Closed sampling device for liquid anhydrous hydrogen fluoride

By designing a closed sampling device that includes a sampling box, a residual liquid collection box, and a gas detector, the problem of difficult collection of anhydrous hydrogen fluoride leakage was solved, achieving a safe and efficient sampling process and reducing harm to operators and the environment.

CN223623918UActive Publication Date: 2025-12-02中国化学品安全协会 +1
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Patent Information

Application Number
CN202423061542.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-11
Publication Date
2025-12-02
Estimated Expiration
2034-12-11

AI Technical Summary

Technical Problem

In the current technology for closed sampling of anhydrous hydrogen fluoride, if the valve or pipeline leaks, the highly toxic AHF is difficult to collect effectively, increasing the risk of injury to the operator.

Method used

A closed sampling device was designed, comprising a sampling box, a residual liquid collection box, an inlet tube, a sampling tube, an outlet tube, a residual liquid collection tube, a sampling valve, and a residual liquid collection valve. It is made of PP material and perfluoroalkoxy resin material, and equipped with a gas detector and an emergency shut-off valve to ensure that leaked liquids and gases are collected and treated.

Benefits of technology

It effectively reduces safety risks in the sampling process, minimizes harm to operators and the environment, and improves the safety and environmental friendliness of the sampling process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of liquid sampling analysis, and particularly relates to a closed sampling device for liquid anhydrous hydrogen fluoride. An inlet of a sample feeding pipe of the closed sampling device is arranged outside a sampling box, an outlet of the sample feeding pipe, a sampling pipe and an inlet of a sample discharging pipe are arranged inside the sampling box, an outlet of the sample discharging pipe is arranged outside the sampling box, and an operation part of a sampling valve is arranged outside the sampling box; an outlet of the sample inlet pipe is connected with an inlet of the sample outlet pipe and an inlet of the sampling pipe through the sampling valve; a residual liquid collecting opening is formed in the bottom of the sampling box. Sudden leakage and sampling pipe cleaning liquid enter a recycling barrel through a residual liquid collecting opening, and generated toxic gas is directly absorbed under negative pressure and cannot be reserved in a sampling box; therefore, the risk that high-toxicity liquid and volatile gas hurt a human body in the sampling link is effectively reduced, and the safety and the environmental protection property of the sampling link are improved.
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Description

Technical Field

[0001] This utility model belongs to the field of liquid sampling and analysis technology, and more specifically, it relates to a closed sampling device for liquid anhydrous hydrogen fluoride. Background Technology

[0002] Anhydrous hydrogen fluoride (AHF) is a colorless and transparent liquid at low temperatures, with a boiling point of 19.4℃, a melting point of -83.37℃, and a specific gravity of 1.008 (25℃ / 4℃). Anhydrous hydrogen fluoride is widely used in the nuclear, chemical, and petroleum industries. It is a strong oxidizing agent and a basic raw material for the production of elemental fluorine, various fluorinated refrigerants, inorganic fluorides, and various organic fluorides. It can be formulated into aqueous hydrofluoric acid for various applications, used as a catalyst in graphite manufacturing and the production of organic compounds, and as a glass etching agent.

[0003] AHF has strong irritant and corrosive properties. It has a strong pungent odor and is highly corrosive to the mucous membranes of the eyes, ears, nose, and throat. It is also severely corrosive to human teeth and bones, causing them to calcify. Acute AHF poisoning can cause eye and upper respiratory tract irritation, bronchitis, pneumonia, and in severe cases, pulmonary edema. AHF readily volatilizes into a fume at room temperature; open sampling may cause large leaks, leading to workplace accidents. Therefore, AHF sampling must be conducted in a sealed environment, avoiding direct contact with operators, and all volatile gases generated during the sampling process must be treated as exhaust gases.

[0004] In existing closed-loop sampling technologies, if valves or pipelines leak, highly toxic AHF is difficult to collect and treat effectively, which increases the possibility of harm to the human body and has a significant impact on operators. Summary of the Invention

[0005] In order to solve the technical problem that "AHF is difficult to collect in the event of abnormal leakage during the closed sampling process", this utility model provides a closed sampling device for liquid anhydrous hydrogen fluoride (AHF).

[0006] The purpose of this invention is to provide a closed sampling device for liquid anhydrous hydrogen fluoride.

