Angle-adjustable mask defect inspection device
By designing an adjustable mask defect inspection device, the automatic multi-angle inspection of the mask is achieved by using a motor and CCD camera adjustment device. This solves the problem that existing devices can only adjust the angle manually, reducing the difficulty and intensity of the work for operators.
Patent Information
- Application Number
- CN202422724013.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-08
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-11-08
AI Technical Summary
Existing mask inspection devices can only be manually adjusted to a specific angle in the X direction, which cannot meet the inspection needs of different angles, increasing the difficulty and intensity of the work for operators.
An angle-adjustable mask defect inspection device was designed. The mask is automatically rotated in the XY axis direction by a motor. Combined with the CCD camera adjustment device, automatic inspection at different angles can be achieved, reducing manual intervention.
It enables automated multi-angle inspection of photomasks, reducing the need for workers to walk back and forth and lowering the difficulty and intensity of the work.
Smart Images
Figure CN223624142U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mask production technology, and in particular to a mask defect inspection device with adjustable angle. Background Technology
[0002] Cleaning is a crucial step in the photomask production process. After cleaning, the photomasks must be inspected to check for defects such as watermarks, dirt, and scratches. If visible defects like watermarks or dirt are present, the photomask must be re-cleaned. Surface inspection is performed after each cleaning process until the inspection results show no watermarks or dirt before proceeding to the next step.
[0003] The existing inspection equipment can only be manually adjusted to a specific angle in the X direction for inspection, which cannot meet the requirements of inspecting photomasks at different angles. In order to achieve inspection at different angles, inspectors can only complete the inspection process from different positions, which increases the difficulty and intensity of the work. Utility Model Content
[0004] To address the aforementioned problems, this invention proposes an angle-adjustable mask defect inspection device to more accurately resolve these issues.
[0005] This utility model is achieved through the following technical solution:
[0006] This utility model proposes an angle-adjustable mask defect inspection device, including a base, on which a motor a, a PLC controller a, a bracket and a CCD camera adjustment device are fixedly installed at the top. The bracket is provided with a mask adjustment device, and the movable shaft of the motor a is fixedly connected to one side of the bottom of the mask adjustment device.
[0007] The mask adjustment device includes a Y-axis adjustment mechanism and an X-axis adjustment mechanism, wherein the X-axis adjustment mechanism is movably mounted on the Y-axis adjustment mechanism.
[0008] The CCD camera adjustment device includes a motor c, which is fixedly mounted on the top of the base.
[0009] Furthermore, the Y-axis adjustment mechanism includes a mounting bracket a, which is movably mounted on the support. A gear a is fixedly mounted on the bottom of the mounting bracket a, and a gear b is fixedly mounted on the movable shaft of the motor a, with the gear b meshing with the gear a.
[0010] Furthermore, the X-axis adjustment mechanism includes a mounting frame b, which is rotatably connected to the mounting frame a. Several rubber wheels are fixedly mounted on one side of the bottom of the mounting frame b. Two guide rails are fixedly mounted on the side of the mounting frame b opposite to the rubber wheels. A movable rod is slidably connected to the guide rails. A mask mounting clamp a is slidably connected to the movable rod. A mask mounting clamp b is fixedly mounted on the bottom of the movable rod on one side of the mask mounting clamp a.
[0011] Furthermore, the mounting bracket b is fixedly mounted on a slide rail on one side of the rubber wheel, and a mask mounting clip c is slidably connected on the slide rail. The mounting bracket b is fixedly mounted on the bottom of the slide rail on the same side as the slide rail, and a mask mounting clip d is fixedly mounted on the bottom of the slide rail.
[0012] Furthermore, a motor b is fixedly mounted on one side of the mounting bracket a, and the movable shaft of the motor b is fixedly connected to one side of the mounting bracket b.
[0013] Furthermore, the motor c is fixedly installed on the top of the base, the surface of the movable shaft of the motor c is threaded, the movable shaft of the motor c is threaded to a mounting plate, the top of the mounting plate is fixedly installed with the motor d and the mounting bracket c, the motor d is located directly below the mounting bracket c, the surface of the movable shaft of the motor d is threaded, and the movable shaft of the motor d is threaded to a horizontal adjustment rod.
