Robot welding tool for high-precision stainless steel tank for semiconductor equipment

Abstract

The utility model discloses a robot welding tool for a high-precision stainless steel tank for semiconductor equipment, which comprises a clamping base and a plurality of C-shaped positioning sliding blocks mounted on the clamping base, and a plurality of sliding block mounting positions are uniformly arranged on the upper surface of the clamping base in the circumferential direction. A C-shaped positioning sliding block is installed on each sliding block installation position, each C-shaped sliding block is composed of an upper positioning arm, a lower positioning arm and a connecting arm, the upper positioning arm and the lower positioning arm are perpendicularly installed at the two ends of the connecting arm respectively, and the upper positioning arm and the lower positioning arm are parallel to each other. A threaded through hole penetrating through the upper positioning arm is formed in the upper positioning arm, and a positioning adjusting screw is installed in the threaded through hole. By means of the mode, the clamping stability of the stainless steel tank can be enhanced, and the welding precision and efficiency of a robot are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to tool fixture field, in particular to a kind of high-precision stainless steel tank body's robot welding tool for semiconductor equipment. BACKGROUND

[0002] Stainless steel tank body generally there is certain difference between size of jar mouth and tank bottom, and tank body itself is generally circular, also there is certain transition change, so there is large error in actual welding, when welding robot is used, it is usually because size is not unified that clamping is unstable, leading to high error rate and slow speed when artificial programming, affect work efficiency, cannot satisfy the requirement of machining precision in semiconductor equipment production, so existing tool needs to be improved, improve stability and reliability when welding positioning. SUMMARY

[0003] The utility model mainly solves the technical problem to provide a kind of robot welding tool, can improve the welding precision and efficiency of high-precision stainless steel tank body for semiconductor equipment.

[0004] To solve the above technical problem, one technical scheme of the utility model is: provide a kind of high-precision stainless steel tank body's robot welding tool for semiconductor equipment, the robot welding tool includes: clamping base and multiple C-shaped positioning sliding blocks installed on the clamping base, the upper surface of the clamping base is evenly provided with multiple sliding block installation sites, one C-shaped positioning sliding block is installed on each sliding block installation site, the C-shaped sliding block is composed of upper positioning arm, lower positioning arm and connecting arm, the upper positioning arm and lower positioning arm are vertically installed at the two ends of the connecting arm respectively, and the upper positioning arm and lower positioning arm are mutually parallel, the upper positioning arm is provided with threaded hole penetrating the upper positioning arm, and positioning adjusting screw is installed in the threaded hole.

[0005] In a preferred embodiment of the utility model, the arm length of the upper positioning arm is less than the arm length of the lower positioning arm.

[0006] In a preferred embodiment of the utility model, limit block is installed on both sides of each sliding block installation site, to form limit track.

[0007] In a preferred embodiment of the utility model, multiple positioning through holes are provided on the sliding block installation site, the distance between adjacent positioning through holes is equal, and the lower positioning arm of the C-shaped positioning sliding block is provided with at least two threaded connection holes matched with the position of the positioning through hole, the distance between adjacent threaded connection holes is equal to the distance between adjacent positioning through holes.

[0008] In a preferred embodiment of the utility model, the clamping base is circular or regular polygon.

[0009] The beneficial effects of this utility model are as follows: Based on the shape characteristics of the stainless steel tank, this utility model optimizes the existing tooling. By installing C-shaped positioning sliders on a special clamping base, the stainless steel tank is fixed from both the top and bottom ends, avoiding deformation in the middle transition area of ​​the tank. Moreover, the upper end adopts a multi-point circumferential uniform clamping method. Thus, when using this tooling for clamping, the position of the tank is stable and reliable, and it is easy to position during robot welding, which significantly improves the accuracy and overall efficiency of the welding process. Attached Figure Description

[0010] Figure 1 This is a three-dimensional installation structure schematic diagram of a preferred embodiment of the present invention;

[0011] The components in the attached diagram are labeled as follows:

[0012] 1. Tank body; 2. Clamping base; 3. Limiting block; 4. C-shaped positioning slider; 5. Positioning adjustment screw;