[0007] The sealed sampling device includes: a sampling box, a residual liquid collection box, an inlet tube, a sampling tube, an outlet tube, a residual liquid collection tube, a sampling valve, and a residual liquid collection valve; both the sampling box and the residual liquid collection box are equipped with doors;

[0008] The inlet of the injection tube is located outside the sampling box, the outlet of the injection tube, the sampling tube, and the inlet of the discharge tube are located inside the sampling box, the outlet of the discharge tube is located outside the sampling box, and the operating part of the sampling valve is located outside the sampling box; the outlet of the injection tube is connected to the inlet of the discharge tube and the inlet of the sampling tube through the sampling valve.

[0009] The bottom of the sampling box is equipped with a residual liquid collection port;

[0010] The residual liquid collection box is located below the sampling box and is connected to the sampling box through the residual liquid collection port;

[0011] The residual liquid collection pipe is located inside the residual liquid collection tank and connected below the residual liquid collection port; the residual liquid collection valve is installed on the residual liquid collection pipe.

[0012] Preferably, the sampling box and residual liquid collection box are made of PP material, the sampling valve is made of perfluoroalkoxy resin, and the sampling tube is a PFA tube (perfluoroalkoxy resin tube).

[0013] The cabinet door is preferably a visible cabinet door, such as a transparent cabinet door.

[0014] The sampling valve can be a three-way valve.

[0015] The residual liquid collection valve is preferably a backflow preventer.

[0016] The injection tube can be located at the top of the sampling box.

[0017] The sample outlet tube can be located at the top of the sampling box.

[0018] The sampling tube is preferably installed vertically.

[0019] The residual liquid collection port is preferably located at a position lower than the bottom of the sampling box.

[0020] The distance between the residual liquid collection port and point A is greater than the radius of the bottom of the sampling bottle; point A is located at the bottom of the sampling box, directly below the sampling port of the sampling tube. During use, the residual liquid collection port will not be covered by the sampling bottle.

[0021] The sealed sampling device may further include a recovery bucket; the recovery bucket is disposed inside the residual liquid collection tank and connected to the residual liquid collection pipe.

[0022] The sealed sampling device may further include a first exhaust gas absorption pipe; one end of the first exhaust gas absorption pipe is connected to the sampling box, and the other end is connected to the exhaust gas treatment system; an exhaust gas absorption valve is provided between the first exhaust gas absorption pipe and the exhaust gas treatment system. Preferably, the inlet of the first exhaust gas absorption pipe is located on the side wall of the sampling box.

[0023] The sealed sampling device may further include a second exhaust gas absorption pipe; one end of the second exhaust gas absorption pipe is connected to the residual liquid collection tank, and the other end is connected to the exhaust gas treatment system, with an exhaust gas absorption valve provided between the second exhaust gas absorption pipe and the exhaust gas treatment system. Preferably, the inlet of the second exhaust gas absorption pipe is located on the side wall of the residual liquid collection tank.

[0024] The sealed sampling device may further include a gas detector; the gas detector is disposed outside the sealed sampling device.

[0025] The sealed sampling device may further include an emergency shut-off valve; the emergency shut-off valve is located outside the sealed sampling device and is installed on the sample inlet tube. Preferably, when the gas detector detects leaked hydrogen fluoride gas, it interlocks and closes the emergency shut-off valve. The gas detector interlocks with the emergency shut-off valve to cut off the toxic material at its source; after the gas detector detects hydrogen fluoride gas, it first generates an audible and visual alarm, and after reaching the interlock threshold, it triggers the interlock to close the emergency shut-off valve.

[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0027] This invention discloses a closed sampling device for liquid anhydrous hydrogen fluoride. When using this closed sampling device, any sudden leaks in the inlet tube, sampling tube, or outlet tube, as well as the cleaning fluid from the sampling tube, enter the recovery tank through the residual liquid collection port. The resulting toxic gases are directly absorbed under negative pressure. Leaked liquid anhydrous hydrogen fluoride and hydrogen fluoride tail gas will not remain in the sampling chamber. Therefore, no secondary leakage will occur when the sampling chamber door is opened. This solves the problems of abnormal AHF leakage and difficulty in collecting the sampling tube cleaning fluid, effectively reducing the risk of harm to the human body from highly toxic liquids and volatile gases during the sampling process, and improving the safety and environmental friendliness of the sampling process.

