Turnover device for silicon component
By designing a silicon component flipping device, the automatic flipping and positioning of silicon disks was achieved, solving the problem of bumps and knocks caused by manual flipping and improving processing efficiency.
Patent Information
- Application Number
- CN202423204546.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-12-25
AI Technical Summary
In the double-sided processing of silicon disks, existing technologies require manual flipping of the silicon disks, which is prone to damage and has low processing efficiency.
A silicon component flipping device was designed, including a base, a worktable, a fixed plate, a lifting mechanism, a mounting ring, a clamping block, a rotating rod, and a limiting device. The flipping and positioning of the silicon disk is achieved through automated control, reducing manual operation.
It improves the efficiency of double-sided processing of silicon disks, reduces the impact of bumps during manual flipping, and simplifies the flipping operation process.
Smart Images
Figure CN223630647U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a turnover device technical field, concretely relates to a kind of turnover device of silicon component. BACKGROUND
[0002] Silicon component mainly includes silicon ring, silicon disc and silicon electrode, in integrated circuit manufacturing process, silicon component and wafer are silicon material, so that etching electrical performance is more uniform, determines the key of process quality.Therefore, silicon component is widely used in semiconductor etching process.
[0003] In the production process of silicon disc, the surface of the silicon disc needs to be drilled or cut by a machine tool, which requires the silicon disc to be placed on the workbench of the machine table first, and then clamped on the workbench by a clamping mechanism. In some cases (such as product shape requirements or silicon disc processing problems), the reverse side of the silicon disc needs to be processed again.
[0004] Currently, in the process of double-sided processing of the silicon disc, the front side of the silicon disc needs to be positioned on the workbench with the front side facing up first. After the front side of the silicon disc is processed, the silicon disc is manually removed from the workbench and turned over. The turned-over silicon disc needs to be positioned again, and the silicon component is prone to bumping when manually turning over the silicon disc, which makes it difficult to improve the processing efficiency of the silicon disc. UTILITY MODEL CONTENT
[0005] The utility model aims at the defects and deficiencies of the prior art, and provides a kind of turnover device of silicon component.
[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a kind of turnover device of silicon component, including base, the upper end surface of the base for supporting lower end surface workbench, still include two fixed plates that can be lifted and set in the upper of the base and symmetrically set in the left and right sides of workbench, the lifting mechanism for controlling the two fixed plates to rise or drop between the lower end surface of two fixed plates and the upper end surface of base, the mounting ring body for positioning the two fixed plates between the two fixed plates and above workbench, the positioning piece for positioning the mounting ring body between the mounting ring body and two fixed plates, two clamping blocks for clamping silicon disc are set on the mounting ring body and symmetrically set, one end is fixedly set on the clamping block and the other end is rotationally connected with the inner wall of mounting ring body, for silicon disc to be turned over in mounting ring body when two clamping blocks clamp silicon disc and mounting ring body rises to predetermined height, two rotating rods, the limiting device for limiting or releasing silicon disc to turn over in mounting ring body is set on the inner wall of mounting ring body.
[0007] Further improvement is that the upper end surface of the workbench is provided with a contact layer.
[0008] Further improvement is that the contact layer is a damping cloth layer or a rubber layer.
[0009] Further improvement is that the lifting mechanism is two telescopic cylinders or telescopic motors with the fixed end arranged on the upper end surface of the base and the output end connected with the lower end of the fixed plate.
[0010] Further improvement is that the positioning member includes two positioning insertion rods arranged on the upper end surface of the fixed plate respectively, two positioning seats arranged on the left and right ends of the mounting ring body respectively, and two positioning insertion holes respectively arranged on the two positioning seats and matched with the positioning insertion rods.
[0011] Further improvement is that the clamping block includes two longitudinal connecting blocks fixedly arranged on the two rotating rods respectively, a transverse connecting block arranged on the lower end surface of the two longitudinal connecting blocks for supporting the silicon disc, two fixed studs arranged on the upper end surfaces of the two longitudinal connecting blocks respectively, two clamping plates arranged above the longitudinal connecting blocks respectively, two avoiding through holes arranged on the two clamping plates for the fixed studs to pass through the clamping plates, and pressing nuts threadedly connected with the two fixed studs and located above the clamping plates.
[0012] Further improvement is that the upper end surface of the transverse connecting block and the lower end surface of the clamping plate are both provided with an extrusion layer, which is a damping cloth layer or a rubber layer.
