Jewel ball assembling jig

Abstract

The utility model discloses a gem ball assembly jig, which relates to the technical field of assembly, and comprises an assembly rod and an extension part, the extension part is integrally connected to one end face of the assembly rod, the extension part forms an assembly step on the end face of the assembly rod, the end face of the extension part is provided with a groove, the groove is of an arc-shaped structure, and the assembly step is connected with the assembly rod. According to the jewel ball assembling jig, the jewel ball is limited through the assembling step formed by the offset between the assembling rod and the extending part and the groove in the end face of the extending part, and when the extending part is inserted into a wafer disc hole, the assembling height of the jewel ball is jointly controlled through the inner arc depth of the assembling step and the inner arc depth of the groove; the size precision during assembly is ensured, the problem that the depths of the jewel balls are inconsistent due to different strength when other tools are manually used for press-fitting is avoided, the jewel balls assembled on the wafer disc are consistent in height and balanced in overall height, and wafers can be located on the same plane when falling on the jewel balls.

Description

Technical Field

[0001] This utility model relates to the field of assembly technology, and in particular to a sapphire ball assembly fixture, specifically relating to the protruding surface dimensions of sapphire balls on the surface of a wafer disk, which are assembled using a special fixture to meet the requirements of the drawings. Background Technology

[0002] A sapphire ball assembly fixture is an auxiliary tool specifically designed for assembling sapphire balls. It has wide applications in fields such as microelectronic packaging and optical instrument manufacturing. In semiconductor processing, to prevent the generation of particles, multiple sapphire balls are usually assembled on a wafer disk to support the wafer. The sapphire balls are located on a heating disk, evenly distributed on the circumference of different diameters, and are at the same height above the heating disk. Together, they support the wafer.

[0003] However, due to the high-precision dimensional requirements of the wafer disks in key components of semiconductor equipment, the height of the highest point of the sapphire ball from the surface of the workpiece body must be 0.03±0.015. Since the bottom of the sapphire ball does not contact the bottom and is a suspended structure, it is extremely difficult to guarantee this dimension during assembly. The commonly used methods are hot pressing, adding a shim in the middle, and slotting and locking. However, none of the above methods can guarantee the accurate installation of this dimension, which will lead to inconsistent heights of the sapphire balls and uneven overall height. This will cause the wafer to no longer be on the same plane when it falls on the sapphire ball, which will easily lead to process failure.

[0004] Therefore, this utility model provides a gemstone ball assembly fixture. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a gemstone ball assembly fixture, which solves the problems mentioned in the background section.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: a gemstone ball assembly fixture, comprising an assembly rod and an extension, wherein the extension is integrally connected to one end face of the assembly rod, the extension forms an assembly step on the end face of the assembly rod, and a groove is provided on the end face of the extension.

[0007] The groove has an arc-shaped structure.

[0008] As a further technical solution of this utility model, the diameter of the groove is 3.90mm and the radius of the groove is 2.25mm.

[0009] As a further technical solution of this utility model, the length of the extension is 1.130±0.005mm, and the outer diameter of the extension is 4.50mm.

[0010] As a further technical solution of this utility model, the mounting rod and the extension are made of metal, and the outer diameter of the mounting rod is larger than the outer diameter of the extension.

[0011] This utility model provides a gemstone ball assembly fixture, which has the following advantages compared with the prior art:

[0012] This design provides a gemstone ball assembly fixture that utilizes the assembly step formed by the discontinuity between the assembly rod and the extension, as well as the groove on the end face of the extension, to limit the positioning of the gemstone ball. When the extension is inserted into the wafer disk hole, the assembly height of the gemstone ball is controlled by the inner arc depth of the assembly step and the groove, ensuring dimensional accuracy during assembly. This avoids the problem of inconsistent gemstone ball depth caused by different forces applied when manually pressing with other tools, ensuring that the gemstone balls assembled on the wafer disk are at a consistent height and have overall height balance, so that the wafer can be placed on the same plane when it falls on the gemstone ball. Attached Figure Description

[0013] Figure 1 A schematic diagram of a jig for assembling a gemstone ball;

[0014] Figure 2 A cross-sectional view of a gemstone ball assembly fixture;

[0015] Figure 3 A cross-sectional front view of a jig for assembling gemstone balls.

