Bearing device and processing equipment

Abstract

The utility model relates to a bearing device and machining equipment, and the bearing device comprises a base plate which is used for bearing materials; the pressing assemblies are arranged on the base plate, and the base plate and the pressing assemblies are matched to press the materials; the pressing assembly comprises a connecting shaft body, a pressing piece and an elastic piece, the pressing piece is provided with a through hole, the connecting shaft body is movably sleeved with the pressing piece through the through hole, the connecting shaft body penetrates through the through hole to be connected with the base plate, and the elastic piece is arranged between the pressing piece and the end, away from the base plate, of the connecting shaft body. The elastic force of the elastic piece acts on the connecting shaft body and the pressing piece, and the pressing piece presses materials located between the pressing piece and the base plate under the action of the elastic force. The material fixing device can be used for fixing materials, is simple in structure and low in cost, can be used for high-temperature operation scenes, and can reduce the problem of low production efficiency caused by frequent disassembly steps.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photovoltaic and semiconductor manufacturing, in particular to a bearing device and processing equipment. BACKGROUND

[0002] Catalytic chemical vapor deposition (Cat-CVD), commonly known as hot-wire CVD, is a new method for preparing device-quality thin films at low substrate temperature. The carrier plate used to carry the silicon wafer in the current Cat-CVD equipment is usually a vertical carrier plate, that is, the silicon wafer is fixed vertically in the vertical carrier plate, so that both sides of the carrier plate can be coated on one side at the same time when coating the silicon wafer.

[0003] In the related art, the silicon wafer is usually fixed in the carrier plate by a permanent magnet or a bolt. However, the permanent magnet is easily limited by temperature and is difficult to use in high-temperature coating operations. In addition, if it needs to be used in high-temperature coating, it needs to use extremely expensive permanent magnets, which easily leads to cost increase. In addition, the magnetic force of the permanent magnet is not easy to control, and the silicon wafer is easily damaged when being fixed in the carrier plate. Although the bolt fixing method is simple and reliable, the bolt needs to be frequently disassembled during use, which easily leads to time and labor cost consumption, is not conducive to automatic production operation, and has low production efficiency. CONTENT OF THE INVENTION

[0004] In view of the above, it is necessary to provide a bearing device and processing equipment which can be used for material fixing, has simple structure and low cost, can be used in high-temperature operation scene, and can reduce the problem of low production efficiency caused by frequent disassembly steps.

[0005] The present application first provides a bearing device, comprising: a substrate for carrying materials; at least one compression assembly, the compression assembly is arranged on the substrate, and the substrate and the compression assembly cooperate to compress the materials; wherein the compression assembly comprises a connecting shaft body, a compression piece and an elastic piece, the compression piece has a through hole, the compression piece is movably sleeved on the connecting shaft body through the through hole, the connecting shaft body passes through the through hole and is connected with the substrate, the elastic piece is arranged between the compression piece and the end of the connecting shaft body away from the substrate, the elastic force of the elastic piece acts on the connecting shaft body and the compression piece, and the compression piece compresses the materials between the compression piece and the substrate under the action of the elastic force.

[0006] In the carrier device, the material (such as a silicon wafer) can be placed between the compression assembly and the base plate, and the compression part of the compression assembly can move towards the base plate under the action of the elastic part to compress the material, that is, the carrier device can be used for material fixation, and has simple structure and low cost, and can be used in high-temperature operation scenarios. When it is necessary to fix new material on the base plate or remove old material from the base plate, the compression part of the compression assembly can be moved away from the base plate, thereby facilitating the removal of the old material or the installation of the new material on the base plate, and the problem of low production efficiency caused by frequent disassembly steps can be reduced.

[0007] In some embodiments, the connecting shaft body includes a first end and a second end, the first end is formed with a protrusion, and the second end is connected with the base plate, one end of the elastic part abuts against the protrusion, and the other end of the elastic part abuts against the compression part.

[0008] In some embodiments, at least part of the elastic part is arranged in the through hole; the compression part is provided with a bearing part located in the through hole, wherein the through hole includes a first accommodating part and a second accommodating part in communication with the first accommodating part, the first accommodating part is arranged close to the protrusion, the second accommodating part is arranged close to the second end, the size of the first accommodating part in the direction perpendicular to the connecting shaft body is greater than the size of the second accommodating part in the direction perpendicular to the connecting shaft body, so as to form the bearing part at the connection between the first accommodating part and the second accommodating part, one end of the elastic part abuts against the protrusion, and the other end of the elastic part abuts against the bearing part.

