Processing device
By introducing first and second moving devices into the optical inspection equipment, the equipment structure for wafer edge inspection is simplified, costs are reduced, and effective inspection of all surfaces of the wafer edge is achieved.
Patent Information
- Application Number
- CN202421690396.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-16
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-07-16
AI Technical Summary
Existing optical inspection equipment requires multiple imaging devices and complex position adjustments when inspecting various surfaces of the wafer edge, resulting in high equipment costs.
A processing device including a first moving device and a second moving device is adopted. The first moving device is used to move the object to be tested along a first direction, and the second moving device is used to move the radiation device along a second direction perpendicular to it, thereby achieving focusing of the radiation device and simplifying the device structure.
By simplifying the equipment structure, the cost of the processing equipment was reduced, while effective detection of each surface of the wafer edge was achieved.
Smart Images
Figure CN223624127U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical equipment technology, and specifically to a processing device. Background Technology
[0002] Optical equipment includes optical inspection equipment, optical measurement equipment, and optical processing equipment. For example, an optical inspection device is used to inspect multiple surfaces of a wafer edge, such as the top edge, bottom edge, a side surface perpendicular to the radial direction, an upper bevel, and a lower bevel. To inspect each surface of the wafer edge, multiple imaging devices are needed to inspect different surfaces of the wafer edge separately. To ensure that the wafer edge is within the depth of field of each imaging device, the positions of the wafer edge and the imaging devices need to be adjusted. Utility Model Content
[0003] The technical solution of this application is to provide a processing device with a simple structure that can reduce the cost of processing devices.
[0004] This utility model provides a processing device, comprising: one or more radiation devices for processing a test object; a first moving device for carrying the test object and moving the test object along a first direction; and a second moving device for moving the radiation devices along a second direction; wherein the second direction is perpendicular to the first direction.
[0005] Optionally, the plurality of radiation devices includes: a first radiation module and a second radiation module, the first radiation module including one or more radiation devices, and the second radiation module including one or more radiation devices; the first radiation module and the second radiation module are respectively used to process the surfaces of the object to be tested located on both sides of the second direction; the second moving device includes one or a combination of a first moving stage and a second moving stage; wherein, the first radiation module is fixed to the first moving stage; the second radiation module is fixed to the second moving stage; the first moving stage is used to drive the first radiation module to move together along the second direction; the second moving stage is used to drive the second radiation module to move together along the second direction.
[0006] Optionally, the second moving device includes a moving stage; at least two of the radiation devices whose detection axis has a component in the second direction share the same moving stage.
[0007] Optionally, the first radiation module includes a first radiation device and a second radiation device; the second radiation module includes a fourth radiation device and a fifth radiation device; the plurality of radiation devices further includes a third radiation device; the detection direction of the first radiation device and the detection direction of the fifth radiation device are both parallel to the second direction; the detection direction of the third radiation device is parallel to the first direction; there is a first preset angle between the detection direction of the second radiation device and the detection direction of the first radiation device; there is a second preset angle between the detection direction of the fourth radiation device and the detection direction of the fifth radiation device.
[0008] Optionally, the first radiation device and the second radiation device are fixedly arranged relative to each other; the fourth radiation device and the fifth radiation device are fixedly arranged relative to each other; the third radiation device is fixedly arranged relative to the second radiation device or relative to the fourth radiation device; or, the third radiation device is movable.
[0009] Optionally, the edge region of the object under test has a first surface, a second surface, a main sidewall, a first inclined surface, and a second inclined surface; the first surface and the second surface are arranged opposite to each other along a first central axis of the object under test; the main sidewall is parallel to the first central axis; the first inclined surface is located between the first surface and the main sidewall and connects the first surface and the main sidewall; the second inclined surface is located between the second surface and the main sidewall and connects the second surface and the main sidewall; the first radiation device is used to process the first surface, the second radiation device is used to process the first inclined surface, the third radiation device is used to process the main sidewall, the fourth radiation device is used to process the second inclined surface, and the fifth radiation device is used to process the second surface.
