Positioning measuring device

Abstract

The utility model relates to the field of transfer positioning, and discloses a positioning measurement device which comprises a bottom plate, the upper surface of the bottom plate is provided with a guide groove and a transverse positioning line, and the transverse positioning line is perpendicular to the length direction of the guide groove; the first end of the movable part is located in the guide groove and moves in the guide groove in the length direction, and the second end of the movable part is provided with angle scale marks; first scales are distributed on the transverse measuring scale, the transverse measuring scale is fixed on the movable part, and the transverse deviation value is determined through the first scales and the transverse positioning line along with the movement of the movable part; and the gyration measuring plate is provided with a gyration positioning line, is rotationally connected with the second end of the movable part, is attached to the to-be-transferred part along with the movement of the movable part, and determines a gyration deviation angle through the angle scale line and the gyration positioning line along with the rotation of the movable part. According to the positioning measurement device, the transverse deviation value and the rotation deviation angle of the to-be-transferred component can be accurately determined, so that the to-be-transferred component can be accurately positioned.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of transfer positioning, and particularly relates to a positioning and measuring device. BACKGROUND

[0002] In a wafer manufacturing factory, an overhead hoist transport (OHT) is used to carry a front opening unified pod (FOUP), a load port and an overhead buffer (OHB) are usually the starting point or destination of the OHT, and the process of taking and placing is called transfer.

[0003] The horizontal position and the rotary position of the FOUP in the transfer process can be completed by a horizontal shaft and a rotary shaft, and the positions are manually positioned in advance and judged by visual observation. The current method cannot accurately determine whether the FOUP is in place, that is, the accurate positioning of the FOUP cannot be achieved.

[0004] Therefore, how to solve the above technical problems should be the focus of the person skilled in the art. CONTENT OF THE UTILITY MODEL

[0005] The purpose of the present application is to provide a positioning and measuring device to realize accurate detection of the horizontal position and the rotary position.

[0006] To solve the above technical problems, the present application provides a positioning and measuring device, comprising:

[0007] a bottom plate, the upper surface of the bottom plate is provided with a guide groove and a horizontal positioning line, the horizontal positioning line is perpendicular to the length direction of the guide groove;

[0008] a movable component, the first end of the movable component is located in the guide groove and moves in the length direction of the guide groove, the second end of the movable component is provided with an angle scale line;

[0009] a horizontal measuring scale with a first scale is fixed to the movable component, and the horizontal deviation is determined by the first scale and the horizontal positioning line with the movement of the movable component;

[0010] a rotary measuring plate provided with a rotary positioning line is rotationally connected to the second end of the movable component, and is attached to the component to be transferred with the movement of the movable component, and the rotary deviation angle is determined by the angle scale line and the rotary positioning line with the rotation of the movable component.

[0011] Optionally, the positioning and measuring device further comprises:

[0012] A lifting component, a first end of the lifting component is provided with a second scale, the first end of the lifting component is located in a first through hole of the bottom plate; a second end of the lifting component is embedded in the to-be-moved component; with the lifting or lowering of the lifting component, the lifting deviation is determined by the second scale and a reference plane.

[0013] Optionally, the lifting component comprises a lifting rod and a lifting positioning plate, one end of the lifting rod is located in the first through hole of the bottom plate, and the lifting positioning plate is connected to the end of the lifting rod away from the first through hole.

[0014] Optionally, the device further comprises a gasket with a second through hole.

[0015] The gasket is located on a surface of the lifting positioning plate away from the first through hole, the lifting positioning plate has a third through hole, and the end of the lifting rod away from the first through hole passes through the third through hole and the second through hole in sequence.

[0016] Optionally, the movable component comprises a guide block and a connecting rod, the guide block is located in the guide groove, and the connecting rod is connected to the guide block.

[0017] Optionally, the horizontal measurement scale has a U-shaped groove, one end of the connecting rod close to the guide block is provided with a clamping groove matched with the U-shaped groove, and the horizontal measurement scale is fixed to the connecting rod through the clamping groove.

[0018] Optionally, the swivel measurement plate is provided with a hole, and one end of the connecting rod away from the guide block extends into the hole and is connected to the swivel measurement plate.

[0019] Optionally, the swivel measurement plate is loosely connected to the connecting rod.

[0020] Optionally, the thickness of a target area of the swivel measurement plate is greater than the thickness of other areas except the target area, and the hole is located in the target area.