[0009] In some embodiments, the compression part further has at least one limiting hole, the base plate is provided with a limiting column, at least part of the limiting column is located in the limiting hole, the compression part can rotate by a preset angle around the connecting shaft body as the rotation shaft, and the limiting column is used to limit the rotation angle of the compression part in cooperation with the limiting hole.

[0010] In some embodiments, the compression part includes a first fixing block, a compression part, and a second fixing block, the first fixing block and the second fixing block are connected and are sleeved on the connecting shaft body together; the compression part is connected with the first fixing block and / or the second fixing block, and the compression part extends towards the base plate to form a compression part for compressing the material.

[0011] In some embodiments, one side of the first fixing block and the second fixing block connected with each other has a groove, and the compression part is arranged in the first fixing block through the groove; or one side of the second fixing block and the first fixing block connected with each other has a groove, and the compression part is arranged in the second fixing block through the groove.

[0012] In some embodiments, the groove includes a first sub-bending groove, a connecting groove, and a second sub-bending groove, with the connecting groove connected to the first sub-bending groove and the second sub-bending groove respectively; the pressing part includes a first sub-bending part, a sub-connecting part, and a second sub-bending part, with the sub-connecting part connected to the first sub-bending part and the second sub-bending part respectively, and the first sub-bending part, the sub-connecting part, and the second sub-bending part located in the first sub-bending groove, the connecting groove, and the second sub-bending groove respectively; the first sub-bending part and the second sub-bending part extend toward the substrate to form a pressing contact part.

[0013] In some embodiments, the pressing portion extends toward the substrate to form a plurality of pressing contacts, and there are a plurality of grooves; the plurality of pressing components are arranged in an array on the substrate.

[0014] In some embodiments, a plurality of clamping components are disposed on a frame structure; the frame structure includes a plurality of limiting grooves for accommodating materials, and each clamping component is disposed in the peripheral area of ​​the limiting groove so that the material can be fixed between the clamping component and the limiting groove.

[0015] This application also provides a processing device having a process cavity, in which a carrier device according to any embodiment of this application is installed. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a scenario in which the carrying device of this application is used to compress materials.

[0017] Figure 2 This is a schematic diagram of the structure of the clamping component according to an embodiment of this application.

[0018] Figure 3 This is a cross-sectional structural diagram of a clamping assembly according to an embodiment of this application.

[0019] Figure 4 This is a cross-sectional structural diagram of a clamping component according to another embodiment of this application.

[0020] Figure 5 This application Figure 4 A cross-sectional structural diagram of the clamping component in the embodiment.

[0021] Figure 6 This application Figure 3 or Figure 4 A top view of the support device in the embodiment being disposed on the substrate.

[0022] Figure 7 This is a schematic diagram of the structure of a clamping component according to another embodiment of this application.

[0023] Figure 8 This application Figure 7 A bottom view of the first fixed block in an embodiment.

[0024] Figure 9 is an embodiment of the present application Figure 7 is a schematic structural view of a pressing member.

[0025] Main element symbol explanation:

[0026] 1, bearing device; 2, material; 11, base plate; 12, pressing assembly; 121, connecting shaft body; 122, pressing member; 123, elastic member; 1220, through hole; 1221, limiting hole; 111, limiting column; 1222, first fixed block; 1223, second fixed block; 1224, pressing part; 2201, first accommodating part; 2202, bearing part; 2203, second accommodating part; 2220, groove; 2221, first sub-bent groove; 2222, connecting groove; 2223, second sub-bent groove; 2240, pressing part; 241, first sub-bent part; 242, sub-connecting part; 243, second sub-bent part; A, first direction.

[0027] The following detailed embodiments will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0028] In the description of the embodiments of the present application, the words "exemplary", "or", "for example" are used to mean serving as an example, instance, or illustration. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or advantageous than other embodiments or design solutions. Rather, the use of the words "exemplary", "or", "for example" is intended to present concepts in a specific way.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. "At least one" means one or more. "Multiple" means two or more. For example, at least one of a, b, or c can mean: a, b, c, a and b, a and c, b and c, or a, b, and c.

[0030] It should also be noted that the terms "first", "second" and "third" and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of practical implementation irrespective of the particular sequence or order of steps presented in the claims.

[0031] In the photovoltaic industry, mainstream solar cells usually include Tunnel Oxide Passivated Contact (TOP-Con) cells and crystalline silicon heterojunction (Heterojunction Technology, HJT) cells. Both types of cells require the growth of high-quality amorphous silicon films, and therefore can be prepared by catalytic chemical vapor deposition (Cat-CVD) in principle. Cat-CVD, often referred to as hot-wire CVD or hot-filament CVD, is a new method for preparing high-quality thin films at low substrate temperatures.