[0014] Furthermore, the lateral adjustment rod is slidably connected to the mounting bracket c, and a motor e is fixedly installed on one side of the lateral adjustment rod. The movable shaft of the motor e is threaded, and a CCD high-definition camera is threadedly connected to the movable shaft of the motor e.
[0015] Furthermore, a support rod is fixedly installed at the top of the base, a control panel is fixedly installed at the top of the support rod, a wireless receiver is fixedly installed on one side of the support rod, and a remote control is placed at the top of the wireless receiver.
[0016] The beneficial effects of this utility model are as follows: The device automatically rotates the mask in the XY axis direction via a motor. The inspection operator can input angle parameters through the control panel or operate the remote control to inspect the mask defects from different angles. The operator does not need to inspect the mask from different positions, which reduces back-and-forth movement and reduces the difficulty and intensity of the operator's work. Attached Figure Description
[0017] Figure 1 This is a first-view schematic diagram of the overall structure of this utility model;
[0018] Figure 2 This is a second-view schematic diagram of the overall structure of this utility model;
[0019] Figure 3 for Figure 2 Enlarged view of point A in the middle;
[0020] Figure 4 This is a side view of the present invention.
[0021] The attached diagram is labeled as follows: 1. Base; 101. Motor a; 102. PLC controller; 103. Bracket; 104. Control panel; 105. Wireless receiver; 106. Remote control; 2. Y-axis adjustment mechanism; 201. Mounting bracket a; 202. Gear a; 203. Gear b; 3. X-axis adjustment mechanism; 301. Mounting bracket b; 302. Rubber wheel; 303. Movable rod; 304. Mask mounting clip a; 305. Mask mounting clip b; 306. Slide rail; 307. Mask mounting clip c; 308. Mask mounting clip d; 309. Motor b; 4. Motor c; 401. Mounting plate; 402. Motor d; 403. Mounting bracket c; 404. Horizontal adjustment rod; 405. Motor e; 406. CCD high-definition camera. Detailed Implementation
[0022] To more clearly and completely illustrate the technical solution of this utility model, the following description, in conjunction with the accompanying drawings, will provide further details.
[0023] Please refer to Figure 1 - Figure 4This utility model proposes an angle-adjustable mask defect inspection device, including a base 1, with casters fixedly installed at the bottom of the base 1, a motor a101 fixedly installed at the top of the base 1, a PLC controller a102 fixedly connected to one side of the base 1, and an electrical signal connection between the PLC controller a102 and the motor a101. A bracket 103 is fixedly installed at the top of the base 1, and a mask adjustment device is provided on the bracket 103. The maximum rotation angle of the mask adjustment device on the bracket 103 is 90°. The movable shaft of the motor a101 is fixedly connected to the mask adjustment device, and the rotation of the movable shaft of the motor a101 can drive the mask adjustment device to rotate. A CCD camera adjustment device is provided at the top of the base 1. The mask adjustment device includes a Y-axis adjustment mechanism 2 and an X-axis adjustment mechanism 3. Mechanism 2 can rotate 45° left and right in the Y-axis direction, that is, the maximum rotation angle is 90°. The X-axis adjustment mechanism 3 can rotate 360° in the X-axis direction. The X-axis adjustment mechanism 3 is movably mounted on the Y-axis adjustment mechanism 2. A support rod is fixedly installed on the top of the base 1. A control panel 104 is fixedly installed on the top of the support rod. The inspection operator can input angle parameters through the control panel 104 to adjust the rotation angle of the device and realize the inspection of mask defects from different angles. A wireless receiver 105 is fixedly installed on one side of the support rod. The wireless receiver 105 is electrically connected to the PLC controller A102. A remote control 106 is placed on the top of the wireless receiver 105. The remote control 106 is electrically connected to the wireless receiver 105. By setting the remote control 106, the operator can remotely control the device.