[0021] Optionally, the horizontal measurement scale is a transparent horizontal measurement scale.

[0022] The positioning measurement device provided by the application comprises a bottom plate, a guide groove and a horizontal positioning line are arranged on the upper surface of the bottom plate, and the horizontal positioning line is perpendicular to the length direction of the guide groove; a movable component, the first end of the movable component is located in the guide groove and moves in the length direction of the guide groove, and the second end of the movable component is provided with an angle scale line; a horizontal measurement ruler provided with a first scale is fixed to the movable component, and the horizontal deviation amount is determined by the first scale and the horizontal positioning line with the movement of the movable component; a rotation measurement plate provided with a rotation positioning line is rotationally connected with the second end of the movable component, is combined with the component to be moved and carried with the movement of the movable component, and the rotation deviation angle is determined by the angle scale line and the rotation positioning line with the rotation of the movable component.

[0023] It can be seen that the positioning measurement device provided by the application comprises a bottom plate, a movable component, a horizontal measurement ruler and a rotation measurement plate, the upper surface of the bottom plate is provided with a guide groove and a horizontal positioning line, the movable component can move in the guide groove, the horizontal measurement ruler can move with the movement of the movable component, and then the horizontal deviation amount of the component to be moved and carried is calculated by the first scale on the horizontal measurement ruler and the horizontal positioning line. In addition, the second end of the movable component is also provided with an angle scale line, the rotation measurement plate is rotationally connected with the movable component, and the rotation deviation angle of the component to be moved and carried is calculated by the angle scale line and the rotation positioning line with the rotation of the movable component. Therefore, the horizontal deviation amount and the rotation deviation angle of the component to be moved and carried can be accurately determined by the positioning measurement device provided by the application, so as to accurately position the component to be moved and carried. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0025] Figure 1 The structural schematic diagram of the positioning measurement device provided by the embodiment of the application;

[0026] In the drawings, 1 is a bottom plate, 2 is a guide groove, 3 is a horizontal positioning line, 4 is an angle scale line, 5 is a horizontal measurement ruler, 6 is a rotation positioning line, 7 is a rotation measurement plate, 8 is a component to be moved and carried, 9 is a lifting rod, 10 is a lifting positioning plate, 11 is a second scale, 12 is a reference plane, 13 is a guide block, 14 is a connecting rod, 15 is a gasket, and 81 is a jaw of a front opening unified pod. DETAILED DESCRIPTION

[0027] For those skilled in the technical field, the application will be further described in detail below in combination with the drawings and specific embodiments. Obviously, the described embodiments are only part of the embodiments of the application, not all. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the application.

[0028] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be practiced without some or all of these details. In other instances, well known methods, procedures and components have not been described in detail so as not to unnecessarily obscure aspects of the present application.

[0029] As described in the background section, at present, when the front opening wafer transfer box is moved, the horizontal position and the rotation position are realized by manual positioning, and whether it is in place is judged by visual observation. The current method cannot accurately determine whether the front opening wafer transfer box is in place, that is, the precise positioning of the front opening wafer transfer box cannot be realized.

[0030] Therefore, the application provides a positioning and measuring device, please refer to Figure 1 may include:

[0031] The bottom plate 1 is provided with a guide groove 2 and a horizontal positioning line 3 on the upper surface, and the horizontal positioning line 3 is perpendicular to the length direction of the guide groove 2;

[0032] The movable part is provided with an angle scale line 4 at the second end, and the first end of the movable part is located in the guide groove 2 and moves in the length direction of the guide groove 2;

[0033] The horizontal measuring scale 5 with the first scale is fixed to the movable part, and the horizontal deviation amount is determined by the first scale and the horizontal positioning line 3 through the movement of the movable part;

[0034] The rotation measuring plate 7 provided with the rotation positioning line 6 is rotationally connected with the second end of the movable part, and is attached to the component to be moved 8 through the movement of the movable part, and the rotation deviation angle is determined by the angle scale line 4 and the rotation positioning line through the rotation of the movable part.

[0035] The component to be moved 8 is not limited in the application, as long as the component to be moved can be moved. For example, the component to be moved 8 can be a front opening wafer transfer box and the like.

[0036] It is to be noted that the cross-sectional shape of the guide groove 2 is not limited in the present embodiment and can be set as desired. For example, the cross-sectional shape of the guide groove 2 can be rectangular, square, or the like.

