Metal base air tightness detection device
By designing a metal base airtightness testing device for helium leakage rate detection under heating conditions, the problem of low airtightness testing accuracy of metal bases for electrostatic chucks under heating conditions is solved, achieving higher testing reliability and accuracy.
Patent Information
- Application Number
- CN202520036256.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-07
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2035-01-07
AI Technical Summary
In the existing technology, the airtightness test of the metal base of the electrostatic chuck is not accurate when heated, and the test results are inaccurate when at room temperature, which easily leads to missed detections.
A metal base airtightness detection device was designed, including a driving component, a sealing component, and a detection component. It can be connected to a leak detector through a leak detection component under heating conditions to simulate the working state of the metal base and use a mass spectrometer leak detector to detect the helium leakage rate.
This improves the reliability of airtightness testing of metal bases, avoids leakage caused by thermal expansion of the metal base, and ensures the accuracy and reliability of the test.
Smart Images
Figure CN223637043U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor industry equipment and accessory detection technical field, concretely relates to a metal base air tightness detection device. BACKGROUND
[0002] The electrostatic chuck is the accessory commonly used in the semiconductor industry, and the metal base needs good air tightness in the working state, so as to ensure the stability and precision of the process, therefore, the air tightness detection of the metal base for the electrostatic chuck is very important. At present, the air tightness detection of the metal base for the electrostatic chuck is mainly through the mass spectrometer leak detector at normal temperature to carry out helium leakage test, but the air tightness detection data obtained by this detection method is not high in accuracy. The metal base will be expanded by heat in the heating state, which increases the probability of gas leakage, therefore, the air tightness detection data obtained by detection at normal temperature is not accurate, and the technical means capable of carrying out air tightness detection in the working state of the metal base is needed. SUMMARY
[0003] In order to overcome the shortcomings and deficiencies in the prior art, the utility model aims at providing a metal base air tightness detection device, which tests the helium leakage rate of the metal base in the heating state, so as to obtain higher accuracy and ensure that no missed detection occurs. The existing helium leakage detection accuracy often lacks accurate detection of the helium leakage rate in the heating state, which is easy to cause the problem of leakage due to the expansion of the metal base by heat, thereby reducing the detection reliability.
[0004] In order to solve the above technical problems, the utility model adopts the following technical scheme:
[0005] A metal base air tightness detection device, comprising a driving assembly, a machine cover and a sealing assembly and a detection assembly both arranged in the machine cover, the detection assembly comprising an upper heating part, a lower heating part and a leak detection part, the leak detection part being connected with the sealing assembly; the sealing assembly comprising a bearing table and an upper cover arranged on the upper end of the bearing table, the lower end of the upper cover being provided with a receiving groove, the upper heating part being arranged in the receiving groove, the upper end of the bearing table being provided with a groove communicating with the receiving groove, the lower heating part being arranged in the groove, the upper end of the lower heating part being used for placing the metal base, the lower end of the driving assembly penetrating through the upper end surface of the machine cover and being connected with the upper cover, the driving assembly being used for driving the upper cover to move downward until abutting against the upper surface of the bearing table.
[0006] Further, the leak detection part comprises a leak detection bellows and a helium pipe, the helium pipe being communicated with the sealing assembly, the leak detection bellows penetrating through the side wall of the sealing assembly for being communicated with the metal base.
[0007] Further, the machine cover comprises an upper support plate and a lower support plate arranged at the lower end of the upper support plate, the upper support plate and the lower support plate are arranged in parallel, the bearing table is arranged at the upper end of the lower support plate, the driving assembly comprises a cylinder and a guide shaft, the upper end of the guide shaft is connected with the upper support plate, the lower end of the guide shaft is connected with the lower support plate, the upper end of the upper cover is provided with a moving plate in sliding connection with the guide shaft, and the lower end of the telescopic rod of the cylinder passes through the upper support plate and is connected with the moving plate.
[0008] Further, an upper heat insulation pad is arranged between the moving plate and the upper cover.