[0024] The CCD camera adjustment device includes a motor C4, which is fixedly mounted on the top of the base 1. The CCD camera adjustment device is used to inspect different parts of the photomask.
[0025] The Y-axis adjustment mechanism 2 includes a mounting bracket a201, which is movably mounted on the bracket 103. A gear a202 is fixedly mounted on the bottom of the mounting bracket a201. A gear b203 is fixedly mounted on the movable shaft of the motor a101. The gear b203 meshes with the gear a202. The rotation of the movable shaft of the motor a101 drives the gear b203 to rotate, which in turn drives the gear a202 to rotate, and the rotation of the gear a202 drives the mounting bracket a201 to rotate.
[0026] The X-axis adjustment mechanism 3 includes a mounting frame b301, which is rotatably connected to a mounting frame a201. Several rubber wheels 302 are fixedly mounted on one side of the bottom of the mounting frame b301. Two guide rails are fixedly mounted on the side of the mounting frame b301 opposite to the rubber wheels 302. A movable rod 303 is slidably connected to the guide rails. The movable rod 303 is fitted into the guide rails, allowing it to slide left and right on the guide rails. A mask mounting clamp a304 is slidably connected to the movable rod 303. The mask mounting clamp a304 can slide up and down along the movable rod 303. A mask mounting clamp b305 is fixedly mounted on the bottom of the same side of the movable rod 303 as the mask mounting clamp a304. Mounting bracket b301 is fixedly mounted on a slide rail 306 on the same side as rubber wheel 302. A mask mounting clip c307 is slidably connected to the slide rail 306 and can slide up and down along the slide rail 306. A mask mounting clip d308 is fixedly mounted on the bottom of mounting bracket b301 on the same side as slide rail 306. Bolts are movably mounted on both mask mounting clips a304 and d308 to secure them. A motor b309 is fixedly mounted on one side of mounting bracket a201. Motor b309 is electrically connected to PLC controller 102. The movable shaft of motor b309 is fixedly connected to mounting bracket b301. Rotation of the movable shaft of motor b309 can drive mounting bracket b301 to rotate 360 degrees.
[0027] Motor C4 is fixedly mounted on the top of base 1. Motor C4 is electrically connected to PLC controller 102. The surface of the movable shaft of motor C4 is threaded. The movable shaft of motor C4 is threadedly connected to mounting plate 401. Mounting plate 401 is located directly above base 1. When the movable shaft of motor C4 rotates, it can move back and forth due to the obstruction of base 1. Motor D402 and mounting bracket C403 are fixedly mounted on the top of mounting plate 401. Motor D402 is located directly below mounting bracket C403. The surface of the movable shaft of motor D402 is threaded. The movable shaft of motor D402 is threadedly connected to a horizontal adjusting rod 404. The horizontal adjusting rod 404 is slidably connected to the mounting bracket c403, so that the rotation of the movable shaft of the motor d402 can drive the horizontal adjusting rod 404 to move up and down. A motor e405 is fixedly installed on one side of the horizontal adjusting rod 404. The movable shaft of the motor e405 is threaded, and the movable shaft of the motor e405 is threadedly connected to a CCD high-definition camera 406. The tail of the CCD high-definition camera 406 is in contact with the horizontal adjusting rod 404. When the movable shaft of the motor e405 rotates, the CCD high-definition camera 406 can move left and right because it is blocked by the horizontal adjusting rod 404.
[0028] The working principle of this utility model is as follows: In use, first place the mask on the rubber wheel 302, adjust the spacing between the movable rod 303, mask mounting clamp a304, and mask mounting clamp d308, then fasten the mask into the mask mounting clamps a304, b305, c307, and d308, and tighten the bolts on the mask mounting clamps a304 and d308 to fix the mask. Operation can be performed via the control panel 104 or the remote control 106. Starting the motor a101 rotates the movable shaft of motor a101, which drives gear a202 to rotate. Gear a202 rotates gear b203, which in turn rotates the mounting bracket a201 and the mask within a 45° left-right rotation. Starting the motor b309... The device automatically rotates the mask 360° by starting motor B309, which drives the mounting bracket B301 and the mask to rotate. Starting motor C4 rotates the movable shaft of motor C4, which moves the mounting plate 401 and the CCD high-definition camera 406 closer to or further away from the mask. Starting motor D402 rotates the movable shaft of motor D402, which moves the CCD high-definition camera 406 up and down. Starting motor E405 rotates the movable shaft of motor E405, which moves the CCD high-definition camera 406 left and right, allowing for the inspection of different parts of the mask. This device automatically rotates the mask in the XY axis direction via motors. Inspection personnel can input angle parameters through the control panel 104 or operate the remote control 106 to inspect mask defects from different angles. Workers no longer need to inspect the mask from different positions, reducing back-and-forth movement and alleviating the difficulty and intensity of their work.