[0037] The length direction of the guide groove 2 is the Y direction in the figure, the length direction of the base plate 1 is the X direction in the figure, and the direction perpendicular to the upper surface of the base plate 1 is the Z direction.

[0038] The guide groove 2 is located on the center line of the length direction of the base plate 1 so as to accurately measure the lateral deviation amount of the component 8 to be transferred.

[0039] The movable component can not only move in the Y direction in the guide groove 2 but also rotate.

[0040] The lateral measurement scale 5 takes the lateral theoretical value position as 0, 0, and the difference between the lateral amount in the two directions is on the both sides of 0, 0.

[0041] The lateral positioning line 3 is perpendicular to the length direction of the guide groove 2, and the lateral measurement scale 5 is parallel to the length direction of the guide groove 2 so as to determine the lateral deviation amount by the distance between the lateral measurement scale 5 and the lateral positioning line 3. When the lateral theoretical value position is aligned with the lateral positioning line 3, it indicates that the lateral deviation amount is zero.

[0042] The first scale on the lateral measurement scale 5 is located on the same side as the lateral positioning line 3. For example, the lateral positioning line 3 can be on the left side of the guide groove 2, and the first scale on the lateral measurement scale 5 is also on the left side of the guide groove 2.

[0043] In order to facilitate reading of the lateral deviation amount between the first scale and the lateral positioning line 3, the lateral measurement scale 5 is a transparent lateral measurement scale 5.

[0044] As the movable component moves in the guide groove 2, the swing measurement plate 7 can be in close contact with the side edge of the component 8 to be transferred. When the component 8 to be transferred is a FOUP, the swing measurement plate 7 is in contact with the side edge of the clamping jaw 81 of the FOUP. The surface of the swing measurement plate 7 in contact with the component 8 to be transferred can be a rectangular surface.

[0045] The angle scale 4 takes the swing theoretical value position as 0°, 0°, and the difference between the swing amount in the two directions is on the both sides of 0°, 0°. When the swing theoretical value position is aligned with the swing positioning line, it indicates that the swing deviation amount is zero.

[0046] The positioning measuring device in the embodiment comprises a bottom plate 1, a movable component, a horizontal measuring scale 5 and a rotating measuring plate 7. The upper surface of the bottom plate 1 is provided with a guide groove 2 and a horizontal positioning line 3. The movable component can move in the guide groove 2. The horizontal measuring scale 5 can move along with the movement of the movable component. Then, the horizontal deviation amount of the to-be-removed component 8 can be calculated through the first scale on the horizontal measuring scale 5 and the horizontal positioning line 3. In addition, the second end of the movable component is also provided with an angle scale line 4. The rotating measuring plate 7 is rotationally connected with the movable component. Along with the rotation of the movable component, the rotating deviation angle of the to-be-removed component 8 can be calculated through the angle scale line 4 and the rotating positioning line. Therefore, through the positioning measuring device in the embodiment, the horizontal deviation amount and the rotating deviation angle of the to-be-removed component 8 can be accurately determined, so as to facilitate the accurate positioning of the to-be-removed component 8 and avoid that the to-be-removed component 8 shakes too much when the crown block takes and places the to-be-removed component 8.

[0047] On the basis of the above embodiment, in an embodiment of the present application, the lower surface of the bottom plate 1 can also be provided with a guide groove 2.

[0048] The number of the guide grooves 2 on the lower surface of the bottom plate 1 can be three or any other number, which is not limited in the present application.

[0049] The guide grooves 2 on the lower surface of the bottom plate 1 are matched with the positioning slightly on the loading port of the machine table. The positioning measuring device can be fixed on the loading port of the machine table through the guide grooves 2 on the lower surface of the bottom plate 1.

[0050] On the basis of the above embodiment, in an embodiment of the present application, as shown in Figure 1 the positioning measuring device can further comprise:

[0051] a lifting component. The first end of the lifting component is provided with a second scale 11. The first end of the lifting component is located in the first through hole of the bottom plate 1. The second end of the lifting component is embedded in the to-be-removed component 8. Along with the lifting or lowering of the lifting component, the lifting deviation amount can be determined through the second scale 11 and the reference plane 12.

[0052] In the embodiment, the reference plane 12 is not limited and can be set by itself. For example, the reference plane 12 can be the upper surface of the bottom plate 1.

[0053] In the second scale 11, the lifting theoretical value position is 0. The difference values of the lifting amount in two directions are on both sides of 0. When the lifting theoretical position is flush with the reference plane 12, it indicates that the lifting deviation is zero.

