Combustion water washing equipment and combustion water washing system for hydrogen tail gas treatment
By utilizing the dual-layer cooling structure and the Venturi effect, the problem of complex or ineffective cooling structures in existing hydrogen tail gas treatment equipment has been solved, achieving efficient and uniform cooling and water washing effects.
Patent Information
- Application Number
- CN202423205856.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-25
AI Technical Summary
In existing hydrogen tail gas treatment equipment, the cooling structure of combustion water washing equipment is complex or the cooling effect is poor, making it difficult to achieve efficient and uniform cooling.
It adopts a double-layer cooling structure, including an air-cooled cavity and a water-cooled cavity. The inner cavity is arranged around the combustion cylinder. Cooling air exchanges heat through the inner and outer cavities, and combined with the guide plate and Venturi effect, it achieves efficient and uniform cooling.
It achieves efficient and uniform cooling outside the combustion chamber, improves cooling effect and safety, reduces the fan load, and enhances the water washing effect.
Smart Images
Figure CN223610135U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor tail gas treatment technical field, concretely is a kind of hydrogen tail gas treatment with combustion water washing equipment and combustion water washing system. BACKGROUND
[0002] In the semiconductor manufacturing process, a variety of tail gas, including hydrogen. These tail gas not only can cause pollution to the environment, and some components also have explosive or toxic, so it needs to be properly treated before being discharged into the atmosphere.
[0003] The hydrogen treatment method in prior art mainly adopts combustion method, and plasma combustion is a kind of combustion treatment mode commonly used, in production practice, the temperature generated by tail gas combustion in combustion chamber is high, needs to be reduced to set temperature after entering water washing equipment, and then discharged outward, and the commonly used cooling structure has air cooling or water cooling type cooling, but the cooling structure is often complex or the cooling effect is poor. UTILITY MODEL CONTENT
[0004] The utility model discloses a kind of hydrogen tail gas treatment with combustion water washing equipment, it solves the technical problem that the combustion water washing equipment exists in prior art, combustion cylinder outer cooling structure is complex, or the technical problem of poor cooling effect, with the technical effect that structure is reasonable, cooling effect is good and cooling is uniform.The technical scheme as follows is used:
[0005] A kind of hydrogen tail gas treatment with combustion water washing equipment, including inner cavity sequentially communicated combustion unit, water washing box and water washing unit;
[0006] Combustion unit, including combustion cylinder and plasma generator, the combustion chamber is formed in the combustion cylinder, the plasma generator is arranged on the combustion cylinder top for emitting charged particles into the combustion chamber, the upper portion of the combustion cylinder is communicated with a plurality of first air inlet pipes for introducing hydrogen, the upper portion of the combustion cylinder is also communicated with a plurality of third air inlet pipes for introducing air or oxygen, the air or oxygen can assist combustion hydrogen tail gas, the main cavity is peripherally provided with cooling cavity, and the cooling cavity includes air cooling cavity and water cooling cavity sleeved outside the air cooling cavity;
[0007] Water washing box, the inner cavity of the water washing box is respectively communicated with water inlet and water outlet, the combustion cylinder is opened below, so that the combustion chamber is communicated with the inner cavity of water washing box downward;
[0008] Water washing unit, including fan and sequentially arranged adsorption cavity, liquid-gas separation cavity and tail cavity from bottom to top, under the action of the fan, tail gas in water washing box is sequentially discharged after passing through adsorption cavity, liquid-gas separation cavity and tail cavity.
[0009] On the basis of the above technical scheme, the air cooling cavity comprises an inner cavity and an outer cavity, the inner cavity is arranged around the combustion cylinder and is downwardly open to communicate with the water washing box, the outer cavity is arranged outside the inner cavity and communicates with the inner cavity through a plurality of circumferentially arranged first through holes, the outer cavity is further communicated with a second air inlet pipe, the cooling gas entering through the second air inlet pipe enters the inner cavity and the water washing box through the first through holes to cool the hydrogen tail gas after combustion; the water cooling cavity is further arranged outside the inner cavity, the water cooling cavity is arranged above the outer cavity and flush with the outer wall surface of the outer cavity, the upper portion of the water cooling cavity is communicated with the water outlet, and the lower portion of the water cooling cavity is communicated with the water inlet.
[0010] On the basis of the above technical scheme, the air cooling inner cylinder forming the inner cavity extends downwardly into the combustion cylinder to form an extension part, and the extension part extends into the water washing box.
