Device for assisting in mounting grinding head retainer

Abstract

The utility model discloses a device for assisting in mounting a grinding head retainer, which is integrally cylindrical and comprises an upper end face, a rotating part and a lower end face, the upper end face is positioned at the top of the rotating part and is integrally arranged with the rotating part, the bottom of the rotating part is rotatably connected with the lower end face through a bearing, and the device further comprises the retainer. A plurality of bolt holes are formed in the outer side of the protective ring side face in the circumferential direction, and a plurality of grinding parts are arranged on the inner side of the protective ring side face and are annularly arranged. By adopting the device for assisting in mounting the grinding head retainer, the instability caused by human factors and the like in the mounting process of the retainer can be effectively improved, the levelness of the mounted retainer is improved, the wafer protection efficiency of the grinding head retainer is effectively improved, and the loss caused by poor mounting of the grinding head retainer is further reduced; and the enterprise operation benefit is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip processing technical field especially, relates to a device of auxiliary installation grinding head guard circle. BACKGROUND

[0002] In the present semiconductor chip processing field, wafers need to be ground, and a guard circle and a grinding pad are used in this process, and the two need to be used in combination. The wafer is loaded in the guard circle, and the guard circle is placed on the upper surface of the grinding pad. The grinding pad rotates on the lower surface of the guard circle during work, and the cooperation between the two is the key factor for the success or failure of grinding the wafer.

[0003] In the process of chip grinding, the guard circle plays a role in protecting the wafer. The bottom surface of the guard circle is provided with a plurality of bolt holes, and the guard circle is installed below the grinding head through bolts. During the installation process of the guard circle, there is no device for assisting the installation of the grinding head guard circle, and the installation of the guard circle can only rely on the experience of engineers. The levelness of the installed guard circle is poor. If the guard circle is not installed horizontally, it will affect the polishing quality, and even cause the wafer to fly out and damage the equipment. Therefore, a device for assisting engineers to install the grinding head guard circle is designed. The levelness of the device itself has been considered during the design of the device, and the device has been calibrated to ensure that the levelness of the device is reliable. SUMMARY

[0004] The utility model aims at providing a device for assisting the installation of a grinding head guard circle. The device can effectively improve the instability caused by human factors during the installation of the guard circle, improve the levelness of the installed guard circle, effectively improve the efficiency of the grinding head guard circle in protecting the wafer, further reduce the loss caused by the poor installation of the grinding head guard circle, and thus improve the business efficiency of enterprises.

[0005] To achieve the above-mentioned purpose, the utility model provides a device for assisting the installation of a grinding head guard circle. The device is cylindrical as a whole and comprises an upper end face, a rotating part and a lower end face. The upper end face is located at the top of the rotating part and is integrally arranged with the rotating part. The bottom of the rotating part is rotatably connected with the lower end face through a bearing. The device further comprises a guard circle. A plurality of bolt holes are arranged on the outer side of the side surface of the guard circle in a circumferential direction. A plurality of grinding parts are arranged on the inner side of the side surface of the guard circle in a circumferential direction.

[0006] Preferably, two symmetrical hand holding openings are arranged on the side surface of the rotating part.

[0007] Preferably, the rotating part is open at the top and hollow inside.

[0008] Preferably, the diameter of the upper end face is 280 mm. The upper end face is provided with a step, and four evenly distributed clamping grooves are arranged on the upper end face in a circumferential direction.

[0009] Preferably, the length, width and height of the card slot are 30*35*25mm.

[0010] Therefore, the device for assisting in installing the grinding head retainer ring can effectively improve the instability caused by human factors during the installation process of the retainer ring, improve the levelness after the installation of the retainer ring, effectively improve the efficiency of the grinding head retainer ring in protecting the wafer, further reduce the loss caused by poor installation of the grinding head retainer ring, and thus improve the business efficiency of the enterprise.

