Target distance adjusting device and coating equipment

Abstract

The utility model relates to the field of coating, and discloses a target distance adjusting device and coating equipment, the target distance adjusting device comprises a fixing frame, a first guide column, a second guide column, a driven frame, a target body and a driving assembly, the first guide column is slidably installed at the end of the fixing frame, and the two ends of the first guide column are located on the two sides of the fixing frame; the second guide column is slidably mounted at the end, away from the first guide column, of the fixing frame, the driven frame is fixedly connected with the first guide column and the second guide column, the target body is fixedly connected with the first guide column and the second guide column, and the driving assembly is fixedly mounted on the driven frame and used for driving the driven frame and the target body to move towards or away from the fixing frame. The driven frame and the target body are in transmission through the first guide column and the second guide column, so that the target body and the driven frame can move synchronously, the driving assembly is in transmission connection with the fixed frame, so that the driven frame moves towards or away from the fixed frame, the target body is moved, and the distance between the target body and the coating substrate is changed.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of coating equipment, in particular to a target distance adjusting device and a coating equipment. BACKGROUND

[0002] In the vacuum magnetron sputtering coating technology, the planar cathode system is widely used in the anticorrosion and decorative film coating of metal and non-metal substrates by virtue of the glow discharge principle. The target-substrate distance, i.e. the distance between the cathode target material and the coating substrate, is a key factor affecting the deposition rate, material utilization rate and coating quality. A closer target-substrate distance can significantly improve the coating efficiency and adapt to diversified process requirements. However, the traditional fixed target-substrate distance design limits the process flexibility and is difficult to cope with the challenges of different substrate characteristics and shapes. Although manual adjustment of the target-substrate distance provides a solution to a certain extent, it is tedious, time-consuming and labor-intensive, and the adjustment accuracy and efficiency are limited, making it difficult to realize automated production. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the purpose of the present application is to overcome the deficiencies in the prior art and provide a target distance adjusting device and a coating equipment.

[0004] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0005] The present application provides:

[0006] A target distance adjusting device, comprising:

[0007] a fixed frame;

[0008] a first guide column, which is slidingly installed at the end of the fixed frame, and the two ends of the first guide column are located on both sides of the fixed frame;

[0009] a second guide column, which is slidingly installed at the end of the fixed frame away from the first guide column, and the two ends of the first guide column are located on both sides of the fixed frame;

[0010] a driven frame, which is located on one side of the fixed frame, and the driven frame is fixedly connected with the first guide column and the second guide column;

[0011] a target body, which is located on the side of the fixed frame away from the driven frame, and the target body is fixedly connected with the first guide column and the second guide column;

[0012] a driving assembly, which is fixedly installed on the driven frame, and the driving assembly is drivingly connected with the fixed frame, and the driving assembly is used to drive the driven frame and the target body to move towards or away from the fixed frame.

[0013] Further, the driving assembly comprises:

[0014] A first screw rod is rotatably mounted at the end of the first guide column, and is in driving connection with the fixed frame;

[0015] A second screw rod is rotatably mounted at the end of the first guide column away from the first screw rod, and is in driving connection with the fixed frame;

[0016] A rotary driving member is fixedly mounted on the first guide column;

[0017] A transmission belt is arranged on the rotating shaft of the rotary driving member, and the rotary driving member drives the first screw rod and the second screw rod to rotate through the transmission belt.

[0018] Further, the target spacing adjusting device further comprises at least one inductive positioning structure, which comprises:

[0019] A fixed shaft is fixedly mounted on the side of the fixed frame facing the driven frame;

[0020] An inductive member is fixedly mounted on the fixed shaft;

[0021] A sensor is fixedly mounted on the driven frame, and the fixed shaft is located in the movement path of the sensor.

[0022] Further, the driven frame is provided with a relief hole for avoiding the fixed shaft.