[0032] In current Cat-CVD equipment, the carrier plate used to carry the silicon wafer is usually a vertical carrier plate, i.e., the silicon wafer is fixed vertically in the vertical carrier plate, so that both sides of the carrier plate can be coated simultaneously when the silicon wafer is coated. In this case, since the carrier plate and the silicon wafer are both placed vertically, an additional cover plate is needed to fix the silicon wafer on the carrier plate. In the related art, the silicon wafer is first clamped between the carrier plate and the cover plate, and the cover plate is then adsorbed by a permanent magnet or fixed by a screw. In some cases, the cover plate can be unnecessary, for example, the silicon wafer can be directly fixed on the carrier plate by a permanent magnet or a screw.

[0033] However, permanent magnets are easily limited by temperature and are difficult to use in high-temperature coating operations. For example, the hot wire temperature of current Cat-CVD equipment is basically between 1600°C and 2200°C, and ordinary rare-earth magnets will gradually demagnetize in this high-temperature environment, which can cause problems such as silicon wafer falling off and fragmentation. In addition, if it is necessary to use in high-temperature coating, extremely expensive permanent magnets such as samarium-cobalt magnets are needed, which have good stability at high temperatures, but are expensive and easily broken compared to rare-earth magnets, resulting in high costs during installation and use. In addition, the silicon wafer is usually about 140 nm thick and is extremely fragile, and the magnetic force of the permanent magnet is not easy to control, which can easily damage the silicon wafer when fixing it on the carrier plate. Although the screw fixing method is simple and reliable and can be used in high-temperature environments, it needs to be frequently disassembled during use, which can cause time and labor costs, is not conducive to automated production operations, and has low production efficiency.

[0034] Therefore, the embodiments of the present application provide a carrying device and processing equipment, which can be used for material fixation, have a simple structure and low cost, can be used in high-temperature operation scenarios, and can reduce the problem of low production efficiency caused by frequent disassembly steps.

[0035] Figure 1 FIG. 1 is a schematic diagram of a scenario in which the carrying device 1 of the embodiments of the present application is used to compress the material 2. Figure 2This is a schematic diagram of the structure of the clamping component 12 in an embodiment of this application.

[0036] Please see Figure 1 This application first provides a support device 1, which can be used to clamp and fix materials including but not limited to silicon wafers, solar cells, photovoltaic panels, or other materials during production. The support device 1 may include a substrate 11 and a clamping assembly 12. The clamping assembly 12 is disposed on the substrate 11, and the substrate 11 and the clamping assembly 12 cooperate to clamp the material 2. Depending on the clamping requirements of the material 2, there may be one or more clamping assemblies 12, that is, the support device 1 includes at least one clamping assembly 12.

[0037] The substrate 11 can also be called a "carrier plate". The substrate 11 can be used as the main body of the carrier to support and fix the material 2 during processing. For example, when the material 2 is a silicon wafer, the substrate 11 supports and fixes the silicon wafer as the main body of the carrier so that the silicon wafer can be coated in the catalytic chemical vapor deposition process.

[0038] In some embodiments, such as Figure 1 As shown, the substrate 11 can have a frame structure. This allows for the simultaneous support and fixation of multiple materials 2, thereby improving production efficiency.

[0039] It can be understood that the substrate 11 has a frame structure, that is, the substrate 11 can be a frame formed by splicing multiple frames, and the material 2 can be fixed on the frame. Therefore, it is convenient to perform multi-face processing on the material 2 through the hollow area of ​​the frame. For example, when the material 2 is a silicon wafer, the silicon wafer can be fixed on the frame of the substrate 11. During high-temperature coating, since the frame has a hollow area, it is convenient to coat both sides of the silicon wafer at the same time.

[0040] In some embodiments, a plurality of clamping components 12 are arranged in an array on the substrate 11. For example, if the material 2 is a square silicon wafer, the clamping components 12 arranged in an array can be provided on the substrate 11. Two clamping components 12 can cooperate with the substrate 11 to clamp one material 2, or four clamping components 12 can cooperate with the substrate 11 to clamp one material 2, or six clamping components 12 can cooperate with the substrate 11 to clamp one material 2, or more. Multiple materials 2 can be clamped by multiple clamping components 12. For example, three clamping components 12 can cooperate with the substrate 11 to clamp two materials 2, or six clamping components 12 can cooperate with the substrate 11 to clamp two materials 2, nine clamping components 12 can cooperate with the substrate 11 to clamp four materials 2, or more.

