High-precision alignment structure for double-sided simultaneous exposure machine

Abstract

The utility model relates to the technical field of alignment, in particular to a high-precision alignment structure for a double-sided simultaneous exposure machine. The driving part slides on the mounting assembly; the driving table is arranged below the driving part; the frame type discharging platform is fixedly connected to one side of the driving table, when the frame type discharging platform is rotated by 0-90 degrees for use by the driving table and exposure materials are placed on the frame type discharging platform, after the driving table is driven by a driving device to rotate by 90 degrees, an exposure area is in a vertical state, and the exposure materials are placed on the frame type discharging platform. In this way, exposure plates can be conveniently placed on the two sides of the frame type discharging platform, when the frame type discharging platform returns to the horizontal state, the linkage piece can axially move under the action of the driving table, and then in the moving process of the linkage piece, the four corner clamping pieces move along the diagonal positions at the same time, so that the exposure plates are placed on the two sides of the frame type discharging platform. And therefore, the plates on the two sides can be clamped by the corner clamping pieces.

Description

TECHNICAL FIELD

[0001] The utility model relates to a technical field of alignment, especially relates to a high-precision alignment structure for double-side simultaneous exposure machine. BACKGROUND

[0002] The exposure machine is a kind of device, and the pattern on mask (photomask) is transferred to the surface of substrate (such as wafer, PCB, flexible substrate etc.) by optical projection, is widely used in semiconductor manufacturing, microelectronic device processing and photoetching process.

[0003] The existing exposure machine adopts single-side exposure mode, can only carry out exposure once, so low efficiency, and the whole time will also be occupied, when double-side exposure, generally, the horizontal plane upper and lower sides are carried out simultaneously, so it is very troublesome when positioning exposure material. UTILITY MODEL CONTENT

[0004] The utility model discloses a high-precision alignment structure for double-side simultaneous exposure machine, which solves the problem in the background art.

[0005] To achieve the above object, the utility model provides the following technical scheme: a high-precision alignment structure for double-side simultaneous exposure machine, comprising:

[0006] Mounting assembly;

[0007] Drive portion, the drive portion slides on the mounting assembly;

[0008] Drive table, the drive table is arranged below the drive portion;

[0009] Frame type material placing platform, the frame type material placing platform is fixedly connected to one side of the drive table, and the frame type material placing platform is rotated between 0 and 90 degrees by the drive table;

[0010] Corner clamping piece, the corner clamping piece is arranged at four right angles of the inner wall of the frame type material placing platform, and is slidably connected at four right angles of the frame type material placing platform, the corner clamping piece has two placing stations, two placing stations are separated by a positioning strip, a plurality of suction cups are arranged on the two sides of the positioning strip, and the two L-shaped corner clamping pieces close to the drive table side are provided with chamfers on the opposite sides;

[0011] Linkage, one end of the linkage is movably connected to the L-shaped corner clamping piece away from the drive table, and one end of the linkage is in transmission connection with the drive table.

[0012] When in use, when the exposure material is placed on the frame type material placing platform, the driving device drives the driving table to rotate 90 degrees, and the exposure area is in a vertical state, so that the exposure plate is placed on both sides of the frame type material placing platform, and when the frame type material placing platform returns to a horizontal state, the linkage member moves axially under the action of the driving table, and the four corner clamping members move along diagonal positions in the process of movement of the linkage member, so that the plate on both sides is clamped by the corner clamping members.

[0013] Further, the mounting assembly comprises a mounting plate, one side of the mounting plate is provided with a sliding rod one, the sliding rod one is provided with a driving sliding table, and two sliding rods two are further provided, the two sliding rods two are provided with a sliding seat in sliding mode, and one side of the mounting plate is provided with a plate chain.

[0014] Further, the sliding seat is provided with a driving device, and the output end of the corner clamping member is provided with a gear set for rotating the driving table.

[0015] Further, the driving table comprises a fixed shaft rotating on the mounting assembly, the fixed shaft is driven to rotate by a motor, a sleeve shaft is rotatingly arranged on the fixed shaft, a gear ring is sleeved on the sleeve shaft, the gear ring is provided with short teeth, one end of the fixed shaft is fixedly connected with a linkage member, and the sleeve shaft is fixedly connected to the mounting assembly.

[0016] When adjusting from a horizontal state to a vertical state, the motor drives the fixed shaft to rotate, and since the sleeve shaft does not rotate, the driving gear on the linkage member always rotates on the surface of the suction cup. When passing through the short teeth, the frame type material placing platform is rotated to a horizontal state, and then the plate is placed, and after the placement is completed, the driving gear is in contact with the short teeth when it returns to a horizontal state, so that it can be quickly reset. In this process, the driving gear moves the pull plate to one side, and at this time the linkage member clamps the corner clamping member to the plate.