[0023] Further, the first guide column and the second guide column are both hollow, the first guide column is provided with a first water pipe, the end of the first water pipe is in communication with the inside of the target body, the second guide column is provided with a second water pipe, and the end of the second water pipe is in communication with the inside of the target body.

[0024] Further, a first pipe sleeve is sleeved on the first water pipe, and the first pipe sleeve is located between the outer wall of the first water pipe and the inner wall of the first guide column; a second pipe sleeve is sleeved on the second water pipe, and the second pipe sleeve is located between the outer wall of the first water pipe and the inner wall of the second guide column.

[0025] Further, the fixed frame comprises a fixed plate, two first side plates are fixedly arranged on the end surface of the fixed plate facing the driven frame, a first transmission plate and a second transmission plate are fixedly mounted on the end surface of the first side plate facing the driven frame, the first transmission plate is in matching connection with the first screw rod, and the second transmission plate is in matching connection with the second screw rod.

[0026] Further, a plurality of connecting plates are fixedly connected between two adjacent first side plates.

[0027] Further, the driven frame comprises a driven plate, a plurality of second side plates are fixedly installed on the side of the driven plate, and a mounting plate is fixedly installed on the second side plate.

[0028] The application also provides a coating equipment comprising the target distance adjusting device.

[0029] The application synchronously moves the target body and the driven frame by arranging the driven frame and the target body on the two sides of the fixed frame respectively and driving the driven frame and the target body through the first guide column and the second guide column, and moves the driven frame towards or away from the fixed frame by driving the driving assembly and the fixed frame, so as to move the target body and change the distance between the target body and the coating substrate, thereby automatically adjusting the position of the target body.

[0030] In order to make the above objectives, characteristics and advantages of the application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be considered as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0032] Figure 1 The overall structure of the target distance adjusting device of the application is shown in the schematic diagram;

[0033] Figure 2 The schematic diagram of the explosion state of the target distance adjusting device of the application is shown;

[0034] Figure 3 The schematic diagram of the cross-section of the target distance adjusting device of the application is shown;

[0035] Figure 4 The schematic diagram of the structure of the fixed frame of the application is shown;

[0036] Figure 5 The schematic diagram of the structure of the driven frame of the application is shown.

[0037] Main element symbol explanation: 100 - fixed frame; 110 - fixed plate; 120 - first side plate; 130 - first transmission plate; 140 - second transmission plate; 150 - connecting plate; 200 - first guide column; 300 - second guide column; 400 - driven frame; 410 - driven plate; 420 - second side plate; 430 - mounting plate; 500 - target body; 600 - driving assembly; 610 - first screw rod; 620 - second screw rod; 630 - rotary driving piece; 640 - transmission belt; 710 - first water pipe; 720 - second water pipe; 800 - inductive positioning structure; 810 - fixed shaft; 820 - inductor; 830 - sensor; 840 - avoiding hole; 910 - first pipe sleeve; 920 - second pipe sleeve. DETAILED DESCRIPTION

[0038] Embodiments of the present application are described below in detail, examples of which are shown in the accompanying drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary only, only for explaining the present application, and cannot be understood as a limitation of the present application.

[0039] In the description of the present application, it is understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0040] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0041] In the present application, unless specifically defined and limited otherwise, the terms "mounting", "connected", "connection", "fixed", and the like, should be interpreted broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In the present application, unless specifically defined and limited otherwise, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0043] In order to adapt to different production processes, it is necessary to adjust the distance between the target material and the coated substrate. Although the existing manual adjustment can achieve the distance adjustment, the efficiency is low, the time and labor are wasted, and the adjustment accuracy cannot be guaranteed, and the automatic production cannot be realized.

[0044] The target distance adjusting device provided by the embodiments of the present application comprises a fixing frame 100, a first guide column 200, a second guide column 300, a driven frame 400, a target body 500 and a driving assembly 600.