[0010] Optionally, the second moving device further includes: a third moving platform; the third radiating device is fixed to the third moving platform; the third moving platform is used to drive the third radiating device to move along the second direction.
[0011] Optionally, the second direction is parallel to the thickness direction of the object to be measured. The processing device further includes: a first controller, configured to control the third moving stage to move the third radiation device and / or control the first moving device to move the object to be measured according to the thickness of the object to be measured, so that the third radiation device is aligned with the central axis of the object to be measured parallel to the first direction.
[0012] Optionally, the fields of view of the first radiation device and the second radiation device partially overlap; the fields of view of the fourth radiation device and the fifth radiation device partially overlap.
[0013] Optionally, the second direction is parallel to the thickness direction of the object to be measured. The processing device further includes: a second controller, used to control the second moving device to move the first radiation module and / or the second radiation module according to the thickness of the object to be measured, so as to adjust the distance between the first radiation module and the second radiation module.
[0014] Optionally, the radiation device includes one or more of the following: a detection device, a measuring device, or a processing device; the detection device includes an optical imaging device or an electron beam imaging device; the measuring device includes a dispersive confocal device or an interferometer; and the processing device includes a laser cutting device or a laser etching device.
[0015] The present invention has the following beneficial effects.
[0016] The processing device provided by this utility model includes a first moving device for carrying the test object and moving it along a first direction. A second moving device is used to move the radiation device along a second direction. Focusing of the radiation device is achieved by moving the test object along the first direction and moving the radiation device along the second direction. The processing device has a simple structure and can reduce its cost. Attached Figure Description
[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0018] Figure 1 This is a structural diagram of a processing device provided in an embodiment of the present invention;
[0019] Figure 2 This is a structural diagram of the test object provided in an embodiment of the present invention. Detailed Implementation
[0020] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0023] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0024] One embodiment of this utility model provides a processing device, see reference. Figure 1 and Figure 2 ,include:
[0025] One or more radiation devices A are used to process the object 7 to be tested;
[0026] The first moving device 6 is used to carry the object to be tested 7 and move the object to be tested 7 along the first direction X;
[0027] The second moving device is used to move the radiating device A along the second direction Y;
[0028] Wherein, the second direction Y is perpendicular to the first direction X.
[0029] In this embodiment, the processing device includes a first moving device 6 that carries the test object 7 and moves it along a first direction X. A second moving device moves the radiation device A along a second direction Y. Focusing of the radiation device A is achieved by moving the test object 7 along the first direction X and moving the radiation device A along the second direction Y. The processing device has a simple structure, which reduces its cost.
[0030] The number of radiation devices A in the processing equipment can be one or more. In this embodiment, the number of radiation devices A in the processing equipment is multiple as an example.
[0031] In this embodiment, at least some of the multiple radiation devices A process the object 7 under test along different directions. In one embodiment, the radiation device A includes one or more of a detection device, a measuring device, or a processing device. The detection device includes an optical imaging device or an electron beam imaging device. The measuring device includes a dispersive confocal device or an interferometer. The processing device includes a laser cutting device or a laser etching device.
[0032] In this embodiment, the radiation is light, an electron beam, or X-rays.
[0033] In this embodiment, the radiation device A is an optical imaging device, which is used to acquire images of the edge region of the object under test 7. The optical imaging device is used to detect whether the edge region of the object under test 7 has defects.
[0034] refer to Figure 1 The first moving device 6 is used to carry the object under test 7. The object under test 7 is, for example, a wafer. The first moving device 6 is used along a first direction X. The first moving device 6 is also used to rotate about the central axis of the first moving device 6.
[0035] In this embodiment, the first direction X is a horizontal direction; the second direction Y is a vertical direction. For example, the second direction Y is parallel to the thickness direction of the object to be measured 7, and the first direction X is perpendicular to the thickness direction of the object to be measured 7.
[0036] In this embodiment, the plurality of radiation devices A includes: a first radiation module Z1 and a second radiation module Z2, wherein the first radiation module Z1 includes one or more radiation devices A, and the second radiation module Z2 includes one or more radiation devices A; the first radiation module Z1 and the second radiation module Z2 are respectively used to process the surfaces of the object to be tested located on both sides of the second direction Y.