[0009] Further, a lower heat insulation pad is arranged between the lower support plate and the bearing table.
[0010] Further, the upper end of the upper heating element is provided with a connecting rod, the upper end of the connecting rod is connected with the upper cover, and the connecting rod is sleeved with an elastic element.
[0011] Further, the lower end of the lower support plate is communicated with a through pipe, the through pipe is communicated with the bearing table, the leak detection bellows and the helium pipe are arranged in the through pipe, one end of the helium pipe extends into the groove along the axial direction of the through pipe, one end of the leak detection bellows extends along the axial direction of the through pipe and is sequentially arranged through the bearing table and the lower heating element until being communicated with the metal base.
[0012] Further, the detection assembly further comprises a heating pipe arranged in the through pipe, one end of the heating pipe extends into the groove along the axial direction of the through pipe and is connected with the lower heating element.
[0013] Further, the machine cover comprises two first side plates arranged in parallel, the upper ends of the two first side plates are respectively connected with the two ends of the upper support plate, the lower ends of the two first side plates are respectively connected with the two ends of the lower support plate, and the front ends of the two first side plates are respectively provided with safety gratings.
[0014] Further, the two first side plates are respectively provided with fans.
[0015] Further, a sealing ring is arranged between the upper cover and the bearing table.
[0016] The metal base airtightness detection device of the utility model has the advantages of simple structure, can simulate the working state of the metal base, and can detect the airtightness of the metal base during heating. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1 It is a perspective structural schematic view of the metal base airtightness detection device.
[0018] Figure 2 It is a top view of the metal base airtightness detection device.
[0019] Figure 3 It is a partial sectional view of the metal base airtightness detection device during operation.
[0020] Figure 4 It is a perspective structural schematic view of the metal base airtightness detection device after being equipped with a helium bottle and a mass spectrometric leak detector.
[0021] The reference signs include:
[0022] 1, cover; 11, upper support plate; 12, lower support plate; 13, first side plate; 14, second side plate; 15, fan; 16, through pipe; 17, safety grating; 2, upper heating piece; 21, connecting rod; 22, elastic piece; 3, lower heating piece; 31, heating pipe; 4, sealing assembly; 41, upper cover; 411, accommodating groove; 42, bearing table; 422, groove; 43, sealing ring; 5, leak detection piece; 51, leak detection bellows; 52, helium pipe; 53, helium bottle; 54, mass spectrometric leak detector; 6, driving assembly; 61, air cylinder; 62, guide shaft; 7, moving plate; 8, upper heat insulation pad; 9, lower heat insulation pad; 10, metal base. DETAILED DESCRIPTION
[0023] For the convenience of understanding of those skilled in the art, the utility model is further explained below in combination with the embodiments and the drawings, and the content mentioned in the embodiments is not a limitation on the utility model.
[0024] For example, Figures 1-4As shown, a metal base airtightness detection device, including drive assembly 6, machine cover 1 and sealing assembly 4 and detection assembly which are all in the machine cover 1, the detection assembly includes upper heating element 2, lower heating element 3 and leak detection element 5, the leak detection element 5 is connected with the sealing assembly 4; the sealing assembly 4 includes bearing table 42 and upper cover 41 which is arranged on the upper end of the bearing table 42, the lower end of the upper cover 41 is provided with accommodating groove 411, the upper heating element 2 is placed in the accommodating groove 411, the upper end of the bearing table 42 is provided with recess 422 which is communicated with the accommodating groove 411, the lower heating element 3 is placed in the recess 422, the upper end of the lower heating element 3 is used for placing metal base 10, the lower end of the drive assembly 6 passes through the upper end surface of the machine cover 1 and is connected with the upper cover 41, the drive assembly 6 is used for driving the upper cover 41 to move downward until abutting on the upper surface of the bearing table 42.
