Double-channel efficient wafer sorting machine

Abstract

The utility model relates to the technical field of wafer sorting machines, and discloses a double-channel efficient wafer sorting machine which comprises a main body, a driving source is fixedly connected in the main body, a mechanical arm is fixedly connected to the driving end of the driving source, two rotating blocks are rotationally connected to one side of the mechanical arm, and the rotating blocks are fixedly connected to the other side of the main body. Two sliding blocks are slidably connected to the interiors of the two rotating blocks, sliding plates are fixedly connected to the inner sides of the sliding blocks, limiting blocks are fixedly connected to one sides of the sliding plates, connecting blocks are slidably connected to the outer sides of the sliding plates, and clamps are fixedly connected to the sides, away from the limiting blocks, of the connecting blocks; the periphery of the main body is fixedly connected with limiting assemblies used for limiting the main body. According to the wafer sorting device, special sorting equipment does not need to be arranged for wafers of different sizes, so that for semiconductor manufacturing enterprises, the equipment purchase cost can be greatly reduced, and the asset utilization rate of the equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer sorting machine technical field especially relates to double -channel high -efficient wafer sorting machine. BACKGROUND

[0002] Wafer sorting machine has wide application in semiconductor chip manufacturing, integrated circuit production and sensor chip manufacturing etc., and its advantage lies in improving product quality, reducing production cost, optimizing product performance grading and improving production efficiency, and the double -channel high -efficient design of wafer sorting machine can greatly improve test efficiency, optimize resource utilization and increase production flexibility, and powerfully promote the cost reduction and efficiency increase of semiconductor chip production and adapt to multiple needs.

[0003] Double -channel high -efficient wafer sorting machine is generally composed of double -test channel device, double mechanical transmission device, sorting device, control device etc., and the double -channel high -efficient wafer sorting machine is positioned by specific feeding device and double mechanical arm, contacts chip by double -channel test probe, signal input and output and data acquisition and analysis, and according to the result, the sorting device is classified and marked chip, and finally, the mechanical arm is unloaded, and the cycle operation is realized under the dispatching of control device, and high -efficient stable operation is realized.

[0004] The existing part double -channel high -efficient wafer sorting machine can not realize the quick adaptation of different size wafer, along with the development of semiconductor technology, and the chip application scene is more and more diversified, and the demand of different size wafer production is also increasing, if the sorting machine can not quickly adapt to different size wafer, enterprise is very difficult to respond to the demand of market to different size chip in time, and some emerging small -size electronic product will need small -size wafer production chip, and large -size server etc. equipment needs large -size wafer production chip, and the quick adaptation can not make enterprise be at a disadvantage in market competition, and the product satisfying customer demand can not be provided in time, and therefore, double -channel high -efficient wafer sorting machine is proposed to solve the above -mentioned problems. UTILITY MODEL CONTENT

[0005] In order to make up for the above insufficient, the utility model provides double -channel high -efficient wafer sorting machine, aims at improving the problem that the quick adaptation of different size wafer can not be realized in prior art.

[0006] In order to realize the above -mentioned purpose, the utility model adopts the following technical scheme:

[0007] Dual-channel high-efficiency wafer sorting machine, including main body, the inside of the main body is fixedly connected with driving source, the driving end of the driving source is fixedly connected with mechanical arm, the side of the mechanical arm is rotatably connected with two rotating blocks, the inside of two rotating blocks is slidably connected with two sliding blocks, the inner side of the sliding block is fixedly connected with sliding plate, the side of the sliding plate is fixedly connected with limiting block, the outer side of the sliding plate is slidably connected with connecting block, the side, away from the limiting block of the connecting block is fixedly connected with clamp, the periphery of the main body is fixedly connected with limiting assembly for limiting it;

[0008] As a further description of the above technical solution:

[0009] The limiting assembly comprises a plurality of fixed rings, the inner side of the plurality of fixed rings is fixedly connected to the outer side of the main body, the inside of the fixed ring is fixedly connected with a fixed rod, the outer side of the fixed rod is fixedly connected with a limiting ring, the inside of the limiting ring is rotatably connected with a rotating disc, the outer side of the rotating disc is fixedly connected with two fixed blocks;

[0010] As a further description of the above technical solution:

[0011] The inside of the fixed rod is slidably connected with a sliding rod, the bottom of the sliding rod is fixedly connected with a limiting disc;

[0012] As a further description of the above technical solution:

[0013] The outer side of the fixed block is rotatably connected to the outside of the sliding rod, and the outer side of the fixed block is rotatably connected to the inside of the limiting ring;

[0014] As a further description of the above technical solution:

[0015] The outer side of the fixed block is rotatably connected to the inside of the fixed rod, and the outer side of the rotating disc is rotatably connected to the inside of the fixed rod;

[0016] As a further description of the above technical solution:

[0017] The inside of the connecting block is provided with a clamping groove, and the outer side of the limiting block is slidably connected in the clamping groove;

[0018] As a further description of the above technical solution:

[0019] The outer side of the connecting block is slidably connected in the inside of the rotating block, and the inside of the sliding plate is fixedly connected with a spring;

[0020] As a further description of the above technical solution:

[0021] The side of the main body is fixedly connected with a control panel, and the outer side of the sliding plate is slidably connected in the inside of the rotating block.

[0022] The utility model has the advantages of the following:

[0023] 1. In the utility model, the sliding block cooperates with the sliding plate, the sliding plate cooperates with the spring and the limiting block, and the limiting block cooperates with the connecting block, so that different sizes of wafers can be quickly adapted, and through the flexible clamp adapter device, one wafer sorting machine can cope with various situations, and special sorting equipment does not need to be equipped for each size of wafer, which can greatly reduce the equipment procurement cost of semiconductor manufacturing enterprises and improve the asset utilization rate of equipment.

[0024] 2. In the utility model, the rotating disc cooperates with the fixed block, the fixed block cooperates with the sliding rod, and the sliding rod cooperates with the limiting disc, so that the main body is limited to avoid the wheel from deviating during work, and after limiting the main body, the equipment can be kept stable during work, a safe working environment is provided for the operator, the safety of the expensive wafer and the equipment is guaranteed, and the probability of production accidents is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a three-dimensional schematic view of the double-channel efficient wafer sorting machine provided by the utility model;

[0026] Figure 2 It is a structural schematic view of the limiting ring of the double-channel efficient wafer sorting machine provided by the utility model;

[0027] Figure 3 It is Figure 2 an enlarged view of position A in the utility model;

[0028] Figure 4 It is Figure 2 an enlarged view of position B in the utility model.

[0029] LEGEND:

[0030] 1, main body; 2, control panel; 3, driving source; 4, mechanical arm; 5, rotating block; 6, sliding block; 7, sliding plate; 8, spring; 9, limiting block; 10, connecting block; 11, clamp; 12, fixed ring; 13, fixed rod; 14, limiting ring; 15, rotating disc; 16, fixed block; 17, sliding rod; 18, limiting disc. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0032] With reference to Figures 1 to 3 The utility model provides an embodiment: double channel high efficiency wafer sorting machine, including main part 1 adopts high strength aluminum alloy material quality to create, with light, high strength characteristics, can provide stable support frame for each part in the interior, effectively reduce the vibration and deformation of equipment in the running process, ensure the stability and reliability of the overall structure of the equipment.

[0033] The side of main part 1 is fixedly connected with control panel 2, control panel 2 adopts advanced touch display screen technology, and its display is clear, and operation is sensitive, and various parameters can be conveniently set by staff intuitively and the running state of the equipment is monitored. The inside of main part 1 is fixedly connected with drive source 3, drive source 3 selects high-precision servo motor, which can accurately control the rotation angle and speed, output stable and strong power, and provide powerful guarantee for the accurate movement of subsequent parts.