[0045] In some embodiments, the first guide column 200 is slidingly installed at the end of the fixing frame 100, and the two ends of the first guide column 200 are located on both sides of the fixing frame 100. The second guide column 300 is slidingly installed at the end of the fixing frame 100 away from the first guide column 200, and the two ends of the first guide column 200 are located on both sides of the fixing frame 100. The driven frame 400 is located on one side of the fixing frame 100, and the driven frame 400 is fixedly connected with the first guide column 200 and the second guide column 300. The target body 500 is located on the side of the fixing frame 100 away from the driven frame 400, and the target body 500 is fixedly connected with the first guide column 200 and the second guide column 300. The driving assembly 600 is fixedly installed on the driven frame 400, and the driving assembly 600 is drivingly connected with the fixing frame 100. The driving assembly 600 is used to drive the driven frame 400 and the target body 500 to move towards or away from the fixing frame 100.

[0046] ReferenceFigure 1 and Figure 2 As shown in the figure, the first guide column 200 and the second guide column 300 are respectively arranged at the upper and lower ends of the fixed frame 100, and the first guide column 200 and the second guide column 300 pass through the fixed frame 100 and extend to both sides of the fixed frame 100. The first guide column 200 and the second guide column 300 are fixedly connected with the driven frame 400 and the target body 500 on both sides of the fixed frame 100. It can be understood that when the driven frame 400 moves, the first guide column 200 and the second guide column 300 will also drive the target body 500 to move, so that the target body 500 moves towards or away from the fixed frame 100, so as to change the distance between the target body 500 and the coated substrate (not shown in the figure) and adapt to different production processes.

[0047] It should be noted that the driving assembly 600 is installed on the driven frame 400, and the driving assembly 600 is in transmission connection with the fixed frame 100. The driving assembly 600 can drive the driven frame 400 to move towards or away from the fixed frame 100, so as to drive the target body 500 to move.

[0048] It should be noted that since the two ends of the target body 500 are respectively connected with the first guide column 200 and the second guide column 300, and the two ends of the driven frame 400 are also connected with the first guide column 200 and the second guide column 300, that is, the target body 500 moves with two transmission guide columns for guidance, so that the target body 500 moves more stably.

[0049] The driving assembly 600 includes a first lead screw 610, a second lead screw 620, a rotary driving member 630, and a transmission belt 640.

[0050] In some embodiments, the first lead screw 610 is rotatably installed at the end of the first guide column 200, the first lead screw 610 is in transmission connection with the fixed frame 100, the second lead screw 620 is rotatably installed at the end of the first guide column 200 away from the first lead screw 610, the second lead screw 620 is in transmission connection with the fixed frame 100, the rotary driving member 630 is fixedly installed on the first guide column 200, the transmission belt 640 is arranged on the rotating shaft of the rotary driving member 630, and the rotary driving member 630 drives the first lead screw 610 and the second lead screw 620 to rotate through the transmission belt 640.

[0051] Please refer to Figure 2 and Figure 3As shown, the first screw rod 610 and the second screw rod 620 are both rotatably installed on the driven frame 400, and the first screw rod 610 and the second screw rod 620 are in transmission connection with the fixed frame 100, the rotary driving member 630 is fixedly installed on the driven frame 400, the rotating shaft of the rotary driving member 630 is connected with the first screw rod 610 and the second screw rod 620 through two transmission belts 640, and the rotary driving member 630 can synchronously drive the first screw rod 610 and the second screw rod 620 to rotate when being started, so that the driven frame 400 moves towards or away from the fixed frame 100.

[0052] Please continue to refer to Figure 2 and Figure 3 As shown, in one embodiment, in order to improve the moving precision of the driven frame 400 and the target body 500, two synchronous pulleys are installed on the rotating shaft of the rotary driving member 630, which can be referred to as a first driving pulley and a second driving pulley, a synchronous pulley is also arranged on the first screw rod 610 and can be referred to as a first driven pulley, a synchronous pulley is arranged on the second screw rod 620 and can be referred to as a second driven pulley, and the transmission belts 640 are two synchronous belts and can be referred to as a first synchronous belt and a second synchronous belt. In order to drive the first screw rod 610 and the second screw rod 620 to rotate, the first driving pulley, the first synchronous belt and the first driven pulley are matched to transmit the power of the rotary driving member 630 to the first screw rod 610; similarly, the power of the rotary driving member 630 is transmitted to the second screw rod 620 through the cooperation between the second driving pulley, the second synchronous belt and the second driven pulley.