[0025] The metal base airtightness detection device of the utility model has simple structure, can simulate the working state of the metal base, and detects the airtightness of the metal base when heated. When in use, after the metal base 10 is placed on the detection position by manual feeding, the metal base 10 is placed on the upper end of the lower heating element 3, the detection is started, the drive assembly 6 drives the upper cover 41 to move downward until abutting on the upper surface of the bearing table 42 to realize the sealing of the sealing assembly 4, that is, the accommodating groove 411 and the recess 422 are the same and are in the sealed state, meanwhile, the lower end of the upper heating element 2 contacts the surface of the metal base 10, that is, the metal base 10 is located between the upper heating element 2 and the lower heating element 3, the upper heating element 2 and the lower heating element 3 heat together according to the required temperature of the metal base 10 in the working state, so that the metal base 10 is heated uniformly, when the temperature in the sealing assembly reaches the target temperature, the leak detection element is connected with the leak detector, at this time, if the leak detector does not alarm, it indicates that the airtightness of the metal base is good when heated. Thus, the working state of the metal base is simulated, the airtightness of the metal base when heated is detected, the reliability of the detection is improved, the leakage due to the thermal expansion of the metal base is avoided, and the problem that cannot be detected at normal temperature is avoided.
[0026] Further, the leak detection member 5 comprises a leak detection bellows 51 and a helium pipe 52, one end of the helium pipe 52 is connected with a helium bottle 53, the other end of the helium pipe 52 is communicated with the sealing assembly 4, one end of the leak detection bellows 51 is connected with a mass spectrometric leak detector 54, the other end of the leak detection bellows 51 penetrates through the side wall of the sealing assembly 4 and is communicated with the waterway of the metal base 10, and the gas in the product waterway is vacuumized. When the driving assembly 6 drives the upper cover 41 to move downwards until abutting against the upper surface of the bearing table 42 to realize the sealing of the sealing assembly 4, a closed test environment is provided for the leak detection test, at this time, the sealing assembly is in a sealed state, the helium pipe 52 injects helium into the sealing assembly 4, and the upper heating member 2 and the lower heating member 3 jointly heat the metal base 10, so that the air tightness of the metal base 10 during heating can be detected, the reliability of the detection is improved, and the problem that the helium leaks at room temperature and cannot be detected is avoided. At the same time, after stopping the detection, the helium exhaust operation is performed first, the driving assembly 6 rises and drives the upper heating member 2 to rise, releases the metal base 10, and then the material is manually taken out, which is simple to operate.
[0027] In the embodiment, the mass spectrometric leak detector 54 is a helium mass spectrometric leak detector, and the measurement range is 1x10 -13 Pa. The helium leakage test is performed by using the mass spectrometric leak detector 54 on the metal base 10 in the heated state, so that higher precision is obtained and the situation that the leakage is not detected is avoided.
[0028] In the embodiment, a gap is left between the upper heating member 2 and the upper cover 41, specifically, the upper heating member 2 is in a disc structure, the diameter of which is smaller than the diameter of the accommodating groove 411, so that the upper cover 41 has enough space to accommodate the helium.
[0029] Further, the machine cover 1 comprises an upper support plate 11 and a lower support plate 12 arranged at the lower end of the upper support plate 11, the upper support plate 11 and the lower support plate 12 are arranged in parallel, the bearing table 42 is arranged at the upper end of the lower support plate 12, the driving assembly 6 comprises a pneumatic cylinder 61 and a guide shaft 62, the upper end of the guide shaft 62 is connected with the upper support plate 11, the lower end of the guide shaft 62 is connected with the lower support plate 12, the upper end of the upper cover 41 is provided with a moving plate 7 which is slidingly connected with the guide shaft 62, and the lower end of the telescopic rod of the pneumatic cylinder 61 penetrates through the upper support plate 11 and is connected with the moving plate 7. Specifically, the telescopic rod of the pneumatic cylinder 61 drives the moving plate 7 to move downwards along the guide shaft 62, and drives the upper cover 41 to also move downwards until abutting against the upper end of the bearing table 42 to realize the sealing of the sealing assembly 4, so that the stable downward movement of the lower cover is ensured.
