Automatic reduction device for vaporizing phosphorus trichloride and premixing vaporized phosphorus trichloride with hydrogen in proportion

Abstract

The utility model discloses an automatic reduction device for vaporizing phosphorus trichloride and premixing the vaporized phosphorus trichloride with hydrogen in proportion, relates to the technical field of compound reduction reaction devices, and aims to solve the problem of low yellow phosphorus yield caused by insufficient reduction reaction of phosphorus trichloride and hydrogen. According to the device, an automatic parameter control cabinet is electrically connected to an automatic reduction device, the bottom end of a first reaction kettle is communicated with a hydrogen inlet pipeline through a pipeline, a hydrogen premixing and dispersing device is arranged at the bottom in a cavity of the first reaction kettle, and a plurality of premixing and heating devices are arranged on the outer wall of the first reaction kettle; the top end of the first reaction kettle is connected with a premixing gas-liquid separator through a pipeline, the premixing gas-liquid separator is mounted in a cavity of the second reaction kettle, and one side of the bottom of the first reaction kettle is connected with the second reaction kettle through a pipeline provided with a stop valve; the bottom end of the second reaction kettle is communicated with a phosphorus trichloride liquid inlet pipeline through a pipeline, and the top end of the second reaction kettle is connected with a premixed gas reduction pipeline.

Description

Technical Field

[0001] This utility model relates to the technical field of compound reduction reaction devices, specifically an automated reduction device for vaporizing phosphorus trichloride and premixing it with hydrogen in a certain proportion. Background Technology

[0002] Electronic-grade high-purity yellow phosphorus (white phosphorus) mainly refers to yellow phosphorus with a purity of 99.9999% or higher, primarily used for the conversion and preparation of electronic-grade high-purity red phosphorus. Electronic-grade high-purity red phosphorus is mainly used in the preparation of III-V compound semiconductor materials such as InP, GaP, and GaAsP, as well as as a dopant for silicon and germanium single crystals. Furthermore, high-purity red phosphorus is also used in the manufacture of integrated circuits and optoelectronic devices; red phosphorus vapor phase epitaxy (VPE) is one of the important processes for achieving high-quality growth of high-end semiconductor materials. In the electronics and electrical appliance field, high-purity phosphorus is an important raw material for manufacturing high-definition display devices such as cathode ray tubes (CRTs) and field emission displays (FEDs).

[0003] High-purity yellow phosphorus of electronic grade is commonly prepared by the reduction reaction of phosphorus trichloride with hydrogen. Phosphorus trichloride is an inorganic compound, a colorless and transparent liquid at room temperature, with strong corrosiveness, and miscible with carbon disulfide, diethyl ether, carbon tetrachloride, benzene, etc. Current phosphorus trichloride reduction technologies involve directly introducing liquid phosphorus trichloride and hydrogen into the reactor. The liquid phosphorus trichloride vaporizes in the reduction furnace and then mixes with hydrogen to produce yellow phosphorus. Because the reduction reaction of phosphorus trichloride with hydrogen requires high activation energy, the production efficiency of the reduction equipment is greatly limited. Furthermore, if the phosphorus trichloride vapor and hydrogen are not fully mixed, the incompletely reacted phosphorus trichloride material is easily lost upon contact with water.

[0004] A phosphorus trichloride reduction device with patent authorization announcement number CN219111635U uses a sealed reactor that is completely isolated from air to reduce phosphorus trichloride with hydrogen. Yellow phosphorus is collected by condensation and stored in water. This device safely and efficiently carries out the phosphorus trichloride reduction reaction to prepare elemental phosphorus and ensures the safe and reliable collection of elemental phosphorus products.

[0005] A continuous reduction furnace device for phosphorus trichloride, with patent authorization announcement number CN215939992U, introduces phosphorus trichloride and hydrogen into a reactor. A reduction unit is nested inside the heating unit of the reactor, and a condensation unit is connected to the reduction unit. The condensation unit is located below the heating unit and is used to cool and collect the yellow phosphorus produced in the reaction.

