Lamp inspection machine

Abstract

The utility model discloses a lamp inspection machine which comprises a machine base, a conveying belt is installed on the machine base, a machine frame is fixedly installed above the machine base, a lifting air cylinder is fixedly installed on the machine frame, a light shield is fixedly installed at the telescopic end of the lifting air cylinder, and a lamp inspection machine head is fixedly installed at the top end in the light shield. A light shielding ring is arranged at the bottom end of the light shielding cover, and an adjusting protection structure is arranged between the light shielding ring and the light shielding cover; an air inlet box is fixedly mounted on the shading ring, and a purification assembly is mounted in the air inlet box; and a fan is fixedly mounted on the light shield. Compared with the prior art, the light inspection machine provided by the utility model can eliminate the influence of external light, air humidity and impurities in air on the work of the light inspection machine when detecting the wafer, so that the light inspection machine can still accurately detect the defects on the surface of the wafer in a workshop with complex light and air environments, and the normal use of the light inspection machine is ensured.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor detection, and specifically relates to a lamp inspection machine. BACKGROUND

[0002] In modern semiconductor manufacturing technology, the detection of wafers is a crucial step, directly affecting the quality and performance of integrated circuits. As an application of optical detection technology in this field, the wafer lamp inspection machine can non-contact detect the defects on the wafer surface, greatly improving the detection efficiency and accuracy.

[0003] At present, when the lamp inspection machine is used, factors such as environmental light and air humidity will have a certain influence on the measurement result. In the workshop with complex light and air environment, the lamp inspection machine has a high rate of missed judgment and misjudgment during detection, and it is difficult to accurately identify the wafer surface defects, resulting in a serious impact on the accuracy and unable to use.

[0004] Therefore, in view of the above technical problems, it is necessary to provide a lamp inspection machine.

[0005] The information disclosed in this background section is intended only to increase an understanding of the general background of the present utility model and should not be construed as an acknowledgment or any form of suggestion that this information constitutes prior art with respect to the present utility model. CONTENT OF THE UTILITY MODEL

[0006] The utility model aims at providing a lamp inspection machine, which can solve the problem that in the workshop with complex light and air environment, the lamp inspection machine has a high rate of missed judgment and misjudgment during detection, and it is difficult to accurately identify the wafer surface defects, resulting in a serious impact on the accuracy and unable to use.

[0007] In order to achieve the above-mentioned purpose, the technical scheme provided by the utility model in one embodiment is as follows:

[0008] A lamp inspection machine comprises a base, a conveying belt installed on the base, a rack fixedly installed above the base, a lifting cylinder fixedly installed on the rack, a light shield fixedly installed at the extension end of the lifting cylinder, and a lamp inspection head fixedly installed at the top end inside the light shield.

[0009] The bottom end of the light shield is provided with a light shield ring, and an adjusting protection structure is arranged between the light shield ring and the light shield.

[0010] The light shield ring is fixedly installed with an air inlet box, and the air inlet box is internally installed with a purification assembly.

[0011] The light shield is fixedly installed with a fan.

[0012] The input end of the fan is communicated with the inside of the light shield cover, and the output end of the fan is fixedly installed with a flow guide shell.

[0013] The flow guide shell is obliquely arranged towards the upper end surface of the conveying belt.

[0014] In one or more embodiments of the utility model, the adjusting protection structure comprises a folded corrugated ring, the folded corrugated ring is fixedly installed between the upper end surface of the light shielding ring and the lower end surface of the light shield cover, and a lifting assembly is arranged between the light shielding ring and the light shield cover.

[0015] In one or more embodiments of the utility model, the lifting assembly comprises a pair of first ear pieces fixed on the light shielding ring and a pair of second ear pieces fixed on the light shield cover, and the pair of first ear pieces and the pair of second ear pieces are matched.

[0016] A screw rod is fixedly installed on each of the pair of first ear pieces, and a nut is rotatably connected to each of the pair of second ear pieces, and the screw rod and the nut are matched.

[0017] In one or more embodiments of the utility model, a pair of wing plates are fixedly installed on the nut.

[0018] In one or more embodiments of the utility model, the purification assembly comprises an air filter element, and the air filter element is fixedly installed in the inside of the porous sealing plate.

[0019] In one or more embodiments of the utility model, the air filter element is any one or a combination of more than one of an activated carbon filter element, an HEPA filter element, a particulate matter filter element, an electrostatic filter element or a fiber filter element.

[0020] In one or more embodiments of the utility model, a porous sealing plate is fixedly installed on one side of the air inlet box.

[0021] In one or more embodiments of the utility model, an artificial window is fixedly installed on the light shield cover.

[0022] In one or more embodiments of the utility model, the fan and the air inlet box are located at different sides.

[0023] Compared with the prior art, the lamp inspection machine can eliminate the influence of external light, air humidity and impurities in the air on the working of the lamp inspection machine when detecting the wafer, so that the lamp inspection machine can still accurately detect the defects on the surface of the wafer in a workshop with complex light and air environment, and normal use of the lamp inspection machine is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to make the technical personnel in the art better understand the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced below, obviously, the drawings described below are only some embodiments in the present application, and for those skilled in the art, other drawings can be obtained without creative labor on the premise of the embodiments in the present application.

