Crystal growing device

Abstract

The utility model provides a crystal growth device, belongs to the technical field of crystal growth, and solves the problem that the positioning of a guide cylinder in the prior art is easily misjudged. The weighing device comprises a base plate, a bearing assembly and a weighing sensor, a first containing bin is formed in the base plate, the first containing bin is used for containing a guide cylinder, a second containing bin is arranged in the first containing bin and used for containing a water-cooled heat shield, the bearing assembly comprises a first bearing part and a second bearing part, the first bearing part is arranged above the first containing bin, and the second bearing part is arranged above the second containing bin. The first bearing part is used for hanging the guide cylinder, the first bearing part has the moving freedom degree in the vertical direction so that the guide cylinder can be hung or separated, the second bearing part is arranged above the second containing bin and connected with the first bearing part, and the second bearing part is used for bearing a water-cooling heat shield; the second bearing part has the movable freedom degree of vertically stretching into or out of the second containing bin, and the weighing sensor acts on the bearing assembly so as to detect and obtain the gravity value of the bearing assembly.

Description

Technical Field

[0001] This application belongs to the field of crystal growth technology, and more specifically, relates to a crystal growth apparatus. Background Technology

[0002] A crystal growth furnace generally includes a furnace chamber, in which a crucible can be placed. Crystal growth materials can be added into the crucible for crystal growth. A thermal field component and a heat preservation component are arranged around the crucible. A water-cooled heat shield and a flow guide tube are installed above the thermal field component.

[0003] Currently, during crystal growth, the guide tube needs to be positioned on the cover plate of the hot zone component. Before each crystal pulling operation, it is necessary to manually confirm whether it is in place. This process is not only cumbersome, but may also lead to misjudgment due to insufficient operator experience or visual observation.

[0004] Based on the above, the technical problem to be solved by this application is that the positioning detection of the guide tube is prone to misjudgment. Utility Model Content

[0005] The purpose of this application is to address the aforementioned problems in the prior art by proposing a crystal growth apparatus that solves the problem of easy misjudgment in the placement detection of the guide tube in the prior art and improves the accuracy of the placement detection of the guide tube.

[0006] The objective of this application can be achieved through the following technical solution: a crystal growth apparatus, comprising a substrate, wherein a first accommodating chamber is formed on the substrate, the first accommodating chamber being used to accommodate a guide tube; a supporting assembly, the supporting assembly comprising: a first supporting member, the first supporting member being disposed above the first accommodating chamber, the first supporting member being used to hang the guide tube, and the first supporting member having a vertical degree of freedom of movement to allow the guide tube to enter or fall into the first accommodating chamber; and a weighing sensor, the weighing sensor acting on the supporting assembly to detect and acquire the gravity value of the supporting assembly.

[0007] In the crystal growth apparatus described above, the first accommodating chamber is provided with a second accommodating chamber, which is used to accommodate a water-cooled hot plate; the supporting component further includes a second supporting member, which is disposed above the second accommodating chamber and connected to the first supporting member. The second supporting member is used to support the water-cooled hot plate, and the second supporting member has a degree of freedom of movement to extend vertically into or out of the second accommodating chamber.

[0008] Understandably, by setting a first support component to support the guide tube and a second support component to support the water-cooled heat shield, when the first support component is attached to the guide tube, the weight value detected by the load cell is the sum of the weights of the guide tube and the water-cooled heat shield. When the guide tube falls to the bottom of the first receiving chamber, the first receiving chamber supports the guide tube, thus allowing the guide tube to detach from the first support component. The weight value detected by the load cell is the weight value of the water-cooled heat shield. The change in weight value can be used to determine whether the guide tube has fallen into place, making the detection convenient and more reliable in terms of accuracy.

[0009] In the aforementioned crystal growth apparatus, the support assembly further includes a lifting rod, on which the first support member and the second support member are respectively connected, and the weighing sensor is mounted. It is understood that by connecting the lifting rod to the first and second support members respectively, when the lifting rod is subjected to force and moves upward or downward, it can drive the first and second support members to move synchronously, avoiding distance deviation caused by separate movements and ensuring the accuracy of the detection.