[0034] The driving end of drive source 3 is fixedly connected with mechanical arm 4, mechanical arm 4 is made of high-strength alloy steel material, has good rigidity and toughness, can withstand frequent movement and certain external force impact, one side of mechanical arm 4 is rotatably connected with two rotating blocks 5, rotating block 5 is made of wear-resistant stainless steel material, which rotates flexibly and is durable, and can ensure that the parts connected thereto can smoothly move relatively.

[0035] The inside of two rotating blocks 5 is slidably connected with two sliding blocks 6, sliding block 6 adopts smooth surface engineering plastic material, and the friction is small, which is convenient for quick sliding in rotating block 5, the inside of sliding block 6 is fixedly connected with sliding plate 7, the inside of sliding plate 7 is slidably connected in rotating block 5, the inside of sliding plate 7 is fixedly connected with spring 8, spring 8 selects high-quality stainless steel spring 8, has good elastic recovery capacity and fatigue resistance, can still maintain stable elastic force after being compressed and stretched for many times.

[0036] One side of the sliding plate 7 is fixedly connected with a limiting block 9, and the outer side of the sliding plate 7 is slidably connected with a connecting block 10. The connecting block 10 is made of high-strength aluminum alloy material, is light in weight and high in strength, and is slidably connected in the inner side of the rotating block 5. The inner side of the connecting block 10 is provided with a clamping groove, and the outer side of the limiting block 9 is slidably connected in the clamping groove. Through the cooperation of the limiting block 9 and the clamping groove, the position of the connecting block 10 can be effectively fixed when the clamp 11 needs to be replaced. One side of the connecting block 10 away from the limiting block 9 is fixedly connected with the clamp 11. The clamping surface of the clamp 11 is made of soft and wear-resistant rubber material, which can firmly grasp the wafer without damaging the wafer, and can adapt to the grasping requirements of wafers of different sizes. The periphery of the main body 1 is fixedly connected with a limiting assembly for limiting the same.

[0037] Referring to Figure 1 、 Figure 2 、 Figure 4 The limiting assembly comprises a plurality of fixed rings 12 made of solid carbon steel material, which provides a stable installation basis for internal components. The inner sides of the plurality of fixed rings 12 are fixedly connected to the outer side of the main body 1. The inner side of the fixed ring 12 is fixedly connected with a fixed rod 13 made of high-strength alloy steel material, which has high axial strength. The inner side of the fixed rod 13 is slidably connected with a sliding rod 17 made of stainless steel, which is smooth in surface and facilitates sliding in the fixed rod 13.

[0038] The bottom of the sliding rod 17 is fixedly connected with a limiting disc 18 made of rubber material with a large area, which can provide a large friction force when in contact with the ground, effectively preventing the main body 1 from moving. The outer side of the fixed rod 13 is fixedly connected with a limiting ring 14 made of metal material, which limits and protects the internal rotating components.

[0039] The inner side of the limiting ring 14 is rotatably connected with a rotating disc 15, and the outer side of the rotating disc 15 is rotatably connected in the inner side of the fixed rod 13. The rotating disc 15 rotates flexibly and can accurately control the movement of related components. The outer side of the rotating disc 15 is fixedly connected with two fixed blocks 16 made of metal material, which are firm in structure. The outer side of the fixed block 16 is rotatably connected to the outer side of the sliding rod 17, the outer side of the fixed block 16 is rotatably connected in the inner side of the limiting ring 14, and the outer side of the fixed block 16 is rotatably connected in the inner side of the fixed rod 13.