[0028] The closed sampling device disclosed in this utility model has a simple connection method and is easy to operate, reducing the risk of operator error. During use, the entire sampling process is safe and environmentally friendly, reducing harm to the environment and minimizing personal injury to sampling personnel. Attached Figure Description

[0029] Figure 1 A schematic diagram of the overall structure of a closed sampling device for liquid anhydrous hydrogen fluoride provided in Embodiment 1 of this utility model;

[0030] Figure 2 A side view schematic diagram of a closed sampling device for liquid anhydrous hydrogen fluoride provided in Embodiment 1 of this utility model;

[0031] In the diagram, 1 is the sample inlet tube, 2 is the sampling tube, 3 is the sample outlet tube, 4 is the three-way valve, 5 is the residual liquid collection tube, 6 is the first tail gas absorption tube, 7 is the second tail gas absorption tube, 8 is the residual liquid collection port, 9 is the sampling box, 10 is the residual liquid collection box, 11 is the emergency shut-off valve, 12 is the gas detector, and 13 is the tail gas absorption valve. Detailed Implementation

[0032] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. It should be noted that the following embodiments are only used to further illustrate the present invention and should not be construed as limiting the scope of protection of the present invention. Some non-essential improvements and adjustments made by those skilled in the art based on the content of the present invention still fall within the scope of protection of the present invention.

[0033] A closed sampling device for liquid anhydrous hydrogen fluoride includes: a sampling box, a residual liquid collection box, an inlet tube, a sampling tube, an outlet tube, a residual liquid collection tube, a sampling valve, and a residual liquid collection valve.

[0034] The inlet of the injection tube is located outside the sampling box, and the outlet is located inside the sampling box. That is, the injection tube passes through one wall of the sampling box (wall A), with one end inside the sampling box and the other end outside. The end inside the sampling box is the outlet, and the end outside is the inlet. The injection tube can be located at the top of the sampling box; the injection tube can be installed horizontally.

[0035] The inlet of the sample outlet tube is located inside the sampling box, and the outlet tube is located outside the sampling box. That is, the sample outlet tube passes through another wall of the sampling box (box wall B), with one end inside the sampling box and the other end outside. The end inside the sampling box is the inlet of the sample outlet tube, and the end outside the sampling box is the outlet. Box wall B can be opposite box wall A. The sample outlet tube can be located at the top of the sampling box; the sample outlet tube can be horizontally installed; preferably, the sample outlet tube and the sample inlet tube are on the same horizontal line.

[0036] The sampling tube is placed inside the sampling box. Preferably, the sampling tube is arranged vertically, with the inlet at the top and the outlet at the bottom.

[0037] The outlet of the inlet tube is connected to the inlet of the outlet tube and the inlet of the sampling tube via a sampling valve. The operating part of the sampling valve is located outside the sampling box; the operator can open and close the sampling valve by operating the operating part of the sampling valve.

[0038] The sampling valve can be a three-way valve. The operating knob of the three-way valve is located outside the sampling box, and the operator opens and closes the three-way valve by turning the knob.

[0039] The sampling box can be any shape that can be achieved, such as a cube. The sampling box is equipped with a door. The door is preferably a visible door, such as a transparent door. The door can be opened; before sampling, the door is opened to place the sampling bottle, and then the door is closed. When the door is closed, the sampling box is sealed, and the substance inside will not leak.

[0040] A residual liquid collection port is provided at the bottom of the sampling box. Preferably, the residual liquid collection port is lower than other positions on the bottom of the sampling box. That is, the residual liquid collection port is located at the lowest position on the bottom of the sampling box; in this way, any leaked anhydrous hydrogen fluoride inside the sampling box will automatically flow into the residual liquid collection port.

[0041] In use, the sampling tube is connected to a sampling bottle, which is placed at the bottom of the sampling box. If the residual liquid collection port is covered by the sampling bottle, it will prevent leaked liquid anhydrous hydrogen fluoride from flowing into the residual liquid collection port; therefore, as a preferred embodiment, the distance between the residual liquid collection port and point A is greater than the radius of the bottom of the sampling bottle; point A is located at the bottom of the sampling box, directly below the sampling port of the sampling tube. During use, the residual liquid collection port will not be covered by the sampling bottle.

