas 311. The two test areas 311 of the first test area can correspond to one conveying assembly 2, that is, the two test areas 311 correspond to one conveying assembly 2; or two conveying assemblies 2 can be correspondingly arranged, that is, one test area 311 corresponds to one conveying assembly 2.

[0042] Of course, in other embodiments, the number of second partitions is not limited to one, and can be two or three or other numbers.

[0043] The test seat 3 further includes a fixed frame 32, and the fixed frame 32 is fixed to the test position, and the test plate 31 is arranged in the fixed frame 32. The test plate 31 is fixed to the test position on the machine table 1 through the fixed frame 32, so as to ensure that the test plate 31 will not be displaced during the compression test.

[0044] During the test, the to-be-tested piece 100 needs to be heated to ensure the required temperature during the compression test of the to-be-tested piece 100. The first heating piece is arranged on the fixed frame 32, that is, the first heating piece is arranged around the test plate 31 to heat the to-be-tested piece 100 on the test plate 31.

[0045] When the area of the test plate 31 is large and the number of test areas 311 arranged on the test plate 31 is large, the temperature of the peripheral area of the test plate 31 close to the first heating member is high, and the temperature of the middle area of the test plate 31 far from the first heating member is low, which causes the temperature of the test areas 311 to be uneven. In order to solve the above problem, the second heating member is arranged on the first partition 312, the second heating member is arranged in the first partition 312, and can heat the middle area of the test plate 31, so as to ensure that the temperature of at least two test areas 311 on the test plate 31 is uniform, the test environment is more stable, and the heating response speed of the test plate 31 is faster, the temperature rising time is reduced, and the test efficiency is improved.

[0046] The first heating member and the second heating member are both electric heaters. Exemplarily, the first heating member and the second heating member are both electric heating rods.

[0047] Of course, in other embodiments, the first heating member and the second heating member can also be heating channels, and water with a set temperature is passed into the heating channels to increase the temperature of the test areas 311.

[0048] In order to facilitate monitoring and adjusting the temperature rising of the test plate 31, the first temperature sensor is arranged on the fixed frame 32. The first temperature sensor is used to detect the temperature of the peripheral area of the test plate 31. The second temperature sensor is also arranged on the first partition 312, and the second temperature sensor is used to detect the temperature of the middle area of the test plate 31.

[0049] The above is only a preferred embodiment of the present application, and for those skilled in the art, according to the idea of the present application, the specific implementation and application range can be changed, and the content of the specification should not be understood as a limitation of the present application.

Claims

1. A test handler characterized by, The utility model relates to a test device for testing the performance of a plurality of test pieces, comprising: a machine table (1) provided with a conveying position and a test position, the test position being provided with the conveying position on both sides; a conveying mechanism comprising at least two conveying assemblies (2), each conveying position being provided with at least one conveying assembly (2), the conveying assembly (2) being used for conveying a test piece (100); a test seat (3) provided in the test position, the test seat (3) being provided with at least two test areas (311); at least two test pressure heads provided above the machine table (1), the at least two test pressure heads being capable of independent movement, each test pressure head corresponding to one test area (311), the test pressure head being capable of picking up the test piece (100) from the conveying assembly (2) on one of the conveying positions and moving the test piece (100) to the corresponding test area (311) for pressure testing.

2. The test handler of claim 1, wherein, The test seat (3) comprises a test plate (31), the middle part of the test plate (31) being provided with a first partition (312), the first partition (312) being provided between adjacent two test areas (311) and extending along a conveying direction parallel to the conveying assembly (2).

3. The test handler of claim 2, wherein, A second partition is provided along the extension direction of the conveying position, the second partition being provided perpendicularly to the first partition (312), the second partition being provided between adjacent two test areas (311).

4. The test handler of claim 2 or 3, wherein, A plurality of conveying assemblies (2) are provided at intervals between the conveying positions, the plurality of conveying assemblies (2) moving at a uniform speed at fixed intervals.

5. The test handler of claim 4, wherein, One end of the conveying position is provided with a feeding position, the other end is provided with a discharging position, the test position being provided between the feeding position and the discharging position; when one of the plurality of conveying assemblies (2) is located in the test position, one of the remaining conveying assemblies (2) is located in the feeding position; and / or, one of the remaining conveying assemblies (2) is located in the discharging position.

6. The test handler of claim 2, wherein, The test seat (3) further comprises a fixed frame (32), the fixed frame (32) being fixed to the test position, the test plate (31) being provided in the fixed frame (32), the fixed frame (32) being provided with a first heating member.

7. The test handler of claim 2 wherein, The first partition (312) is provided with a second heating member.

8. The test handler of claim 6, wherein, The fixed frame (32) is further provided with a first temperature sensor, and the first partition (312) is further provided with a second temperature sensor.

9. The test handler of claim 1, wherein, Each test area (311) is distributed with a plurality of positioning pins (3111) and a plurality of locking holes (3112), the test piece (100) being distributed with a plurality of positioning holes and a plurality of locking pins, the plurality of positioning pins (3111) and the plurality of positioning holes being provided one by one, the positioning pin (3111) and the positioning hole being matched and positioned; The plurality of locking holes (3112) and the plurality of locking pins are provided one by one, the locking pin and the locking hole (3112) being matched and locked.

10. The test handler of claim 1, wherein, The conveying assembly (2) is provided with two, and each conveying station is provided with one conveying assembly (2); the test pressure head is provided with two, and the test seat (3) is provided with two test areas (311), two test pressure heads and two test areas (311) are one-to-one correspondence, the test pressure head picks up the test piece (100) from the conveying assembly (2) close to the conveying station where it is arranged and moves the test piece (100) to the test area (311) corresponding to it for pressure test.