[0006] The above patents all involve directly introducing liquid phosphorus trichloride and hydrogen into a reactor for heating and reduction reaction, followed by cooling and collection of the resulting yellow phosphorus. Because the vaporization of phosphorus trichloride requires a certain amount of heat and time, and the reaction between phosphorus trichloride and hydrogen requires a high activation energy, the reaction efficiency is severely limited. In cases where excessive liquid phosphorus trichloride cannot react fully, it may react with water, leading to feedstock loss. This not only wastes reactants but also makes it difficult to guarantee reaction efficiency. Therefore, there is an urgent need to research a device that can improve the yield of phosphorus trichloride. Utility Model Content

[0007] To address the aforementioned problems, specifically those raised in the background section, this invention proposes an automated reduction device for the vaporization of phosphorus trichloride and its premixing with hydrogen in a specific ratio. The device includes an automated parameter control cabinet electrically connected to the automated reduction device. The bottom of a first reaction vessel is connected to a hydrogen inlet pipe via a pipeline. A hydrogen premixing and dispersing device is installed at the bottom of the first reaction vessel cavity. Several premixing heating devices are installed on the outer wall of the first reaction vessel. A premixed gas-liquid separator is connected to the top of the first reaction vessel via a pipeline. The premixed gas-liquid separator is installed inside the cavity of a second reaction vessel. One side of the bottom of the first reaction vessel is connected to the second reaction vessel via a pipeline equipped with a shut-off valve. The bottom of the second reaction vessel is connected to a phosphorus trichloride inlet pipe via a pipeline. The top of the second reaction vessel is connected to a premixed gas reduction pipeline. The other end of the premixed gas reduction pipeline is connected to a premixed gas reduction furnace. The other end of the premixed gas reduction furnace is connected to a yellow phosphorus collection box via a pipeline.

[0008] A further feature of this invention is that the top of the first reactor is provided with a safety rupture disc, a nitrogen purging port, and a pressure monitoring instrument, and the bottom of the first reactor is provided with a temperature monitoring instrument, the sensing end of which is installed inside the cavity of the first reactor.

[0009] A further feature of this invention is that, from the inlet end to the outlet end, a hydrogen inlet flow meter, a hydrogen inlet shut-off valve, and a hydrogen inlet check valve are sequentially arranged on the hydrogen inlet pipeline, and a hydrogen inlet port is provided at the other end of the hydrogen inlet pipeline.

[0010] A further feature of this invention is that, from the inlet end to the outlet end, the phosphorus trichloride inlet pipeline is sequentially equipped with a phosphorus trichloride inlet flow meter, a phosphorus trichloride inlet shut-off valve, a phosphorus trichloride inlet check valve, and a level gauge. The other end of the phosphorus trichloride inlet pipeline is provided with a phosphorus trichloride inlet interface, and the other end of the level gauge is connected to the top of the second reaction vessel through a pipeline.

[0011] A further feature of this invention is that, from the inlet end to the outlet end, the premixed gas reduction pipeline is sequentially provided with a premixed gas filter, a premixed gas flow meter, and a premixed gas reduction feed valve. A premixed gas venting branch is also provided on the pipeline between the premixed gas flow meter and the premixed gas reduction feed valve. The premixed gas venting branch is provided with a premixed gas venting interface through a premixed gas venting shut-off valve.

[0012] A further feature of this invention is that the automated parameter control cabinet is electrically connected to a pressure monitoring instrument, a temperature monitoring instrument, a hydrogen inlet flow meter, a premixed heating device, a hydrogen inlet shut-off valve, a level gauge, a phosphorus trichloride inlet shut-off valve, a premixed gas vent shut-off valve, and a premixed gas reduction feed valve.