[0010] In the crystal growth apparatus described above, the first support member includes: a support portion for supporting at least a portion of the guide tube; and a clearance hole formed on the support portion, through which at least a portion of the guide tube can pass. For example, the support portion may be plate-shaped, block-shaped, column-shaped, or platform-shaped, and the clearance hole may be hole-shaped or slot-shaped.

[0011] In the crystal growth apparatus described above, the second support member protrudes downward relative to the first support member, and the bottom of the second support member is an insertion part, an adsorption part, or a threaded connection part. It is understood that by making the bottom of the second support member protrude from the first support member, a height difference is maintained between the two during vertical movement. By configuring the bottom of the second support member with various connection methods, it is easy to connect and disconnect with a water-cooled heatsink.

[0012] In the crystal growth apparatus described above, the portion of the upper surface of the substrate near the first accommodating chamber serves as a support portion, which is used to support at least a part of the guide tube. It is understood that by providing the support portion, after the first support member descends, the guide tube can directly contact the support portion, thereby allowing the first support member and the guide tube to separate, and enabling the weighing sensor to detect sudden changes in gravity.

[0013] In the crystal growth apparatus described above, there are at least two sets of support components, symmetrically arranged around the second accommodating chamber. It is understood that by providing at least two sets of support components, a uniform and stable load-bearing force is provided, which is beneficial for the detection by the weighing sensor.

[0014] The crystal growth apparatus described above also includes a furnace cover, a flow guide tube, and a water-cooled heat shield. The furnace cover is connected to the substrate and has an opening for vertical movement of the support assembly. The flow guide tube is disposed within the first receiving chamber and has a cover plate that abuts against the substrate. The water-cooled heat shield is disposed within the second receiving chamber, which is located within the flow guide tube. It is understood that the opening in the furnace cover provides lifting space for the support assembly, and the cover plate on the flow guide tube, corresponding to the substrate, abuts against each other for positioning. The flow guide tube is hollow at the center, forming the second receiving chamber to accommodate the water-cooled heat shield. A gas flow channel can be formed between the flow guide tube and the water-cooled heat shield, allowing argon gas to flow through.

[0015] In the aforementioned crystal growth apparatus, a flange is connected to the top of the water-cooled heat shield, and the flange is connected to the second support member. It is understood that by providing a flange on the top of the water-cooled heat shield and connecting it to the second support member, damage from friction against the water-cooled heat shield can be avoided, thus extending its service life.

[0016] In the aforementioned crystal growth apparatus, the guide tube is equipped with a mounting assembly, which includes: a connecting post disposed on the guide tube and penetrating the first support member vertically; and a mounting portion disposed on the connecting post at the end away from the first receiving chamber, with the outer diameter of the mounting portion being larger than the outer diameter of the connecting post. It is understood that because the connecting post penetrates the first support member vertically, the height of the connecting post and the mounting portion is higher than that of the first support member. Therefore, when the first support member moves vertically downwards, the guide tube falls onto the substrate for contact and fixation, and the relative distance between the first support member and the mounting portion gradually increases and they separate. Since the outer diameter of the mounting portion is larger than the outer diameter of the connecting post, the mounting portion can remain mounted on the first support member when the guide tube is still in a downward state.

[0017] In the crystal growth apparatus described above, a linear module is provided on the outer side of the furnace cover. This linear module acts on the support assembly to drive the support assembly to move in the vertical direction. For example, the linear module is configured as an electric cylinder, which has high linear motion accuracy and can ensure that the support assembly maintains linear movement.

[0018] Compared with the prior art, this application has the following beneficial effects:

[0019] 1. This application sets a first support member to support the guide tube and a second support member to support the water-cooled heat shield. When the first support member is attached to the guide tube, the weight value detected by the weighing sensor is the sum of the weights of the guide tube and the water-cooled heat shield. When the guide tube falls to the bottom of the first receiving chamber, the first receiving chamber supports the guide tube, so the guide tube can be detached from the first support member. The weight value detected by the weighing sensor is the weight value of the water-cooled heat shield. The change in the weight value can be used to determine whether the guide tube has fallen into place. The detection is more convenient and the detection accuracy is more reliable.

