One-key box opening tool capable of replacing wafer box

Abstract

The utility model provides a one-key box opening tool capable of replacing a wafer box, which is used for opening a wafer loading device in a one-key manner and comprises a bottom plate arranged on the wafer loading device; the wafer loading device is provided with a first sensor and two second sensors, and the bottom plate abuts against the first sensor; the storage box is arranged on the bottom plate, the storage box is arranged between the two second sensors, and the storage box is used for storing wafers; the outer cover covers the side face of the storage box and is used for shielding signals sent by the two second sensors, and an opening is formed in the side, facing the inlet of the wafer loading device, of the storage box. According to the wafer loading device, the first sensor is pressed down through the bottom plate, and the signal between the two second sensors is shielded through the outer cover, so that box opening operation is performed on the wafer loading device, the time of manual operation is saved, and the efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing technical field especially relates to a one-key opening tool of replacing wafer box. BACKGROUND

[0002] In the wafer processing process, the wafer box (FOUP, Front Opening Unified Pod) is an important component, which is used to ensure the safe transfer of wafers between various production stages, reducing the risk of manufacturing failure caused by pollution or damage. The outer surface of the wafer box is usually dark and opaque, so it is difficult to observe the wafer box inside the machine. During the production process, it is usually necessary for a person to enter the machine to position the mechanical hand and the wafer box with mechanical tools. However, this method has a high safety risk, and the space inside the machine is limited, making it inconvenient to operate.

[0003] Although there is a way to replace the wafer box with a specific tool in the prior art, the specific tool is placed outside the machine, making it easy to observe. Although the specific tool makes it easy to observe the internal wafer, the specific tool does not have the one-key opening capability of the wafer box, so when the specific tool enters the wafer loading device (Loadport), manual operation of the wafer loading device is required to open the box, thereby opening the entrance of the wafer loading device to allow the mechanical hand to pick up the wafer. This method increases the operation time and seriously affects the production efficiency. SUMMARY

[0004] The utility model provides a one-key opening tool of replacing wafer box to solve the problem of long operation time and low efficiency caused by the specific tool in the prior art.

[0005] The utility model provides a one-key opening tool of replacing wafer box for one-key opening of the wafer loading device, comprising:

[0006] The bottom plate is provided on the wafer loading device;

[0007] The wafer loading device is provided with a first sensor and two second sensors, and the bottom plate is in abutment with the first sensor;

[0008] The storage box is provided on the bottom plate, and the storage box is provided between the two second sensors, and the storage box is used for storing wafers;

[0009] The cover covers the side of the storage box, and is used for shielding the signals sent between the two second sensors, and the storage box is provided with an opening towards one side of the closed door of the wafer loading device.

[0010] According to the one-key opening tool for replacing wafer boxes provided by the utility model, one side of the bottom plate and the wafer loading device is provided with a pressing block, and the pressing block is in abutment with the first sensor.

[0011] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the pressing block is correspondingly arranged with the first sensor.

[0012] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the wafer loading device is further provided with a positioning column, one side of the bottom plate and the wafer loading device is further provided with a positioning groove, and the positioning groove and the positioning column are in mutual alignment and clamped.

[0013] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the positioning groove is a rectangular groove, and the surface is provided with a wear-resistant layer.

[0014] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the outer cover is made of transparent material.

[0015] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the storage box comprises at least three stand columns and a top plate, the three stand columns are arranged at intervals on the bottom plate, and the top plate is arranged on the side, away from the bottom plate, of the three stand columns.

[0016] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the top plate is provided with an observation hole, and the observation hole is in communication with the inner cavity of the storage box and the outside.

[0017] According to the one-key opening tool for replacing wafer boxes provided by the utility model, along the length direction of the stand column, the stand column is provided with a plurality of clamping grooves, and the clamping grooves are used for limiting the wafer.

[0018] According to the one-key opening tool for replacing wafer boxes provided by the utility model, the three stand columns are arranged according to the three vertices of an equilateral triangle on the bottom plate.

[0019] This invention provides a one-click wafer cassette opening fixture that can replace a wafer cassette. It has a base plate on which a storage box is arranged to store wafers. When the one-click wafer cassette opening fixture is placed on a wafer loading device, the base plate abuts against a first sensor on the wafer loading device, triggering the first sensor. An outer cover is then provided on the side of the storage box, placing it between two second sensors to block signal transmission between them. This meets the signal conditions for the wafer loading device to open the cassette automatically. The entire process requires no manual operation; simply placing the one-click wafer cassette opening fixture on the wafer loading device is sufficient. Furthermore, an opening is provided on the side of the storage box facing the wafer loading device's inlet, allowing a robotic arm to directly reach into the storage box and grasp the wafer after the wafer loading device automatically opens the cassette. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the one-click wafer box opening tooling provided by this utility model, which can replace the wafer box.