[0011] On the basis of the above technical scheme, a guide plate is fixedly arranged on the inner wall surface of the air cooling inner cylinder above the first through hole, the guide plate extends annularly and has an angle downwardly inclined from outside to inside, the downwardly inclined angle of the guide plate is 30-60°, and the annular gap formed between the guide plate and the outer wall surface of the combustion cylinder is 1.5-5 mm wide.
[0012] On the basis of the above technical scheme, the first air inlet pipe extends into the combustion cylinder, and the gas outlet of the first air inlet pipe has an angle downwardly and obliquely to the central axis of the combustion cylinder; the third air inlet pipe communicates with the upper portion of the combustion cylinder through an air inlet cavity, the air inlet cavity is arranged outside the combustion cylinder, and the annular passage through which the air inlet cavity communicates with the combustion chamber has an angle downwardly inclined from outside to inside.
[0013] On the basis of the above technical scheme, the annular passage has an angle downwardly inclined of 30-60°.
[0014] On the basis of the above technical scheme, a plurality of first spray pipes are horizontally arranged in the water washing box, a plurality of first spray holes with different orientations are arranged on the first spray pipes to adsorb and wash the tail gas flowing therethrough; the adsorption cavity is arranged above the water body in the water washing box and comprises a plurality of hole plates, the hole plates separate the adsorption cavity into a plurality of chambers which are independent of each other, at least one of the chambers is provided with adsorption fillers; a plurality of first spray pipes are horizontally arranged in the adsorption cavity, a plurality of second spray holes with different orientations are arranged on the first spray pipes to adsorb and wash the tail gas flowing therethrough; a liquid-gas separator is fixedly arranged in the liquid-gas separation cavity, the tail gas mixed with water vapor passes through the liquid-gas separator to realize liquid-gas separation; the tail cavity comprises a tapered reduced diameter section, and the tapered reduced diameter section is designed to form a Venturi effect when the tail gas flows therethrough to quickly discharge the tail gas.
[0015] On the basis of the above technical scheme, the fillers are any one of Rasching ring, Pall ring, stepped ring and Intalox, which increase the contact time and contact area of the spray water and the tail gas.
[0016] On the basis of the above technical scheme, the conical reduced diameter section is communicated with the first pipe section downward and with the second pipe section upward, and the pipe diameters of the first pipe section, the conical reduced diameter section and the second pipe section are gradually reduced, and the side wall of the first pipe section is further communicated with a compressed air inlet, and a Venturi effect can be formed when the compressed air passes through the first pipe section, the conical reduced diameter section and the second pipe section.
[0017] A combustion water washing system for hydrogen tail gas treatment comprises a plurality of combustion water washing devices as described above, the plurality of combustion water washing devices are arranged side by side, and the first air inlets of the plurality of combustion water washing devices are all communicated with a hydrogen tail gas pipeline.
[0018] Advantageous effects
[0019] The utility model discloses a structure is reasonable, and the combustion cylinder is successively sleeved with the air cooling cavity and water cooling cavity, wherein, the air cooling cavity includes inner chamber and outer chamber, and the cooling air that enters the outer chamber through the second air inlet pipeline passes through a plurality of first through -holes and enters the inner chamber to exchange heat with the combustion cylinder, wherein the first through -hole is arranged below, and the cooling air that flows in through the first through -hole enters the inner chamber upward and downward, and the cooling air that enters the inner chamber extension downward can well cool the high -temperature tail gas that enters the water washing box, and the cooling air that enters the inner chamber upward, on the one hand, the gas in the inner chamber flows fast, promotes the heat exchange efficiency between the water cooling cavity and the main cavity, and greatly improves the cooling uniformity, on the other hand, it is favorable to improve the air cooling effect, and the cooling air diffuses to the outer chamber first, and the cool air in the outer chamber enters the inner chamber through a plurality of first through -holes, greatly reduces the flow velocity of the cool air, increases the contact duration with the main cavity, and further improves the air cooling effect, and on the other hand, the first through -hole is further provided with a guide plate, makes the cooling air form annular airflow curtain at the guide plate, can also block the high -temperature gas that the main cavity discharges diffuses to the inner chamber, is favorable to improve the use safety, and the setting of the guide plate also makes the cooling air and the exhaust gas flow of the main cavity consistent, so as to guide the exhaust gas after combustion to discharge outward, and continue to cool the exhaust gas, and is favorable to improve the washing effect.