[0020] 2. This application provides a uniform and stable load-bearing force by setting at least two sets of load-bearing components, which is also beneficial to the detection of the weighing sensor;

[0021] 3. This application avoids damage to the water-cooled heat shield from contact friction by setting a flange on the top of the water-cooled heat shield and connecting it with the second load-bearing component through the flange, thus extending its service life. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural schematic diagram of the crystal growth apparatus of this application;

[0023] Figure 2 This is a partial structural cross-sectional view of the crystal growth apparatus of this application;

[0024] Figure 3 yes Figure 2 Enlarged structural diagram of region A in the middle;

[0025] Figure 4 yes Figure 1 Schematic diagram of the 3D structure after hiding some parts of the structure Figure 1 ;

[0026] Figure 5 yes Figure 4 A magnified structural diagram of region B in the middle;

[0027] Figure 6 yes Figure 1 Schematic diagram of the 3D structure after hiding some parts of the structure Figure 2 ;

[0028] Figure 7 yes Figure 6 A magnified structural diagram of region C in the middle;

[0029] In the diagram, 100 is the substrate; 110 is the first accommodating compartment; 120 is the second accommodating compartment; 130 is the supporting part; 200 is the supporting assembly; 210 is the first supporting member; 211 is the supporting part; 212 is the clearance hole; 220 is the second supporting member; 230 is the lifting rod; 300 is the weighing sensor; 400 is the guide tube; 410 is the cover plate; 500 is the water-cooled heat shield; 510 is the flange; 600 is the furnace cover; 610 is the opening; 700 is the mounting assembly; 710 is the connecting column; 720 is the mounting part; and 800 is the linear module. Detailed Implementation

[0030] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0031] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0036] Please refer to the attached diagram in the instruction manual. Figure 1 , Figure 2 and Figure 3 The crystal growth apparatus of this application includes a substrate 100, a support component 200, and a weighing sensor 300. A first receiving chamber 110 is formed on the substrate 100, which is used to receive a flow guide tube 400. A second receiving chamber 120 is provided inside the first receiving chamber 110, which is used to receive a water-cooled heatsink 500. See also... Figure 4 and Figure 5The support assembly 200 includes: a first support member 210 and a second support member 220. The first support member 210 is disposed above the first accommodating chamber 110 and is used to hang the guide tube 400. The first support member 210 has a vertical degree of freedom of movement so that the guide tube 400 can enter or fall into the first accommodating chamber 110. The second support member 220 is disposed above the second accommodating chamber 120 and connected to the first support member 210. The second support member 220 is used to support the water-cooled heat shield 500 and has a vertical degree of freedom of movement to extend into or out of the second accommodating chamber 120. The weighing sensor 300 acts on the support assembly 200 to detect and obtain the gravity value of the support assembly 200. Understandably, by setting the first support member 210 to support the guide tube 400 and the second support member 220 to support the water-cooled heat shield 500, when the first support member 210 is attached to the guide tube 400, the weight value detected by the load cell 300 is the sum of the weights of the guide tube 400 and the water-cooled heat shield 500. When the guide tube 400 falls onto the first receiving chamber 110 and thus detaches from the first support member 210, the weight value detected by the load cell 300 is the weight value of the water-cooled heat shield 500. The sudden change in the weight value can be used to determine whether the guide tube 400 has fallen into place, which is convenient and more reliable in terms of detection accuracy.

[0037] See Figure 1 In some embodiments, a linear module 800 is provided on the outer side of the furnace cover 600. The linear module 800 acts on the support assembly 200 to drive the support assembly 200 to move in the vertical direction. For example, the linear module 800 is configured as an electric cylinder, which has high linear motion accuracy and can ensure that the support assembly 200 maintains linear motion.

[0038] See Figure 1 and Figure 2 In some embodiments, there are at least two sets of load-bearing components 200, and the at least two sets of load-bearing components 200 are symmetrically arranged around the second accommodating chamber 120. It is understood that by providing at least two sets of load-bearing components 200, a uniform and stable load-bearing force is provided, which is beneficial to the detection of the weighing sensor 300.

[0039] See Figure 2 and Figure 3 In some embodiments, the portion of the upper surface of the substrate 100 near the first receiving chamber 110 is a support portion 130, which is used to support at least a portion of the guide tube 400. It is understood that by providing the support portion 130, after the first support member 210 descends, the guide tube 400 can directly abut against the support portion 130, thereby allowing the first support member 210 and the guide tube 400 to separate, and enabling the weighing sensor 300 to detect sudden changes in gravity.

