Small-dose gluing device

Abstract

The utility model provides a small dose gluing device which comprises a mechanical arm, a photoresist mounting mechanism, a pneumatic propulsion mechanism and a gluing pressure setting mechanism, the mechanical arm can be fixed on a machine table, is in a folded state when the gluing device is in a non-working state and is in an extended state when the gluing device is in a working state, and the pneumatic propulsion mechanism and the gluing pressure setting mechanism are fixed on the machine table. The tail end of the lifting mechanism is connected with the photoresist mounting mechanism; the photoresist mounting mechanism comprises a fixing part, a connecting part and a supporting part, the fixing part, the connecting part and the supporting part form an I-shaped structure, the fixing part is used for being connected with the tail end of the mechanical arm, and a through hole is formed in the edge of the fixing part; the pneumatic propelling mechanism comprises an air pipe, an air pump, an air cylinder and a two-position six-way electromagnetic valve; the gluing pressure setting mechanism is fixed at the lower end of the supporting part and comprises a pressure adjusting knob, a photoresist inlet and a photoresist outlet, and the photoresist inlet is communicated with the air cylinder pipeline. According to the utility model, the problems that the use amount of the photoresist cannot be controlled and the productivity is influenced in the existing manual glue pouring process are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a small dose gluing device. BACKGROUND

[0002] In the process of test and development of photoresist, the photoresist is manually poured on the wafer, and then rotation, exposure and development processes are carried out to analyze the performance of the photoresist. During the pouring process, the side door plate of the track machine is opened, and when the wafer reaches the cot slot, it stays for a period of time, and then the beaker filled with photoresist prepared in advance is manually poured on the wafer to replace the original photoresist pipeline on the track machine.

[0003] During the manual pouring process of the track machine, the following problems may exist: 1. Since the track side door plate needs to be opened for air contact with the wafer, HMDS cannot be applied on the wafer, which may result in excessive photoresist to complete the coat operation and cannot control the amount of photoresist; 2. During the manual coating process, the photoresist may cause some chemical pollution, and generally a gas mask needs to be worn when this step is completed, which still has some safety hazards; 3. If it is not removed in time when it is completed, the photoresist may splash during the spin coating process, causing safety hazards; 4. Manual pouring may also cause unevenness of wafer spin coating due to pouring height and inclination angle.

[0004] Moreover, when evaluating the photoresist, the recipe needs to be modified first to ensure a period of static time before wafer spin coating for manual pouring, which needs to be performed offline and may affect the machine capacity. UTILITY MODEL CONTENTS

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a small dose gluing device to solve the problem of manual pouring that cannot control the amount of photoresist and affects the capacity.

[0006] To achieve the above-mentioned purposes and other related purposes, the utility model provides a small dose gluing device, which comprises a mechanical arm, a photoresist mounting mechanism, a pneumatic propulsion mechanism and a gluing pressure setting mechanism,

[0007] The mechanical arm can be fixed on the machine, and when the gluing device is in a non-working state, it is in a folded state, and when the gluing device is in a working state, it is in an extended state, and the end thereof is connected with the photoresist mounting mechanism;

[0008] The photoresist mounting mechanism comprises a fixed part, a connecting part and a supporting part, and the three parts form a H-shaped structure, wherein the fixed part is used to connect with the end of the mechanical arm, and a through hole is arranged at the edge of the fixed part;

[0009] The pneumatic propulsion mechanism comprises an air pipe, an air pump, an air cylinder and a two-position six-way electromagnetic valve, wherein one end of the air pipe is fixed to the bottom end of the fixed part, the other end is arranged in the air cylinder, and at least two air pipe channels communicating with the inside of the air pipe are arranged on the side of the air pipe, the air cylinder is arranged on one side of the connecting part, a piston is arranged in the air cylinder, and the space below the piston is used to store photoresist, an air cylinder channel communicating with the inside of the air cylinder is arranged at the bottom of the air cylinder, the air pump is fixed to the fixed part through the through hole, and the air pump comprises a motor, an air pump air inlet and an air pump air outlet, the two-position six-way electromagnetic valve comprises a control switch, a first air inlet, a first air outlet, a second air inlet and a second air outlet, the first air inlet communicates with the air pump air outlet, the first air outlet communicates with the air pump air inlet, and the second air inlet and the second air outlet are connected with two air pipe channels respectively;