[0011] The technical scheme of the present application will be further described in detail below with reference to the drawings and embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is the overall structure schematic diagram of the device for assisting in installing the grinding head retainer ring of the present application;

[0013] Figure 2 is the cross-sectional schematic diagram of the device for assisting in installing the grinding head retainer ring of the present application;

[0014] Figure 3 is the retainer ring schematic diagram in the device for assisting in installing the grinding head retainer ring of the present application;

[0015] Figure 4 is the use schematic diagram of the device for assisting in installing the grinding head retainer ring of the present application, wherein A is the device use schematic diagram, and B is the retainer ring bolt hole number schematic diagram.

[0016] REFERENCE NUMERALS

[0017] 1, lower end surface; 2, rotating part; 3, card slot; 4, upper end surface; 5, hand holding port; 6, retainer ring; 7, grinding part; 8, threaded hole. DETAILED DESCRIPTION

[0018] The technical scheme of the present application will be further described in detail below with reference to the drawings and embodiments.

[0019] Unless otherwise defined, technical terms or scientific terms used in the present application shall have the ordinary meaning as understood by a person of ordinary skill in the art to which the present application pertains. The terms "first", "second", and similar terms used in the present application do not denote any order, quantity, or importance, but are merely used to distinguish different components. The terms "include" or "contain" and similar terms mean that the elements or objects before the terms encompass the elements or objects listed after the terms and their equivalents, and do not exclude other elements or objects. The terms "connect" or "connected" and similar terms do not mean physical or mechanical connection, but can include electrical connection, whether direct or indirect. The terms "upper", "lower", "left", "right", and the like are merely used to indicate relative positional relationships, which can change when the absolute positions of the described objects change.

[0020] Embodiment

[0021] As shown in Figure 1 and Figure 2 , a device for assisting in installing a grinding head retainer ring 6, the device is cylindrical as a whole, comprising an upper end face 4, a rotating part 2, and a lower end face 1. The upper end face 4 is located at the top of the rotating part 2 and is integrally arranged with the rotating part 2. The bottom of the rotating part 2 is rotatably connected to the lower end face 1 through a bearing. The top of the rotating part 2 is open and hollow inside. Two symmetrical hand holding openings 5 are provided on the side surface of the rotating part 2. The diameter of the upper end face 4 is 280 mm. The upper end face 4 is stepped and has four evenly distributed clamping grooves 3 circumferentially arranged thereon. The length, width, and height of the clamping grooves 3 are 30*35*25 mm.

[0022] When installing the retainer ring 6, the rotating part 2 can be rotated to facilitate the assembly of the retainer ring 6. As long as the part is gently rotated, the engineer can install the components of the retainer ring 6 in all directions, eliminating the need for laborious work such as carrying and turning, improving work efficiency, and reducing the workload of the engineer.

[0023] The rotating part 2 is provided with a hand holding opening 5, and the engineer holds the device through the hand holding opening 5 and can rotate the entire device, which is convenient to use. The rotating part 2 is hollow inside, which reduces the overall weight of the device and makes the device more portable during transportation.

[0024] The device further comprises a retainer ring 6. A plurality of bolt holes are circumferentially arranged on the outer side of the side surface of the retainer ring 6. A plurality of grinding parts 7 are arranged on the inner side of the side surface of the retainer ring 6, and the plurality of grinding parts 7 are arranged in a ring shape. Figure 3 As shown in Figure 3As shown in Fig. 6, the side of the retainer 6 with bolt holes is placed on the upper end face 4, the diameter of the upper end face 4 is adapted to the outer diameter of the annular ring formed by the plurality of grinding portions 7, the retainer 6 is clamped by the step of the upper end face 4, the grinding portions 7 are placed in the clamping grooves 3, the grinding portions 7 are adapted to the clamping grooves 3, and the structures of the step and the clamping grooves 3 function to fix the retainer 6 so that the retainer 6 cannot be moved randomly during installation.