[0029] Of course, there may be other implementations of this utility model. Based on this implementation, other implementations obtained by those skilled in the art without any creative effort are all within the scope of protection of this utility model.
Claims
1. An angle-adjustable mask defect inspection device, comprising a base, wherein a motor a, a PLC controller a, a bracket, and a CCD camera adjustment device are fixedly mounted on the top of the base, characterized in that, The bracket is equipped with a mask adjustment device, and the movable shaft of the motor a is fixedly connected to one side of the bottom of the mask adjustment device; the mask adjustment device includes a Y-axis adjustment mechanism and an X-axis adjustment mechanism, and the X-axis adjustment mechanism is movably mounted on the Y-axis adjustment mechanism; the CCD camera adjustment device includes a motor c, and the motor c is fixedly mounted on the top of the base.
2. The mask defect inspection device with adjustable angle according to claim 1, characterized in that, The Y-axis adjustment mechanism includes a mounting bracket a, which is movably mounted on the support. A gear a is fixedly mounted on the bottom of the mounting bracket a, and a gear b is fixedly mounted on the movable shaft of the motor a. The gear b meshes with the gear a.
3. The mask defect inspection device with adjustable angle according to claim 2, characterized in that, The X-axis adjustment mechanism includes a mounting frame b, which is rotatably connected to the mounting frame a. Several rubber wheels are fixedly mounted on one side of the bottom of the mounting frame b. Two guide rails are fixedly mounted on the side of the mounting frame b opposite to the rubber wheels. A movable rod is slidably connected to the guide rails. A mask mounting clamp a is slidably connected to the movable rod. A mask mounting clamp b is fixedly mounted on the bottom of the movable rod on one side of the mask mounting clamp a.
4. The mask defect inspection device with adjustable angle according to claim 3, characterized in that, The mounting bracket b is fixedly mounted on a slide rail on one side of the rubber wheel, and a mask mounting clip c is slidably connected on the slide rail. A mask mounting clip d is fixedly mounted on the bottom of the mounting bracket b on the same side of the slide rail.
5. The mask defect inspection device with adjustable angle according to claim 3, characterized in that, A motor b is fixedly mounted on one side of the mounting bracket a, and the movable shaft of the motor b is fixedly connected to one side of the mounting bracket b.
6. The mask defect inspection device with adjustable angle according to claim 1, characterized in that, The motor c is fixedly installed on the top of the base. The surface of the movable shaft of the motor c is threaded. The movable shaft of the motor c is threaded to a mounting plate. The top of the mounting plate is fixedly installed with the motor d and the mounting bracket c. The motor d is located directly below the mounting bracket c. The surface of the movable shaft of the motor d is threaded. The movable shaft of the motor d is threaded to a horizontal adjustment rod.
7. The mask defect inspection device with adjustable angle according to claim 6, characterized in that, The horizontal adjustment rod is slidably connected to the mounting bracket c. A motor e is fixedly installed on one side of the horizontal adjustment rod. The movable shaft of the motor e is threaded, and a CCD high-definition camera is threadedly connected to the movable shaft of the motor e.
8. The mask defect inspection device with adjustable angle according to claim 1, characterized in that, A support rod is fixedly installed at the top of the base, a control panel is fixedly installed at the top of the support rod, a wireless receiver is fixedly installed on one side of the support rod, and a remote control is placed at the top of the wireless receiver.