[0022] Figure 2 yes Figure 1 The diagram shows the bottom of a one-click wafer box opening fixture that can replace a wafer box.

[0023] Figure 3 This is a schematic diagram of the wafer loading device provided by this utility model.

[0024] Figure 4 This is a schematic diagram of the one-click wafer unpacking fixture and wafer loading device provided by this utility model after assembly.

[0025] Figure label:

[0026] 1. Base plate; 11. Pressing block; 12. Positioning groove;

[0027] 2. Wafer loading device; 21. First sensor; 22. Second sensor; 23. Positioning post; 24. Shielding door;

[0028] 3. Storage box; 31. Column; 32. Top plate; 33. Observation hole;

[0029] 4. Wafers;

[0030] 5. Outer cover. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] A wafer box is a wafer box.

[0033] The following is combined Figure 1 This invention describes a one-click wafer cassette opening fixture that can replace a wafer cassette, comprising a base plate 1, a wafer loading device 2, a storage box 3, a wafer 4, and an outer cover 5. The base plate 1 is mounted on the wafer loading device 2. The wafer loading device 2 is equipped with a first sensor 21 and two second sensors 22, and the base plate 1 abuts against the first sensor 21. The storage box 3 is mounted on the base plate 1 and positioned between the two second sensors 22, and is used to store the wafer 4. The outer cover 5 covers the side of the storage box 3 to block signals transmitted between the two second sensors 22, and the storage box 3 has an opening on the side facing the closed door of the wafer loading device 2.

[0034] Please refer to the above as well. Figures 1 to 4 The base plate 1 is preferably a rectangular flat plate, on which the storage box 3 is mounted. The storage box 3 has a hollow structure, allowing the wafer 4 to be stored within its internal space, and the internal contour of the storage box 3 must correspond to the outer contour of the wafer 4. Typically, the wafer 4 is circular, so the size of the hollow portion inside the storage box 3 must be greater than or equal to the diameter of the wafer 4. Since the wafers 4 need to be stacked in the storage box 3, the storage box 3 has multiple protrusions extending towards its central axis to support the wafers 4. After the wafers 4 are stored in the storage box 3, they can be transferred on the production line via the storage box 3.

[0035] like Figure 3 As shown, the wafer loading device 2 has a platform for placing the one-click unpacking fixture that can replace the wafer cassette. The platform on the wafer loading device 2 is horizontally arranged, and a vertically arranged shielding door 24 is located on one side of the platform, serving as the entrance to the wafer loading device 2. During production, this shielding door 24 needs to be opened to allow the robotic arm to pass through the entrance and pick up the wafer 4. Therefore, the unpacking operation of the wafer loading device 2 involves opening the shielding door 24.

[0036] The shield door 24 needs to be opened by operating the wafer loading device 2 to receive the corresponding signal. A plurality of first sensors 21 are installed on the platform of the wafer loading device 2. In this application, the first sensors 21 are selected as induction sensors (placements). Then at least two second sensors 22 are provided on the wafer loading device 2. In this application, the second sensors 22 are selected as in-place sensors. The two second sensors 22 are arranged oppositely so that the light signals emitted therebetween are detected. The first sensors 21 need to be pressed to send signals, and the two second sensors 22 need to shield the light beam signals between them to provide the required opening box signals.

[0037] In this embodiment, the bottom plate 1 receives the storage box 3 containing the wafer 4. The first sensors 21 are pressed by the bottom plate 1. Because the storage box 3 has its own weight and contains the wafer 4 inside, the overall gravity is sufficient to press the plurality of first sensors 21 into place to provide the opening box signal. Each first sensor 21 on the wafer loading device 2 is provided with a positioning column 23, so the bottom plate 1 needs to avoid the top of the positioning column 23 when it is pressed. The bottom plate 1 can avoid the positioning column 23 in many ways, for example, after the bottom plate 1 is pressed against the positioning column 23, a protrusion is provided on the bottom plate 1 at each position corresponding to the first sensor 21, so that the bottom plate 1 has enough length to press against the first sensor 21. Alternatively, a groove is provided on the bottom plate 1 at each position corresponding to the positioning column 23, and the height of the groove is greater than or equal to the height of the positioning column 23, so that when the bottom plate 1 is pressed against the first sensor 21, there is enough space on the bottom plate 1 to avoid the top of the positioning column 23. The specific implementation can be selected according to the actual situation, which is not limited in this application.

