Sulfate radical detection device

Abstract

The utility model discloses a sulfate radical detection device, and relates to the technical field of sulfate radical detection. The sulfate radical detection device comprises a box body, the box body is provided with a plate body, the inner space of the box body is divided into a containing cavity and a mounting cavity by the plate body, and the plate body is provided with a plurality of partition plates used for dividing the containing cavity into a plurality of containing sub-cavities; the box body is provided with feeding pipes corresponding to the containing sub-cavities, the plate body is provided with discharging holes corresponding to the containing sub-cavities, and each discharging hole is provided with a first opening and closing piece. A reaction box body is arranged in the mounting cavity, an opening of the reaction box body faces upwards, and each discharge hole is communicated with the interior of the reaction box body; a material flow hole is formed in the reaction box body, the box body is provided with a sulfate radical detector, the sulfate radical detector is connected to the material flow hole, and the material flow hole is provided with an opening and closing piece II. Various additives can be conveniently added into the chemical agent to be detected, so that sulfate radical analysis is completed.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of sulfate detection, in particular to a sulfate detection device. BACKGROUND

[0002] With the rapid development of the semiconductor industry, chemical agents such as electronic grade hydrofluoric acid as a key wet etchant, the purity requirement is increasing, at present, the components such as residual sulfuric acid, sulfate after water bath volatilization will affect the purity of such chemical agents, so it is necessary to detect and determine the sulfate content to meet the subsequent use requirements.

[0003] At present, a sulfate analysis method is disclosed, first, various different additives such as barium chloride, water, chromium black T indicator and the like are added to the chemical agent to be detected in a predetermined order, among them, barium chloride and chromium black T indicator are added to react with the chemical agent, and water is added to adjust the pH value, then the chemical agent to be detected needs to be heated to meet the detection requirements.

[0004] For the above related technology, the inventors believe that the following defects exist: the above various additives are manually added to the chemical agent to be detected, which needs the continuous intervention of the user in the use process, and the above sulfate analysis method involves more manual participation, which is very inconvenient. CONTENT OF THE UTILITY MODEL

[0005] In order to facilitate the addition of various additives to the chemical agent to be detected to complete the sulfate analysis, the present application provides a sulfate detection device.

[0006] The sulfate detection device provided by the present application adopts the following technical scheme:

[0007] A sulfate detection device, comprising a box body, the box body is provided with a plate body, the plate body divides the space in the box body into a containing cavity and a mounting cavity, a plurality of partition plates for dividing the containing cavity into a plurality of containing sub-cavities are installed on the plate body; a feeding pipe corresponding to each containing sub-cavity is arranged on the box body, and a discharging hole corresponding to each containing sub-cavity is opened on the plate body; an opening and closing member one is installed on each discharging hole; a reaction box body is arranged in the mounting cavity, the reaction box body is opened upward, and each discharging hole is in communication with the inside of the reaction box body; a flow hole is opened on the reaction box body, a sulfate detector is installed on the box body, the sulfate detector is connected to the flow hole, and an opening and closing member two is installed on the flow hole.

[0008] By adopting the technical scheme, first, the chemical agent to be detected is placed in the reaction box body, then different additives to be added are respectively pre-stored in the containing sub-cavity through the feeding pipe, then the opening and closing member one is flexibly controlled to pass the additive to be added into the reaction box body, and after the reaction is completed, the opening and closing member two is driven to open the flow hole to make the chemical agent to be detected flow into the sulfate detector to complete the detection. The way of automatically controlling various additives to enter the reaction box to react with the chemical agent to be detected is more convenient, so that the sulfate detection can be completed conveniently.

[0009] In a specific implementation, the box body is provided with a notch, and a door is installed on the box body to close the notch; the reaction box body and the plate body are detachably connected.

[0010] By adopting the technical scheme, the door can be opened to take out the reaction box body, so that the inside of the reaction box body can be conveniently cleaned.

[0011] In a specific implementation, the reaction box body is provided with a connecting lug, the connecting lug is provided with a connecting hole one, the plate body is provided with a connecting hole two, and the connecting hole one and the connecting hole two are jointly connected with a screw.

[0012] By adopting the technical scheme, the reaction box body can be detached by unscrewing the screw.

[0013] In a specific implementation, a temperature detection member is installed on the inner wall of the reaction box body, a heating pipe is embedded in the box body, the box body is provided with a control module, the heating pipe and the temperature detection member are connected with the control module, and the control module controls the heating pipe to work in response to the detection signal of the temperature detection member.

[0014] By adopting the technical scheme, the temperature detection member can detect the temperature of the chemical agent to be detected in the reaction box body, if the temperature is too low and does not meet the requirement, the control module will receive the detection signal from the temperature detection member to control the heating pipe to work to heat the reaction box body.

[0015] In a specific implementation, the temperature detection member is a temperature sensor.

[0016] In a specific implementation, the bottom end of the box body is provided with a mounting frame, and the mounting frame is provided with universal wheels.