[0025] As shown in Fig. 6, the side of the retainer 6 with bolt holes is placed on the upper end face 4, the diameter of the upper end face 4 is adapted to the outer diameter of the annular ring formed by the plurality of grinding portions 7, the retainer 6 is clamped by the step of the upper end face 4, the grinding portions 7 are placed in the clamping grooves 3, the grinding portions 7 are adapted to the clamping grooves 3, and the structures of the step and the clamping grooves 3 function to fix the retainer 6 so that the retainer 6 cannot be moved randomly during installation. Figure 4 As shown in Fig. 6, the side of the retainer 6 with bolt holes is placed on the upper end face 4, the diameter of the upper end face 4 is adapted to the outer diameter of the annular ring formed by the plurality of grinding portions 7, the retainer 6 is clamped by the step of the upper end face 4, the grinding portions 7 are placed in the clamping grooves 3, the grinding portions 7 are adapted to the clamping grooves 3, and the structures of the step and the clamping grooves 3 function to fix the retainer 6 so that the retainer 6 cannot be moved randomly during installation. Figure 4 As shown in Fig. 6, the side of the retainer 6 with bolt holes is placed on the upper end face 4, the diameter of the upper end face 4 is adapted to the outer diameter of the annular ring formed by the plurality of grinding portions 7, the retainer 6 is clamped by the step of the upper end face 4, the grinding portions 7 are placed in the clamping grooves 3, the grinding portions 7 are adapted to the clamping grooves 3, and the structures of the step and the clamping grooves 3 function to fix the retainer 6 so that the retainer 6 cannot be moved randomly during installation. Figure 4 As shown in Fig. 6, the side of the retainer 6 with bolt holes is placed on the upper end face 4, the diameter of the upper end face 4 is adapted to the outer diameter of the annular ring formed by the plurality of grinding portions 7, the retainer 6 is clamped by the step of the upper end face 4, the grinding portions 7 are placed in the clamping grooves 3, the grinding portions 7 are adapted to the clamping grooves 3, and the structures of the step and the clamping grooves 3 function to fix the retainer 6 so that the retainer 6 cannot be moved randomly during installation.

[0026] Therefore, the device for assisting in installation of a retainer of a grinding head can effectively improve the instability caused by human factors during installation of the retainer, improve the levelness of the retainer after installation, effectively improve the efficiency of the retainer of the grinding head in protecting wafers, further reduce losses caused by poor installation of the retainer of the grinding head, and thus improve the operating efficiency of an enterprise.

[0027] Therefore, the device for assisting in installation of a retainer of a grinding head can effectively improve the instability caused by human factors during installation of the retainer, improve the levelness of the retainer after installation, effectively improve the efficiency of the retainer of the grinding head in protecting wafers, further reduce losses caused by poor installation of the retainer of the grinding head, and thus improve the operating efficiency of an enterprise.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application rather than limit the same, and although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can still be modified or replaced by equivalents, and these modifications or replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present application.

Claims

1. A device for assisting in the installation of a grinding head retaining ring, characterized in that: The device is cylindrically arranged as a whole, comprising an upper end surface, a rotating part, and a lower end surface, the upper end surface is located at the top of the rotating part and is integrally arranged with the rotating part, the bottom of the rotating part is rotationally connected with the lower end surface through a bearing, the device further comprises a retainer, the lateral outer side of the retainer is provided with a plurality of bolt holes in the circumferential direction, and the lateral inner side of the retainer is provided with a plurality of grinding parts, and the plurality of grinding parts are arranged in a ring shape.

2. The apparatus of claim 1, wherein: Two symmetrical hand holding openings are arranged on the lateral surface of the rotating part.

3. The device of claim 1, wherein: The rotating part is open at the top and hollow inside.

4. The device of claim 1, wherein: The diameter of the upper end surface is 280 mm, the upper end surface is step-shaped, and four evenly distributed clamping grooves are arranged along the circumference of the upper end surface.

5. The device of claim 4, wherein: The length, width and height of the clamping groove are 30*35*25 mm.

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