[0013] A further feature of this invention is that the reaction temperature range of the premixed gas reduction furnace is 850-950℃, and the cooling temperature range of the yellow phosphorus collection box is 50-80℃.

[0014] A further feature of this invention is that the hydrogen inlet pipeline and the phosphorus trichloride liquid inlet pipeline are connected by a shut-off valve.

[0015] The beneficial technical effects of this invention are as follows: This invention ensures thorough vaporization and mixing of phosphorus trichloride and hydrogen before the reduction reaction, increasing the contact area between reactants and thus increasing the intermolecular reaction opportunities, accelerating the reaction rate. Sufficient premixing is achieved before entering the reduction furnace, resulting in a faster and more complete phosphorus trichloride reduction process. Increasing the temperature of the materials before the reaction and increasing the contact time between reactants helps to reach the activation energy of the reaction more quickly, ensuring the reduction reaction is fully completed and greatly improving the reaction yield. The premixing device, while increasing the phosphorus trichloride reduction reaction yield, ensures that phosphorus trichloride and hydrogen react to the maximum extent, preventing excess phosphorus trichloride from being incompletely reacted and decomposed and lost due to contact with water. Automated parameter control ensures a reasonable ratio of reactants, reduces the uncertainty of human operation, improves the accuracy of material reaction ratio control, and guarantees a safe and controllable reaction, thereby achieving stable production. Attached Figure Description

[0016] Figure 1 A three-dimensional structural schematic diagram of the present invention is shown.

[0017] Figure 2 A schematic diagram of the planar structure of this utility model is shown.

[0018] Reference numerals: 1. Safety rupture disc; 2. Nitrogen purging port; 3. Pressure monitoring instrument; 4. Temperature monitoring instrument; 5. Hydrogen inlet flow meter; 6. Hydrogen inlet port; 7. Premixed heating device; 8. Hydrogen inlet shut-off valve; 9. Hydrogen premixed dispersion device; 10. Hydrogen inlet check valve; 11. Shut-off valve; 12. Phosphorus trichloride liquid inlet check valve; 13. Premixed gas filter; 14. Premixed gas flow meter; 15. Premixed gas-liquid separator; 16. Level gauge; 17. Phosphorus trichloride liquid inlet shut-off valve; 18. Phosphorus trichloride liquid inlet flow meter; 19. Phosphorus trichloride liquid inlet port; 20. Premixed gas vent port; 21. Premixed gas vent shut-off valve; 22. Premixed gas reduction feed valve; 23. Premixed gas reduction furnace; 24. Yellow phosphorus collection box; 25. Automated parameter control cabinet; 26. First reactor; 27. Second reactor. Detailed Implementation

[0019] The following is a reference to the appendix. Figure 1-2 The preferred embodiments of this utility model are described below. Those skilled in the art should understand that these embodiments are merely for explaining the technical principles of this utility model and are not intended to limit the scope of protection of this utility model.

[0020] This invention proposes an automated reduction device for vaporizing phosphorus trichloride and premixing it with hydrogen in a certain ratio. The device includes an automated parameter control cabinet 25 electrically connected to the automated reduction device. The bottom end of the first reaction vessel 26 is connected to the hydrogen inlet pipeline through a pipeline. Hydrogen is introduced from the hydrogen inlet port 6 and is charged from the bottom of the first reaction vessel 26 in a certain ratio under the measurement of the hydrogen inlet flow meter 5.

[0021] A hydrogen premixing and dispersing device 9 is installed at the bottom of the first reaction vessel 26. The hydrogen premixing and dispersing device 9 completely disperses the hydrogen entering the first reaction vessel 26 to participate in the mixing, making the hydrogen and phosphorus trichloride mix more evenly.

[0022] The outer wall of the first reactor 26 is equipped with several premixed heating devices 7. The premixed heating devices 7 can heat phosphorus trichloride to a set temperature. The heating power is interlocked with the temperature monitoring instrument 4 to control the liquid phosphorus trichloride, so that the liquid phosphorus trichloride is vaporized and fully mixed with the hydrogen gas introduced from the bottom.