[0030] In the embodiment, the guide shafts 62 are in a rectangular distribution between the upper support plate 11 and the lower support plate 12, and the four peripheral edges of the moving plate 7 are in sliding connection with the guide shafts 62, so as to ensure that the moving plate 7 moves downward along the guide shafts 62 stably.
[0031] Further, the upper heat insulation pad 8 is arranged between the moving plate 7 and the upper cover 41. The upper heat insulation pad 8 can play a heat insulation role, and can block the high-temperature hot air generated by the upper heating member 2, so that the upper cover 41 is not affected by high temperature.
[0032] Further, the lower heat insulation pad 9 is arranged between the lower support plate 12 and the bearing table 42. The lower heat insulation pad 9 can play a heat insulation role, and can block the high-temperature hot air generated by the lower heating member 3, so that the bearing table 42 is not affected by high temperature.
[0033] Further, the upper end of the upper heating member 2 is provided with the connecting rod 21, the upper end of the connecting rod 21 is connected with the upper cover 41, the lower end of the connecting rod 21 is connected with the upper heating member 2, the connecting rod 21 is sleeved with the elastic member 22, the elastic member 22 is located between the upper heating member 2 and the upper cover 41, and the elastic member 22 is used for urging the upper heating member 2 to press the metal base 10 tightly, so as to avoid displacement of the metal base 10.
[0034] Further, the lower end of the lower support plate 12 is communicated with the through pipe 16, the through pipe 16 is communicated with the bearing table 42, the leak detection bellows 51 and the helium pipe 52 are arranged in the through pipe 16, one end of the helium pipe 52 extends into the recess 422 along the axial direction of the through pipe 16, one end of the leak detection bellows 51 extends along the axial direction of the through pipe 16 and is sequentially arranged in the bearing table 42 and the lower heating member 3 and then is communicated with the metal base 10, and the structure is compact, and the occupied space of the device is reduced.
[0035] Further, the detection assembly further comprises the heating pipe 31 arranged in the through pipe 16, one end of the heating pipe 31 extends into the recess 422 along the axial direction of the through pipe 16 and is connected with the lower heating member 3, the structure is compact, and the heating pipe 31 is used for heating the lower heating member 3.
[0036] Further, the cover 1 comprises two first side plates 13 arranged in parallel, upper ends of the two first side plates 13 are connected with two ends of the upper support plate 11 respectively, lower ends of the two first side plates 13 are connected with two ends of the lower support plate 12 respectively, front ends of the two first side plates 13 are respectively provided with safety gratings 17, so as to guarantee the safety of personnel and equipment. Wherein, the two safety gratings 17 are safety grating 17 emitting ends and safety grating 17 receiving ends respectively, the safety grating 17 emitting end and the safety grating 17 receiving end form a light curtain by emitting and receiving infrared light. When an object blocks the light, it can quickly detect and make the equipment stop running, so as to improve the safety performance of the device.
[0037] In the embodiment, the cover 1 further comprises a second side plate 14, an upper end of the second side plate 14 is connected with a rear end of the upper support plate 11, a lower end of the second side plate 14 is connected with a rear end of the lower support plate 12, and two ends of the second side plate 14 are respectively connected with rear ends of the two first side plates 13, that is, the front end of the first side plate 13 is the working position of the device, so as to improve the safety performance of the device.
[0038] Further, the two first side plates 13 are respectively provided with fans 15. The fans 15 are used for cooling the metal base 10 after the detection of the metal base 10 and the separation of the upper cover 41 and the bearing table 42, so as to facilitate the operation personnel to take the metal base 10.
[0039] Further, a sealing ring 43 is arranged between the upper cover 41 and the bearing table 42, so as to improve the sealing performance of the sealing assembly 4.
[0040] The above is only the preferred embodiment of the present application, for the ordinary skilled in the art, according to the idea of the present application, the specific implementation mode and the application range will be changed, the content of the specification should not be understood as the limitation of the present application.