[0054] In the embodiment, the shape of the first through hole is not limited and can be set by itself. The shape of the first through hole includes but is not limited to a circular shape, an elliptical shape, a rectangular shape, a square shape or other irregular shapes.

[0055] The positioning measurement device in the embodiment can not only accurately determine the horizontal deviation amount and the swing deviation angle of the component 8 to be moved, but also accurately determine the lifting deviation amount of the component 8 to be moved.

[0056] The structure of the lifting component in the embodiment is not limited, as long as the lifting deviation measurement can be achieved.

[0057] In an embodiment of the present application, the lifting component includes a lifting rod 9 and a lifting positioning plate 10, one end of the lifting rod 9 is located in the first through hole of the bottom plate 1, and the lifting positioning plate 10 is connected to the end of the lifting rod 9 away from the first through hole.

[0058] When the component 8 to be moved is a front opening unified pod (FOUP), the lifting positioning plate 10 is located inside the clamping jaw 81 of the FOUP.

[0059] The shape of the lifting rod 9 includes but is not limited to a cylinder, a prism, etc. The aperture ratio of the first through hole is greater than the rod diameter of the lifting rod 9, so that the lifting rod 9 can move up and down in the first through hole.

[0060] As shown in Figure 1 , the second scale 11 is located at the end of the lifting rod 9 close to the first through hole.

[0061] It should be noted that the position of the first through hole on the bottom plate 1 in the embodiment is not limited, and can be at any position of the bottom plate 1. For example, the first through hole can be located on the center line of the length direction of the bottom plate 1, or other positions.

[0062] The connection mode of the end of the lifting rod 9 away from the first through hole and the lifting positioning plate 10 in the embodiment is not limited.

[0063] As an implementable mode, the end of the lifting rod 9 away from the first through hole can be bonded with the lower surface of the lifting positioning plate 10, or a third through hole is provided on the lifting positioning plate 10, the end of the lifting rod 9 away from the first through hole passes through the third through hole, and is clamped on the upper surface of the lifting positioning plate 10.

[0064] As another implementable mode, the positioning measurement device can further include a gasket 15 with a second through hole, the gasket 15 is located on the surface of the lifting positioning plate 10 away from the first through hole, the lifting positioning plate 10 has a third through hole, and the end of the lifting rod 9 away from the first through hole sequentially passes through the third through hole and the second through hole.

[0065] As shown in Figure 1 , the gasket 15 is located on the upper surface of the lifting positioning plate 10, the end of the lifting rod 9 away from the first through hole passes through the third through hole and the second through hole, and is clamped on the upper surface of the gasket 15 and fixedly connected with the gasket 15.

[0066] Compared with setting the third through hole on the lifting positioning plate 10, the lifting rod 9 directly passes through the third through hole and is clamped on the upper surface of the lifting positioning plate 10. In this embodiment, by setting the gasket 15, the problem of stress concentration on the lifting positioning plate 10 can be alleviated, and the probability of the lifting rod 9 falling off the lifting positioning plate 10 can be reduced.

[0067] In order to fix the position of the gasket 15, the upper surface of the lifting positioning plate 10 is provided with a groove matched with the gasket 15, and the gasket 15 can be partially embedded in the groove.

[0068] The third through hole on the lifting positioning plate 10 can be used to pass through the gasket 15, and the groove on the lifting positioning plate 10 can be 90° with the third through hole.

[0069] On the basis of any of the above embodiments, in an embodiment of the present application, the movable part includes a guide block 13 and a connecting rod 14; the guide block 13 is located in the guide groove 2, and the connecting rod 14 is connected with the guide block 13.

[0070] The guide block 13 is matched with the size of the guide groove 2, for example, when the guide groove 2 is square, the guide block 13 is also square.

[0071] The guide block 13 is located in the guide groove 2, and the upper surface of the guide block 13 can be flush with the upper surface of the bottom plate 1.

[0072] The connecting rod 14 is connected with the center of the guide block 13, so as to ensure that the center of rotation of the connecting rod 14 is located at the center line of the bottom plate 1 along the length direction.

[0073] It should be noted that the connecting mode of the connecting rod 14 and the guide block 13 is not limited in this embodiment, and can be set as needed.

[0074] As an implementable mode, the upper surface of the guide block 13 is provided with an opening, and the top end of the connecting rod 14 is connected with the guide block 13 through the opening. The shape of the opening includes but is not limited to rectangle, circle, square and the like.