[0038] When the bottom plate 1 is placed on the wafer loading device 2, the first sensors 21 are pressed to provide the first opening box signal. At this time, the storage box 3 is placed between the two second sensors 22. Because the storage box 3 has good openness for observation, the storage box 3 cannot block the light beam signals emitted between the two second sensors 22. Therefore, in this embodiment, an outer cover 5 is provided outside the storage box 3 to block the light beam signals emitted between the two second sensors 22 to provide the second opening box signal. Thus, the required signals for opening the box are met, and the wafer loading device 2 can automatically open the box and open the shield door 24.

[0039] Further, the wafer 4 in the storage box 3 needs to be picked up after the shielding door 24 is opened. Therefore, the side of the storage box 3 facing the shielding door 24 is in an open state, thereby avoiding the obstruction to the mechanical hand. That is, the outer cover 5 is only arranged on the other side of the storage box 3, and the outer cover 5 is not arranged on the side of the storage box 3 facing the shielding door 24, thereby not causing obstruction.

[0040] In the present application, the bottom plate 1 and the outer cover 5 are arranged to meet the triggering conditions of the two box opening signals, so that after the wafer box can be replaced by the one-key box opening tool is placed on the wafer loading device 2, the wafer loading device 2 can be automatically opened, without the need for additional operations, thereby greatly improving the work efficiency and saving human resources.

[0041] In an embodiment, the side of the bottom plate 1 abutting against the wafer loading device 2 is further provided with a pressing block 11, and the pressing block 11 abuts against the first sensor 21. In an embodiment, the pressing block 11 is correspondingly arranged with the first sensor 21.

[0042] As shown in Figure 2 The bottom plate 1 is provided with a pressing block 11 at the bottom, that is, the side of the bottom plate 1 abutting against the wafer loading device 2. The area of the pressing block 11 corresponds to the pressing range, and the pressing range of the pressing block 11 covers three first sensors 21. Because three first sensors 21 are taken as an example for description in the present embodiment, the pressing block 11 is approximately in the shape of “Y” in the present embodiment, and the three ends of the pressing block 11 correspond to the positions of the three first sensors 21, so that after the bottom plate 1 is placed on the wafer loading device 2, the pressing block 11 can press the three first sensors 21. The pressing block 11 is designed in the shape of “Y”, so that the pressing block 11 is correspondingly arranged with the first sensor 21, thereby reducing the overall size of the pressing block 11 while meeting the requirement of pressing the three first sensors 21. At the same time, the design of the pressing block 11 in the shape of “Y” can also provide better stability for the bottom plate 1 when the pressing block 11 abuts against the wafer loading device 2.

[0043] In an embodiment, the wafer loading device 2 is further provided with a positioning column 23, and the side of the bottom plate 1 abutting against the wafer loading device 2 is further provided with a positioning groove 12, and the positioning groove 12 and the positioning column 23 are correspondingly aligned and clamped. In an embodiment, the positioning groove 12 is a rectangular groove, and the surface of the positioning groove 12 is provided with a wear-resistant layer.

[0044] Please refer to Figure 2 and Figure 3In the embodiment, three first sensors 21 are taken as an example, and three positioning columns 23 are arranged correspondingly, and one positioning column 23 is arranged correspondingly beside each first sensor 21. The positioning columns 23 on the wafer loading device 2 prevent the first sensors 21 from being touched by mistake and ensure that the signals are not triggered by mistake. In the embodiment, three positioning grooves 12 are arranged correspondingly at the bottom of the bottom plate 1, and the positions of the positioning grooves 12 correspond to the positions of the positioning columns 23.

[0045] After the bottom plate 1 is placed on the wafer loading device 2, each positioning groove 12 is aligned with one positioning column 23. During the process of placing the bottom plate 1, the positioning column 23 is inserted into the positioning groove 12, so that the clamping is achieved. In the embodiment, the positioning groove 12 is designed as a rectangular groove, so that after the positioning column 23 is inserted into the positioning groove 12, the positioning column 23 abuts against the inner wall of the positioning groove 12, preventing the positioning column 23 from rotating and improving the stability. At the same time, the positioning groove 12 and the positioning column 23 abut against each other, and friction between them may occur. Therefore, the surface of the positioning groove 12 is provided with a wear-resistant layer, so as to prolong the service life of the positioning groove 12.

[0046] In an embodiment, the cover 5 is made of transparent material. Because the cover 5 is arranged outside the storage box 3, it will block the inside of the storage box 3. Therefore, in the embodiment, the cover 5 is designed to be transparent, so that the operator can directly observe the storage condition inside the storage box 3 from the outside. Further, in different embodiments, the cover 5 can also be designed to be opaque to improve the protection performance of the cover 5. The specific condition is selected according to the actual condition, which is not limited here. At the same time, the connection between the cover 5 and the storage box 3 can be designed to be detachable, so that the subsequent disassembly and maintenance are more convenient.