[0010] The glue coating pressure setting mechanism is fixed to the lower end of the supporting part, and comprises a pressure adjusting knob, a photoresist inlet and a photoresist outlet, and the photoresist inlet communicates with the air cylinder channel.

[0011] Optionally, the photoresist mounting mechanism is detachably connected with the end of the mechanical arm.

[0012] Optionally, the connecting part has a three-sided arc structure.

[0013] Optionally, the outer side of the air pipe channel has threads.

[0014] Optionally, the outer sides of the air pump air inlet and the air pump air outlet have threads.

[0015] Optionally, the inner sides of the first air inlet, the first air outlet, the second air inlet and the second air outlet have threads.

[0016] Optionally, the number of the air cylinders is 3, and the number of the air pipes is the same as the number of the air cylinders.

[0017] Optionally, the number of the second air inlets and the second air outlets is 3.

[0018] Optionally, the air pump air outlet is arranged on one side of the air pump, and the air pump air inlet is arranged at the bottom of the air pump.

[0019] Optionally, the glue coating pressure setting mechanism comprises a pilot-operated pressure relief valve.

[0020] Optionally, the mechanical arm comprises a first mechanical arm, a second mechanical arm and a connecting arm, the first end of the first mechanical arm is used for being fixed on a machine table, the second end of the first mechanical arm is movably connected with the first end of the second mechanical arm, the second end of the second mechanical arm is connected with the first end of the connecting arm, and the second end of the connecting arm is connected with the photoresist mounting mechanism as the terminal end of the mechanical arm.

[0021] Optionally, a servo motor is mounted at the connection between the second end of the first mechanical arm and the first end of the second mechanical arm.

[0022] Optionally, the glue coating device further comprises a battery, an electric wire, an infrared sensor and a programmable logic controller.

[0023] As described above, the small-dose glue coating device can trigger the working start time of the manual glue pouring device through cooperation of the infrared sensor and the mechanical arm, can complete HMDS processing to restore the most real glue coating environment, can accurately control the position, angle, force and spraying amount of glue coating, and can maximize the reduction of human intervention and increase the integrity and operation safety of the process. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 A schematic view showing the small-dose glue coating device of the utility model in a working state.

[0025] Figures 2-4 A schematic view showing the photoresist mounting mechanism, the pneumatic propulsion mechanism and the glue coating pressure setting mechanism of the utility model at different angles.

[0026] Figure 5 A top view of the connecting part of the utility model.

[0027] Figure 6 A schematic view of the air pump of the utility model.

[0028] Figure 7 And Figure 8 A schematic view of the pilot-operated pressure relief valve of the utility model.

[0029] Figure 9 And Figure 10 A schematic view of the glue coating pressure setting mechanism of the utility model.

[0030] BRIEF DESCRIPTION OF DRAWINGS

[0031] 10: mechanical arm; 11: first mechanical arm; 12: second mechanical arm; 13: connecting arm; 20: photoresist installation mechanism; 21: fixed part; 22: connecting part; 23: supporting part; 30: pneumatic propulsion mechanism; 31: air pipe; 311: air pipe pipeline; 32: air pump; 321: motor; 322: air pump air inlet; 323: air pump air outlet; 33: air cylinder; 331: air cylinder pipeline; 34: two-position six-way electromagnetic valve; 341: control switch; 342: first air inlet; 343: first air outlet; 344: second air inlet; 345: second air outlet; 40: photoresist coating pressure setting mechanism; 41: pressure adjusting knob; 42: photoresist inlet; 43: photoresist outlet DETAILED DESCRIPTION

[0032] The other advantages and effects of the present application can be easily understood by those skilled in the art from the content disclosed in the present specification. The present application can also be implemented or applied in other different specific embodiments, and each detail in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application.