[0075] It should be noted that the fixing mode between the horizontal measuring scale 5 and the connecting rod 14 is not limited in this embodiment, and is determined according to the situation.

[0076] As an implementable mode, the horizontal measuring scale 5 has a U-shaped groove, one end of the connecting rod 14 close to the guide block 13 is provided with a clamping groove matched with the U-shaped groove, and the horizontal measuring scale 5 is fixed to the connecting rod 14 through the clamping groove.

[0077] By setting the U-shaped groove on the horizontal measuring scale 5, the horizontal measuring scale 5 is clamped on the connecting rod 14, which is very simple and convenient to operate.

[0078] It should be noted that the connection between the connecting rod 14 and the rotation measurement plate 7 is not limited in the embodiment.

[0079] As an implementation manner, the rotation measurement plate 7 is provided with a hole, and the end of the connecting rod 14 away from the guide block 13 extends into the hole and is connected with the rotation measurement plate 7.

[0080] The hole is located on the lower surface of the rotation measurement plate 7 and at the center of the rotation measurement plate 7. The top end of the connecting rod 14 is located in the hole of the rotation measurement plate 7, and the connecting rod 14 and the rotation measurement plate 7 can rotate relative to each other.

[0081] By providing the hole on the lower surface of the rotation measurement plate 7, the connection between the hole and the connecting rod 14 is very simple.

[0082] In an embodiment of the present application, the thickness of a target region of the rotation measurement plate 7 is greater than the thickness of other regions except the target region, and the hole is located in the target region.

[0083] The target region can be the middle region of the rotation measurement plate 7, and the other regions are the regions on both sides of the target region. Thickening the target region can facilitate the manufacture of the hole on the rotation measurement plate 7.

[0084] In order to simplify the rotating connection between the connecting rod 14 and the rotation measurement plate 7, in an embodiment of the present application, the rotation measurement plate 7 and the connecting rod 14 are loosely connected.

[0085] The embodiments in the specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts of each embodiment can be referred to each other.

[0086] The positioning measurement device provided by the present application is described in detail above. The principles and implementation manners of the present application are described by applying specific examples. The above description of the embodiments is only used to help understand the scheme of the present application and its core idea. It should be noted that those skilled in the art can make some improvements and modifications to the present application without departing from the principles of the present application, and these improvements and modifications also fall within the protection scope of the present application.

Claims

1. A positioning measurement device, characterized by The application relates to a horizontal and vertical deviation measuring device. The bottom plate is provided with a guide groove and a horizontal positioning line on the upper surface, and the horizontal positioning line is perpendicular to the length direction of the guide groove. A movable component is provided with an angle scale on the second end, and the first end is located in the guide groove and moves in the length direction. A horizontal measuring ruler is provided with a first scale and is fixed to the movable component. A rotating measuring plate is provided with a rotating positioning line and is connected with the second end of the movable component.

2. The position measuring device according to claim 1, wherein The application also relates to a lifting component provided with a second scale on the first end. The first end of the lifting component is located in the first through hole of the bottom plate. The second end of the lifting component is embedded in the component to be moved.

3. The position measuring device of claim 2, wherein The lifting component includes a lifting rod and a lifting positioning plate.

4. The position measuring device of claim 3, wherein The application also relates to a gasket provided with a second through hole. The gasket is located on the surface of the lifting positioning plate away from the first through hole.

5. The position measuring device of claim 1, wherein The lifting rod is sequentially connected with the third through hole and the second through hole.

6. The position measuring device of claim 5, wherein The movable component includes a guide block and a connecting rod.

7. The position measuring device of claim 5, wherein The guide block is located in the guide groove.

8. The position measuring device of claim 7, wherein, The connecting rod is connected with the guide block.

9. The position measuring device of claim 7, wherein, The horizontal measuring ruler is provided with a U-shaped groove.

10. The positioning measurement device according to any one of claims 1 to 9, characterized in that, The connecting rod is provided with a clamping groove matched with the U-shaped groove. The horizontal measuring ruler is fixed to the connecting rod through the clamping groove. The rotating measuring plate is provided with a hole. The connecting rod is extended into the hole and connected with the rotating measuring plate. The rotating measuring plate is loosely connected with the connecting rod. The thickness of the target area of the rotating measuring plate is greater than that of other areas. The horizontal measuring ruler is transparent.

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