[0053] It should be noted that the rotary driving member 630 is a motor, and in order to further control and adjust the precision, the rotary driving member 630 can be a servo motor.

[0054] The target distance adjusting device further comprises at least one inductive positioning structure 800, the inductive positioning structure 800 comprises a fixed shaft 810, an inductive element 820 and a sensor 830, the fixed shaft 810 is fixedly installed on the side of the fixed frame 100 facing the direction of the driven frame 400, the inductive element 820 is fixedly installed on the fixed shaft 810, the sensor 830 is fixedly installed on the driven frame 400, and the fixed shaft 810 is located in the movement path of the sensor 830.

[0055] Please refer to Figure 2 and Figure 3As shown, in order to accurately move the target body 500 to the predetermined position, a sensor 830 is installed on the driven frame 400, and the driven frame 400 moves to drive the sensor 830 to move towards or away from the fixed frame 100, and at this time the sensor 830 moves towards or away from the inductor 820, and when the sensor 830 is at the position of the inductor 820 and detects the presence of the inductor 820, it can be determined that the driven frame 400 and the target body 500 reach the predetermined position. It should be noted that the distance moved by the driven frame 400 and the target body 500 can be determined according to different processes, that is, a plurality of sets of inductive positioning structures 800 can be provided to correspond to different adjustment distances.

[0056] In some embodiments, the sensor 830 can be a photoelectric sensor or a proximity switch, and the inductor 820 can be any object that can be detected by the sensor 830.

[0057] The driven frame 400 is provided with a relief hole 840 for avoiding the fixed shaft 810.

[0058] As shown in Figure 5 When the driven frame 400 moves, it may come into contact with the fixed shaft 810. In order to prevent the driven frame 400 from colliding with the fixed shaft 810 and causing movement interference, a relief hole 840 is provided on the driven frame 400 at the position of the fixed shaft 810, so as to avoid the fixed shaft 810 and prevent the fixed shaft 810 from colliding with the driven frame 400.

[0059] The first guide column 200 and the second guide column 300 are hollow, the first guide column 200 is provided with a first water pipe 710, the end of the first water pipe 710 is in communication with the inside of the target body 500, and the second guide column 300 is provided with a second water pipe 720, the end of the second water pipe 720 is in communication with the inside of the target body 500.

[0060] As shown in Figures 1 to 3 The target body 500 generates a large amount of heat during operation, and therefore needs to be cooled. Specifically, a first water pipe 710 in communication with the target body 500 is arranged in the cavity of the first guide column 200, and a second water pipe 720 in communication with the target body 500 is arranged in the circular cavity of the second guide column 300, and the target body 500 has a passage for connecting the first water pipe 710 and the second water pipe 720. At this time, the first water pipe 710, the second water pipe 720 and the target body 500 form a water channel, and when water passes through the target body 500, the heat generated by the target body 500 is removed.

[0061] It can be understood that the first water pipe 710 and the second water pipe 720 move with the target body 500.

[0062] In one embodiment, water can be fed from the second water pipe 720 and then discharged from the first water pipe 710, or water can be fed from the first water pipe 710 and then discharged from the second water pipe 720, which can be designed as required in practice, and the direction of water feeding and discharging is not limited herein.

[0063] It should be noted that the length of the first water pipe 710 should be greater than the length of the first guide column 200, and the length of the second water pipe 720 should be greater than the length of the second guide column 300.