[0042] The residual liquid collection tank can be any shape that can be achieved, such as a cube. The residual liquid collection tank is equipped with a door. The door is preferably a visible door, such as a transparent door. The door can be opened and closed. When the door is closed, the residual liquid collection tank is sealed, and the substances inside will not leak.

[0043] The residual liquid collection tank is located below the sampling tank. The residual liquid collection tank and the sampling tank are connected via a residual liquid collection port. A residual liquid collection pipe is connected below the residual liquid collection port, and a residual liquid collection valve is installed on the residual liquid collection pipe; the residual liquid collection pipe is located inside the residual liquid collection tank. The residual liquid collection valve is a backflow preventer. The function of the residual liquid collection port is to collect any liquid anhydrous hydrogen fluoride that leaks into the sampling tank. For optimal rapid collection of liquid anhydrous hydrogen fluoride, the residual liquid collection port is preferably located below other parts of the bottom of the sampling tank.

[0044] The residual liquid collection pipe can be directly and sealed to an external liquid anhydrous hydrogen fluoride recovery system, or it can be directly connected to a recovery tank. When the residual liquid collection pipe is directly connected to the recovery tank, preferably, the recovery tank is placed inside the residual liquid collection box.

[0045] The sealed sampling device may further include a first exhaust gas absorption pipe; one end of the first exhaust gas absorption pipe is connected to the sampling box, and the other end is connected to the exhaust gas treatment system; an exhaust gas absorption valve is provided between the first exhaust gas absorption pipe and the exhaust gas treatment system. An exhaust gas outlet is provided on the wall of the sampling box, and the exhaust gas outlet is connected to the external device's exhaust gas treatment system through the first exhaust gas absorption pipe. The exhaust gas from the sampling box enters the first exhaust gas absorption pipe through the exhaust gas outlet and then enters the exhaust gas treatment system. An exhaust gas absorption valve is provided between the first exhaust gas absorption pipe and the exhaust gas treatment system. When the exhaust gas absorption valve is closed, the sampling box is in a sealed state; when the exhaust gas absorption valve is opened, the sampling box is connected to the exhaust gas treatment system. The inlet of the first exhaust gas absorption pipe can be located at any position in the sampling box; preferably, the inlet of the first exhaust gas absorption pipe is located on the side wall of the sampling box.

[0046] The sealed sampling device may further include a second exhaust gas absorption pipe; one end of the second exhaust gas absorption pipe is connected to the residual liquid collection tank, and the other end is connected to the exhaust gas treatment system. An exhaust gas absorption valve is provided between the second exhaust gas absorption pipe and the exhaust gas treatment system. An exhaust gas outlet is provided on the wall of the residual liquid collection tank, and the exhaust gas outlet is connected to the external exhaust gas treatment system through the second exhaust gas absorption pipe. The exhaust gas from the residual liquid collection tank enters the second exhaust gas absorption pipe through the exhaust gas outlet and then enters the exhaust gas treatment system. An exhaust gas absorption valve is provided between the second exhaust gas absorption pipe and the exhaust gas treatment system. When the exhaust gas absorption valve is closed, the residual liquid collection tank is in a sealed state; when the exhaust gas absorption valve is opened, the residual liquid collection tank is connected to the exhaust gas treatment system. Preferably, the inlet of the second exhaust gas absorption pipe is located on the side wall of the residual liquid collection tank.

[0047] The sealed sampling device may further include a gas detector. The gas detector is located outside the sealed sampling device. In the event of a leak in the sealed sampling device, the leaked hydrogen fluoride will be detected by the gas detector. The gas detector can be any existing gas detector capable of detecting hydrogen fluoride; preferably, it is a gas detector with an alarm device that sounds an alarm when hydrogen fluoride is detected.

[0048] The closed sampling device may further include an emergency shut-off valve. The emergency shut-off valve is located outside the closed sampling device and is installed on the sample inlet tube. The emergency shut-off valve can cut off the entry of liquid anhydrous hydrogen fluoride into the closed sampling device in an emergency. Preferably, the gas detector can interlock to close the emergency shut-off valve; after the gas detector detects leaked hydrogen fluoride gas, it will first generate an audible and visual alarm, and after reaching the interlock threshold, it will trigger the interlock to close the emergency shut-off valve.