[0013] Further improvement is that the limiting device includes two limiting plates arranged on the inner wall of the mounting ring body, the two limiting plates are arranged in parallel on the upper and lower sides, the two limiting plates are slidably arranged on the mounting ring body, and the outer sides of the two limiting plates are provided with anti-disengagement plates.
[0014] The utility model discloses beneficial effect is: when needing to process the silicon disc from both sides, first silicon disc is clamped in the installation ring body through two clamping blocks, and through the limiting device, silicon disc is limited in the installation ring body and is turned over, and then through the positioning piece, the installation ring body is positioned between two fixed plates, and then through the lifting mechanism, two fixed plates drive the installation ring body to descend, until the lower end surface of silicon disc abuts on the upper end surface of workbench, and the front side of silicon disc can be preliminarily processed.
[0015] Further effect: when needing to position the installation ring body between the two fixed plates, lift the installation ring body and put the positioning socket and the positioning rod into alignment, until the lower end surface of the positioning seat abuts on the upper end surface of the fixed plate, so that the installation ring body is supported and fixed by the fixed plate.
[0016] Further effect: the outer diameter of the fixing stud is smaller than the diameter of the avoiding hole. When needing to clamp the silicon disc in the installation ring body, first place the silicon disc between the two longitudinal blocks, and support the silicon disc by the transverse block, then align the avoiding hole on the clamping plate with the fixing stud, then press down the clamping plate to clamp the silicon disc, screw the pressing nut into the fixing stud, until the lower end surface of the pressing nut abuts on the upper end surface of the clamping plate, so as to limit the upward movement of the clamping plate. At this time, the silicon disc can be completely clamped between the transverse block and the clamping plate.
[0017] Further effect: when needing to limit, first push one of the limiting plates inward until the anti-dropping plate contacts the outer surface of the installation ring body. When the silicon disc is turned over to the predetermined position, the surface of the silicon disc will contact the surface of the limiting plate. At this time, push the other limiting plate inward until the anti-dropping plate contacts the outer surface of the installation ring body. At this time, the two limiting plates limit the turning space of the silicon disc, and the silicon disc will not automatically turn over in the installation ring body under the action of gravity during the descent of the installation ring body. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced as follows. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.
[0019] Figure 1 is a front view of the present application;
[0020] Figure 2 is a top view of the present application;
[0021] Figure 3 is a top view of the present application;
[0022] Figure 4 is a sectional view of the present application;
[0023] Figure 5 is an enlarged view of A part corresponding to Figure 4
[0024] Figure 6 is a sectional view of the present application.
[0025] Marked: base 1, workbench 2, fixed plate 3, lifting mechanism 4, mounting ring 5, rotating rod 6, contact layer 7, positioning plug 8, positioning seat 9, positioning plug hole 10, longitudinal block 11, transverse block 12, fixed stud 13, clamping plate 14, avoiding perforation 15, pressing nut 16, extrusion layer 17, limiting plate 18, anti-off plate 19. DETAILED DESCRIPTION
[0026] The present application will be further described in combination with the drawings and specific embodiments.
[0027] Referring to Figures 1 to 6 As shown, the technical scheme adopted in the embodiment is: a silicon component overturning device, comprising a base 1, a workbench 2 arranged on the upper end face of the base 1 and used for supporting the lower end face, two fixed plates 3 arranged above the base 1 and symmetrically arranged on the left and right sides of the workbench 2, a lifting mechanism 4 arranged between the lower end face of each fixed plate 3 and the upper end face of the base 1 and used for controlling the lifting or lowering of the two fixed plates 3, a mounting ring body 5 arranged between the two fixed plates 3 and above the workbench 2, a positioning piece arranged between the mounting ring body 5 and the two fixed plates 3 and used for positioning the mounting ring body 5 between the two fixed plates 3, two clamping blocks symmetrically arranged on the mounting ring body 5 and used for clamping the silicon disc, two rotating rods 6 fixedly arranged on the clamping blocks and rotationally connected with the inner wall of the mounting ring body 5 at the other end, and a limiting device arranged on the inner wall of the mounting ring body 5 and used for limiting or releasing the silicon disc in the mounting ring body 5 for overturning. The diameter of the workbench 2 is smaller than the diameter of the silicon disc. The workbench 2 can also be in a circular ring shape. The other end of the rotating rod 6 is rotationally connected with the inner wall of the mounting ring body 5 through a bearing, or a gap groove is arranged on the mounting ring body 5 and gap-fitted with the rotating rod 6. The predetermined position of the mounting ring body 5 is a position at which the silicon disc can be overturned in the mounting ring body 5 and does not contact the workbench.