[0023] The top of the first reactor 26 is connected to a premixed gas-liquid separator 15 via a pipeline. The premixed gas-liquid separator 15 is installed inside the cavity of the second reactor 27. The premixed gas-liquid separator 15 is used to separate the liquid in the mixed gas to prevent excessive phosphorus trichloride liquid from entering the reduction device and causing the ratio to become unbalanced.

[0024] The bottom side of the first reactor 26 is connected to the second reactor 27 through a pipeline equipped with a shut-off valve 11. The bottom end of the second reactor 27 is connected to the phosphorus trichloride inlet pipeline through a pipeline. The hydrogen inlet pipeline and the phosphorus trichloride inlet pipeline are connected through the shut-off valve 11. Liquid phosphorus trichloride is introduced from the phosphorus trichloride inlet port 19 and is charged into the second reactor 27 under the measurement of the phosphorus trichloride inlet flow meter 18.

[0025] The top of the second reactor 27 is connected to a premixed gas reduction pipeline, the other end of which is connected to a premixed gas reduction furnace 23. The premixed gas reduction furnace 23 causes the premixed gas to undergo a reduction reaction to produce gaseous yellow phosphorus. The other end of the premixed gas reduction furnace 23 is connected to a yellow phosphorus collection tank 24 via a pipeline. The gaseous yellow phosphorus is cooled to liquid yellow phosphorus by pure water in the yellow phosphorus collection tank 24 and then stored in a water seal. The reaction temperature range of the premixed gas reduction furnace 23 is 850-950℃, and the cooling temperature range of the yellow phosphorus collection tank 24 is 50-80℃.

[0026] The top of the first reactor 26 is also equipped with a safety rupture disc 1, a nitrogen purging port 2, and a pressure monitoring instrument 3. The bottom of the first reactor 26 is equipped with a temperature monitoring instrument 4, and the sensing end of the temperature monitoring instrument 4 is installed inside the cavity of the first reactor 26.

[0027] From the inlet to the outlet, the hydrogen inlet pipeline is sequentially equipped with a hydrogen inlet flow meter 5, a hydrogen inlet shut-off valve 8, and a hydrogen inlet check valve 10. A hydrogen inlet port 6 is located at the other end of the hydrogen inlet pipeline. The pressure monitoring instrument 3, temperature monitoring instrument 4, hydrogen inlet flow meter 5, and hydrogen inlet shut-off valve 8 are interlocked to control the pressure of the first reactor 26 according to the mixing ratio requirements, ensuring a reasonable ratio of premixed hydrogen to phosphorus trichloride. When the pressure inside the first reactor 26 is too high or the hydrogen source pressure is too low, the hydrogen inlet shut-off valve 8 automatically cuts off the hydrogen supply, the premixed heating device 7 stops heating, and the phosphorus trichloride inlet shut-off valve 17 cuts off the feed, ensuring stable material mixing and equipment operation.

[0028] From the inlet to the outlet, the phosphorus trichloride inlet pipeline is sequentially equipped with a phosphorus trichloride inlet flow meter 18, a phosphorus trichloride inlet shut-off valve 17, a phosphorus trichloride inlet check valve 12, and a level gauge 16. The other end of the phosphorus trichloride inlet pipeline is provided with a phosphorus trichloride inlet port 19. The other end of the level gauge 16 is connected to the top of the second reactor 27 through a pipeline. The phosphorus trichloride inlet shut-off valve 17 is interlocked with the level gauge 16. When the liquid level in the first reactor 26 is too high, the phosphorus trichloride inlet shut-off valve 17 cuts off the phosphorus trichloride inlet, controls the phosphorus trichloride liquid level within the set range, and ensures that the equipment operates at a safe liquid level.