[0040] Continue to refer to Figure 2 and Figure 3 The crystal growth apparatus of this application also includes a furnace cover 600, a flow guide tube 400, and a water-cooled heat shield 500. The furnace cover 600 is connected to the substrate 100 and has an opening 610 for vertical movement of the support assembly 200. The flow guide tube 400 is disposed within a first receiving chamber 110 and has a cover plate 410 that abuts against the substrate 100. The water-cooled heat shield 500 is disposed within a second receiving chamber 120, which is also disposed within the flow guide tube 400. It is understood that by providing an opening 610 on the furnace cover 600 to provide lifting space for the support assembly 200, and by providing a cover plate 410 on the flow guide tube 400 corresponding to the substrate 100, they abut against each other and are positioned accordingly. The center of the guide tube 400 is hollow, thereby forming a second accommodating chamber 120 to accommodate the water-cooled heat shield 500. A gas flow channel can be formed between the guide tube 400 and the water-cooled heat shield 500, which can be used for the flow of argon gas.

[0041] See Figure 2 , Figure 4 and Figure 5 In some embodiments, the support assembly 200 further includes a lifting rod 230, on which a first support member 210 and a second support member 220 are respectively connected, and a weighing sensor 300 is provided. It is understood that by setting the lifting rod 230 to connect the first support member 210 and the second support member 220 respectively, when the lifting rod 230 is subjected to force and moves upward or downward, it can drive the first support member 210 and the second support member 220 to move synchronously, avoiding distance deviation caused by separate movements and ensuring the accuracy of the detection.

[0042] See Figure 4 or Figure 5 In some embodiments, a flange 510 is connected to the top of the water-cooled heat shield 500, and the flange 510 is connected to the second support member 220. It can be understood that by providing a flange 510 on the top of the water-cooled heat shield 500 and connecting it to the second support member 220 through the flange 510, damage from contact friction of the water-cooled heat shield 500 can be avoided, thus extending its service life.

[0043] See Figure 5 or Figure 7 In some embodiments, the first support member 210 includes a support portion 211 and a clearance hole 212. The support portion 211 is used to support at least a portion of the guide tube 400, and the clearance hole 212 is formed on the support portion 211, allowing at least a portion of the guide tube 400 to pass through. Exemplarily, the support portion 211 may be plate-shaped, block-shaped, column-shaped, or platform-shaped, and the clearance hole 212 may be hole-shaped or slot-shaped.

[0044] Continue to refer to Figure 5 or Figure 7 In some embodiments, the second support member 220 protrudes downward relative to the first support member 210, and the bottom of the second support member 220 is a plug-in portion, an adsorption portion, or a threaded connection portion. It is understood that by having the bottom of the second support member 220 protrude from the first support member 210, a height difference is maintained between the two during vertical movement. By configuring the bottom of the second support member 220 with various connection methods, it is easy to connect and detach from the water-cooled heatsink 500.

[0045] See Figure 2 , Figure 5 or Figure 7 In some embodiments, the guide tube 400 is provided with a mounting assembly 700, which includes: a connecting post 710 disposed on the guide tube 400 and penetrating the first support member 210 in a vertical direction; and a mounting portion 720 disposed on the end of the connecting post 710 away from the first receiving chamber 110, with the outer diameter of the mounting portion 720 being larger than the outer diameter of the connecting post 710. It is understood that because the connecting post 710 penetrates the first support member 210 in a vertical direction, the height of the connecting post 710 and the mounting portion 720 is higher than that of the first support member 210. Therefore, when the first support member 210 moves vertically downwards, the guide tube 400 falls onto the base plate 100 for contact and fixation, and the relative positional distance between the first support member 210 and the mounting portion 720 gradually increases and they separate. Since the outer diameter of the mounting part 720 is larger than the outer diameter of the connecting column 710, the mounting part 720 can remain mounted on the first bearing member 210 when the guide tube 400 is still in the falling state.