[0020] The utility model discloses a structure is reasonable, and the washing unit still includes tail cavity, and the tail cavity includes conical reduced diameter section, when the tail gas flows through the first pipe section, the conical reduced diameter section and the second pipe section, forms Venturi effect, and the conical reduced diameter section is close to the first pipe section and forms negative pressure environment, promotes the tail gas below to rise and pass through the tail cavity fast, is favorable to reduce the fan load, further, the first pipe section still is communicated with the compressed air inlet, can make Venturi effect more remarkable, further promotes the tail gas of flow rate slowing down below to rise and pass through the tail cavity fast, so as to further reduce the fan burden, reduce energy consumption. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced. Obviously, the accompanying drawings in the following description are only an embodiment of the present application, and for those skilled in the art, other drawings can be obtained from the provided drawings without creative labor.
[0022] Figure 1 The three-dimensional structure schematic diagram of the present application;
[0023] Figure 2 The structure schematic diagram of the front view of the combustion unit in the present application;
[0024] Figure 3 : Figure 2 The sectional structure schematic diagram of the present application in B-B direction;
[0025] Figure 4 : Figure 3 The local enlarged structure schematic diagram of the present application in B;
[0026] Figure 5 : Figure 3 The local enlarged structure schematic diagram of the present application in C;
[0027] Figure 6 The sectional structure schematic diagram of the front view of the water washing unit and the water washing box in the present application;
[0028] Figure 7 The sectional structure schematic diagram of the three-dimensional view of the present application;
[0029] Figure 8 : Figure 6 The local enlarged structure schematic diagram of the present application in A; DETAILED DESCRIPTION
[0030] The following description and drawings are illustrative of specific embodiments thereof and are not intended to limit the scope of the embodiments. Parts and features of some embodiments can be included or substituted in other embodiments. The scope of the embodiments described herein is encompassed by the entire scope of the claims, and all available equivalents of the claims. Herein, the terms "first", "second", and the like, are used to distinguish one element from another, and do not require or imply any actual relationship or order between such elements. In fact, the first element could be named the second element and, conversely, the second element could be named the first element. Also, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a structure, device, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such structure, device, or apparatus. Without further limitation, an element defined by an "includes a" statement does not exclude the presence of additional identical elements in the structure, device, or apparatus that includes the element. Various embodiments are described in a progressive manner, each focusing on the differences from other embodiments, and the same or similar parts between embodiments are cross-referenced.
[0031] The terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate an orientation or positional relationship based on the orientation or position shown in the drawings, and are used only to facilitate the description of the present document and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present invention. In the description herein, unless otherwise specified and limited, the terms "mount", "connect", "connect" should be interpreted broadly, for example, it can be a mechanical connection or an electrical connection, it can be a connection between two elements, it can be a direct connection or an indirect connection through an intermediate medium, and the specific meaning of the above terms can be understood by those skilled in the art according to the specific circumstances.
[0032] Herein, unless otherwise specified, the term "multiple" means two or more.
[0033] Herein, the character " / " represents an "or" relationship between the objects before and after it. For example, A / B means: A or B.
[0034] Herein, the term "and / or" is a description of the relationship between the objects, which means that there can be three relationships. For example, A and / or B means: A or B, or, A and B, the three relationships.
[0035] As Figures 1 to 8The hydrogen exhaust gas treatment combustion water washing device shown includes a combustion unit 1, a water washing tank 2 and a water washing unit 3 connected in sequence in the inner cavity;
[0036] like Figure 2 and 3 The combustion unit 1 shown includes a combustion cylinder 11 and a plasma generator 113. A combustion chamber is formed inside the combustion cylinder 11, and the plasma generator 113 is located above the combustion cylinder 11 to emit charged particles into the combustion chamber. Figure 3 As shown, the emission port of the plasma generator 113 is connected to the upper port of the combustion cylinder 11. When current passes through the plasma generator 113, it generates a large number of free electrons and positive ions. These charged particles interact with hydrogen and oxygen in the air. Hydrogen molecules are excited to a higher energy state after being collided with these charged particles, making them more likely to react with oxygen.