[0033] Please refer to Figures 1-10 . It should be noted that the diagrams provided in the present embodiment only illustrate the basic concept of the present application in a schematic manner, and although only the components related to the present application are shown in the diagrams, the actual implementation is not drawn according to the number, shape and size of the components, the actual implementation of each component can be randomly changed, and the component layout form can be more complex.

[0034] As shown in Figure 1 , the present embodiment provides a small-dose photoresist coating device, which comprises a mechanical arm 10, a photoresist installation mechanism 20, a pneumatic propulsion mechanism 30 and a photoresist coating pressure setting mechanism 40.

[0035] In the present embodiment, the small-dose photoresist coating device is used in a track machine.

[0036] The mechanical arm 10 can be fixed on the machine, and is in a folded state when the coating device is in a non-working state, and is in an extended state when the coating device is in a working state, and the end thereof is connected to the photoresist installation mechanism 20.

[0037] Specifically, the mechanical arm 10 comprises a first mechanical arm 11, a second mechanical arm 12 and a connecting arm 13, the first end of the first mechanical arm 11 is used for fixing on a machine table, the second end thereof is movably connected with the first end of the second mechanical arm 12, the second end of the second mechanical arm 12 is connected with the first end of the connecting arm 13, and the second end of the connecting arm 13 as the terminal end of the mechanical arm 10 is connected with the photoresist mounting mechanism 20.

[0038] Specifically, a servo motor is installed at the connection between the second end of the first mechanical arm 11 and the first end of the second mechanical arm 12.

[0039] The photoresist mounting mechanism 20 comprises a fixed part 21, a connecting part 22 and a supporting part 23, and the three parts form a H-shaped structure, wherein the fixed part 21 is used for connecting with the terminal end of the mechanical arm 10, and a through hole is arranged at the edge of the fixed part 21.

[0040] As shown in Figure 2 In the embodiment, the photoresist mounting mechanism 20 is used for mounting small-dose photoresist, and at most three different photoresists can be mounted to ensure that the three photoresists are evaluated at the same time.

[0041] Specifically, the photoresist mounting mechanism 20 is detachably connected with the terminal end of the mechanical arm 10.

[0042] Specifically, the connecting part 22 has a three-sided arc-shaped structure.

[0043] The pneumatic propulsion mechanism 30 comprises an air pipe 31, an air pump 32, an air cylinder 33 and a two-position six-way electromagnetic valve 34, wherein one end of the air pipe 31 is fixed to the bottom end of the fixed part 21, the other end is arranged in the air cylinder 33, and at least two air pipe channels 311 which are in communication with the inside of the air pipe 31 are arranged at the side of the air pipe 31, the air cylinder 33 is arranged at one side of the connecting part 22, a piston is arranged in the air cylinder 33, and the space below the piston is used for storing photoresist, an air cylinder channel 331 which is in communication with the inside of the air cylinder 33 is arranged at the bottom of the air cylinder 33, the air pump 32 is fixed to the fixed part 21 through the through hole, and the air pump 32 comprises a motor 321, an air pump air inlet 322 and an air pump air outlet 323, the two-position six-way electromagnetic valve 34 comprises a control switch 341, a first air inlet 342, a first air outlet 343, a second air inlet 344 and a second air outlet 345, the first air inlet 342 is in communication with the air pump air outlet 323, the first air outlet 343 is in communication with the air pump air inlet 322, and the second air inlet 344 and the second air outlet 345 are respectively connected with two air pipe channels 311.

[0044] In the embodiment, the pneumatic propulsion mechanism 30 provides power source for photoresist coating, the circulation reciprocating action of the cylinder 33 can be controlled through the two-position flow-through electromagnetic valve 34, and the pressure of the cylinder 33 is adjustable, thereby facilitating to provide suitable coating power conditions.