[0046] Beneficial effects:

[0047] This application sets a first support member 210 to support the guide tube 400 and a second support member 220 to support the water-cooled heat shield 500. When the first support member 210 is attached to the guide tube 400, the weight sensor 300 detects the sum of the weights of the guide tube 400 and the water-cooled heat shield 500. When the guide tube 400 falls onto the first receiving chamber 110 and detaches from the first support member 210, the weight sensor 300 detects the weight of the water-cooled heat shield 500. The sudden change in the weight value can be used to determine whether the guide tube 400 has fallen into place, which is convenient and more reliable. By setting at least two sets of support components 200, a uniform and stable load-bearing force is provided, which is also beneficial to the detection of the weight sensor 300. By setting a flange 510 on the top of the water-cooled heat shield 500 and connecting it to the second support member 220 through the flange 510, the water-cooled heat shield 500 can be avoided from being damaged by friction and thus its service life can be extended.

[0048] The specific embodiments described herein are merely illustrative examples of the spirit of this application. Those skilled in the art to which this application pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this application or exceeding the scope defined by the appended claims.

Claims

1. A crystal growth apparatus, characterized in that, include: A substrate (100) is provided with a first accommodating chamber (110) for accommodating a guide tube (400); A support component (200), the support component (200) comprising: The first support member (210) is disposed above the first accommodating chamber (110). The first support member (210) is used to hang the guide tube (400), and the first support member (210) has a vertical degree of freedom of movement so that the guide tube (400) can enter or fall into the first accommodating chamber (110). as well as A weighing sensor (300) acts on the load-bearing component (200) to detect and acquire the gravity value of the load-bearing component (200).

2. The crystal growth apparatus according to claim 1, characterized in that, The first accommodating compartment (110) is provided with a second accommodating compartment (120), which is used to accommodate the water-cooled heat shield (500); The supporting component further includes a second supporting member (220), which is disposed above the second accommodating chamber (120) and connected to the first supporting member (210). The second supporting member (220) is used to support the water-cooled heat shield (500), and the second supporting member (220) has a degree of freedom of movement to extend vertically into or out of the second accommodating chamber (120).

3. The crystal growth apparatus according to claim 2, characterized in that, The load-bearing assembly (200) further includes a lifting rod (230), on which the first load-bearing member (210) and the second load-bearing member (220) are respectively connected, and the weighing sensor (300) is provided on the lifting rod (230).

4. The crystal growth apparatus according to claim 1, characterized in that, The first carrier (210) includes: Support portion (211), said support portion (211) is used to support at least a portion of said guide tube (400); A clearance hole (212) is provided on the support portion (211) for at least part of the guide tube (400) to pass through.

5. The crystal growth apparatus according to claim 2, characterized in that, The second support member (220) protrudes downward relative to the first support member (210), and the bottom of the second support member (220) is a plug-in part, an adsorption part, or a threaded connection part.

6. The crystal growth apparatus according to claim 1, characterized in that, The portion of the upper surface of the substrate (100) near the first accommodating chamber (110) is a support portion (130), which is used to support at least a portion of the guide tube (400).

7. The crystal growth apparatus according to claim 2, characterized in that, The bearing components (200) are at least two sets, and the at least two sets of bearing components (200) are symmetrically arranged with the second accommodating compartment (120) as the center.

8. The crystal growth apparatus according to claim 2, characterized in that, Also includes: A furnace cover (600) is connected to the base plate (100), and the furnace cover (600) is provided with an opening (610) for the support component (200) to move vertically to make room. A flow guide tube (400) is disposed in the first accommodating chamber (110), and a cover plate (410) is provided on the flow guide tube (400), the cover plate (410) abutting against the base plate (100); as well as A water-cooled heat shield (500) is disposed in the second accommodating chamber (120), which is disposed in the guide tube (400).

9. The crystal growth apparatus according to claim 8, characterized in that, The top of the water-cooled heat shield (500) is connected to a flange (510), which is connected to the second carrier (220).

10. The crystal growth apparatus according to claim 8, characterized in that, The guide tube (400) is provided with a mounting assembly (700), the mounting assembly (700) comprising: A connecting post (710) is disposed on the guide tube (400), and the connecting post (710) penetrates the first bearing member (210) in the vertical direction; The mounting part (720) is disposed on the connecting column (710) at one end away from the first accommodating compartment (110), and the outer diameter of the mounting part (720) is larger than the outer diameter of the connecting column (710).

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