[0041] In some embodiments, a plurality of pressing assemblies 12 are arranged on the frame structure to press the plurality of materials 2 against the frame structure. For example, the pressing assemblies 12 can be arranged at the four corners of the frame structure, or can be arranged on the four edges of the frame structure, or can be arranged at the four corners of the frame structure and on the four edges of the frame structure.

[0042] In some other embodiments, the frame structure can include a plurality of limiting grooves, i.e., the base plate can include a plurality of limiting grooves. The limiting grooves can be used to accommodate the materials 2, and each pressing assembly 12 is arranged at a peripheral region of the limiting grooves so that the materials 2 can be fixed between the pressing assembly 12 and the limiting grooves.

[0043] In some embodiments, the base plate 11 can be made of a high-temperature-resistant material, such as high-temperature-resistant ceramic, high-temperature-resistant metal, high-temperature-resistant metal alloy, or other high-temperature-resistant materials. In the embodiments of the present application, the base plate 11 can be used in an environment with a temperature up to 2200°C.

[0044] In some embodiments, the pressing assembly 12 can be made of a high-temperature-resistant material, such as high-temperature-resistant ceramic, high-temperature-resistant metal, high-temperature-resistant metal alloy, or other high-temperature-resistant materials. In the embodiments of the present application, the pressing assembly 12 can be used in an environment with a temperature up to 2200°C. In other words, the pressing assembly 12 can be made of the same material as the base plate 11.

[0045] Please refer to Figure 2 In the embodiments of the present application, the pressing assembly 12 can include a connecting shaft body 121, a pressing member 122, and an elastic member 123. The connecting shaft body 121 can pass through the through hole 1220 to be connected to the base plate 11, and the pressing member 122 has a through hole 1220. The pressing member 122 can be movably sleeved on the connecting shaft body 121 through the through hole 1220, i.e., the pressing member 122 can rotate around the connecting shaft body 121 or can be moved and detached from the connecting shaft body 121. The elastic member 123 is arranged between the pressing member 122 and the end of the connecting shaft body 121 away from the base plate 11, and the elastic member 123 has an elastic force. The elastic force of the elastic member 123 can act on the connecting shaft body 121 and the pressing member 122. The pressing member 122 can press the material 2 between the pressing member 122 and the base plate 11 under the action of the elastic member 123. Specifically, the pressing member 122 moves towards the base plate 11 (i.e., in the first direction A) under the action of the elastic member 123 to press the material 2 between the pressing member 122 and the base plate 11.

[0046] It can be understood that the pressing member 122 is moved towards the base plate 11 under the action of the elastic member 123, that is, the pressing member 122 can be subjected to the elastic force of the elastic member 123 and moved towards the base plate 11 under the action of the elastic force, so that the material 2 placed between the pressing member 122 and the base plate 11 can be tightly fixed in cooperation with the base plate 11. The material 2 (such as a silicon wafer) can be placed between the pressing assembly 12 and the base plate 11, and the pressing member 122 of the pressing assembly 12 can be moved towards the base plate 11 under the action of the elastic member 123 to press the material 2, that is, the carrying device 1 can be used for material 2 fixation, which has simple structure and low cost and can be used in high-temperature operation scenarios.

[0047] In other embodiments, the material 2 (such as a silicon wafer) can be placed between the pressing assembly 12 and the base plate 11, and the pressing member 122 of the pressing assembly 12 can first rotate a predetermined angle around the connecting shaft body 121 and then move towards the base plate 11 under the action of the elastic member 123 to press the material 2. For example, the pressing member 122 can be a cuboid, and when it is necessary to tightly fix the material 2, the pressing member 122 can be rotated to an angle (such as 90°) at which the long side portion can abut against the material 2, and then the pressing member 122 can move towards the base plate 11 under the action of the elastic member 123 to press the material 2.

[0048] When it is necessary to fix a new material 2 to the base plate 11 or remove an old material 2 from the base plate 11, the pressing member 122 of the pressing assembly 12 can be moved away from the base plate 11 to release the old material 2, thereby facilitating the removal of the old material 2 or the installation of the new material 2 to the base plate 11, and the problem of low production efficiency caused by frequent disassembly steps can be reduced.