[0028] The upper end face of the workbench 2 is provided with a contact layer 7. The contact layer 7 can reduce the damage of the workbench 2 to the surface of the silicon disc.
[0029] The contact layer 7 is a damping cloth layer or a rubber layer. The damping cloth is a silk-like polishing cloth, which is porous and elastic on the surface, can effectively contain grinding liquid during grinding, can improve cutting force and can avoid scratching workpieces, and is a kind of mirror effect processing consumable with excellent performance.
[0030] The lifting mechanism 4 is two telescopic cylinders or telescopic motors with the fixed end arranged on the upper end face of the base 1 and the output end connected with the lower end of the fixed plate 3. The two telescopic cylinders or telescopic motors are symmetrically arranged on the left and right sides of the workbench 2. The two telescopic cylinders or telescopic motors are electrically connected with the control panel of the machine tool, and the two telescopic cylinders or telescopic motors are simultaneously controlled to be extended or retracted through the control panel.
[0031] The positioning piece comprises two positioning insertion rods 8 arranged on the upper end face of the fixed plate 3, two positioning seats 9 arranged on the left and right ends of the mounting ring body 5, and two positioning insertion holes 10 respectively arranged on the two positioning seats 9 and gap-fitted with the positioning insertion rods 8.
[0032] The clamping block comprises two longitudinal connecting blocks 11 fixedly arranged on the two rotating rods 6 respectively, a transverse connecting block 12 arranged on the lower end face of the two longitudinal connecting blocks 11 respectively for supporting the silicon disc, two fixed studs 13 arranged on the upper end faces of the two longitudinal connecting blocks 11 respectively, two clamping plates 14 arranged above the longitudinal connecting blocks 11 respectively and capable of being lifted and lowered, two avoiding through holes 15 opened on the two clamping plates 14 respectively for allowing the fixed studs 13 to pass through the clamping plates 14, and pressing nuts 16 threadedly connected to the two fixed studs 13 and located above the clamping plates 14. The longitudinal connecting blocks 11 and the transverse connecting block 12 form L-shaped blocks, the distance between the two longitudinal connecting blocks 11 on the mounting ring body 5 is slightly smaller than the outer diameter of the silicon disc, and the distance is about 1 mm. The longitudinal connecting blocks 11 and the transverse connecting block 12 are arc-shaped blocks, and the clamping plates 14 are L-shaped plates.
[0033] The upper end face of the transverse connecting block 12 and the lower end face of the clamping plate 14 are provided with extrusion layers 17, which are damping cloth layers or rubber layers.
[0034] The limiting device comprises two limiting plates 18 arranged on the inner wall of the mounting ring body 5, the two limiting plates 18 are arranged in parallel from top to bottom, the two limiting plates 18 are slidably arranged on the mounting ring body 5, and the outer side of the two limiting plates 18 on the mounting ring body 5 is provided with anti-falling plates 19. The distance between the upper end face and the lower end face of the two limiting plates 18 is slightly higher than the thickness of the silicon disc, and the distance is about 1 mm. The two limiting plates 18 can also be arranged in cross symmetry, and the lower limiting plate 18 can be located at the symmetric position of the upper limiting plate 18. The anti-falling plates 19 can prevent the limiting plates 18 from moving excessively inward and falling off, and can facilitate manual pushing and pulling of the limiting plates 18.
[0035] The utility model discloses a working principle: when needing to process the silicon disc double-sidedly, first, the silicon disc is clamped in the installation ring body 5 through two clamping blocks, and the silicon disc is limited in the installation ring body 5 to overturn through the inward push of two limit plates 18, then, the installation ring body 5 is lifted and the positioning jack 10 and positioning plug rod 8 are aligned and put in, until the lower end surface of positioning seat 9 is in abutment with the upper end surface of fixed plate 3, so that the installation ring body 5 is positioned between two fixed plates 3, then, the two fixed plates 3 are driven to descend through the lifting mechanism 4, until the lower end surface of silicon disc is in abutment with the upper end surface of workbench 2, the front side of silicon disc can be preliminarily processed.
