Mortar supply three-way ball valve of silicon rod multi-wire cutting machine

Abstract

The utility model discloses a mortar liquid supply three-way ball valve of a silicon rod multi-wire cutting machine. The main body structure of the three-way ball valve is provided with a valve body, a blind plate valve seat, a cleaning blow-down valve seat and three mortar pipeline valve seats, wherein the blind plate valve seat, the cleaning blow-down valve seat and the mortar pipeline valve seat are respectively arranged on the valve body through threads and are sealed by teflon sealing elements; a T-shaped three-way ball body is installed in the valve body and connected with a valve rod, and the valve rod drives the ball body to rotate to achieve connection and disconnection of a mortar supply pipeline. The cleaning blow-down valve seat is connected with a blow-down cavity, the blow-down cavity is connected with the blow-down port seat through a blow-down connecting pipe, a hollow cylinder for compressed air to circulate is arranged in the middle of the cleaning blow-down valve seat, hollows are uniformly arranged on the outer side of the hollow cylinder, and the hollows are communicated with the blow-down cavity. On-off of a mortar supply pipeline is achieved through rotation of the T-shaped three-way ball body, the interior of the valve body is kept clean through the cleaning and sewage discharging component, loss of a sealing piece is reduced, and the service life of the ball valve is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of silicon wafer processing, in particular to a silicon rod multi-wire saw slurry supply tee ball valve. BACKGROUND

[0002] The multi-wire saw is a commonly used device in the 12-inch silicon rod slicing process, and the cutting process is completed by the action of steel wire and slurry on the crystal bar; to ensure the cutting quality, the slurry needs to be replaced regularly. At present, the tee ball valve used in the slurry supply pipeline often causes abnormal opening and closing after the internal slurry accumulates and solidifies, which can cause the slurry to be unable to be supplied or to be supplied in excess, resulting in waste of the slurry. The accumulated slurry solidifies, which not only causes slight changes in the position of the T-shaped tee ball body, but also causes slurry particles to adhere to the spherical surface, both of which can exacerbate the wear of the sealing element. At the same time, the ball valve used at present needs to be disassembled to replace the T-shaped tee ball body, and the process is complicated. SUMMARY

[0003] In view of the problem of slurry waste and frequent maintenance caused by the abnormal opening and closing of the tee ball valve after the internal slurry accumulates and solidifies, the purpose of the utility model is to provide a silicon rod multi-wire saw slurry supply tee ball valve, which has an internal residual slurry cleaning function to meet the needs of normal opening and closing of the tee ball valve, improve the service life, and facilitate maintenance.

[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0005] A silicon rod multi-wire saw slurry supply tee ball valve, the main structure of the tee ball valve has a valve body, a blind plate valve seat, a cleaning and sewage valve seat, and three slurry pipeline valve seats; wherein,

[0006] The blind plate valve seat, the cleaning and sewage valve seat, and the slurry pipeline valve seat are respectively installed on the valve body by threads and sealed by a tetrafluoro seal;

[0007] A T-shaped tee ball body is installed inside the valve body, the ball body is connected to a valve rod, and the rotation of the ball body is driven by the valve rod to realize the opening and closing of the slurry supply pipeline;

[0008] The cleaning and sewage valve seat is connected to a sewage chamber, the sewage chamber is connected to a sewage outlet seat through a sewage connection pipe, a hollow column for air flow is arranged in the middle of the cleaning and sewage valve seat, and hollows are uniformly arranged on the outer side of the hollow column, and the hollows are communicated with the sewage chamber.

[0009] Further, the tetrafluoro seal is respectively embedded in the blind plate valve seat, the cleaning and sewage valve seat, and the slurry pipeline valve seat, and is in contact with the T-shaped tee ball body to realize the positioning of the T-shaped tee ball body.

[0010] Further, the T-shaped three-way ball adopts a floating sealing mode with the four-fluorine sealing piece on the blind plate valve seat and the four-fluorine sealing piece on the cleaning and blowdown valve seat.

[0011] Further, the three mortar pipeline valve seats are respectively used for connecting the mortar inlet pipeline, the mortar outlet pipeline and the mortar liquid supplementing pipeline.

[0012] The T-shaped three-way ball is provided with three grooves in the arc surface on the opposite side of the valve rod along the arc direction, and the grooves correspond to the mortar pipeline valve seat at the mortar inlet pipeline, the mortar pipeline valve seat at the mortar outlet pipeline and the blind plate valve seat respectively.