[0049] In other embodiments, when it is necessary to fix a new material 2 to the base plate 11 or remove an old material 2 from the base plate 11, the pressing member 122 of the pressing assembly 12 can be moved away from the base plate 11, and then the pressing member 122 of the pressing assembly 12 can first rotate a predetermined angle around the connecting shaft body 121 to facilitate the removal of the old material 2 or the installation of the new material 2 to the base plate 11. For example, the pressing member 122 can be a cuboid, and after the pressing member 122 moves towards the base plate 11 under the action of the elastic member 123 to press the material 2 before the material 2 is placed between the base plate 11 and the pressing member 122 or after the material 2 is removed from between the base plate 11 and the pressing member 122, the pressing member 122 can be rotated to an angle (such as 90°) at which the short side portion forms a predetermined distance from the material 2, thereby facilitating the removal of the old material 2 or the installation of the new material 2 to the base plate 11.

[0050] In some embodiments, the pressing member 122 can be a symmetric body and the through hole 1220 is located at the center of symmetry. For example, the pressing member 122 can be a cuboid, the pressing member 122 can press and fix the material 2 by using the long edge part, and the short edge part facilitates the release of the material 2. Alternatively, the pressing member 122 can be a block composed of two fan-shaped bodies, the pressing member 122 can press and fix the material 2 by using the fan-shaped part, and the remaining part facilitates the release of the material 2. Alternatively, the pressing member 122 can be a cross-shaped body, the pressing member 122 can press and fix the material 2 by using the convex part of the cross shape, and the non-convex part of the cross shape facilitates the release of the material 2. In this case, the pressing member 122 can press and fix multiple materials 2 at the same time.

[0051] In other embodiments, the pressing member 122 can also be an asymmetric body. For example, the pressing member 122 can be a long strip block, but the through hole 1220 is located at one end of the long strip block, the pressing member 122 can press and fix the material 2 by using the long strip part and the one end no longer occupies space, thereby reducing the interference or disturbance to other structures. Alternatively, the pressing member 122 can be a fan-shaped body, and the through hole 1220 is located at one end close to the arc or close to the center of the circle.

[0052] In some embodiments, the connecting shaft body 121 and the base plate 11 are detachably connected by threads. For example, the part where the connecting shaft body 121 and the base plate 11 are connected can be a screw, and the part where the base plate 11 and the connecting shaft body 121 are connected can have threads matching the screw. In this case, when the pressing assembly 12 is damaged, it can be disassembled and replaced by threads, improving convenience. In addition, the degree of connection between the connecting shaft body 121 and the base plate 11 can also be adjusted by threads, thereby adjusting the pressing force of the pressing member 122 on the material 2, thereby facilitating the adaptation of materials 2 of various thicknesses and improving adaptability.

[0053] In some embodiments, the connecting shaft body 121 can be a nut.

[0054] In some embodiments, the connecting shaft body 121 can include a first end and a second end, the first end is formed with a protrusion, and the second end is connected to the base plate 11. One end of the elastic member 123 abuts against the protrusion, and the other end of the elastic member 123 abuts against the pressing member 122. For example, one end of the elastic member 123 abuts against the protrusion, and the other end of the elastic member 123 can abut against the upper surface of the pressing member 122 close to the protrusion (see the embodiment below), or one end of the elastic member 123 abuts against the protrusion, and the other end of the elastic member 123 can abut against the bearing part 2202 located in the through hole 1220 (see the embodiment below). Figure 3 Figure 4 、 Figure 5 ​The elastic force of the elastic member 123 can act on the pressing member 122 and the connecting shaft body 121. Since the connecting shaft body 121 is connected to the base plate 11, the pressing member 122 can move towards the base plate 11 under the elastic force of the elastic member 123 to press the material 2, which can reduce the time required for pressing the material 2 by the bolt method, or can lift the pressing member 122 to reset the pressing member 122 after the material 2 is removed, which can reduce the time required for removing the material 2 by the bolt method.

[0055] Figure 3 is a cross-sectional structure schematic diagram of the pressing assembly 12 of an embodiment of the present application.

[0056] In some embodiments, as shown in Figure 3 , the connecting shaft body 121 can include a first end and a second end, the first end is formed with a protrusion, and the second end is connected to the base plate 11. One end of the elastic member 123 abuts against the protrusion, and the other end of the elastic member 123 abuts against the pressing member 122. The elastic force of the elastic member 123 can act on the surface of the pressing member 122 and the protrusion of the connecting shaft body 121. Since the connecting shaft body 121 is connected to the base plate 11, the pressing member 122 can move towards the base plate 11 under the elastic force of the elastic member 123 to press the material 2, which can reduce the time required for pressing the material 2 by the bolt method, or can lift the pressing member 122 to reset the pressing member 122 after the material 2 is removed, which can reduce the time required for removing the material 2 by the bolt method.