[0037] In this embodiment, the second moving device includes a moving stage; at least two radiation devices A whose detection axis has a component in the second direction Y share the same moving stage. The second moving device includes one moving stage and multiple moving stages. This allows for the synchronous movement of multiple radiation devices A as a whole.
[0038] In this embodiment, the first radiation module Z1 includes a first radiation device 1 and a second radiation device 2. The second radiation module Z2 includes a fourth radiation device 4 and a fifth radiation device 5. The plurality of radiation devices A further includes a third radiation device 3.
[0039] In this embodiment, the detection direction of the first radiation device 1 and the detection direction of the fifth radiation device 5 are both parallel to the second direction Y; the detection direction of the third radiation device 3 is parallel to the first direction X; the detection direction of the second radiation device 2 and the detection direction of the first radiation device 1 have a first preset angle; the detection direction of the fourth radiation device 4 and the detection direction of the fifth radiation device 5 have a second preset angle.
[0040] In this embodiment, the first radiation device 1 and the second radiation device 2 are fixedly arranged relative to each other. The position of the second radiation device 2 is adjusted simultaneously during the adjustment of the position of the first radiation device 1, thus adjusting the positions of the first radiation device 1 and the second radiation device 2 as a whole.
[0041] In this embodiment, the fourth radiation device 4 and the fifth radiation device 5 are fixedly arranged relative to each other. The position of the fifth radiation device 5 is adjusted simultaneously during the adjustment of the position of the fourth radiation device 4, resulting in an overall adjustment of the positions of the four radiation devices 4 and the fifth radiation device 5.
[0042] In this embodiment, the third radiation device 3 is fixedly arranged relative to the second radiation device 2. The position of the third radiation device 3 is adjusted simultaneously during the adjustment of the position of the second radiation device 2, thus adjusting the positions of the third radiation device 3 and the second radiation device 2 as a whole.
[0043] In other embodiments, the third radiation device 3 and the fourth radiation device 4 are fixedly arranged relative to each other. The position of the third radiation device 3 is adjusted simultaneously during the adjustment of the position of the fourth radiation device 4, thus adjusting the positions of the third radiation device 3 and the fourth radiation device 4 as a whole.
[0044] In other embodiments, the third radiation device 3 is movable, and its position can be adjusted independently.
[0045] In this embodiment, reference Figure 2 The edge region of the object under test 7 has a first surface 711, a second surface 715, a main sidewall 713, a first inclined surface 712, and a second inclined surface 714. The first surface 711 and the second surface 715 are arranged opposite each other along a first central axis of the object under test 7. The main sidewall 713 is parallel to the first central axis. The first inclined surface 712 is located between the first surface 711 and the main sidewall 713 and connects the first surface 711 and the main sidewall 713. The second inclined surface 714 is located between the second surface 715 and the main sidewall 713 and connects the second surface 715 and the main sidewall 713.
[0046] The first radiation device 1 is used to process the first surface 711, the second radiation device 2 is used to process the first inclined surface 712, the third radiation device 3 is used to process the main sidewall 713, the fourth radiation device 4 is used to process the second inclined surface 714, and the fifth radiation device 5 is used to process the second surface 715.
[0047] For example, the first radiation device 1 to the fifth radiation device 5 are optical imaging devices. The first radiation device 1 is used to detect defects on the first surface 711. The second radiation device 2 is used to detect defects on the first inclined surface 712. The third radiation device 3 is used to detect defects on the main sidewall 713. The fourth radiation device 4 is used to detect defects on the second inclined surface 714. The fifth radiation device 5 is used to detect defects on the second surface 715.
[0048] The detection axis of the first radiation device 1 is perpendicular to the first surface 711. The detection axis of the second radiation device 2 is perpendicular to the first inclined surface 712. The detection axis of the third radiation device 3 is perpendicular to the main sidewall 713. The detection axis of the fourth radiation device 4 is perpendicular to the second inclined surface 714. The detection axis of the fifth radiation device 5 is perpendicular to the second surface 715.