[0013] The utility model has the advantages that:

[0014] The silicon rod multi-wire saw mortar liquid supply three-way ball valve provided by the utility model has the function of cleaning the valve body chamber, can effectively solve the accumulation and solidification of the mortar in the valve body, reduce the abrasion of the sealing piece, prolong the service life of the ball valve, improve the reliability of the valve opening and closing, effectively solve the phenomenon of mortar waste caused by abnormal closing, and the sealing piece is simple to disassemble, the whole replacement of the sealing ring can be carried out without disassembling the T-shaped three-way ball, and the convenience of maintenance is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a use scene schematic view of the utility model applied to the mortar liquid supplementing of the multi-wire saw.

[0016] Figure 2 It is a structure schematic view of the utility model.

[0017] Figure 3 It is a sectional view of the utility model.

[0018] Figure 4 It is a structure schematic view of the cleaning and blowdown piece in the utility model.

[0019] Figure 5 It is a structure schematic view of the cleaning and blowdown valve seat in the utility model.

[0020] Figure 6 It is a structure schematic view of the T-shaped three-way ball in the utility model.

[0021] REFERENCE SIGNS:

[0022] 1 - three-way ball valve; 2 - pneumatic actuator; 3 - mortar inlet pipeline; 4 - one-way stop valve; 5 - mortar outlet pipeline; 6 - blowdown pipe; 7 - mortar liquid supplement pipeline; 11 - valve body; 12 - mortar pipeline valve seat; 13 - T-shaped three-way ball; 14 - valve stem; 15 - blind plate valve seat; 16 - cleaning and blowdown valve seat; 17 - blowdown chamber; 18 - blowdown connecting pipe; 19 - blowdown port seat; 20 - fluorine sealing piece (1); 21 - fluorine sealing piece (2); 22 - fluorine sealing piece (3); 23 - oil seal; 24 - valve stem nut. DETAILED DESCRIPTION

[0023] The utility model will be explained in detail below in combination with the drawings, but the example is only used for explaining the utility model, and is not used for limiting the range of the utility model.

[0024] As Figure 1 shown, the utility model discloses a kind of silicon rod multi-wire saw mortar liquid supply three-way ball valve 1 (hereinafter referred to as three-way ball valve) is applied to multi-wire saw mortar liquid supplement.Three-way ball valve 1 is equipped with mortar inlet pipeline 3, mortar outlet pipeline 5, mortar liquid supplement pipeline 7, when supplementing, three-way ball valve 1 is driven by pneumatic actuator 2, realize that mortar inlet pipeline 3 and mortar liquid supplement pipeline 7 intercommunication carry out supplementing, after supplementing, realize that mortar inlet pipeline 3 and mortar outlet pipeline 5 intercommunication by pneumatic actuator 2 drive, thereafter one-way stop valve 4 is connected into compressed air, and residual mortar in three-way ball valve 1 valve body is blown to mortar liquid supplement pipeline 7 by blowdown pipe 6.

[0025] As Figure 2 , 3 ,4 shows, the three-way ball valve 1 is by valve body 11, mortar pipeline valve seat 12, T-shaped three-way ball 13, valve stem 14, blind plate valve seat 15, cleaning and blowdown valve seat 16, blowdown chamber 17, blowdown connecting pipe 18, blowdown port seat 19, fluorine sealing piece 20, 21, 22, oil seal 23, valve stem nut 24 etc..Among them, blind plate valve seat 15, cleaning and blowdown valve seat 16, mortar pipeline valve seat 12 are installed in valve body 11 by thread respectively and are sealed by fluorine sealing piece, T-shaped three-way ball 13 is arranged in valve body 11 interior, and is cooperated with valve stem 14, this valve stem 14 is installed on valve body 11 using valve stem nut 24, using valve stem 14 makes T-shaped three-way ball 13 rotate to realize the on-off of mortar supply pipeline.Fluorine sealing piece (1) 20 is embedded in blind plate valve seat 15, fluorine sealing piece (2) 21 is embedded in mortar pipeline valve seat 12, fluorine sealing piece (3) 22 is embedded in cleaning and blowdown valve seat 16, realizes the accurate positioning of T-shaped three-way ball 13.Further, T-shaped three-way ball 13 and fluorine sealing piece 20, 22 adopt floating seal mode, can reduce contact area, reduce rotating friction.

[0026] As Figure 4As shown, the cleaning and drain valve seat 16 is connected to a drain chamber 17, which is connected to a drain outlet seat 19 via a drain connection pipe 18, thus forming a cleaning and drain component. Figure 5 As shown, the cleaning drain valve seat 16 has a hollow column (air passage cavity) in the middle for compressed air circulation, and the outer side of the column has evenly distributed perforations to facilitate mortar flow. The drain chamber 17 is threaded onto the cleaning drain valve seat 16 and sealed with an oil seal 23 to prevent mortar overflow. The drain connection pipe 18 connects the drain chamber 17 to the drain port seat 19, and is used to discharge the mortar in the drain chamber 17 through the drain port seat 19.