[0057] Figure 4 is a cross-sectional structure schematic diagram of the pressing assembly 12 of another embodiment of the present application. Figure 5 is a cross-sectional structure schematic diagram of the pressing part of an embodiment of the present application. Figure 4

[0058] In some embodiments, as shown in Figure 4 , at least part of the elastic member 123 is arranged in the through hole 1220. As shown in Figure 5 , the pressing member 122 is provided with a bearing part 2202 located in the through hole 1220, wherein the through hole 1220 includes a first accommodating part 2201 and a second accommodating part 2203 in communication with the first accommodating part 2201, the first accommodating part 2201 is arranged close to the protrusion, and the second accommodating part 2203 is arranged close to the second end. The size of the first accommodating part 2201 in the direction perpendicular to the connecting shaft body 121 can be greater than the size of the second accommodating part 2203 in the direction perpendicular to the connecting shaft body 121, so as to form the bearing part 2202 at the connection between the first accommodating part 2201 and the second accommodating part 2203. As shown in Figure 4 ​As shown, one end of the elastic member 123 abuts against the protrusion, and the other end of the elastic member abuts against the bearing portion 2202. In this case, the elastic force of the elastic member 123 can act on the bearing portion 2202 and the protrusion, and since the connecting shaft body 121 is connected to the base plate 11, the pressing member 122 can move toward the base plate 11 under the action of the elastic force of the elastic member 123 to press the material 2, which can reduce the time required for pressing the material 2 in the bolt manner, or can lift the pressing member 122 to reset the pressing member 122 after the material 2 is removed, which can reduce the time required for removing the material 2 in the bolt manner. At the same time, since the elastic member 123 is partially located in the through hole 1220, a stable structural relationship is formed among the through hole 1220, the elastic member 123, and the connecting shaft body 121, which can improve the stability of the movement of the pressing member 122 on the connecting shaft body 121.

[0059] Figure 6 is another embodiment of the present application Figure 3 or Figure 4 A top view of the bearing device 1 of the embodiment is arranged on the base plate 11.

[0060] In some embodiments, in combination Figures 3 to 6 As shown, the pressing member 122 can also have at least one limiting hole 1221, for example, 1, 2, 3, or more. The base plate 11 is provided with a limiting post 111, and the number of the limiting posts 111 can correspond to the number of the limiting holes 1221, for example, 1 limiting hole 1221 can correspond to 1 limiting post 111, or 1 limiting hole 1221 can correspond to 2 limiting posts 111. At least part of the limiting post 111 is located in the limiting hole 1221, and the pressing member 122 can rotate by a preset angle with the connecting shaft body 121 as the rotation shaft. The limiting post 111 is used to cooperate with the limiting hole 1221 to limit the rotation angle of the pressing member 122. For example, when the limiting post 111 cooperates with the limiting hole 1221 to limit the clockwise rotation of the pressing member 122 by 45° with the connecting shaft body 121 as the rotation shaft, the pressing member 122 can cooperate with the base plate 11 to press and fix the material 2, at this time, the pressing member 122 can be said to rotate to the “working position”, and when the limiting post 111 cooperates with the limiting hole 1221 to limit the counterclockwise rotation of the pressing member 122 by 45° with the connecting shaft body 121 as the rotation shaft, the pressing member 122 can loosen the material 2 to facilitate the removal or replacement of the material 2, at this time, the pressing member 122 can be said to rotate to the “installation position”.

[0061] In some embodiments, the preset angle of the rotation of the pressing member 122 with the connecting shaft body 121 as the rotation shaft can be between 0° and 180°, for example, 45°, 90°, or 135°.

[0062] Figure 7 is a structural schematic view of the pressing assembly 12 of another embodiment of the present application. Figure 8 is another embodiment of the present application Figure 7Figure 22 is a bottom view of the first fixing block 1222 of the embodiment.

[0063] In some embodiments, as shown in Figure 7 The pressing member 122 can include a first fixing block 1222, a second fixing block 1223, and a pressing portion 1224, the first fixing block 1222 is connected with the second fixing block 1223 and is sleeved on the connecting shaft body 121 together.