[0029] From the inlet to the outlet, the premixed gas reduction pipeline is sequentially equipped with a premixed gas filter 13, a premixed gas flow meter 14, and a premixed gas reduction feed valve 22. The premixed gas filter 13 can separate the liquid in the premixed gas. Finally, the mixed gas after removing the liquid is fed into the premixed gas reduction furnace 23 under the measurement of the premixed gas flow meter 14 to undergo a reduction reaction. The resulting yellow phosphorus is finally collected in the yellow phosphorus collection box 24.

[0030] A premixed gas venting branch is also provided on the pipeline between the premixed gas flow meter 14 and the premixed gas reduction feed valve 22. The premixed gas venting branch has a premixed gas venting port 20 opened through the premixed gas venting shut-off valve 21. When the reaction ratio of hydrogen and phosphorus trichloride is unbalanced, the premixed gas reduction feed valve 22 is automatically shut off, and the premixed gas venting shut-off valve 21 is automatically opened to safely collect the excess phosphorus trichloride and ensure the safe conduct of the reduction reaction.

[0031] The automated parameter control cabinet 25 is electrically connected to a pressure monitoring instrument 3, a temperature monitoring instrument 4, a hydrogen inlet flow meter 5, a premixed heating device 7, a hydrogen inlet shut-off valve 8, a level gauge 16, a phosphorus trichloride inlet shut-off valve 17, a premixed gas vent shut-off valve 21, and a premixed gas reduction feed valve 22.

[0032] Normal Operation: In the first reactor, hydrogen gas is introduced into the reactor 26 through the hydrogen inlet port 6 according to the set ratio. Under the measurement of the hydrogen inlet flow meter 5, it enters the bottom of the first reactor 26 through the hydrogen inlet shut-off valve 8 and the hydrogen inlet check valve 10. At the same time, phosphorus trichloride is introduced into the second reactor 27 through the phosphorus trichloride liquid inlet port 19 and is measured by the phosphorus trichloride liquid inlet flow meter 18. The premixed heating device 7 heats the phosphorus trichloride to the set temperature, causing it to vaporize and mix thoroughly with the hydrogen gas. At this time, the pressure monitoring instrument 3, temperature monitoring instrument 4, hydrogen inlet flow meter 5, and hydrogen inlet shut-off valve 8 in the first reactor 26 are linked to ensure that the ratio of the premixed gas meets the requirements. After the premixed gas passes through the premixed gas-liquid separator 15 to separate the liquid, it enters the premixed gas reduction pipeline and enters the premixed gas reduction furnace 23 under the measurement of the premixed gas flow meter 14 to generate gaseous yellow phosphorus. The yellow phosphorus is collected in the yellow phosphorus collection box 24 after cooling.

[0033] Excessive Pressure: When the pressure inside the first reactor 26 is too high and the hydrogen source pressure is too low, the pressure monitoring instrument 3 will send a signal to the automated parameter control cabinet 25. The automated parameter control cabinet 25 will automatically shut off the hydrogen inlet shut-off valve 8 and simultaneously stop the premixing heating device 7. At this time, the phosphorus trichloride liquid inlet shut-off valve 17 will cut off the feed, and the pressure will be balanced by reducing the premixing heating temperature to reduce the amount of phosphorus trichloride vaporization, thus ensuring stable material ratio and equipment operation.

[0034] High liquid level: When the liquid level in the second reactor 27 is too high, the level gauge 16 will send a signal to the automation parameter control cabinet 25. The automation parameter control cabinet 25 will automatically cut off the phosphorus trichloride inlet shut-off valve 17 to stop the phosphorus trichloride inlet, thereby controlling the phosphorus trichloride liquid level within the set range and ensuring that the equipment operates at a safe liquid level.