[0027] like Figure 6 As shown, the T-shaped three-way ball valve 13 has three grooves along the arc direction on the opposite side of the valve stem. These grooves correspond to the mortar inlet valve seat 12 at mortar inlet pipe 3, the mortar outlet valve seat 12 at mortar outlet pipe 5, and the blind valve seat 15, respectively. This directs compressed air to areas with severe mortar buildup, facilitating the rapid discharge of mortar through the cleaning and drain valve seat 16 from the three-way ball valve 1, thus improving cleaning efficiency. Combined with… Figure 1 As shown, the T-type tee ball 13 has six spatial supports, including the valve stem, three mortar pipeline valve seats, a cleaning and drain valve seat, and a blind valve seat. This improves the operational stability of the T-type tee ball, reduces the impact of seal wear caused by T-type tee ball positional displacement, increases maintenance convenience, and allows for the replacement of PTFE seals without moving the T-type tee ball.

[0028] In practical applications, the operation process of the three-way ball valve of this utility model is as follows:

[0029] Install the three-way ball valve 1 according to... Figure 1 As shown in the diagram, the mortar is installed on the mortar flow pipeline. When the multi-wire cutting machine needs mortar replenishment, press the control switch of the pneumatic actuator 2. The pneumatic actuator 2 drives the T-shaped three-way ball 13 to rotate 90° via the valve stem 14, connecting the mortar inlet pipeline 3 and the mortar replenishment pipeline 7, thus achieving the purpose of replenishing the multi-wire cutting machine. After replenishment is completed, press the control switch of the pneumatic actuator 2, and the T-shaped three-way ball 13 resets, connecting the mortar inlet pipeline 3 and the mortar outlet pipeline 5, ensuring that the mortar can continuously circulate within the pipeline. Open the compressed air valve connected to the one-way shut-off valve 4 and continuously purge until the residual mortar inside the valve body 11 of the three-way ball valve 1 flows out through the drain pipe 6, then close the compressed air valve.

[0030] The three-way ball valve has the mortar internal leakage cleaning function, can effectively solve the problem of ball valve normal rotation blocked by mortar internal leakage, improves the reliability of the mortar liquid supplement system, and reduces the waste caused by mortar overflow; the ball valve adopts the all-around fixing mode, solves the problem of local serious wear of the sealing ring caused by the T-shaped three-way ball body deflection; each Teflon sealing piece is installed on the detachable valve seat, can realize quick replacement of the damaged sealing ring, and saves maintenance time.

Claims

1. A silicon rod multi-wire saw mortar liquid supply tee ball valve, characterized in that, The three-way ball valve body structure has a valve body, a blind plate valve seat, a cleaning and sewage valve seat, and three mortar pipeline valve seats. The blind plate valve seat, the cleaning and sewage valve seat, and the mortar pipeline valve seat are respectively installed on the valve body by threads and sealed by a Teflon sealing element. A T-shaped three-way ball body is installed inside the valve body, which is connected to the valve rod and driven to rotate by the valve rod to realize the on-off of the mortar supply pipeline. The cleaning and sewage valve seat is connected to a sewage chamber, which is connected to a sewage outlet seat through a sewage connection pipe.

2. The silicon rod multi-wire saw slurry supply tee ball valve of claim 1, wherein, The Teflon sealing element is embedded in the blind plate valve seat, the cleaning and sewage valve seat, and the mortar pipeline valve seat, and contacts the T-shaped three-way ball body to realize positioning of the T-shaped three-way ball body.

3. The silicon rod multi-wire saw slurry supply tee ball valve of claim 2, wherein, The T-shaped three-way ball body and the Teflon sealing elements on the blind plate valve seat and the cleaning and sewage valve seat adopt a floating sealing method.

4. The silicon rod multi-wire saw slurry supply tee ball valve of claim 1, wherein, The three mortar pipeline valve seats are respectively used to connect the mortar inlet pipeline, the mortar outlet pipeline, and the mortar liquid supplement pipeline.

5. The silicon rod multi-wire saw slurry supply tee ball valve of claim 1, wherein, The T-shaped three-way ball body has three grooves on the arc surface opposite to the valve rod along the arc direction, which correspond to the mortar pipeline valve seat at the mortar inlet pipeline, the mortar pipeline valve seat at the mortar outlet pipeline, and the blind plate valve seat.

Images