[0049] The closed sampling device may have its sampling box and residual liquid collection box made of PP material, its sampling valve made of perfluoroalkoxy resin, and its inlet tube, sampling tube, and outlet tube made of PFA (perfluoroalkoxy resin).

[0050] Example 1

[0051] A closed sampling device for liquid anhydrous hydrogen fluoride, such as Figure 1 , Figure 2 The enclosure includes a sampling box 9 at the top, a residual liquid collection box 10 at the bottom, an inlet pipe 1, a sampling pipe 2, an outlet pipe 3, a three-way valve 4, a residual liquid collection pipe 5, a residual liquid collection valve, a first exhaust gas absorption pipe 6, a second exhaust gas absorption pipe 7, a gas detector 12, and an emergency shut-off valve 11. Both the sampling box 9 and the residual liquid collection box 10 are equipped with visual doors.

[0052] The inlet tube 1 passes horizontally through one side wall of the upper part of the sampling box 9, with one end outside the sampling box 9 and the other end inside. The outlet tube 3 passes horizontally through the other side wall of the sampling box 9 opposite side wall A, and is aligned with the inlet tube 1; one end of the outlet tube 3 is outside the sampling box 9 and the other end is inside. The ends of the inlet tube 1 and the outlet tube 3, which are close to each other, are connected to the two horizontal openings of the three-way valve 4, respectively. The downward opening of the three-way valve 4 is connected to the upper end of the sampling tube 2, which is vertically positioned. The operating knob of the three-way valve 4 is located outside and at the top of the sampling box 9. The three-way valve 4 is the sampling valve.

[0053] A residual liquid collection port 8 is provided at the bottom of the sampling box 9, and the residual liquid collection port 8 is lower than other positions on the bottom of the sampling box 9. The sampling box 9 and the residual liquid collection box 10 are connected through the residual liquid collection port 8. A residual liquid collection tube 5 is connected below the residual liquid collection port 8, and the residual liquid collection tube 5 is located inside the residual liquid collection box 10. A residual liquid collection valve is provided on the residual liquid collection tube 5, and the residual liquid collection valve is a backflow preventer. The distance between the residual liquid collection port 8 and point A is greater than the radius of the bottom of the sampling bottle; point A is located at the bottom of the sampling box 9, directly below the sampling port of the sampling tube 2.

[0054] A tail gas outlet is provided on the side wall of the sampling box 9. The tail gas outlet is connected to the first tail gas absorption pipe 6, which is connected to the tail gas treatment system of an external device. A tail gas absorption valve 13 is provided between the first tail gas absorption pipe 6 and the tail gas treatment system. A tail gas outlet is provided on the side wall of the residual liquid collection box 10. The tail gas outlet is connected to the second tail gas absorption pipe 7, which is connected to the tail gas treatment system of an external device. A tail gas absorption valve 13 is provided between the second tail gas absorption pipe 7 and the tail gas treatment system.

[0055] Emergency shut-off valve 11 is located outside the sealed sampling device and is installed on the sample inlet tube 1; gas detector 12 is installed outside the sampling box 9; gas detector 12 can close emergency shut-off valve 11 when the interlock value is triggered.

[0056] Example 2

[0057] Example 1 provides a method for using a closed sampling device for liquid anhydrous hydrogen fluoride: keep the doors of the sampling box 9 and the residual liquid collection box 10 closed, open the tail gas absorption valve 13, and close the tail gas absorption valve 13 after 3 minutes.

[0058] Open the door of the residual liquid collection tank 10, connect the recycling bucket to the residual liquid collection pipe 5, and close the door of the residual liquid collection tank 10.

[0059] Open the door of sampling box 9, rinse the wall of sampling tube 2 with a wash bottle, and wipe it clean with paper. Place the prepared sampling bottle, and when opening the bottle cap, be careful to avoid touching the bottle opening. Insert sampling tube 2, being careful to avoid touching the bottle opening with sampling tube 2. Close the door of sampling box 9.