[0013] 401. Upper arm, 402. Lower arm, 403. Connecting arm. Detailed Implementation

[0014] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0015] Please see Figure 1 The embodiments of this utility model include:

[0016] A robotic welding fixture for high-precision stainless steel tanks used in semiconductor equipment includes a clamping base 2 and three C-shaped positioning sliders 4 mounted on the clamping base 2. The clamping base 2 is generally circular or a regular polygon; in this embodiment, it is circular. Three slider mounting positions are evenly arranged circumferentially on the upper surface of the clamping base 2, with an included angle of 120° between adjacent slider mounting positions. Each slider mounting position is equipped with a C-shaped positioning slider 4. The C-shaped slider 4 consists of an upper positioning arm 401, a lower positioning arm 402, and a connecting arm 403. The upper positioning arm 401 and the lower positioning arm 402 are respectively vertically mounted at both ends of the connecting arm 403, and the upper positioning arm 401 and the lower positioning arm 402 are parallel to each other. The upper positioning arm 401 has a threaded through hole, and a positioning adjustment screw 5 is installed in the threaded through hole. The length of the upper positioning arm 401 is shorter than the length of the lower positioning arm 402, which can prevent the can opening from being too large and the bottom of the can from being too small to be easily positioned.

[0017] Each slider mounting position is equipped with limit blocks 3 on both sides. The two limit blocks 3 together form a limit track. During installation, the limit track can help the installer to quickly align the position. Moreover, during positioning, the limit track can provide lateral support and improve overall stability.

[0018] The slider mounting position has four positioning through holes, which are equidistant from each other. The bottom of the lower positioning arm 402 of the C-shaped positioning slider 4 has two threaded connection holes that match the positions of the positioning through holes, and the distance between adjacent threaded connection holes is equal to the distance between adjacent positioning through holes. This provides three matching levels between the same slider mounting position and the C-shaped positioning slider, which can meet the positioning requirements of at least three sizes of tanks in actual use.

[0019] In actual use, this utility model first selects the appropriate gear according to the diameter of the stainless steel tank 1 to be welded and installs three C-shaped positioning sliders 4. Then, the stainless steel tank 1 to be welded is placed in the middle of the clamping base 2. Finally, the positioning adjustment screws 5 installed on the upper positioning arms 401 of the three C-shaped positioning sliders 4 are tightened to fix the position of the stainless steel tank 1.

[0020] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A robotic welding fixture for high-precision stainless steel tanks used in semiconductor equipment, characterized in that, The robotic welding fixture includes: a clamping base and multiple C-shaped positioning sliders mounted on the clamping base. Multiple slider mounting positions are evenly arranged circumferentially on the upper surface of the clamping base. Each slider mounting position is equipped with a C-shaped positioning slider. The C-shaped slider consists of an upper positioning arm, a lower positioning arm, and a connecting arm. The upper and lower positioning arms are respectively vertically mounted at both ends of the connecting arm, and the upper and lower positioning arms are parallel to each other. The upper positioning arm has a threaded through hole that passes through the upper positioning arm, and a positioning adjustment screw is installed in the threaded through hole.

2. The robotic welding fixture for high-precision stainless steel tanks for semiconductor equipment according to claim 1, characterized in that, The length of the upper positioning arm is less than the length of the lower positioning arm.

3. The robotic welding fixture for high-precision stainless steel tanks for semiconductor equipment according to claim 1, characterized in that, Limit blocks are installed on both sides of each slider mounting position to form a limit track.

4. The robotic welding fixture for high-precision stainless steel tanks for semiconductor equipment according to claim 1, characterized in that, The slider mounting position is provided with multiple positioning through holes, and the distance between the positioning through holes is equal. The bottom of the lower positioning arm of the C-shaped positioning slider is provided with at least two threaded connection holes that match the positions of the positioning through holes. The distance between adjacent threaded connection holes is equal to the distance between adjacent positioning through holes.

5. The robotic welding fixture for high-precision stainless steel tanks for semiconductor equipment according to claim 1, characterized in that, The clamping base is circular or a regular polygon.

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