[0045] Specifically, the outer side of the air pipe 311 is provided with threads.

[0046] Specifically, the outer side of the air pump air inlet 322 and the air pump air outlet 323 is provided with threads.

[0047] Specifically, the inner side of the first air inlet 342, the first air outlet 343, the second air inlet 344 and the second air outlet 345 is provided with threads.

[0048] In the embodiment, when the air pump air inlet 322 and the air pump air outlet 323 are connected with the first air outlet 343 and the first air inlet 342, if direct connection is not available, the air pump air inlet 322 and the air pump air outlet 323 can be connected through a threaded communication pipe, one end of the communication pipe is screwed into the first air outlet 343 or the first air inlet 342, and the other end is screwed into the air pump air inlet 322 or the air pump air outlet 323. When the air pipe 311 is connected with the second air inlet 344 or the second air outlet 345, if direct connection is not available, the air pipe 311 can be connected through a threaded communication pipe, one end of the communication pipe is screwed into the second air inlet 344 or the second air outlet 345, and the other end is screwed into the air pipe 311.

[0049] Specifically, the number of the second air inlet 344 and the second air outlet 345 is 3.

[0050] Specifically, the number of the cylinder 33 is 3, and the number of the air pipe 31 is the same as that of the cylinder 33.

[0051] Specifically, the air pump air outlet 322 is arranged on one side of the air pump 32, and the air pump air inlet 323 is arranged at the bottom of the air pump 32.

[0052] The coating pressure setting mechanism 40 includes a pressure adjusting knob 41, a photoresist inlet 42 and a photoresist outlet 43, the photoresist inlet 42 is communicated with the cylinder pipe 332 and is fixed to the lower end of the support part 23.

[0053] In the embodiment, the coating pressure setting mechanism 40 is used to ensure that the photoresist coated on the wafer is uniform, and to avoid crystallization caused by exposure of the photoresist to air.

[0054] Specifically, the glue coating pressure setting mechanism 10 comprises a pilot pressure relief valve.

[0055] In this embodiment, when the pipeline pressure of the pilot pressure relief valve reaches the set value, the photoresist can complete the spraying work. The pressure setting of the pilot pressure relief valve can be adjusted by experience.

[0056] Specifically, the glue coating device further comprises a battery, a wire, an infrared sensor and a programmable logic controller.

[0057] In this embodiment, the infrared sensor is added at both ends of the mechanical arm (cot arm), and when a specific action of the mechanical arm is detected (such as moving up and down three times), a signal is input to the programmable logic controller (PLC), the PLC controls the mechanical arm to move to a specific position, and then controls the extension and retraction of the cylinder through the two-position six-way electromagnetic valve to complete the glue coating work. Different photoresist coating work can be achieved by setting different specific actions of the mechanical arm.

[0058] Further, the glue coating device installation method and working process in this embodiment are as follows:

[0059] 1. First, install the small-dose glue coating device at a corner position of the cot slot, which will not affect the work of the on-line product. The infrared sensor is placed on both sides of the cot arm (mechanical arm) to provide a work signal for the small-dose glue coating device.

[0060] 2. Load the photoresist into the cylinder.

[0061] 3. Ensure that there is no product in the machine, open the track side door, install the cylinder, and then close the track side door.

[0062] 4. Change the track recipe to control the cot arm to move up and down three times in a period of time, and the infrared detection signal moves the photoresist outlet of the pilot pressure relief valve to the center of the wafer.

[0063] 5. The pneumatic propulsion mechanism controls the extension and retraction of the cylinder to complete the photoresist spraying work. There is a pressure throttle valve at the end of the nozzle, which can prevent photoresist backwashing and crystallization.

[0064] 6. After the glue coating is completed, the arm returns to the corner position of the cot slot.

[0065] In summary, the small-dose gluing device can trigger the working start time of the manual glue pouring device through cooperation of the infrared sensor and the mechanical arm, can complete HMDS processing, restore the most real gluing environment, can accurately control the position, angle, force and spraying amount of gluing, and maximally reduces human intervention and increases the integrity and operation safety of the process.