[0037] like Figure 2 and 3 As shown, the combustion chamber 11 is cylindrical and open at the bottom. Multiple first air inlet pipes 12 are connected to the combustion chamber 11 for introducing hydrogen exhaust gas. The inlet ends of the multiple first air inlet pipes 12 are arranged circumferentially and communicate with the upper part of the combustion chamber 11. Each first air inlet pipe 12 also includes a corrugated section 121, which helps reduce noise and vibration caused by airflow vibration to the combustion device. Furthermore, the outlet of the first air inlet pipe 12 has a downward angle inclined towards the central axis of the combustion chamber 11, thus concentrating the hydrogen exhaust gas at the central axis of the combustion chamber. The temperature at the central axis of the combustion chamber is stable and relatively high, which is beneficial for improving combustion completeness. A refractory mortar layer is provided on the inner wall surface of the combustion chamber 11 near the first air inlet pipe 12. The refractory mortar layer is existing technology, and those skilled in the art can select it according to their needs.
[0038] The upper part of the combustion chamber 11 is also connected to a third air inlet pipe 13, through which air or oxygen can enter the combustion chamber 11 to aid combustion. The third air inlet pipe 13 is connected to the combustion chamber 11 through the air inlet chamber 14; for example Figure 2 As shown, the upper part of the combustion cylinder 11 includes a reduced diameter section. The first air intake pipe 12 and the air intake chamber 14 are arranged corresponding to the reduced diameter section of the combustion cylinder 11. The air intake chamber 14 is sleeved outside the reduced diameter section of the combustion cylinder 11, as shown. Figure 4 As shown, the annular channel connecting the intake chamber 14 and the reduced-diameter section of the combustion cylinder 11 has a downward-sloping angle from the outside to the inside, as... Figure 4 As shown, in this embodiment, the annular channel is inclined downwards at an angle of 45°. This allows the combustion-supporting gas, either air or oxygen, to diffuse annularly into the combustion chamber 11, ensuring more thorough contact with the exhaust gas and improving combustion completeness.
[0039] In production practice, when the tail gas is combusted, on the one hand, it is necessary to ensure that the center of the combustion cylinder 11 has a stable high-temperature environment, and on the other hand, it is necessary to quickly and efficiently cool the combusted tail gas to smoothly complete the water washing process, so it is necessary to set a cooling cavity outside the combustion cylinder 11, as shown in the figure, the cooling cavity includes an air cooling cavity 16 and a water cooling cavity 17 sleeved outside the air cooling cavity 16.
[0040] As shown in Figure 3 , the air cooling cavity 16 is formed outside the combustion cylinder 11, the air cooling cavity 16 includes an inner cavity 161 and an outer cavity 162, the inner cavity 161 is arranged around the combustion cylinder 11, the inner cavity 161 extends upward to near the air inlet cavity 14, the inner cavity 161 downwardly forms an annular opening, the outer cavity 162 is arranged near the lower part of the combustion cylinder 11 and is sleeved outside the inner cavity 161, and the outer cavity 162 is communicated with the inner cavity 161 through a plurality of first through holes 110 arranged in a circumferential direction.
[0041] As shown in Figure 3 and 5 , the outer cavity 162 is communicated with the second air inlet pipe 18, the end port of the second air inlet pipe 18 extending into the outer cavity 162 is closed, and a plurality of through holes arranged in a circumferential direction are arranged on the side wall near the end, so that the gas entering the outer cavity 162 through the second air inlet pipe 18 can be more evenly diffused in the outer cavity 162, and then the gas can be more evenly entered into the inner cavity 161 through the first through hole 110.
[0042] As shown in Figure 3 , the inner cavity 161 extends downward to form an extension 111 outside the combustion cylinder 11, the extension 111 extends into the water washing box, and the bottom surface of the extension is lower than the lower opening of the combustion cylinder 11, a guide plate 19 is fixedly arranged on the inner wall surface of the inner cavity 161 above the first through hole 110, the guide plate 19 has an angle of downward inclination from outside to inside, and the guide plate 19 and the outer wall surface of the combustion cylinder 11 form an annular gap, as shown in Figure 3 , the guide plate 19 is inclined downward by 45° from outside to inside, and the width of the annular gap is 2.5mm, so that a part of the cooling air entering the inner cavity 161 through the first through hole 110 can still maintain a high flow rate, and after entering the inner cavity 161 upwardly, the cooling air flow diffused upwardly touches the inner top surface of the inner cavity 161, and then is folded back to be discharged downwardly, so as to promote the rapid flow of the gas in the inner cavity 161, and greatly improve the heat exchange efficiency and uniformity of heat exchange between the water cooling cavity 17 and the combustion cylinder 11, which is beneficial to further improve the cooling effect. At the same time, another part of the cooling air flows downwardly along the extension 111, and the part of the cooling air is consistent with the flow direction of the exhaust gas discharged from the combustion cylinder 11, so that the combusted exhaust gas can be guided to be discharged outwardly after being discharged from the combustion cylinder 11, and enter the water washing device 3, and also play a role of guiding flow and continuously cooling the exhaust gas.