[0017] Further, the corner clamping member further comprises an L-shaped corner, and a sleeve groove is formed in the L-shaped corner.

[0018] The frame type material placing platform is provided with a wedge, and the wedge is in contact with the chamfer.

[0019] Further, the linkage member comprises a pull plate, one side of the pull plate is fixedly connected with a rotary contraction sleeve, the movable end of the rotary contraction sleeve is fixedly connected with a driving gear, the inner side of the pull plate is fixedly connected with a connecting strip, one side of the connecting strip is fixedly connected with a linkage plate, the linkage plate is provided with an inclined groove, the linkage plate is close to the L-shaped corner away from the driving table, a guide rod is sleeved in the inclined groove, one end of the guide rod is fixedly connected to the surface of the L-shaped corner, one end of the pull plate is provided with a trigger inclined surface, and the trigger inclined surface is in contact with the corner clamping member close to the driving table.

[0020] Further, the rotating shrink sleeve is provided with a 90-degree spiral groove, and the slider on the movable end of the rotating shrink sleeve slides in the spiral groove.

[0021] In the specific feeding process, when the frame type feeding platform is in the vertical state, the packaging boards are placed in the frame type feeding platform on both sides synchronously, the positioning strips on the corner clamping pieces can separate the boards on both sides, of course, the frame type feeding platform is also provided with components for supporting the boards on both sides, and the suction cups on the positioning strips can adsorb the boards, so that in the resetting process, when the driving gear rotates, the rotating shrink sleeve rotates and is arranged on one side of the pull plate through the connecting shaft, the driving gear drives the slider on the movable end to slide in the spiral groove, so that the frame type feeding platform is reset and rotates by 90 degrees, and the rotating shrink sleeve can pull the pull plate, at this time, the connecting strips on both sides move synchronously, the L-shaped corner clamping pieces are horizontally moved under the action of the inclined surface, and after being in contact with the wedge block, the L-shaped corner clamping pieces move along the diagonal line of the frame type feeding platform, in this process, the other two L-shaped corner clamping pieces move along the diagonal line under the action of the inclined groove and the guide rod, and the clamping effect is realized, which is convenient to use and simple to operate.

[0022] The technical effects and advantages of the utility model are as follows:

[0023] 1. When the exposure material is placed in the frame type feeding platform, the driving device drives the driving table to rotate by 90 degrees, and the exposure area is in the vertical state, so that the exposure boards can be placed on both sides of the frame type feeding platform, when the frame type feeding platform returns to the horizontal state, the linkage moves axially under the action of the driving table, and in the movement process of the linkage, the four corner clamping pieces move along the diagonal line, and the boards on both sides can be clamped by the corner clamping pieces.

[0024] 2. When the horizontal state is adjusted to the vertical state, the motor drives the fixed shaft to rotate, and the sleeve shaft does not rotate, at this time, the driving gear on the linkage always rotates on the surface of the suction cup, when the short tooth gear is passed, the frame type feeding platform rotates to the horizontal state, and the boards can be placed conveniently, after the placement is completed, the driving gear is in contact with the short tooth gear when it returns to the horizontal state, so that the boards can be reset quickly, in the process, the driving gear moves the pull plate to one side, and the linkage clamps the boards by the corner clamping pieces. BRIEF DESCRIPTION OF DRAWINGS

[0025] Fig. 1 It is a perspective view of the utility model;

[0026] Fig. 2 It is a top view of the utility model;

[0027] Fig. 3 It is a schematic view of the corner clamping piece of the utility model;

[0028] Fig. 4 The schematic view of the linkage member of the utility model.

[0029] In the drawing:

[0030] 1, mounting plate; 2, slide bar one; 3, link iron; 4, plate chain; 5, slide bar two; 6, slide; 7, drive table; 71, fixed shaft; 72, sleeve shaft; 73, gear ring; 8, corner clamping member; 81, L-shaped corner clamping; 82, sleeve groove; 83, suction disc; 84, positioning strip; 85, chamfer; 9, linkage member; 91, pull plate; 92, rotary retracting sleeve; 93, drive gear; 94, connecting strip; 95, linkage plate; 96, inclined groove; 97, guide rod; 98, trigger inclined surface; 10, position detector; 11, drive device; 12, frame type material discharging platform; 121, wedge block. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0032] Referring to Figs. 1 to 4 A high-precision alignment structure for a double-sided simultaneous exposure machine, comprising:

[0033] A mounting assembly;

[0034] A drive portion, which slides on the mounting assembly;

[0035] A drive table 7, which is arranged below the drive portion;

[0036] A frame type material discharging platform 12, which is fixedly connected to one side of the drive table 7 and is rotated by the drive table 7 between 0 and 90 degrees;

[0037] A corner clamping member 8, which is arranged at four right angles of the inner wall of the frame type material discharging platform 12 and is slidingly connected to the four right angles of the frame type material discharging platform 12, and has two placing stations, which are separated by a positioning strip 84, and a plurality of suction discs 83 are arranged on both sides of the positioning strip 84, and chamfers 85 are arranged on the opposite sides of the two L-shaped corner clamping members 81 close to the drive table 7;

[0038] A linkage member 9, one end of which is movably connected to the L-shaped corner clamping member 81 away from the drive table 7, and the other end of the linkage member 9 is drivingly connected to the drive table 7.

[0039] In use, when the exposure material is placed on the frame material placing platform 12, the driving device 11 drives the driving table 7 to rotate 90 degrees, and the exposure area is in a vertical state, so that the exposure plate is placed on both sides of the frame material placing platform 12, and when the frame material placing platform 12 returns to a horizontal state, the linkage 9 can move axially under the action of the driving table 7, and the four corner clamping pieces 8 are moved along diagonal positions in the movement of the linkage 9, so that the plate on both sides is clamped by the corner clamping pieces 8.

[0040] The mounting assembly comprises a mounting plate 1, one side of the mounting plate 1 is provided with a sliding rod 1, the sliding rod 1 is provided with a driving sliding table, and two sliding rods 2 are further provided, the two sliding rods 2 are slidably provided with a sliding seat 6, and one side of the mounting plate 1 is provided with a plate chain 4.

[0041] The sliding seat 6 is provided with a driving device 11, and the output end of the corner clamping piece 8 is provided with a gear set for rotating the driving table 7.

[0042] The driving table 7 comprises a fixed shaft 71 rotating on the mounting assembly, the fixed shaft 71 is driven to rotate by a motor, the fixed shaft 71 is provided with a sleeve shaft 72 rotating thereon, the sleeve shaft 72 is provided with a gear ring 73 sleeved thereon, the gear ring 73 is provided with short teeth, one end of the fixed shaft 71 is fixedly connected with a linkage 9, and the sleeve shaft 72 is fixedly connected to the mounting assembly.

[0043] In the process of adjusting from a horizontal state to a vertical state, the motor drives the fixed shaft 71 to rotate, and since the sleeve shaft 72 does not rotate, the driving gear 93 on the linkage 9 always rotates on the surface of the suction cup 83 at this time, and when passing through the short teeth, the frame material placing platform 12 is rotated to a horizontal state, so that the plate is placed, and after the placement is completed, the driving gear 93 is in contact with the short teeth when it returns to a horizontal state, so that it can be quickly reset, and in this process, the driving gear 93 moves the pull plate 91 to one side, and at this time the linkage 9 clamps the plate by the corner clamping piece 8.

[0044] The corner clamping piece 8 further comprises an L-shaped corner clamping piece 81, and the L-shaped corner clamping piece 81 is provided with a sleeve groove 82;

[0045] The frame material placing platform 12 is provided with a wedge 121 in contact with the chamfer 85.

[0046] The linkage 9 comprises a pull plate 91, one side of the pull plate 91 is fixedly connected with a rotary contraction sleeve 92, the movable end of the rotary contraction sleeve 92 is fixedly connected with a driving gear 93, the inner side of the pull plate 91 is fixedly connected with a connecting strip 94, one side of the connecting strip 94 is fixedly connected with a linkage plate 95, the linkage plate 95 is provided with an inclined groove 96, the linkage plate 95 is close to the L-shaped corner 81 away from the driving table 7, the inclined groove 96 is provided with a guide rod 97, one end of the guide rod 97 is fixedly connected to the surface of the L-shaped corner 81, one end of the pull plate 91 is provided with a trigger inclined surface 98, the trigger inclined surface 98 is in contact with the corner piece 8 close to the driving table 7.

[0047] The rotary contraction sleeve 92 is provided with a 90-degree spiral groove, and the slider on the movable end of the rotary contraction sleeve 92 slides in the spiral groove.

