Eight-inch gas injection pipe for vertical furnace convenient to quickly connect

Abstract

An 8-inch gas injection pipe for a vertical furnace convenient to connect quickly comprises a connector and an injection pipe body, a base portion of the injection pipe body is fixed on the connector in an inserted mode, a clamping groove is formed in the periphery of the base portion of the injection pipe body, an installation opening for the clamping groove to be exposed is correspondingly formed in the connector, and a clamping block and a hoop are further arranged at the position of the installation opening. The clamping block is used for penetrating through the mounting opening and being clamped into the clamping groove, and the hoop is used for hooking the clamping block and being clamped on the connector so as to position the clamping block. The device is used for greatly improving the replacement and maintenance efficiency of the gas injection pipe.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production and processing technology, specifically an 8-inch vertical furnace gas injection pipe that is easy to connect quickly. Background Technology

[0002] In the production of elemental silicon using a vertical furnace, silane is injected into the furnace through a gas injection pipe, where it decomposes at high temperatures to obtain elemental silicon and hydrogen. Elemental silicon readily adheres to the inner and outer walls of the gas injection pipe, forming a silicon film, which generates stress on the inner and outer surfaces. As the silicon film thickens due to the reaction, the quartz gas injection pipe is prone to breakage due to the internal and external stresses. After breakage, the injection pipe body must be removed from the connector, and a new injection pipe body must be inserted and fixed onto the connector before being reused in the vertical furnace.

[0003] In existing gas injection pipes, the base of the injection pipe body is usually connected to the joint by adhesive, which makes it cumbersome to remove the broken injection pipe body. After installing the new injection pipe body, it is still necessary to wait for the adhesive to dry and stabilize, which takes a long time and is not conducive to the rapid replacement of broken gas injection pipes. Utility Model Content

[0004] The present invention aims to provide an 8-inch vertical furnace gas injection pipe that is easy to connect quickly, thereby greatly improving the efficiency of gas injection pipe replacement and maintenance.

[0005] To solve the above technical problems, the specific solution adopted by this utility model is as follows: an 8-inch vertical furnace gas injection pipe that is easy to connect quickly, including a connector and an injection pipe body whose base is inserted and fixed on the connector. The outer periphery of the base of the injection pipe body is provided with a slot, and the connector is provided with an installation port for exposing the slot. A locking block and a clamp are also provided at the installation port. The locking block is used to pass through the installation port and engage with the slot, and the clamp is used to hook the locking block and hold it on the connector to position the locking block.

[0006] Preferably, both the connector and the spray pipe body have circular cross-sections.

[0007] Preferably, both the card slot and the mounting opening are rectangular.

[0008] Preferably, the clamp is arc-shaped and its outer diameter corresponds to that of the connector; the clamp is arc-shaped and its inner diameter corresponds to that of the connector.

[0009] Preferably, the inner side of the card block has a protrusion for insertion into the card slot, and the thickness of the protrusion corresponds to the width of the card slot.

[0010] Preferably, the angle of the clamp is 185°-190°.

[0011] Preferably, a hook hole is provided on the outer side of one end of the card block, and a hook body is provided on the clamp that can be inserted into the hook hole to hook the card block.

[0012] Preferably, the end of the clamp away from the hook is turned outward to form a flange.

[0013] Preferably, the joints, clamps, and clamps are all made of 316L stainless steel.

[0014] The present invention features a slot on the main body of the injection pipe and an installation port through the connector. The locking block is inserted into the slot via the installation port and then secured to the connector with a clamp. This makes the removal and installation of the injection pipe on the connector extremely convenient and quick, thereby improving the maintenance and replacement of broken gas injection pipes and significantly increasing maintenance efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of an 8-inch vertical furnace gas injection pipe that is easy to connect quickly, according to Embodiment 1 of this utility model.

[0016] Figure 2 for Figure 1 Enlarged structural diagram of the lower end of the injection pipe body and the upper end of the connector;

[0017] Figure 3 A schematic diagram of the transverse cross-section of the jet pipe body after the connector has been installed and positioned.