[0043] As shown in Figure 3 and 5As shown, the inner cavity 161 is sleeved with a water cooling cavity 17, the upper part of the water cooling cavity 17 is communicated with a cooling water outlet 172, the lower part of the water cooling cavity 17 is communicated with a cooling water inlet 171. And the water cooling cavity 17 is arranged above the outer cavity 162 and is flush with the outer wall surface of the outer cavity 162, which is beneficial to keep the flatness of the appearance.
[0044] The water washing box 2 is communicated with a water inlet and a water outlet, and the water inlet is communicated with the water outlet of the first water pump, which is convenient for automatic discharge and water supply, and can also facilitate the recycling of water in the water washing box 2.
[0045] As shown in the drawings, Figure 6 The water washing box 2 is communicated with a water inlet and a water outlet, and the water inlet is communicated with the water outlet of the first water pump, which is convenient for automatic discharge and water supply, and can also facilitate the recycling of water in the water washing box 2.
[0046] The combustion cylinder 11 is opened below, so that the combustion chamber is communicated with the inner cavity of the water washing box 2 downward; the tail gas containing hydrogen is burned in the combustion chamber, and the burned gas enters the water washing unit 3 after passing through the water washing box 2. The water washing unit 3 includes a fan and an adsorption cavity 32, a liquid-gas separation cavity 333 and a tail cavity 34 arranged from bottom to top. The fan is arranged at the outlet of the tail cavity 34. Under the action of the fan, the tail gas in the water washing box 2 passes through the adsorption cavity 32, the liquid-gas separation cavity 333 and the tail cavity 34 in turn and is discharged.
[0047] As shown in the drawings, Figure 6 The adsorption cavity 32, the liquid-gas separation cavity 333 and the tail cavity 34 are arranged in parallel with the combustion chamber. The tail gas containing hydrogen has a high temperature after being discharged from the combustion chamber. When the high-temperature tail gas flows through the water washing box 2, it can be washed and adsorbed on one hand, and can be rapidly cooled on the other hand, which provides favorable conditions for the tail gas entering the adsorption cavity 32 in the water washing device. In addition, the inner bottom surface of the water washing box 2 is provided with a partition plate 22, which is arranged between the combustion chamber and the adsorption cavity 32. The tail gas discharged from the combustion chamber enters the water body of the water washing box 2, and the large particles in it settle. In addition, the gas flow of the tail gas also causes disturbance of the water body, so that the settled large particles are stirred in the water body, and the arrangement of the partition plate 22 can reduce the diffusion of the particles to the adsorption cavity 32. The side wall of the water washing box 2 is provided with a transparent window 23 for viewing the situation in the water washing box 2.
[0048] As shown in the drawings, Figure 6 and 7As shown, the adsorption cavity 32 is arranged above the water body in the water washing tank 2, and three perforated plates 322 are arranged in the adsorption cavity 32. One of the perforated plates 322 forms the bottom surface of the adsorption cavity 32, and the other two perforated plates 322 divide the adsorption cavity 32 into three independent chambers. The perforated plate 322 is detachably connected to the inner wall of the adsorption cavity 32, and the adjacent two perforated plates 322 are arranged in a staggered manner to slow down the flow rate of the tail gas. At least one chamber is provided with adsorption filler 323. The filler 323 is any one of Rasching ring, Pall ring, ladder ring and Interox, which can increase the contact time and contact area of the sprayed water and the tail gas, reduce the flow rate of the tail gas, greatly increase the contact time and contact area of the tail gas and the sprayed water, and is beneficial to improve the water washing and adsorption effect. Figure 6 and 7 As shown, a plurality of second spray pipes 321 are arranged horizontally in the adsorption cavity 32, and a plurality of second spray holes with different orientations are arranged on the second spray pipes 321. The water sprayed from the second spray holes can be evenly attached to the filler 323, further making the tail gas fully contact with the sprayed water, and improving the adsorption and water washing effect. The water discharged through the second spray holes flows back to the water washing tank 2.