[0017] By adopting the technical scheme, the application can be moved to a designated position for detection.

[0018] In a specific implementation, each feeding pipe is threadedly connected with a closing cover.

[0019] By adopting the technical scheme, the additive can be injected into the feeding pipe by opening the sealing cover, and the sub-cavity can be kept sealed by screwing the sealing cover again.

[0020] In one specific implementation, the opening and closing member one and the opening and closing member two are both valves.

[0021] In summary, the present application has at least one of the following beneficial technical effects:

[0022] 1. First, place the chemical agent to be detected in the reaction box body, then pre-store different additives to be added in the sub-cavity through the feeding pipe, then flexibly control the opening and closing member one to pass the additive to be added into the reaction box body, and after the reaction is completed, drive the opening and closing member two to open the flow hole to make the chemical agent to be detected flow into the sulfate detector to complete the detection. This way of automatically controlling various additives to enter the reaction box to react with the chemical agent to be detected is more convenient, so as to facilitate the completion of sulfate detection;

[0023] 2. The reaction box body can be disassembled by unscrewing the screw, and the reaction box body can be taken out by opening the door, so as to facilitate cleaning of the inside of the reaction box body;

[0024] 3. The temperature detection member can detect the temperature of the chemical agent to be detected in the reaction box body, and if the temperature is too low and does not meet the requirements, the control module will receive the detection signal from the temperature detection member to control the heating pipe to work and heat the reaction box body. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structural schematic diagram of a sulfate detection device according to an embodiment of the present application.

[0026] Figure 2 is a sectional view of a sulfate detection device according to an embodiment of the present application.

[0027] Figure 3 is an exploded view of a connecting lug.

[0028] BRIEF DESCRIPTION OF DRAWINGS 1. box; 11, containing cavity; 111, sub-cavity; 12, mounting cavity; 13, support column; 14, notch; 15, door; 16, mounting frame; 17, universal wheel; 2, plate body; 21, partition; 211, discharge hole; 212, opening and closing member one; 22, connecting hole two; 3, feeding pipe; 31, sealing cover; 4, reaction box body; 41, flow hole; 411, opening and closing member two; 42, connecting lug; 421, connecting hole one; 5, sulfate detector; 6, temperature detection member; 61, heating pipe; 62, control module. DETAILED DESCRIPTION

[0029] The present application will be further described in detail below with reference to the accompanying drawings.

[0030] The embodiment of the present application discloses a sulfate detection device. Various additives can be added in the chemical agent to be detected to complete sulfate analysis. In the embodiment, barium chloride, water and chromium black T indicator are added in the chemical agent to be detected.

[0031] Referring to Figure 1 and Figure 2 , the sulfate detection device comprises a box body 1, the box body 1 is provided with a plate body 2, the plate body 2 divides the space in the box body 1 into a containing cavity 11 and a mounting cavity 12 from top to bottom, a plurality of vertical partition plates 21 for separating the containing cavity 11 into a plurality of containing sub-cavities 111 are arranged on the plate body 2, and the number of the partition plates 21 is three in the embodiment. A feeding pipe 3 is arranged on the upper end of the box body 1 and corresponds to each containing sub-cavity 111, each feeding pipe 3 is communicated with the corresponding containing sub-cavity 111, and a discharging hole 211 is formed in the plate body 2 and corresponds to each containing sub-cavity 111. The discharging hole 211 is arranged in a penetrating mode, and a first opening and closing member 212 is arranged in each discharging hole 211. The first opening and closing member 212 is normally closed and corresponds to the discharging hole 211. The first opening and closing member 212 is a valve. A reaction box body 4 is arranged in the mounting cavity 12, a supporting column 13 is arranged at the bottom end of the box body 1, the reaction box body 4 is arranged in the mounting cavity 12 by means of the supporting column 13, the reaction box body 4 is located below the plate body 2, the reaction box body 4 is open upward, and each discharging hole 211 is communicated with the inside of the reaction box body 4. A flow hole 41 is formed in the bottom end of the reaction box body 4 and arranged in a penetrating mode. A sulfate detector 5 is arranged at the bottom end of the box body 1 and used for detecting the sulfate content. The sulfate detector 5 is a prior art in a specific structure and will not be described here. The sulfate detector 5 is connected to the flow hole 41, and a second opening and closing member 411 is arranged in the flow hole 41. The second opening and closing member 411 is also a valve and is normally closed.

[0032] Barium chloride, water, chromium black T indicator and the chemical agent to be detected are respectively arranged in the four containing sub-cavities 111 in advance. Then, the chemical agent to be detected is introduced into the reaction box body 4 by flexibly controlling the first opening and closing member 212. Then, the barium chloride, water and chromium black T indicator are introduced into the reaction box body 4 by flexibly controlling the plurality of first opening and closing members 212 to complete the reaction. Then, the flow hole 41 is opened by driving the second opening and closing member 411, so that the liquid in the reaction box body 4 enters the sulfate detector 5 to complete the determination of the sulfate.