[0036] When needing to clamp the silicon disc in the installation ring body 5, first, the silicon disc is placed between two longitudinal joints 11, and the silicon disc is supported through the horizontal joint 12, then, the avoiding perforation 15 on the clamping plate 14 is aligned with the fixed stud 13, then, the silicon disc is clamped by pressing down the clamping plate 14, the pressing nut 16 is screwed into the fixed stud 13, until the lower end surface of pressing nut 16 is in abutment with the upper end surface of clamping plate 14, so that the upward of clamping plate 14 is limited, at this time, the silicon disc can be clamped between the horizontal joint 12 and clamping plate 14.
[0037] The utility model discloses a working principle: when needing to process the silicon disc double-sidedly, first, the silicon disc is clamped in the installation ring body 5 through two clamping blocks, and the silicon disc is limited in the installation ring body 5 to overturn through the inward push of two limit plates 18, then, the installation ring body 5 is lifted and the positioning jack 10 and positioning plug rod 8 are aligned and put in, until the lower end surface of positioning seat 9 is in abutment with the upper end surface of fixed plate 3, so that the installation ring body 5 is positioned between two fixed plates 3, then, the two fixed plates 3 are driven to descend through the lifting mechanism 4, until the lower end surface of silicon disc is in abutment with the upper end surface of workbench 2, the front side of silicon disc can be preliminarily processed.
[0038] The basic principle and main features of the utility model and its advantages are shown and described above, and the person skilled in the art should understand that the utility model is not limited by the above examples, and the above examples and the description in the description are only to illustrate the principle of the utility model, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed, and the scope of protection of the utility model is defined by the appended claims and their equivalents. The utility model is not described in detail, which is the known technology of the person skilled in the art.
Claims
1. A silicon member turning apparatus comprising a base, a worktable disposed on an upper end surface of the base for supporting a lower end surface, characterized by: Two fixed plates are arranged above the base and symmetrically on the left and right sides of the workbench, a lifting mechanism is arranged between the lower end surface of the two fixed plates and the upper end surface of the base to control the lifting or lowering of the two fixed plates, a mounting ring body is arranged above the workbench between the two fixed plates, a positioning piece is arranged between the mounting ring body and the two fixed plates to position the mounting ring body between the two fixed plates, two clamping blocks symmetrically arranged on the mounting ring body are used to clamp the silicon disc, two rotating rods are fixedly arranged on the clamping blocks and rotatably connected to the inner wall of the mounting ring body, the two rotating rods are used to rotate the silicon disc in the mounting ring body when the silicon disc is clamped by the two clamping blocks and the mounting ring body is lifted to a predetermined height, and a limiting device is arranged on the inner wall of the mounting ring body to limit or release the silicon disc in the mounting ring body for rotation.
2. A silicon member turnover device according to claim 1, characterized by: The upper end surface of the workbench is provided with a contact layer.
3. An apparatus for inverting a silicon member as defined in claim 2, wherein: The contact layer is a damping cloth layer or a rubber layer.
4. The apparatus of claim 1 wherein: The lifting mechanism is two telescopic cylinders or telescopic motors with fixed ends arranged on the upper end surface of the base and output ends connected to the lower ends of the fixed plates.
5. The apparatus of claim 1 wherein: The positioning piece includes two positioning insertion rods arranged on the upper end surfaces of the fixed plates, two positioning seats arranged on the left and right ends of the mounting ring body, and two positioning insertion holes respectively arranged on the two positioning seats and in gap cooperation with the positioning insertion rods.
6. The apparatus of claim 1 wherein: The clamping block includes two longitudinal connecting blocks fixedly arranged on the two rotating rods, a transverse connecting block arranged on the lower end surface of the two longitudinal connecting blocks to support the silicon disc, two fixed studs arranged on the upper end surfaces of the two longitudinal connecting blocks, two clamping plates arranged above the longitudinal connecting blocks, two avoiding through holes respectively arranged on the two clamping plates for the fixed studs to pass through the clamping plates, and compression nuts respectively threadedly connected to the two fixed studs and located above the clamping plates.
7. An apparatus for inverting a silicon member as defined in claim 6, wherein: The upper end surface of the transverse connecting block and the lower end surface of the clamping plate are both provided with an extrusion layer, which is a damping cloth layer or a rubber layer.
8. The apparatus of claim 1 wherein: The limiting device includes two limiting plates arranged on the inner wall of the mounting ring body, the two limiting plates are arranged in parallel on the upper and lower sides, the two limiting plates are slidably arranged on the mounting ring body, and the outer side of the two limiting plates on the mounting ring body is provided with an anti-dropping plate.