[0025] Figure 1 Structure diagram of the lamp inspection machine in an embodiment of the present application

[0026] Figure 2 Lightproof cylinder structure of the lamp inspection machine in an embodiment of the present application Figure 1 ;

[0027] Figure 3 Lightproof cylinder structure of the lamp inspection machine in an embodiment of the present application Figure 2 ;

[0028] Figure 4 Sectional view of the lightproof cylinder of the lamp inspection machine in an embodiment of the present application

[0029] Figure 5 The lamp inspection machine in an embodiment of the present application Figure 2 Enlarged view of A in FIG. 6.

[0030] Main drawing mark explanation:

[0031] 1, machine base; 2, conveying belt; 3, rack; 4, lifting cylinder; 5, light shielding ring; 501, first ear; 6, light shielding cover; 601, second ear; 7, fan; 8, flow guide shell; 9, artificial window; 10, folded corrugated ring; 11, air inlet box; 1101, multi-hole sealing plate; 1102, air filter element; 12, screw; 13, lamp inspection machine head; 14, nut; 1401, wing plate. DETAILED DESCRIPTION

[0032] In order to make the technical personnel in the art better understand the technical solutions in the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application, obviously, the described embodiments are only some embodiments in the present application, and are not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0033] As Figures 1-5As shown, the utility model discloses a lamp inspection machine, including base 1, the base 1 is installed with conveying belt 2, and wafer can be transported on conveying belt 2 and feed. The top of base 1 is fixedly installed with rack 3, and the rack 3 is fixedly installed with lifting cylinder 4, and the telescopic end of lifting cylinder 4 is fixedly installed with light shield 6, and lifting cylinder 4 can drive light shield 6 to lift.

[0034] The top end of the inside of light shield 6 is fixedly installed with lamp inspection machine head 13, and at least one group of LED lamp groups and industrial cameras are installed on lamp inspection machine head 13, and the LED lamp groups and industrial cameras cooperate, can realize the automatic detection of wafer. LED lamp groups and industrial cameras are all the common knowledge of the person skilled in the art, and will not be described in detail here.

[0035] As shown, Figure 2 Artificial window 9 is fixedly installed on light shield 6, and staff can observe wafer through artificial window 9, and realize artificial detection of wafer.

[0036] The bottom end of light shield 6 is provided with light shield ring 5, and adjusting protection structure is arranged between light shield ring 5 and light shield 6. Adjusting protection structure includes folding corrugated ring 10, and folding corrugated ring 10 is fixedly installed between the upper end face of light shield ring 5 and the lower end face of light shield 6, and folding corrugated ring 10 can fold and stretch out and in, and through light shield ring 5, light shield 6 and folding corrugated ring 10, a whole telescopic adjusting lightproof cylinder can be formed, when detecting wafer, the lightproof cylinder can be lowered, so that the bottom is tightly attached to the upper end face of conveying belt 2, that is, the lightproof cylinder can effectively isolate external light, so that the lamp inspection machine is not affected by external complex light, and the detection accuracy is significantly improved.

[0037] As shown, Figure 2 And Figure 3 Lifting assembly is arranged between light shield ring 5 and light shield 6. The lifting assembly includes a pair of first lugs 501 fixed on the light shield ring 5 and a pair of second lugs 601 fixed on the light shield 6, and the pair of first lugs 501 and the pair of second lugs 601 correspond to each other.

[0038] As shown, Figure 5 A pair of first lugs 501 are fixedly installed with screw rods 12, and a pair of second lugs 601 are rotatably connected with nuts 14, the top end of screw rod 12 penetrates the inside of nut 14, and screw rod 12 is threadedly connected with nut 14. By rotating two groups of nuts 14 simultaneously, screw rod 12 can be driven to lift light shield ring 5, so that the length of the lightproof cylinder can be adjusted, so that the distance between lamp inspection machine head 13 and conveying belt 2 can be adjusted according to actual needs, so as to adapt to the detection of wafers of different specifications.

[0039] A pair of wings 1401 are fixedly installed on nut 14, which facilitates manual rotation of nut 14 and enhances operability.

[0040] As Figure 4 shown, the light shielding ring 5 is fixedly installed with an air inlet box 11, the inside of the air inlet box 11 is connected with the inside of the light shielding ring 5, and external air can enter the inside of the light shielding cylinder through the air inlet box 11.

[0041] The air inlet box 11 is installed with a purification assembly. The purification assembly comprises an air filter element 1102, which is fixedly installed inside a porous sealing plate 1101 and can filter and purify the air entering the inside of the light shielding cylinder.

[0042] Preferably, in the embodiment, the air filter element 1102 is preferably an activated carbon filter element, which can filter the moisture and impurities in the air.