[0035] Imbalance in reaction ratio: When the reaction ratio of hydrogen and phosphorus trichloride is unbalanced, the automatic parameter control cabinet 25 will automatically cut off the premixed gas reduction feed valve 22 and open the premixed gas venting shut-off valve 21 to discharge the excess phosphorus trichloride through the premixed gas venting branch, ensuring the safe conduct of the reduction reaction.

[0036] Although the present invention has been described with reference to preferred embodiments, various modifications can be made to it and components can be replaced with equivalents without departing from the scope of the present invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0037] In the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0040] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. An automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio, characterized in that: The automated parameter control cabinet (25) is electrically connected to the automated reduction device. The bottom end of the first reactor (26) is connected to the hydrogen inlet pipeline through a pipeline. A hydrogen premixing dispersion device (9) is provided at the bottom of the cavity of the first reactor (26). Several premixing heating devices (7) are provided on the outer wall of the first reactor (26). A premixed gas-liquid separator (15) is connected to the top of the first reactor (26) through a pipeline. The premixed gas-liquid separator (15) is installed in the cavity of the second reactor (27). The bottom side of the first reactor (26) is connected to the second reactor (27) through a pipeline equipped with a shut-off valve (11). The bottom end of the second reactor (27) is connected to the phosphorus trichloride inlet pipeline through a pipeline, and the top end of the second reactor (27) is connected to a premixed gas reduction pipeline. The other end of the premixed gas reduction pipeline is connected to a premixed gas reduction furnace (23), and the other end of the premixed gas reduction furnace (23) is connected to a yellow phosphorus collection box (24) through a pipeline.

2. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: The top of the first reactor (26) is also provided with a safety rupture disc (1), a nitrogen purging port (2) and a pressure monitoring instrument (3), and the bottom of the first reactor (26) is provided with a temperature monitoring instrument (4), the sensing end of the temperature monitoring instrument (4) is installed inside the cavity of the first reactor (26).

3. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: From the inlet end to the outlet end, the hydrogen inlet pipeline is sequentially equipped with a hydrogen inlet flow meter (5), a hydrogen inlet shut-off valve (8) and a hydrogen inlet check valve (10), and the other end of the hydrogen inlet pipeline is provided with a hydrogen inlet port (6).

4. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: From the inlet end to the outlet end, the phosphorus trichloride inlet pipeline is sequentially equipped with a phosphorus trichloride inlet flow meter (18), a phosphorus trichloride inlet shut-off valve (17), a phosphorus trichloride inlet check valve (12), and a level gauge (16). The other end of the phosphorus trichloride inlet pipeline is provided with a phosphorus trichloride inlet interface (19), and the other end of the level gauge (16) is connected to the top of the second reactor (27) through a pipeline.

5. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: From the inlet end to the outlet end, the premixed gas reduction pipeline is sequentially provided with a premixed gas filter (13), a premixed gas flow meter (14) and a premixed gas reduction feed valve (22). A premixed gas venting branch is also provided on the pipeline between the premixed gas flow meter (14) and the premixed gas reduction feed valve (22). The premixed gas venting branch is provided with a premixed gas venting interface (20) through a premixed gas venting shut-off valve (21).

6. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: The automated parameter control cabinet (25) is electrically connected to a pressure monitoring instrument (3), a temperature monitoring instrument (4), a hydrogen inlet flow meter (5), a premixed heating device (7), a hydrogen inlet shut-off valve (8), a liquid level gauge (16), a phosphorus trichloride inlet shut-off valve (17), a premixed gas vent shut-off valve (21), and a premixed gas reduction feed valve (22).

7. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: The reaction temperature range of the premixed gas reduction furnace (23) is 850-950℃, and the cooling temperature range of the yellow phosphorus collection box (24) is 50-80℃.

8. The automated reduction apparatus for vaporizing phosphorus trichloride and premixing it with hydrogen in a specific ratio according to claim 1, characterized in that: The hydrogen inlet pipeline and the phosphorus trichloride liquid inlet pipeline are connected by a shut-off valve (11).

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