[0064] The first water pipe 710 is sleeved with a first pipe sleeve 910, and the first pipe sleeve 910 is located between the outer wall of the first water pipe 710 and the inner wall of the first guide column 200. The second water pipe 720 is sleeved with a second pipe sleeve 920, and the second pipe sleeve 920 is located between the outer wall of the first water pipe 710 and the inner wall of the second guide column 300.

[0065] Please continue to refer to Figure 2 and Figure 3 As the first water pipe 710 and the second water pipe 720 are long and thin, in order to prevent them from bending, a first pipe sleeve 910 is arranged in the cavity of the first guide column 200, and a second pipe sleeve 920 is arranged in the cavity of the second guide column 300. The first water pipe 710 is located in the inner hole of the first pipe sleeve 910, and the second water pipe 720 is located in the inner hole of the second pipe sleeve 920. The first pipe sleeve 910 and the second pipe sleeve 920 support the first water pipe 710 and the second water pipe 720 to prevent them from bending.

[0066] The fixing frame 100 includes a fixing plate 110, two first side plates 120 are fixedly arranged on the end face of the fixing plate 110 towards the driven frame 400, a first transmission plate 130 and a second transmission plate 140 are fixedly installed on the end face of the first side plate 120 towards the driven frame 400, the first transmission plate 130 is connected with the first lead screw 610 in a matched mode, and the second transmission plate 140 is connected with the second lead screw 620 in a matched mode.

[0067] Referring to Figure 4 It can be understood that in order to prevent the fixing plate 110 from bending, a plurality of first side plates 120 are arranged on the side of the fixing plate 110 in a vertical mode to improve the bending resistance of the fixing plate 110. In order to be able to be connected with the first lead screw 610 and the second lead screw 620 in a transmission mode, the first transmission plate 130 connected with the first lead screw 610 in a transmission mode and the second transmission plate 140 connected with the second lead screw 620 in a transmission mode are fixedly installed on the end face of the first side plate 120. Furthermore, a lead screw nut is installed on each of the first transmission plate 130 and the second transmission plate 140.

[0068] In the embodiment, the number of the first side plates 120 is two.

[0069] A plurality of connecting plates 150 are fixedly connected between two adjacent first side plates 120.

[0070] Please continue to refer to Figure 4 As shown, in order to prevent the first side plate 120 and the fixed plate 110 from being broken due to external force, a plurality of connecting plates 150 are arranged between the two first side plates 120, so that the frame composed of the fixed plate 110, the first side plate 120 and the connecting plate 150 is more stable, and the number of the connecting plates 150 can be set according to actual needs, which is not specifically limited here.

[0071] The driven frame 400 comprises a driven plate 410, a plurality of second side plates 420 are fixedly installed on the side surface of the driven plate 410, and a mounting plate 430 is fixedly installed on the second side plate 420.

[0072] Please refer to Figure 5 As shown, the driven frame 400 is composed of the driven plate 410, the second side plate 420 and the mounting plate 430, the avoiding hole 840 is provided through the driven plate 410, the two second side plates 420 are installed on the side surface of the driven plate 410, and the mounting plate 430 is installed on each second side plate 420, and the two mounting plates 430 are located at the same height, and the mounting plate 430 is used for installing the rotary driving piece 630.

[0073] The embodiment of the present application also provides a coating equipment, the coating equipment comprises the target distance adjusting device, and the coating equipment comprises all technical effects of the target distance adjusting device, and the specific technical effects will not be described here in detail, and the content recorded in the target distance adjusting device can be referred to.