[0040] Working principle: when the staff needs to detect or sort the wafer, the wafer can be placed in the inside of the main body 1, and then the driving source 3 can be started, so that the driving source 3 drives the mechanical arm 4, one end of the mechanical arm 4 is connected with two rotating blocks 5, the inside of the rotating block 5 is slidably connected with the connecting block 10, one side of the connecting block 10 is provided with the clamp 11, so that the wafer can be taken out and sent to detection, when the clamp 11 needs to be replaced, the sliding block 6 can be pressed inward, the sliding plate 7 is driven to slide inward by the two sliding blocks 6, one side of the sliding plate 7 slides in the inside of the connecting block 10, the side of the sliding plate 7 that slides in the inside of the connecting block 10 is connected with the limiting block 9, so that the connecting block 10 can be limited by the limiting block 9, so that when the replacement is completed, the connecting block 10 can be slid into the inside of the rotating block 5 again, then the sliding block 6 is released, the two sliding plates 7 are pushed back to the original position by the compressed spring 8, so that when the smaller wafer is encountered, the clamp 11 can be replaced to adapt to different sizes of wafers.

[0041] When the staff needs to transfer the main body 1, the wheels connected at the bottom of the main body 1 can be used to transfer the main body 1, when reaching the specified position, the fixed block 16 can be rotated by rotating the rotating disc 15, when the fixed block 16 rotates, the sliding rod 17 will slide down because the limitation is cancelled, at this time, the sliding rod 17 can be adjusted to the appropriate position, the bottom of the sliding rod 17 is connected with the limiting disc 18, so that the main body 1 can be avoided from deviating when working.

[0042] Finally, it should be pointed out that: the above only for the preferred embodiments of the present application, and is not used to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. Double channel high efficiency wafer handler, comprising a main body (1), characterized in that: The inside of the main body (1) is fixedly connected with a driving source (3), the driving end of the driving source (3) is fixedly connected with a mechanical arm (4), one side of the mechanical arm (4) is rotatably connected with two rotating blocks (5), the inside of the two rotating blocks (5) is slidably connected with two sliding blocks (6), the inside of the sliding block (6) is fixedly connected with a sliding plate (7), one side of the sliding plate (7) is fixedly connected with a limiting block (9), the outside of the sliding plate (7) is slidably connected with a connecting block (10), one side of the connecting block (10) away from the limiting block (9) is fixedly connected with a clamp (11), the periphery of the main body (1) is fixedly connected with a limiting assembly for limiting.

2. The dual lane high efficiency wafer handler of claim 1, wherein: The limiting assembly comprises a plurality of fixed rings (12), the inside of the plurality of fixed rings (12) is fixedly connected to the outside of the main body (1), the inside of the fixed ring (12) is fixedly connected with a fixed rod (13), the outside of the fixed rod (13) is fixedly connected with a limiting ring (14), the inside of the limiting ring (14) is rotatably connected with a rotating disc (15), the outside of the rotating disc (15) is fixedly connected with two fixed blocks (16).

3. The dual lane high efficiency wafer handler of claim 2, wherein: The inside of the fixed rod (13) is slidably connected with a sliding rod (17), the bottom of the sliding rod (17) is fixedly connected with a limiting disc (18).

4. The dual lane high efficiency wafer sorter of claim 3, wherein: The outside of the fixed block (16) is rotatably connected to the outside of the sliding rod (17), the outside of the fixed block (16) is rotatably connected to the inside of the limiting ring (14).

5. The dual lane high efficiency wafer sorter of claim 2, wherein: The outside of the fixed block (16) is rotatably connected to the inside of the fixed rod (13), the outside of the rotating disc (15) is rotatably connected to the inside of the fixed rod (13).

6. The dual lane high efficiency wafer sorter of claim 1, wherein: The inside of the connecting block (10) is provided with a clamping groove, the outside of the limiting block (9) is slidably connected to the inside of the clamping groove.

7. The dual lane high efficiency wafer sorter of claim 1, wherein: The outside of the connecting block (10) is slidably connected to the inside of the rotating block (5), the inside of the sliding plate (7) is fixedly connected with a spring (8).

8. The dual lane high efficiency wafer sorter of claim 1, wherein: One side of the main body (1) is fixedly connected with a control panel (2), the outside of the sliding plate (7) is slidably connected to the inside of the rotating block (5).

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