Claims
1. A metal base airtightness detection device, characterized by: The utility model provides a kind of leak detection device, including drive assembly (6), machine cover (1) and the sealing assembly (4) and detection assembly being located in machine cover (1) are all equipped;The detection assembly includes upper heating element (2), lower heating element (3) and leak detection element (5), and the leak detection element (5) is connected with sealing assembly (4);The sealing assembly (4) includes bearing table (42) and the upper cover (41) being located in the upper end of bearing table (42), and the lower end of upper cover (41) is equipped with accommodating groove (411), and upper heating element (2) is placed in accommodating groove (411), and the upper end of bearing table (42) is equipped with recess (422) with accommodating groove (411) being communicated, and lower heating element (3) is placed in recess (422), and the upper end of lower heating element (3) is used to place metal base (10), and the lower end of drive assembly (6) passes through the upper end surface of machine cover (1) and is connected with upper cover (41), and drive assembly (6) is used to drive upper cover (41) to move downwards until abutting on the upper surface of bearing table (42).
2. The metal base airtightness detection device according to claim 1, characterized in that: The leak detection element (5) includes a leak detection bellows (51) and a helium tube (52), the helium tube (52) is in communication with the sealing assembly (4), and the leak detection bellows (51) passes through the side wall of the sealing assembly (4) and is in communication with the metal base (10).
3. The metal base airtightness detection device according to claim 2, characterized in that: The machine cover (1) includes an upper support plate (11) and a lower support plate (12) disposed at the lower end of the upper support plate (11), the upper support plate (11) and the lower support plate (12) are arranged in parallel, the bearing table (42) is disposed at the upper end of the lower support plate (12), the drive assembly (6) includes a pneumatic cylinder (61) and a guide shaft (62), the upper end of the guide shaft (62) is connected with the upper support plate (11), the lower end of the guide shaft (62) is connected with the lower support plate (12), the upper end of the upper cover (41) is provided with a moving plate (7) in sliding connection with the guide shaft (62), and the lower end of the telescopic rod of the pneumatic cylinder (61) passes through the upper support plate (11) and is connected with the moving plate (7).
4. The metal base airtightness detection device according to claim 3, characterized in that: An upper heat insulation pad (8) is arranged between the moving plate (7) and the upper cover (41), and a lower heat insulation pad (9) is arranged between the lower support plate (12) and the bearing table (42).
5. The metal base hermeticity inspection apparatus of claim 1, wherein: The upper end of the upper heating element (2) is provided with a connecting rod (21), the upper end of the connecting rod (21) is connected with the upper cover (41), and the connecting rod (21) is sleeved with an elastic element (22).
6. The metal base airtightness detection device according to claim 3, characterized in that: The lower end of the lower support plate (12) is communicated with a through pipe (16), the through pipe (16) is communicated with the bearing table (42), the leak detection bellows (51) and the helium tube (52) are arranged in the through pipe (16), one end of the helium tube (52) extends into the recess (422) along the axial direction of the through pipe (16), and one end of the leak detection bellows (51) extends along the axial direction of the through pipe (16) and sequentially passes through the bearing table (42) and the lower heating element (3) to be in communication with the metal base (10).
7. The metal base hermeticity detection apparatus of claim 6, wherein: The detection assembly further includes a heating pipe (31) arranged in the through pipe (16), one end of the heating pipe (31) extends into the recess (422) along the axial direction of the through pipe (16) and is connected with the lower heating element (3).
8. The metal base airtightness detection device according to claim 3, characterized in that: The hood (1) comprises two first side plates (13) arranged in parallel, upper ends of the two first side plates (13) are connected with two ends of an upper support plate (11) respectively, lower ends of the two first side plates (13) are connected with two ends of a lower support plate (12) respectively, and front ends of the two first side plates (13) are all provided with safety gratings (17).
9. The metal base hermeticity detection apparatus of claim 8, wherein: The two first side plates (13) are respectively provided with fans (15).
10. The metal base hermeticity inspection apparatus of claim 1, wherein: A sealing ring (43) is arranged between the upper cover (41) and the bearing table (42).