[0049] The liquid-gas separator 331 is fixedly arranged in the liquid-gas separation cavity 33. The tail gas mixed with water vapor passes through the liquid-gas separator 331 to realize liquid-gas separation, so as to avoid the water vapor from entering the subsequent process. The liquid-gas separator 331 is a prior art, and those skilled in the art can select it according to the needs, which will not be described here.
[0050] The tail cavity 34 includes a tapered reduced diameter section 342, as shown in Figure 6 and 7 The tapered reduced diameter section 342 is communicated with the first pipe section 341 downward, and the tapered reduced diameter section 342 is communicated with the second pipe section 343 upward. The pipe diameters of the first pipe section 341, the tapered reduced diameter section 342 and the second pipe section 343 decrease in turn. When the tail gas flows through the tail cavity 34, the Venturi effect is formed, so that the negative pressure is formed at the first pipe section 341, and the tail gas flowing through the liquid-gas separator 331 is driven to pass through the tail cavity 34 quickly. In addition, the compressed air inlet 3411 is communicated with the side wall of the first pipe section 341. The fan is arranged at the compressed air inlet, or the tail gas discharged by other tail gas water washing equipment is used as the gas source. When the compressed air passes through the first pipe section 341, the tapered reduced diameter section 342 and the second pipe section 343, the Venturi effect is more obvious, which further promotes the tail gas with slow flow rate to rise and pass through the tail cavity 34 quickly.
[0051] As shown in Figure 7 and 8As shown, the first pipe section 341 is sleeved with a spraying cavity 344, the spraying cavity 344 is arranged close to the tapered reduced diameter section 342, the outer side wall of the spraying cavity 344 is communicated with a spraying inlet, the top surface of the spraying cavity 344 has an angle that is inclined downward from outside to inside, and the top surface of the spraying cavity 344 is provided with a plurality of spraying outlets 3441, spraying water can be discharged through the spraying outlets 3441 to form a water curtain on the inner wall surface of the first pipe section 341, and the water discharged through the spraying outlets 3441 can flow back to the water washing box 2.
[0052] A combustion water washing system, in order to ensure efficient and safe treatment of tail gas, the combustion water washing equipment is arranged in parallel with multiple, and the first air inlet pipe 12 of multiple combustion water washing equipment is communicated with hydrogen tail gas pipeline, so even if one of the combustion water washing equipment fails, the tail gas treatment work can still be completed by other combustion water washing equipment, avoiding the situation that the tail gas leaks outward due to the failure of the combustion water washing equipment.
[0053] The utility model is described above by way of example, but the utility model is not limited to the above specific embodiments, any modification or change based on the utility model belongs to the range of the utility model claimed.
Claims
1. A combustion water scrubbing apparatus for hydrogen tail gas treatment, characterized by, The combustion unit (1), the water washing box (2) and the water washing unit (3) are sequentially communicated in the inner cavity; The combustion unit (1) comprises a combustion cylinder (11) and a plasma generator (113), the combustion cylinder (11) forms a combustion chamber, the plasma generator (113) is arranged above the combustion cylinder (11) and is used for emitting charged particles into the combustion chamber, the upper portion of the combustion cylinder (11) is communicated with a plurality of first gas inlets (12) for introducing hydrogen, and the upper portion of the combustion cylinder (11) is also communicated with a plurality of third gas inlets (13) for introducing air or oxygen, the air or oxygen can assist combustion of hydrogen tail gas, and the combustion cylinder (11) is externally surrounded by a cooling cavity, the cooling cavity comprises a wind cooling cavity (16) and a water cooling cavity (17) sleeved outside the wind cooling cavity (16); The water washing box (2) is communicated with a water inlet and a water outlet in the inner cavity, and the combustion cylinder (11) is opened below the water washing box (2), so that the combustion chamber is communicated with the inner cavity of the water washing box (2) downward; The water washing unit (3) comprises a fan and an adsorption cavity (32), a liquid-gas separation cavity (33) and a tail cavity (34) arranged from bottom to top, under the action of the fan, the tail gas in the water washing box (2) is sequentially discharged through the adsorption cavity (32), the liquid-gas separation cavity (33) and the tail cavity (34).
2. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 1, characterized in that, The wind cooling cavity (16) comprises an inner cavity (161) and an outer cavity (162), the inner cavity (161) is arranged around the combustion cylinder (11) and is opened downward to communicate with the water washing box (2), the outer cavity (162) is arranged outside the inner cavity (161) and is communicated with the inner cavity (161) through a plurality of first through holes (110) arranged in the circumferential direction, and the outer cavity (162) is also communicated with a second gas inlet (18), cooling gas entering through the second gas inlet (18) enters the inner cavity (161) and the water washing box (2) through the first through holes (110) to cool the hydrogen tail gas after combustion; the water cooling cavity (17) is further sleeved outside the inner cavity (161), the water cooling cavity (17) is arranged above the outer cavity (162) and is flush with the outer wall surface of the outer cavity (162), the upper portion of the water cooling cavity (17) is communicated with a cooling water outlet (172), and the lower portion of the water cooling cavity (17) is communicated with a cooling water inlet (171).
3. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 2, characterized in that, The wind cooling inner cylinder forming the inner cavity (161) extends downward to form an extension (111) outside the combustion cylinder (11), and the extension (111) extends into the water washing box (2).
4. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 3, characterized in that, The inner wall surface of the wind cooling inner cylinder above the first through hole (110) is fixedly provided with a guide plate (19), the guide plate (19) extends in a ring shape and has an angle inclined downward from outside to inside, the downward inclination angle of the guide plate (19) is 30-60°, and the annular gap formed between the guide plate (19) and the outer wall surface of the combustion cylinder (11) is 1.5-5mm.
5. The apparatus for hydrogen tail gas treatment by combustion water scrubbing according to claim 2, wherein The first air inlet pipe (12) extends into the combustion cylinder (11), and the outlet of the first air inlet pipe (12) has an angle inclined downward and toward the axis of the combustion cylinder (11); the third air inlet pipe (13) communicates with the upper part of the combustion cylinder (11) through an air inlet cavity (14), the air inlet cavity (14) is sleeved outside the combustion cylinder (11), and the annular passage communicating the air inlet cavity (14) with the combustion chamber has an angle inclined downward from outside to inside.
6. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 5, characterized in that, The angle of the annular passage inclined downward is 30-60°.
7. The apparatus for combustion water scrubbing of hydrogen tail gas according to any one of claims 1 to 6, characterized in that The water washing box (2) is provided with a plurality of first spray pipes (21) horizontally arranged therein, the first spray pipes (21) are provided with a plurality of first spray holes with different orientations to wash the tail gas flowing therethrough; the adsorption cavity (32) is arranged above the water body in the water washing box (2) and comprises a plurality of perforated plates (322), the plurality of perforated plates (322) separate the adsorption cavity (32) into a plurality of independent chambers, and at least one of the chambers is provided with adsorption fillers (323); the adsorption cavity (32) is provided with a plurality of first spray pipes (21) horizontally arranged therein, the first spray pipes (21) are provided with a plurality of second spray holes with different orientations to wash the tail gas flowing therethrough; the liquid-gas separation cavity (33) is fixedly provided with a liquid-gas separator (331), and the tail gas mixed with water vapor passes through the liquid-gas separator (331) to realize liquid-gas separation; the tail cavity (34) comprises a tapered reduced diameter section (342), and the tapered reduced diameter section (342) is designed to form a Venturi effect when the tail gas flows therethrough to quickly discharge the tail gas.
8. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 7, characterized in that, The fillers (323) are any one of Rasching rings, Pall rings, stepped rings and Intalox, which increase the contact time and contact area of the spray water and the tail gas.
9. The apparatus for combustion water scrubbing of hydrogen tail gas according to claim 8, characterized in that, The tapered reduced diameter section (342) is in communication with the first pipe section (341) downward, the tapered reduced diameter section (342) is in communication with the second pipe section (343) upward, the pipe diameters of the first pipe section (341), the tapered reduced diameter section (342) and the second pipe section (343) decrease in sequence, and the side wall of the first pipe section (341) is further provided with a compressed air inlet (3411), and the compressed air passing through the first pipe section (341), the tapered reduced diameter section (342) and the second pipe section (343) can form a Venturi effect.
10. A combustion water scrubbing system for hydrogen tail gas treatment, characterized by, The application further provides a plurality of the combustion and washing devices as claimed in any one of claims 1-6, 8 and 9, and the first air inlet pipes (12) of the plurality of the combustion and washing devices are in communication with a hydrogen tail gas pipeline.