[0016] In the diagram: 1. Assembly rod; 2. Extension; 3. Groove. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1-3This utility model provides a technical solution for a gemstone ball assembly fixture: a gemstone ball assembly fixture includes an assembly rod 1 and an extension 2. The length of the extension 2 is 1.130±0.005mm, and the outer diameter of the extension 2 is 4.50mm. The assembly rod 1 and the extension 2 are made of metal, and the outer diameter of the assembly rod 1 is larger than the outer diameter of the extension 2. The extension 2 is integrally connected to one end face of the assembly rod 1, and the extension 2 forms an assembly step on the end face of the assembly rod 1. The assembly step formed by the discontinuity between the assembly rod 1 and the extension 2 is used. When the assembly fixture is in use, the gemstone ball is placed into the wafer disk hole, and the groove 3 on the end face of the extension 2 is used to limit the gemstone ball. At the same time, the extension 2 is inserted into the wafer disk hole. The assembly height of the gemstone ball is controlled by the assembly step and the inner arc depth of the groove 3, ensuring the dimensional accuracy during assembly.

[0019] The end face of the extension 2 is provided with a groove 3. The groove 3 has an arc-shaped structure, a diameter of 3.90mm, and a radius of 2.25mm. This assembly method uses the assembly step and the groove 3 to position the gem ball, which can ensure the dimensions in the drawing. This is because if other tools are used manually for pressing, the depth of the gem ball may be inconsistent due to different forces applied.

[0020] The working principle of this utility model is as follows: When in use, the wafer disk is first processed according to the customer's drawing requirements, and then the gemstone ball is placed into the hole of the wafer disk. The assembly fixture designed in this invention is used to assemble it. During assembly, the extension part 2 is inserted into the hole of the wafer disk, and the groove 3 on the end face of the extension part 2 is aligned with the gemstone ball. Then the assembly rod 1 is raised vertically to the wafer disk. Then the top of the assembly rod 1 is tapped, paying attention to the tapping force, and then the gemstone ball is assembled.

[0021] During assembly, the height of the gemstone ball is measured, and its position is adjusted by tapping it a second time until the dimensions of the gemstone ball installed on the wafer disk meet the requirements of the drawing.

[0022] This design utilizes the groove 3 on the end face of the extension 2 to limit the gemstone ball. At the same time, the extension 2 is inserted into the wafer disk hole. The assembly height of the gemstone ball is controlled by the assembly step and the inner arc depth of the groove 3, ensuring the accuracy of the dimensions during assembly. This solves the problem that the depth of the gemstone ball is inconsistent when manually pressing with other tools due to different forces. It also ensures that the wafer is placed more flat on the wafer disk surface.

[0023] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model are implemented according to conventional methods in the art, unless otherwise specified or limited.

Claims

1. A fixture for assembling gemstone balls, characterized in that, It includes an assembly rod (1) and an extension (2), the extension (2) being integrally connected to one end face of the assembly rod (1), the extension (2) forming an assembly step on the end face of the assembly rod (1), and a groove (3) being provided on the end face of the extension (2). The groove (3) has an arc-shaped structure.

2. The gemstone ball assembly fixture according to claim 1, characterized in that, The diameter of the groove (3) is 3.90 mm and the radius of the groove (3) is 2.25 mm.

3. The gemstone ball assembly fixture according to claim 1, characterized in that, The length of the extension (2) is 1.130±0.005mm, and the outer diameter of the extension (2) is 4.50mm.

4. A gemstone ball assembly fixture according to claim 1, characterized in that, The mounting rod (1) and the extension (2) are made of metal, and the outer diameter of the mounting rod (1) is larger than the outer diameter of the extension (2).

Images