[0033] Referring to Figure 1 and Figure 2 , in order to facilitate the cleaning of the reaction box body 4, a gap 14 is formed in the box body 1, and a door 15 is hinged to the box body 1 and used for closing the gap 14. The reaction box body 4 is detachably connected to the plate body 2. Specifically, referring to Figure 3The reaction box body 4 is provided with a connecting lug 42, the connecting lug 42 is provided with a connecting hole 421, the plate body 2 is provided with a connecting hole 22, and the connecting hole 421 and the connecting hole 22 are connected by a screw. The door 15 can be opened to disassemble the reaction box body 4 to clean the reaction box body 4.

[0034] Of course, after the reaction box body 4 is taken out, the chemical agent to be detected can also be directly poured into the reaction box body 4 manually.

[0035] Referring to Figure 2 In order to ensure the sealing of the containing sub-cavity 111 and prevent the additive from flowing out or the pungent smell from overflowing, each feeding pipe 3 is threadedly connected with a closing cover 31, and the closing cover 31 can be disassembled / installed to open / close the feeding pipe 3.

[0036] Referring to Figure 1 and Figure 2 In order to make the chemical agent to be detected meet the reaction or detection requirements, a temperature detection piece 6 is installed on the inner wall of the reaction box body 4, the temperature detection piece 6 is a temperature sensor, a heating pipe 61 is also embedded in the box body, the box body 1 is provided with a control module 62, and the heating pipe 61 and the temperature detection piece 6 are connected with the control module 62. The control module 62 controls the heating pipe 61 to work in response to the detection signal of the temperature detection piece 6.

[0037] Referring to Figure 1 In order to move the application to facilitate detection, the bottom end of the box body 1 is provided with a mounting frame 16, and four universal wheels 17 are arranged around the mounting frame 16.

[0038] The implementation principle of the sulfate detection device in the embodiment of the application is as follows:

[0039] Barium chloride, water, chromium black T indicator and the chemical agent to be detected are respectively placed in the four containing sub-cavities 111 in advance, then the chemical agent to be detected is passed into the reaction box body 4 by flexibly controlling the opening and closing piece one 212, then the barium chloride, water and chromium black T indicator are passed into the reaction box body 4 to complete the reaction by flexibly controlling the plurality of opening and closing pieces one 212 according to requirements, and then the flow hole 41 is opened by driving the opening and closing piece two 411 to make the liquid in the reaction box body 4 enter the sulfate detector 5 to complete the determination of sulfate.

[0040] The above are preferred embodiments of the application, and do not limit the protection scope of the application, so that: any equivalent changes made on the basis of the structure, shape, principle of the application should be covered within the protection scope of the application.

Claims

1. A sulfate detection device, characterized by: The utility model provides a sulfuric acid radical detection device, including box (1), box (1) is installed with board (2), board (2) will the space in box (1) divide into containing cavity (11) and installation cavity (12), install a plurality of baffle (21) for containing cavity (11) is divided into a plurality of containing sub-cavity (111) on board (2), box (1) is equipped with feed pipe (3) corresponding to each containing sub-cavity (111), board (2) is opened with discharge hole (211) corresponding to each containing sub-cavity (111), each discharge hole (211) is installed with open and close piece one (212), the installation cavity (12) is equipped with reaction box body (4), reaction box body (4) is opened upwards and each discharge hole (211) is communicated with the inside of reaction box body (4), reaction box body (4) is opened with material flow hole (41), box (1) is installed with sulfate detector (5), sulfate detector (5) is connected to material flow hole (41), material flow hole (41) is installed with open and close piece two (411).

2. The sulfate detection device of claim 1, wherein: Box (1) is opened with notch (14), and the door (15) for closing the notch (14) is installed on the box (1), and the reaction box body (4) and the board (2) are detachably connected.

3. A sulfate detection device according to claim 2, wherein: The connecting lug (42) is provided on the reaction box body (4), the connecting hole one (421) is opened on the connecting lug (42), the connecting hole two (22) is opened on the board (2), and the connecting hole one (421) and the connecting hole two (22) are jointly connected with the screw.

4. The sulfate detection device of claim 1, wherein: The temperature detection piece (6) is installed on the inner wall of the reaction box body (4), the heating pipe (61) is further embedded in the box body, the control module (62) is installed on the box (1), the heating pipe (61) and the temperature detection piece (6) are connected with the control module (62), and the control module (62) controls the heating pipe (61) to work in response to the detection signal of the temperature detection piece (6).

5. A sulfate detection device according to claim 4, wherein: The temperature detection piece (6) is a temperature sensor.

6. The sulfate detection device of claim 1, wherein: The mounting frame (16) is provided at the bottom end of the box (1), and the universal wheel (17) is provided on the mounting frame (16).

7. The sulfate detection device of claim 1, wherein: Each feed pipe (3) is threadedly connected with a closure cover (31).

8. The sulfate detection device of claim 1, wherein: The open and close piece one (212) and the open and close piece two (411) are both valves.

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