[0064] As shown in Figure 8 The side of the first fixing block 1222 connected with the second fixing block 1223 has a groove 2220, the pressing portion 1224 is arranged in the first fixing block 1222 through the groove 2220, and the pressing portion 1224 extends towards the substrate 11 to form a pressing portion 2240 for pressing the material 2. In other words, a part of the pressing portion 1224 can be arranged between the first fixing block 1222 and the second fixing block 1223 through the groove 2220, the first fixing block 1222 and the second fixing block 1223 can stabilize the pressing portion 1224, and the part of the pressing portion 1224 not arranged between the first fixing block 1222 and the second fixing block 1223 can form the pressing portion 2240 for pressing the material 2. In this case, the material 2 can be pressed by the pressing portion 2240, which can reduce the contact area between the material 2 and the pressing portion 2240 when the material 2 is pressed, thereby facilitating more efficient processing and utilization of the material 2. For example, when the material 2 is a silicon wafer and the processing procedure is coating, the silicon wafer can be pressed by the pressing portion 2240, which can reduce the contact area between the silicon wafer and the pressing portion 2240 when the material 2 is pressed, thereby enabling the silicon wafer to form a high-quality thin film with a larger area through coating, reducing the waste of silicon wafer raw materials.

[0065] In other embodiments, the side of the second fixing block 1223 connected with the first fixing block 1222 can also have a groove 2220, and the pressing portion 1224 is arranged in the second fixing block 1223 through the groove 2220.

[0066] In other embodiments, the side of the first fixing block 1222 connected with the second fixing block 1223 and the side of the second fixing block 1223 connected with the first fixing block 1222 both have grooves 2220, and the pressing portion 1224 is arranged between the first fixing block 1222 and the second fixing block 1223 through the grooves 2220.

[0067] In some embodiments, the first fixing block 1222 or the second fixing block 1223 may have multiple grooves 2220, and the number of pressing parts 1224 is the same as the number of grooves 2220. In this case, it is convenient to set multiple pressing parts 1224 to press and fix multiple materials 2 at one time. For example, there may be two grooves 2220, two pressing parts 1224, and one pressing contact part 2240 of the pressing part 1224, so that the two pressing parts 1224 can press two materials 2 at the same time. Or, there may be two grooves 2220, two pressing parts 1224, and two pressing contact parts 2240 of the pressing part 1224, so that the two pressing parts 1224 can press four materials 2 at the same time.

[0068] In some embodiments, the groove 2220 may include a first sub-bending groove 2221, a connecting groove 2222, and a second sub-bending groove 2223, wherein the connecting groove 2222 is connected to the first sub-bending groove 2221 and the second sub-bending groove 2223 respectively. Figure 8 As shown, the connecting groove 2222 can be the middle section of the groove 2220, and the first sub-bending groove 2221 and the second sub-bending groove 2223 can be two sections of the groove 2220 that bend outwards.

[0069] In some embodiments, the first fixing block 1222 and the second fixing block 1223 can be connected by screws. In other embodiments, the first fixing block 1222 and the second fixing block 1223 can also be connected by adhesive or snap-fit.

[0070] Figure 9 This application Figure 7 A schematic diagram of the structure of the clamping part 1224 in an embodiment.

[0071] In some embodiments, such as Figure 9 As shown, the pressing part 1224 has a plurality of pressing contacts 2240. For example, one pressing part 1224 may have two pressing contacts 2240. The pressing part 1224 may be shaped like an "antenna," with the pressing contacts 2240 being the tip of the "antenna." The plurality of pressing contacts 2240 may be evenly distributed on a plane, that is, the angles between the plurality of pressing contacts 2240 on a plane may be equal. For example, there may be two pressing contacts 2240, and the angle between the two pressing contacts 2240 may be 180°, or there may be four pressing contacts 2240, and the angle between the four pressing contacts 2240 may be 90°.

[0072] In some embodiments, the clamping portion 1224 may be a bent strip. The pressure contact portion 2240 of the clamping portion 1224 may be bent to be parallel to the surface of the material 2. This can improve the stability of clamping while reducing the possibility of damage to the material 2 due to excessive concentration of force on the pressure contact portion 2240 during clamping.

[0073] Specifically, as shown in Figure 9 The pressing part 1224 can include a first sub-bending part 241, a sub-connection part 242, and a second sub-bending part 243, and the sub-connection part 242 is connected with the first sub-bending part 241 and the second sub-bending part 243, respectively. The first sub-bending part 241, the sub-connection part 242, and the second sub-bending part 243 are located in the first sub-bending groove 2221, the connection groove 2222, and the second sub-bending groove 2223, respectively. The portions of the first sub-bending part 241 and the second sub-bending part 243 outside the pressing member 122 extend towards the substrate 11 to form a pressing contact part 2240. In this case, the arrangement of the bending part and the bending groove can better fix the pressing part 1224 and avoid the falling of the pressing part 1224.

[0074] The application also provides a processing equipment, which has a process cavity, and the process cavity is provided with the bearing device 1 of any one of the embodiments of the application.