[0060] After the AHF has circulated through the inlet tube 1, outlet tube 3, and storage tank for a period of time, open the three-way valve 4 from the outside of the sealed sampling device to collect liquid anhydrous hydrogen fluoride. Close the three-way valve 4, open the tail gas absorption valve 13, maintain negative pressure ventilation, open the door of the sampling box 9, cover the cap of the sampling bottle, seal the sampling bottle, and after sampling is completed, close the door of the sampling box 9, keep the tail gas absorption valve 13 open for a period of time, and close the tail gas absorption valve 13 after cleaning is completed. Open the door of the residual liquid collection box 10, close the residual liquid discharge valve, and remove the recovery bucket.

[0061] In case of emergencies, such as a leak in sampling tube 2 or three-way valve 4, the leaked AHF will collect at the residual liquid collection port 8 and then enter the residual liquid collection pipe 5 and the recovery tank; the leaked AHF will not remain in the sampling box 9. The exhaust gas absorption valve 13 will remain open to continuously absorb the highly toxic volatile exhaust gas, which will then enter the exhaust gas treatment system. A large leak of hydrogen fluoride gas will trigger a high alarm on gas detector 12, reaching the interlock threshold and interlocking to close the emergency shut-off valve 11.

Claims

1. A closed sampling device for liquid anhydrous hydrogen fluoride, characterized in that, The sealed sampling device includes: a sampling box, a residual liquid collection box, an inlet tube, a sampling tube, an outlet tube, a residual liquid collection tube, a sampling valve, and a residual liquid collection valve; both the sampling box and the residual liquid collection box are equipped with doors; The inlet of the injection tube is located outside the sampling box, the outlet of the injection tube, the sampling tube, and the inlet of the discharge tube are located inside the sampling box, the outlet of the discharge tube is located outside the sampling box, and the operating part of the sampling valve is located outside the sampling box; the outlet of the injection tube is connected to the inlet of the discharge tube and the inlet of the sampling tube through the sampling valve. The bottom of the sampling box is equipped with a residual liquid collection port; The residual liquid collection box is located below the sampling box and is connected to the sampling box through the residual liquid collection port; The residual liquid collection pipe is located inside the residual liquid collection tank and connected below the residual liquid collection port; the residual liquid collection valve is installed on the residual liquid collection pipe.

2. The sealed sampling device as described in claim 1, characterized in that, The cabinet door is a visible cabinet door; or / and, The sampling valve is a three-way valve; or / and, The residual liquid collection valve is a stop valve.

3. The sealed sampling device as described in claim 1, characterized in that, The injection tube is located at the top of the sampling box; or / and, The sampling tube is located at the top of the sampling box; or / and, The sampling tube is set vertically.

4. The sealed sampling device as described in claim 1, characterized in that, The residual liquid collection port is located below other parts of the bottom of the sampling box.

5. The sealed sampling device as described in claim 4, characterized in that, The distance between the residual liquid collection port and point A is greater than the radius of the bottom of the sampling bottle; point A is located at the bottom of the sampling box, directly below the sampling port of the sampling tube.

6. The sealed sampling device as described in claim 1, characterized in that, It also includes a recycling bin; the recycling bin is located inside the residual liquid collection tank and connected to the residual liquid collection pipe.

7. The sealed sampling device as described in claim 1, characterized in that, It also includes a first exhaust gas absorption pipe; one end of the first exhaust gas absorption pipe is connected to the sampling box, and the other end is connected to the exhaust gas treatment system; an exhaust gas absorption valve is provided between the first exhaust gas absorption pipe and the exhaust gas treatment system; or / and, It also includes a second exhaust gas absorption pipe; one end of the second exhaust gas absorption pipe is connected to the residual liquid collection tank and the other end is connected to the exhaust gas treatment system; an exhaust gas absorption valve is provided between the second exhaust gas absorption pipe and the exhaust gas treatment system.

8. The sealed sampling device as described in claim 7, characterized in that, The inlet of the first exhaust gas absorption pipe is located on the side wall of the sampling box; or / and, The inlet of the second exhaust gas absorption pipe is located on the side wall of the residual liquid collection.

9. The sealed sampling device as described in claim 1, characterized in that, It also includes a gas detector; the gas detector is located outside the sealed sampling device.

10. The sealed sampling device as described in claim 9, characterized in that, It also includes an emergency shut-off valve; the emergency shut-off valve is located outside the sealed sampling device and is installed on the sample inlet tube.

11. The sealed sampling device as described in claim 10, characterized in that, When the gas detector detects leaked hydrogen fluoride gas, it interlocks and closes the emergency shut-off valve.