[0049] For example, radiation device A is an optical imaging device, the detection axis of the first radiation device 1 is the optical axis of the first radiation device 1, the detection axis of the second radiation device 2 is the optical axis of the second radiation device 2, the detection axis of the third radiation device 3 is the optical axis of the third radiation device 3, the detection axis of the fourth radiation device 4 is the optical axis of the fourth radiation device 4, and the detection axis of the fifth radiation device 5 is the optical axis of the fifth radiation device 5.
[0050] The detection axis of radiation device A is perpendicular to the radiation surface of radiation device A. For example, the detection axis of the first radiation device 1 is perpendicular to the radiation surface of the first radiation device 1, the detection axis of the second radiation device 2 is perpendicular to the radiation surface of the second radiation device 2, the detection axis of the third radiation device 3 is perpendicular to the radiation surface of the third radiation device 3, the detection axis of the fourth radiation device 4 is perpendicular to the radiation surface of the fourth radiation device 4, and the detection axis of the fifth radiation device 5 is perpendicular to the radiation surface of the fifth radiation device 5. When radiation device A is an optical imaging device, the radiation surface of radiation device A is the light-emitting surface of radiation device A.
[0051] The detection direction of radiation device A is parallel to its detection axis. For example, the detection direction of the first radiation device 1 is parallel to its detection axis. The detection direction of the second radiation device 2 is parallel to its detection axis. The detection direction of the third radiation device 3 is parallel to its detection axis. The detection direction of the fourth radiation device 4 is parallel to its detection axis. The detection direction of the fifth radiation device 5 is parallel to its detection axis.
[0052] In this embodiment, the second moving device includes one or a combination of a first moving platform and a second moving platform. The first radiation module Z1 is fixed to the first moving platform. The second radiation module Z2 is fixed to the second moving platform. For example, the first radiation device 1 and the second radiation device 2 are fixed to the first moving platform. The fourth radiation device 4 and the fifth radiation device 5 are fixed to the second moving platform. The first moving platform is used to drive the first radiation module Z1 to move together along the second direction Y. The second moving platform is used to drive the second radiation module Z2 to move together along the second direction Y.
[0053] Since the thickness of the object to be tested 7 changes, it is easy for the first radiation device 1 and the second radiation device 2 to defocus. The first moving stage can drive the first radiation device 1 and the second radiation device 2 to move along the second direction Y, so that even if the thickness of the object to be tested 7 changes, the edge of the object to be tested 7 can be focused.
[0054] The first moving device 6 positions the bottom surface of the object to be tested 7 at a relatively preset detection position, thereby enabling the fourth radiation device 4 and the fifth radiation device 5 to focus on the edge of the object to be tested 7. The second moving stage is used to drive the fourth radiation device 4 and the fifth radiation device 5 to move together along the second direction Y to focus on the edge of the object to be tested 7.
[0055] In this embodiment, the second moving device further includes a third moving platform; the third radiating device 3 is fixed to the third moving platform. The third moving platform is used to drive the third radiating device 3 to move in the second direction Y.
[0056] Since the thickness difference of the object under test 7 is very small compared with the field of view of the third radiation device 3, the third radiation device 3 can still process the main sidewall 713 of the edge of the object under test 7 when the thickness of the object under test 7 changes.
[0057] In this embodiment, the fields of view of the first radiation device 1 and the second radiation device 2 partially overlap. The fields of view of the fourth radiation device 4 and the fifth radiation device 5 partially overlap.
[0058] In this embodiment, the second direction Y is parallel to the thickness direction of the object to be tested 7. The processing device further includes a first controller, which is used to control the third moving stage to move the third radiation device 3 and / or control the first moving device to move the object to be tested 7 according to the thickness of the object to be tested 7, so that the third radiation device is aligned with the central axis of the object to be tested parallel to the first direction.
[0059] In this embodiment, the second direction Y is parallel to the thickness direction of the object to be measured 7. The processing device further includes a second controller, which is used to control the second moving device to move the first radiation module Z1 and / or the second radiation module Z2 according to the thickness of the object to be measured 7, so as to adjust the distance between the first radiation module Z1 and the second radiation module Z2.