[0018] The markings in the diagram are: 1. Spray pipe body, 2. Connector, 3. Slot, 4. Installation port, 5. Hook hole, 6. Hook body, 7. Locking block, 8. Clamp, 9. Flanged edge, 10. Protrusion. Detailed Implementation

[0019] like Figure 1 As shown, this embodiment has the same main structure as the conventional gas injection pipe for injecting silane gas in a vertical furnace, both including a structure at the bottom and an injection pipe body 1 whose base is inserted into the connector 2. The base is made of 316L stainless steel, and the injection pipe body is made of quartz. Unlike the conventional method of gluing the injection pipe body 1 to the connector 2, in this embodiment, the base of the injection pipe and the connector 2 are connected by a snap-fit ​​structure, which greatly improves the efficiency of disassembly and installation. Specifically:

[0020] like Figure 2As shown, a rectangular groove 3 distributed laterally is provided at the base of the injection pipe body 1. The groove 3 does not penetrate the wall thickness of the injection pipe body 1 to avoid leakage. A rectangular mounting port 4 distributed laterally is provided on the connector 2. The mounting port 4 penetrates the wall thickness of the connector 2 so that the groove 3 can be exposed through the mounting port 4. The base of the injection pipe body 1 is positioned and installed on the connector 2 by a locking block 7 and a clamp 8, both made of 316L stainless steel.

[0021] Combination Figure 3 As shown, the outer periphery of the locking block 7 is arc-shaped and corresponds to the outer diameter of the connector 2, and its length corresponds to the mounting port 4, allowing it to be inserted precisely into the mounting port 4 to fill the position of the mounting port 4 of the connector 2. The inner side of the locking block 7 has a protrusion 10 that can be inserted into the slot 3. The thickness of the protrusion 10 corresponds to the width of the slot 3, thereby preventing the jet pipe body 1 from moving longitudinally. The clamp 8 is an arc-shaped clamp with an angle greater than 180 degrees. The inner side of its left end has a hook 6, which can be hooked and engaged with the hook hole 5 opened on the outer side of the left end of the locking block 7. The right end can be clamped onto the connector 2 under external force to position the locking block 7 and prevent the locking block 7 from falling off from the mounting port 4. In addition, for easy removal, the right end of the clamp 8 has a flange 9 that flips outward, so that personnel can pry the clamp 8 outward to remove the clamp 8 and the locking block 7, or pry the clamp 8 inward to install the clamp 8 and the locking block 7.

Claims

1. An 8-inch vertical furnace gas injection pipe that is easy to connect quickly, comprising a connector (2) and an injection pipe body (1) whose base is inserted and fixed on the connector (2), characterized in that: The base of the injection pipe body (1) is provided with a groove (3) on the outer periphery. The connector (2) is provided with an installation port (4) for the groove (3) to be exposed. A locking block (7) and a clamp (8) are also provided at the installation port (4). The locking block (7) is used to pass through the installation port (4) and engage with the groove (3). The clamp (8) is used to hook the locking block (7) and hold it on the connector (2) to position the locking block (7).

2. The 8-inch vertical furnace gas injection pipe as described in claim 1, characterized in that: Both the connector (2) and the spray pipe body (1) have circular cross-sections.

3. The 8-inch vertical furnace gas injection pipe as described in claim 2, characterized in that: Both the slot (3) and the mounting port (4) are rectangular.

4. The 8-inch vertical furnace gas injection pipe as described in claim 2, characterized in that: The clamp (7) is arc-shaped and its outer diameter corresponds to that of the connector (2); the clamp (8) is arc-shaped and its inner diameter corresponds to that of the connector (2).

5. The 8-inch vertical furnace gas injection pipe as described in claim 4, characterized in that: The inner side of the card block (7) has a protrusion (10) for insertion into the card slot (3), and the thickness of the protrusion (10) corresponds to the width of the card slot (3).

6. The 8-inch vertical furnace gas injection pipe as described in claim 4, characterized in that: The angle of the clamp (8) is 185°-190°.

7. The 8-inch vertical furnace gas injection pipe as described in claim 1, characterized in that: A hook hole (5) is provided on the outer side of one end of the card block (7), and a hook body (6) is provided on the clamp (8) that can be inserted into the hook hole (5) to hook the card block (7).

8. The 8-inch vertical furnace gas injection pipe as described in claim 5, characterized in that: The end of the clamp (8) away from the hook (6) is turned outward to form a flange (9).

9. The 8-inch vertical furnace gas injection pipe as described in claim 1, characterized in that: The connector (2), the clamp (7) and the clamp (8) are all made of 316L stainless steel.

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