[0074] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0075] Although the embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary, and are not to be interpreted as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A target spacing adjustment device, characterized by, The utility model relates to a target distance adjusting device, including: Fixed frame (100); First guide post (200), first guide post (200) slidingly installed in the end of fixed frame (100), and both ends of first guide post (200) are located on both sides of fixed frame (100); Second guide post (300), second guide post (300) slidingly installed in the end of fixed frame (100) away from first guide post (200), both ends of first guide post (200) are located on both sides of fixed frame (100); Driven frame (400), driven frame (400) is located on one side of fixed frame (100), and driven frame (400) is fixedly connected with first guide post (200) and second guide post (300); Target body (500), target body (500) is located on one side of fixed frame (100) away from driven frame (400), and target body (500) is fixedly connected with first guide post (200) and second guide post (300); Drive assembly (600), drive assembly (600) is fixedly installed on driven frame (400), drive assembly (600) is in transmission with fixed frame (100), and drive assembly (600) is used for driving driven frame (400) and target body (500) move towards or away from the direction of fixed frame (100).

2. The inter-target spacing adjustment device of claim 1, wherein The drive assembly (600) includes: First screw rod (610), first screw rod (610) is rotatably installed on the end of first guide post (200), and first screw rod (610) is in transmission with fixed frame (100); Second screw rod (620), second screw rod (620) is rotatably installed on the end of first guide post (200) away from first screw rod (610), and second screw rod (620) is in transmission with fixed frame (100); Rotary drive (630), rotary drive (630) is fixedly installed on first guide post (200); Transmission belt (640), transmission belt (640) is arranged on the rotating shaft of rotary drive (630), and rotary drive (630) drives first screw rod (610) and second screw rod (620) to rotate through transmission belt (640).

3. The inter-target spacing adjustment device of claim 1, wherein, The target distance adjusting device further includes at least one inductive positioning structure (800), and the inductive positioning structure (800) includes: Fixed shaft (810), fixed shaft (810) is fixedly installed on the side of fixed frame (100) towards driven frame (400); Induction piece (820), induction piece (820) is fixedly installed on the conveying fixed shaft (810); Sensor (830), sensor (830) is fixedly installed on driven frame (400), and fixed shaft (810) is located in the movement path of sensor (830).

4. The inter-target spacing adjustment device of claim 3, wherein Driven frame (400) is provided with an avoiding hole (840), and the avoiding hole (840) is used for avoiding fixed shaft (810).

5. The inter-target spacing adjustment device of claim 1, wherein, The first guide column (200) and the second guide column (300) are hollow, the first guide column (200) is provided with a first water pipe (710), the end of the first water pipe (710) is communicated with the inside of the target body (500), the second guide column (300) is provided with a second water pipe (720), the end of the second water pipe (720) is communicated with the inside of the target body (500).

6. The inter-target spacing adjustment device of claim 5, wherein, The first water pipe (710) is sleeved with a first pipe sleeve (910), the first pipe sleeve (910) is located between the outer wall of the first water pipe (710) and the inner wall of the first guide column (200); the second water pipe (720) is sleeved with a second pipe sleeve (920), the second pipe sleeve (920) is located between the outer wall of the first water pipe (710) and the inner wall of the second guide column (300).

7. The inter-target spacing adjustment device of claim 2, wherein, The fixed frame (100) comprises a fixed plate (110), the end face of the fixed plate (110) in the direction of the driven frame (400) is fixedly provided with two first side plates (120), the end face of the first side plate (120) in the direction of the driven frame (400) is fixedly installed with a first transmission plate (130) and a second transmission plate (140), the first transmission plate (130) is connected with the first lead screw (610), and the second transmission plate (140) is connected with the second lead screw (620).

8. The inter-target spacing adjustment device of claim 7, wherein, A plurality of connecting plates (150) are fixedly connected between two adjacent first side plates (120).

9. The inter-target spacing adjustment device of claim 1, wherein, The driven frame (400) comprises a driven plate (410), a plurality of second side plates (420) are fixedly installed on the side face of the driven plate (410), and a mounting plate (430) is fixedly installed on the second side plate (420).

10. A coating apparatus, characterized by, The target distance adjusting device comprises the target distance adjusting device according to any one of claims 1 to 9. The target distance adjusting device comprises the target distance adjusting device according to any one of claims 1 to 9.

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