[0048] Specifically, during the feeding process, when the frame type feeding platform 12 is in a vertical state, the packaging boards on both sides are placed in the frame type feeding platform 12 synchronously, the positioning strip 84 on the corner piece 8 can separate the boards on both sides, and of course the frame type feeding platform 12 is also provided with a component for supporting the boards on both sides, so that the suction cups 83 on the positioning strip 84 can play a role in adsorbing the boards, so that during the resetting process, when the driving gear 93 rotates, the rotary contraction sleeve 92 rotates through the connecting shaft and is arranged on one side of the pull plate 91, the driving gear 93 drives the slider on the movable end to slide in the spiral groove, so that the frame type feeding platform 12 is rotated by 90 degrees, and the rotary contraction sleeve 92 can drive the pull plate 91 to move, at this time, the connecting strips 94 on both sides move synchronously, at this time, the trigger inclined surface 98 makes the L-shaped corner 81 move horizontally and contact the wedge block 121, so that the L-shaped corner 81 moves along the diagonal line of the frame type feeding platform 12, and in this process, the other two L-shaped corners 81 move along the diagonal line under the action of the inclined groove 96 and the guide rod 97, thereby realizing the clamping effect, which is convenient to use and simple to operate.

[0049] Finally, it should be noted that: the above only describes the preferred embodiments of the present application, and is not intended to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A high-precision alignment structure for a double-sided simultaneous exposure machine, characterized in that, Include: Mounting assembly; Driving part, the driving part slides on the mounting assembly; Driving table (7), the driving table (7) is arranged below the driving part; Frame type material placing platform (12), the frame type material placing platform (12) is fixedly connected on one side of the driving table (7), and the frame type material placing platform (12) is rotated between 0 and 90 degrees by the driving table (7); Corner clamping piece (8), the corner clamping piece (8) is arranged at the four right angles of the inner wall of the frame type material placing platform (12), and is slidably connected at the four right angles of the frame type material placing platform (12), the corner clamping piece (8) has two placement stations, two placement stations are separated by a positioning strip (84), a plurality of suction cups (83) are arranged on both sides of the positioning strip (84), and two L-shaped corner clamps (81) close to the driving table (7) side are provided with chamfers (85) on the opposite sides; Linkage (9), one end of the linkage (9) is movably connected to the L-shaped corner clamp (81) away from the driving table (7), and one end of the linkage (9) is in transmission connection with the driving table (7).

2. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 1, characterized in that, The mounting assembly includes a mounting plate (1), one side of the mounting plate (1) is provided with a slide rod one (2), the slide rod one (2) is provided with a driving slide table, and two slide rod twos (5) are further provided, the slide seat (6) is slidably arranged on the two slide rod twos (5), and one side of the mounting plate (1) is provided with a plate chain (4).

3. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 2, characterized in that, The slide seat (6) is provided with a driving device (11), and the output end of the corner clamping piece (8) is provided with a gear set for rotating the driving table (7).

4. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 3, characterized in that, The driving table (7) includes a fixed shaft (71) rotating on the mounting assembly, the fixed shaft (71) is driven to rotate by a motor, the fixed shaft (71) is rotatably provided with a sleeve shaft (72), the sleeve shaft (72) is sleeved with a gear ring (73), the gear ring (73) is provided with short teeth, one end of the fixed shaft (71) is fixedly connected with the linkage (9), and the sleeve shaft (72) is fixedly connected on the mounting assembly.

5. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 4, characterized in that, The corner clamping piece (8) further includes an L-shaped corner clamp (81), the L-shaped corner clamp (81) is provided with a sleeve groove (82), and the sleeve groove (82) is clamped on the frame type material placing platform (12); The frame type material placing platform (12) is provided with a wedge block (121), and the wedge block (121) is in contact with the chamfer (85).

6. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 5, characterized in that, The linkage (9) includes a pull plate (91), one side of the pull plate (91) is fixedly connected with a rotary contraction sleeve (92), the movable end of the rotary contraction sleeve (92) is fixedly connected with a drive gear (93), the inner side of the pull plate (91) is fixedly connected with a connecting strip (94), one side of the connecting strip (94) is fixedly connected with a linkage plate (95), the linkage plate (95) is provided with an inclined groove (96), the linkage plate (95) is close to an L-shaped corner (81) away from the drive table (7), the inclined groove (96) is provided with a guide rod (97), one end of the guide rod (97) is fixedly connected with the surface of the L-shaped corner (81), one end of the pull plate (91) is provided with a trigger inclined surface (98), and the trigger inclined surface (98) is in contact with the corner piece (8) close to the drive table (7).

7. The high-precision alignment structure for a double-sided simultaneous exposure machine according to claim 6, characterized in that, The rotary contraction sleeve (92) is provided with a 90-degree spiral groove, and the slider on the movable end of the rotary contraction sleeve (92) slides in the spiral groove.

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