[0043] As Figure 2 shown, one side of the air inlet box 11 is fixedly installed with a porous sealing plate 1101, which can be installed on one side of the air inlet box 11 in a bolted manner and can be flexibly disassembled and assembled, facilitating cleaning or replacement of the air filter element 1102.

[0044] As Figure 4 shown, the light shielding cover 6 is fixedly installed with a fan 7, the input end of the fan 7 is connected with the inside of the light shielding cover 6, and the fan 7 can extract the air inside the light shielding cylinder and discharge it.

[0045] Among them, the fan 7 and the air inlet box 11 are on different sides, that is, external air can enter from one side and be discharged from the other side, so that the air inside the light shielding cylinder flows uniformly.

[0046] Specifically, after the light shielding cylinder is attached to the upper end surface of the conveying belt 2, the air inside the light shielding cylinder can be extracted and discharged by the fan 7, and the external air is filtered and purified and enters the inside of the light shielding cylinder, so that the air inside the light shielding cylinder is clean enough to eliminate the influence of impurities in the air on the lamp inspection machine and improve the detection accuracy.

[0047] By isolating light and eliminating the influence of impurities in the air, the influence of the external environment on the work of the lamp inspection machine is eliminated, so that the lamp inspection machine can work normally in a workshop with complex light and poor air quality and accurately complete the detection of defects on the wafer surface.

[0048] In addition, the output end of the fan 7 is fixedly installed with a flow guide shell 8, which is inclined towards the upper end surface of the conveying belt 2. The air discharged by the fan 7 can be blown to the upper end surface of the conveying belt 2 through the flow guide shell 8, and when the wafer to be measured passes through, the wafer surface can be automatically swept and cleaned to prevent false judgment caused by dirt on the wafer surface and improve the reliability of the detection work of the lamp inspection machine.

[0049] In use, the wafer is transported on the conveying belt 2, when passing under the lamp inspection head 13, the lifting cylinder 4 drives the light shield 6 to descend, so that the bottom of the light shield ring 5 is attached to the upper end surface of the conveying belt 2, and the light-proof cylinder formed by the light shield ring 5, the light shield 6 and the folded corrugated ring 10 can effectively isolate external light. Then the pneumatic fan 7, the fan 7 expels the air inside the light-proof cylinder, while the external air enters the light-proof cylinder after being filtered and purified by the air filter 1102 inside the air inlet box 11, so that the air inside the light-proof cylinder is clean enough, and then the wafer surface can be detected by the lamp inspection head 13.

[0050] Compared with the prior art, the lamp inspection machine can eliminate the influence of external light, air humidity and impurities in the air on the working of the lamp inspection machine when detecting the wafer, so that the lamp inspection machine can still accurately detect the defects on the wafer surface in a workshop with complex light and air environment, and ensure the normal use of the lamp inspection machine.

[0051] For those skilled in the art, it is obvious that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0052] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.

Claims

1. A lamp inspection machine, comprising a base, a conveying belt is installed on the base, a rack is fixedly installed above the base, a lifting cylinder is fixedly installed on the rack, characterized in that, The telescopic end of the lifting cylinder is fixedly installed with a light shield, and the top end of the light shield is fixedly installed with a lamp inspection head; The bottom end of the light shield is provided with a light shielding ring, and the light shielding ring and the light shield are provided with an adjusting protection structure; The light shielding ring is fixedly installed with an air inlet box, and the air inlet box is internally installed with a purification assembly; The light shield is fixedly installed with a fan.

2. A lamp inspection machine according to claim 1, characterized in that The input end of the fan is communicated with the inside of the light shield, and the output end of the fan is fixedly installed with a flow guide shell; The flow guide shell is obliquely arranged towards the upper end surface of the conveying belt.

3. A lamp inspection machine according to claim 1, characterized in that The adjusting protection structure comprises a folded corrugated ring, which is fixedly installed between the upper end surface of the light shielding ring and the lower end surface of the light shield, and a lifting assembly is arranged between the light shielding ring and the light shield.

4. A lamp inspection machine according to claim 3, characterized in that The lifting assembly comprises a pair of first lugs fixed on the light shielding ring and a pair of second lugs fixed on the light shield, and the pair of first lugs and the pair of second lugs are matched. A screw rod is fixedly installed on each of the pair of first lugs, and a nut is rotatably connected to each of the pair of second lugs, and the screw rod and the nut are matched.

5. A lamp inspection machine according to claim 4, characterized in that A pair of wing plates are fixedly installed on the nut.

6. A lamp inspection machine according to claim 1, characterized in that The purification assembly comprises an air filter element, which is fixedly installed in the inside of a porous sealing plate.

7. A lamp inspection machine according to claim 6, characterized in that The air filter element is any one of an activated carbon filter element, a HEPA filter element, a particulate matter filter element, an electrostatic filter element or a fiber filter element.

8. A lamp inspection machine according to claim 7, characterized in that One side of the air inlet box is fixedly installed with a porous sealing plate.

9. A lamp inspection machine according to claim 1, characterized in that An artificial window is fixedly installed on the light shield.

10. A lamp inspection machine according to claim 1, characterized in that The fan and the air inlet box are located on different sides.

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