[0075] In the embodiments of the application, the material 2 (such as a silicon wafer) can be placed between the pressing assembly 12 and the substrate 11, and the pressing member 122 of the pressing assembly 12 can move towards the substrate 11 under the action of the elastic member 123 to press the material 2, that is, the bearing device 1 can be used for fixing the material 2, and has the advantages of simple structure, low cost, and can be used in high-temperature operation scenarios. When it is necessary to fix a new material 2 on the substrate 11 or remove an old material 2 from the substrate 11, the pressing member 122 of the pressing assembly 12 can be moved away from the substrate 11, thereby facilitating the removal of the old material 2 or the installation of the new material 2 on the substrate 11, and the problem of low production efficiency caused by frequent disassembly steps can be reduced.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the application and are not limiting. Although the application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the application can be modified or replaced equivalently without departing from the spirit and scope of the technical solutions of the application.

Claims

1. A supporting device, characterized in that, include: The substrate is used to support materials; At least one clamping component is disposed on the substrate, and the substrate cooperates with the clamping component to clamp the material; The clamping assembly includes a connecting shaft, a clamping member, and an elastic member. The clamping member has a through hole and is movably fitted onto the connecting shaft through the through hole. The connecting shaft passes through the through hole and is connected to the substrate. The elastic member is disposed between the clamping member and the end of the connecting shaft away from the substrate. The elastic force of the elastic member acts on the connecting shaft and the clamping member, and the clamping member presses the material located between the clamping member and the substrate under the action of the elastic force.

2. The bearing device according to claim 1, characterized in that, The connecting shaft includes a first end and a second end. The first end has a protrusion, and the second end is connected to the substrate. One end of the elastic member abuts against the protrusion, and the other end of the elastic member abuts against the clamping member.

3. The bearing device according to claim 2, characterized in that, At least a portion of the elastic element is disposed within the through hole; The clamping member is provided with a bearing portion located within the through hole. The through hole includes a first receiving portion and a second receiving portion communicating with the first receiving portion. The first receiving portion is disposed near the protrusion, and the second receiving portion is disposed near the second end. The dimension of the first receiving portion in the direction perpendicular to the connecting shaft is larger than the dimension of the second receiving portion in the direction perpendicular to the connecting shaft, so that the bearing portion is formed at the connection between the first receiving portion and the second receiving portion. One end of the elastic member abuts against the protrusion, and the other end of the elastic member abuts against the bearing portion.

4. The bearing device according to claim 1, characterized in that, The clamping member also has at least one limiting hole, and the base plate is provided with a limiting post. At least a portion of the limiting post is located in the limiting hole. The clamping member can rotate a preset angle about the connecting shaft. The limiting post is used to cooperate with the limiting hole to limit the rotation angle of the clamping member.

5. The bearing device according to claim 4, characterized in that, The clamping component includes a first fixing block, a clamping part, and a second fixing block. The first fixing block and the second fixing block are connected and together sleeved on the connecting shaft. The clamping part is connected to the first fixing block and / or the second fixing block, and the clamping part extends toward the substrate to form a pressure contact part for clamping the material.

6. The bearing device according to claim 5, characterized in that, The side of the first fixing block that connects to the second fixing block has a groove, and the clamping part is disposed on the first fixing block through the groove; or The second fixing block has a groove on the side that connects to the first fixing block, and the clamping member is disposed on the second fixing block through the groove.

7. The bearing device according to claim 6, characterized in that, The groove includes a first sub-bending groove, a connecting groove, and a second sub-bending groove, wherein the connecting groove is connected to the first sub-bending groove and the second sub-bending groove respectively; The pressing part includes a first sub-bending part, a sub-connecting part, and a second sub-bending part. The sub-connecting part is connected to the first sub-bending part and the second sub-bending part respectively. The first sub-bending part, the sub-connecting part, and the second sub-bending part are respectively located in the first sub-bending groove, the connecting groove, and the second sub-bending groove. The first sub-bend and the second sub-bend extend toward the substrate to form the pressure contact portion.

8. The bearing device according to claim 6, characterized in that, The pressing portion extends toward the substrate to form a plurality of pressing contacts, and the groove is a plurality of; Multiple clamping components are arranged in an array on the substrate.

9. The bearing device according to claim 1, characterized in that, The substrate has a frame structure, and the plurality of clamping components are disposed on the frame structure; The frame structure includes multiple limiting grooves for accommodating the material. Each clamping component is disposed in the peripheral area of ​​the limiting groove so that the material can be fixed between the clamping component and the limiting groove.

10. A processing device, characterized in that, The processing equipment has a process cavity, and the bearing device as described in any one of claims 1-9 is installed in the process cavity.

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