[0047] In an embodiment, the storage box 3 includes at least three columns 31 and a top plate 32, and the three columns 31 are arranged at intervals on the bottom plate 1, and the top plate 32 is arranged on the side of the three columns 31 away from the bottom plate 1. In an embodiment, the top plate 32 is provided with an observation hole 33, and the observation hole 33 communicates the inner cavity of the storage box 3 with the outside.

[0048] As shown in Figure 1 the inner space of the storage box 3 in the embodiment is enclosed by the three columns 31, so that there is no obstruction between the two adjacent columns 31, improving the openness of the storage box 3 and facilitating the observation of the internal condition. The three columns 31 are adjacent to each other, and there are three side surfaces, two of which are provided with the cover 5 for protection. On the side surface facing the shielding door 24, the cover 5 is not arranged, so that the position of the storage box 3 at this place is in an open state, facilitating the clamping of the mechanical hand.

[0049] Meanwhile, a top plate 32 is provided on top of the three pillars 31 to cover the top of the three pillars 31. The bottom plate 1 is used to close the bottom of the three pillars 31, and the outer cover 5 is used to close the sides of the three pillars 31, thereby ensuring the protective performance of the entire storage box 3 and preventing the wafers 4 inside the storage box 3 from being damaged. At the same time, an observation hole 33 is also provided on the top plate 32, through which the condition of the wafers 4 inside the storage box 3 can be observed.

[0050] In one embodiment, the pillar 31 is provided with multiple slots along its length for positioning the wafer 4. In another embodiment, three pillars 31 are arranged on the base plate 1 at the three vertices of an equilateral triangle.

[0051] like Figure 1 As shown, in this embodiment, wafers 4 are stored by creating slots on the pillars 31. Therefore, the number of slots on the pillars 31 determines the number of wafers 4 that can be stored; if the pillars 31 have multiple slots, multiple wafers 4 can be stored. Furthermore, in this embodiment, the three pillars 31 are arranged on the base plate 1 according to the three vertices of an equilateral triangle, making the overall structure more stable.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A one-key unloading tooling for one-key unloading of a wafer carrier, for one-key opening of a wafer loading device, characterized in that, include: A base plate (1) is disposed on the wafer loading device (2); A wafer loading device (2) is provided with a first sensor (21) and two second sensors (22), and the base plate (1) abuts against the first sensor (21); Storage box (3), the storage box (3) is disposed on the base plate (1) and the storage box (3) is disposed between the two second sensors (22), the storage box (3) is used to store the wafer (4). The outer cover (5) covers the side of the storage box (3) to block the signals sent between the two second sensors (22). The storage box (3) has an opening on the side facing the entrance of the wafer loading device (2).

2. The one-key open cassette tool for replaceable wafer cassette according to claim 1, wherein, The base plate (1) is further provided with a pressure block (11) on the side that abuts against the wafer loading device (2), and the pressure block (11) abuts against the first sensor (21).

3. The one-key openable reticle pod of claim 2, wherein, The pressure block (11) is configured in correspondence with the first sensor (21).

4. The one-key open cassette tooling of claim 1, wherein, The wafer loading device (2) is also provided with a positioning post (23), and the side of the base plate (1) that abuts against the wafer loading device (2) is also provided with a positioning groove (12), and the positioning groove (12) and the positioning post (23) are aligned and engaged with each other.

5. The one-key openable disposable FOUP of claim 4, wherein, The positioning groove (12) is a rectangular groove, and the surface is provided with a wear-resistant layer.

6. The one-key open cassette tooling of claim 1, wherein, The outer cover (5) is made of transparent material.

7. The one-key open cassette tooling of claim 1, wherein, The storage box (3) includes at least three uprights (31) and a top plate (32). The three uprights (31) are spaced apart from the bottom plate (1), and the top plate (32) is located on the side of the three uprights (31) away from the bottom plate (1).

8. The one-key openable disposable FOUP tooling of claim 7, wherein, The top plate (32) is provided with an observation hole (33), which connects the inner cavity of the storage box (3) to the outside.

9. The one-key openable disposable FOUP tooling of claim 7, wherein, Along the length of the column (31), the column (31) is provided with a plurality of slots, which are used to limit the wafer (4).

10. The one-key open cassette tooling of claim 7, wherein, The three columns (31) are arranged on the base plate (1) according to the three vertices of an equilateral triangle.

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