[0066] The above embodiments only exemplarily illustrate the principles and effects of the utility model, and are not used to limit the utility model. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and category of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the utility model should be covered by the claims of the utility model.

Claims

1. A small-dose gumming device, characterized by comprising: It includes: A mechanical arm, a photoresist installation mechanism, a pneumatic propulsion mechanism, and a glue coating pressure setting mechanism, The mechanical arm can be fixed on a machine table, and is in a folded state when the glue coating device is in a non-working state, and is in an extended state when the glue coating device is in a working state. The end thereof is connected with the photoresist installation mechanism; The photoresist installation mechanism includes a fixed part, a connecting part, and a supporting part, and the three form an I-shaped structure, wherein the fixed part is used for connecting with the end of the mechanical arm, and a through hole is arranged at the edge thereof; The pneumatic propulsion mechanism includes an air pipe, an air pump, an air cylinder, and a two-position six-way electromagnetic valve, wherein one end of the air pipe is fixed to the bottom end of the fixed part, the other end is arranged in the air cylinder, and at least two air pipe channels communicating with the inside of the air pipe are arranged at the side of the air pipe. The air cylinder is arranged on one side of the connecting part, a piston is arranged in the air cylinder, and the space below the piston is used for storing photoresist. The bottom of the air cylinder is provided with an air cylinder channel communicating with the inside of the air cylinder. The air pump penetrates through the through hole and is fixed to the fixed part, and includes a motor, an air pump air inlet, and an air pump air outlet. The two-position six-way electromagnetic valve includes a control switch, a first air inlet, a first air outlet, a second air inlet, and a second air outlet. The first air inlet communicates with the air pump air outlet, the first air outlet communicates with the air pump air inlet, and the second air inlet and the second air outlet are respectively connected with two air pipe channels. The glue coating pressure setting mechanism is fixed to the lower end of the supporting part, and includes a pressure adjusting knob, a photoresist inlet, and a photoresist outlet, and the photoresist inlet communicates with the air cylinder channel.

2. The low dosage gluing device according to claim 1, characterized in that The end of the photoresist installation mechanism and the mechanical arm are detachably connected.

3. The low dosage gluing device according to claim 1, characterized in that The connecting part has a three-sided arc structure.

4. The low dosage gluing device according to claim 1, characterized in that The outside of the air pipe channel has threads.

5. The low dosage gluing device according to claim 1, wherein The outside of the air pump air inlet and the air pump air outlet has threads.

6. The low dosage gluing device according to claim 1, wherein The inside of the first air inlet, the first air outlet, the second air inlet, and the second air outlet has threads.

7. The low dosage gluing device according to claim 3, wherein The number of air cylinders is 3, and the number of air pipes is the same as the number of air cylinders.

8. The low dosage gluing device according to claim 7, characterized in that The number of second air inlets and second air outlets is 3.

9. The low dosage gluing device according to claim 1, wherein The air pump air outlet is arranged on one side of the air pump, and the air pump air inlet is arranged at the bottom of the air pump.

10. The low dosage gluing device according to claim 1, wherein The glue coating pressure setting mechanism includes a pilot pressure relief valve.

11. The low dosage gluing device according to claim 1, characterized in that The mechanical arm includes a first mechanical arm, a second mechanical arm, and a connecting arm. The first end of the first mechanical arm is used for fixing on a machine table, the second end thereof is movably connected with the first end of the second mechanical arm, the second end of the second mechanical arm is connected with the first end of the connecting arm, and the second end of the connecting arm serves as the end of the mechanical arm and is connected with the photoresist installation mechanism.

12. The low dosage gluing device according to claim 11, characterized in that A servo motor is arranged at the connection between the second end of the first mechanical arm and the first end of the second mechanical arm.

13. The light application device of claim 1, wherein The glue coating device further includes a battery, a wire, an infrared sensor, and a programmable logic controller.

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