[0060] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.
Claims
1. A processing device, characterized in that, include: One or more radiation devices for treating an object to be tested; A first moving device is used to carry the object to be tested and move the object to be tested along a first direction; A second moving device is used to move a radiation device along a second direction, wherein the detection axis of the radiation device has a component in the second direction; The second direction is perpendicular to the first direction.
2. The processing apparatus according to claim 1, characterized in that, The plurality of radiation devices include: a first radiation module and a second radiation module, wherein the first radiation module includes one or more radiation devices, and the second radiation module includes one or more radiation devices; the first radiation module and the second radiation module are respectively used to process the surfaces of the object to be tested located on both sides of a second direction. The second mobile device includes one or a combination of a first mobile station and a second mobile station; Wherein, the first radiation module is fixed to the first mobile platform; the second radiation module is fixed to the second mobile platform; The first mobile station is used to drive the first radiation module to move together along the second direction; the second mobile station is used to drive the second radiation module to move together along the second direction.
3. The processing apparatus according to claim 1, characterized in that, The second moving device includes a moving stage; at least two of the radiation devices whose detection axis has a component in the second direction share the same moving stage.
4. The processing apparatus according to claim 2, characterized in that, The first radiation module includes a first radiation device and a second radiation device; The second radiation module includes a fourth radiation device and a fifth radiation device; The plurality of said radiating devices further includes: a third radiating device; The detection directions of the first radiation device and the fifth radiation device are both parallel to the second direction; the detection direction of the third radiation device is parallel to the first direction; there is a first preset angle between the detection direction of the second radiation device and the detection direction of the first radiation device; there is a second preset angle between the detection direction of the fourth radiation device and the detection direction of the fifth radiation device.
5. The processing apparatus according to claim 4, characterized in that, The first radiation device and the second radiation device are fixedly arranged relative to each other; the fourth radiation device and the fifth radiation device are fixedly arranged relative to each other; The third radiation device is fixed relative to the second radiation device or the fourth radiation device; or, the third radiation device is movable.
6. The processing apparatus according to claim 4, characterized in that, The edge region of the object to be tested has a first surface, a second surface, a main sidewall, a first inclined surface, and a second inclined surface; The first surface and the second surface are arranged opposite each other along the first central axis of the object to be tested; the main sidewall is parallel to the first central axis; The first inclined surface is located between the first surface and the main sidewall and connects the first surface and the main sidewall; the second inclined surface is located between the second surface and the main sidewall and connects the second surface and the main sidewall; The first radiation device is used to process the first surface, the second radiation device is used to process the first inclined surface, the third radiation device is used to process the main sidewall, the fourth radiation device is used to process the second inclined surface, and the fifth radiation device is used to process the second surface.
7. The processing apparatus according to claim 4, characterized in that, The second moving device further includes: a third moving platform; the third radiating device is fixed to the third moving platform; the third moving platform is used to drive the third radiating device to move along the second direction.
8. The processing apparatus according to claim 7, characterized in that, The second direction is parallel to the thickness direction of the object to be measured. The processing device further includes: a first controller, which controls the third moving stage to move the third radiation device and / or controls the first moving device to move the object to be measured according to the thickness of the object to be measured, so that the third radiation device is aligned with the central axis of the object to be measured parallel to the first direction.
9. The processing apparatus according to claim 4, characterized in that, The fields of view of the first and second radiating devices partially overlap; the fields of view of the fourth and fifth radiating devices partially overlap.
10. The processing apparatus according to claim 2, characterized in that, The second direction is parallel to the thickness direction of the object to be measured. The processing device further includes a second controller, which controls the second moving device to move the first radiation module and / or the second radiation module according to the thickness of the object to be measured, so as to adjust the distance between the first radiation module and the second radiation module.
11. The processing apparatus according to claim 1, characterized in that, The radiation device includes one or more of the following: a detection device, a measuring device, or a processing device; the detection device includes an optical imaging device or an electron beam imaging device; the measuring device includes a dispersive confocal device or an interferometer; and the processing device includes a laser cutting device or a laser etching device.