Vacuum drying device

Abstract

The utility model discloses a vacuum drying device which comprises a drying groove and a groove cover for opening or closing the drying groove, a flower basket is arranged in an inner cavity of the drying groove, a vacuumizing assembly communicated with the inner cavity is arranged on the drying groove, and a flow uniformizing assembly and a drying pipeline are arranged on the side face and the bottom of the drying groove. The hot air pipelines are connected with the corresponding flow uniformizing assemblies, and hot air sent out by the hot air pipelines enters the inner cavity through the flow uniformizing assemblies. According to the vacuum drying device, on the premise that drying efficiency is guaranteed, the structure is simplified, and energy consumption is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic industry technical field especially relates to a vacuum drying device for silicon wafer drying. BACKGROUND

[0002] In the photovoltaic industry chain, photovoltaic silicon wafer drying equipment plays a pivotal role. First, in the production process of silicon wafer, the drying link is crucial to guarantee the quality of silicon wafer. The surface cleanliness, flatness and electrical performance of the silicon wafer treated by the drying equipment can be significantly improved, thereby improving the conversion efficiency of photovoltaic cells. Secondly, with the continuous development of photovoltaic industry, the requirements for the production efficiency and quality of silicon wafer are also continuously improved. Therefore, efficient and stable photovoltaic silicon wafer drying equipment has become an inevitable choice for the development of the industry.

[0003] The traditional silicon wafer drying equipment is used in the drying link in the production process of photovoltaic silicon wafer. Vacuum drying utilizes the principle of pressure reduction to lower the boiling point of liquid, so that the liquid on the surface of the flower basket evaporates quickly at the same temperature, achieving the drying effect. Water evaporation absorbs heat, and repeated negative pressure will cause the temperature to decrease and frost, affecting the drying effect. Therefore, during the opening time, the tank body, flower basket and silicon wafer need to be heated by blowing hot air to ensure the temperature conditions. In order to ensure the drying efficiency, multiple positions are generally used to blow hot air to the flower basket in the existing drying tank, and each drying position is an independent drying component. This structure consumes a lot of energy, and is limited by the size of the fan, which is not conducive to later installation and maintenance. SUMMARY

[0004] The technical problem to be solved by the utility model is that the utility model provides a vacuum drying device which can simplify the structure and reduce energy consumption under the premise of ensuring drying efficiency.

[0005] The technical scheme adopted by the utility model to solve its technical problem is that a vacuum drying device comprises a drying tank and a tank cover for opening or closing the drying tank, the inner cavity of the drying tank is provided with a flower basket, the drying tank is provided with a vacuum extraction assembly communicating with the inner cavity, the side surface and the bottom of the drying tank are provided with a flow uniformizing assembly and a drying pipeline, the drying pipeline is connected with the corresponding flow uniformizing assembly, and the hot air sent out by the drying pipeline enters the inner cavity through the flow uniformizing assembly.

[0006] Further, in order to make the hot air blow to the flower basket uniformly, the flow uniformizing assembly comprises an outer plate and an inner plate, the outer plate is connected to the drying tank and communicates with the hot air drying assembly, and the inner plate and the outer plate are arranged in a gap, thereby forming an airflow channel, a plurality of flow uniformizing holes are arranged on the inner plate, and the hot air of the hot air drying assembly enters the airflow channel through the outer plate and then uniformly flows into the cavity through the plurality of flow uniformizing holes.

[0007] Further, in order to facilitate cleaning and replacement of the inner plate, the outer plate is provided with a slot on both sides, and the inner plate is connected in the slot by insertion.

[0008] Further, in order to quickly disassemble the inner plate, a plurality of handles are further provided on the upper side of the inner plate.

[0009] Further, in order to ensure the drying effect of the flower basket, the flow uniformizing assembly is arranged on the bottom surface and the front and rear surfaces of the cleaning tank, and a plurality of rows of flow uniformizing holes are arranged opposite to the bottom and side surfaces of the flower basket.

[0010] Further, in order to simplify the structure and reduce energy consumption, a plurality of drying pipelines are connected with a shared hot air drying device.

[0011] Further, in order to meet the need of vacuumizing, the vacuumizing assembly comprises a main vacuumizing pipe and a secondary vacuumizing pipe which are communicated with the inner cavity, the inner cavity is vacuumized through the secondary vacuumizing pipe and the main vacuumizing pipe in sequence, and a pressure gauge is further arranged on the inner wall of the drying tank.

[0012] Further, in order to place the flower basket and the accumulated water of the drying tank, a flower basket positioning support is arranged in the drying tank, and a drain port is further arranged at the bottom of the drying tank.

[0013] Further, in order to facilitate opening and closing of the tank cover, a sealing strip is arranged on the upper end surface of the drying tank, the drying tank and the tank cover are sealed through the sealing strip, the tank cover is hinged to the drying tank, and a hydraulic cylinder is connected to the tank cover.

[0014] Compared with the prior art, the vacuum drying device has the following beneficial effects:

[0015] The vacuum drying device has the following beneficial effects:

[0016] The vacuum drying device has the following beneficial effects:

[0017] The vacuum drying device has the following beneficial effects: BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model will be further described in connection with the drawings and examples.

[0019] Figure 1 It is a three-dimensional structure schematic view of the vacuum drying device.

[0020] Figure 2 is a perspective view of the structure from another angle; Figure 1

[0021] Figure 3 is a top view of the structure; Figure 1

[0022] Figure 4 is a sectional view of the drying tank;

[0023] Figure 5 is a partial structure schematic view of the structure; Figure 4

[0024] Figure 6 is a partial structure schematic view of the structure; Figure 1

[0025] In the figure: 1, drying tank, 2, tank cover, 3, flower basket positioning support, 4, sealing strip, 5, vacuumizing assembly, 51, main vacuumizing pipe, 52, auxiliary vacuumizing pipe, 6, flow uniformizing assembly, 61, outer plate, 62, inner plate, 63, flow uniformizing hole, 7, drying pipeline, 8, pressure gauge, 9, drain, 10, hydraulic cylinder. DETAILED DESCRIPTION

[0026] The utility model will be described in further detail in combination with the drawings. These drawings are all simplified schematic views, and only schematically show the basic structure of the utility model, so they only show the structure related to the utility model.

[0027] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, so it cannot be understood as a limitation on the utility model. In addition, the features limited as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more.

[0028] ​​​​In the description of the utility model, it is necessary to explain, unless another explicit provision and limitation, the term "installation", "link", "connection" should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can indirectly connect through the intermediate medium, can be two elements inside the communication. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according of the specific circumstances.

[0029] As Figure 1 And Figure 2 A vacuum drying device, including drying groove 1 and the groove cover 2 that opens or closes drying groove 1. Drying groove 1 is equipped with basket positioning support 3, basket is arranged on basket positioning support 3, and in the embodiment, up to 4 basket positioning supports 3 can be placed. The groove cover 2 is hinged on the drying groove 1, and the hydraulic cylinder 10 is connected to the groove cover 2. The groove cover 2 is moved by the hydraulic cylinder 10 to open or close the drying groove 1. The upper end surface of the drying groove 1 is provided with a sealing strip 4, and in the closed state, the drying groove 1 and the groove cover 2 are sealed by the sealing strip 4 to ensure that the inside and outside of the drying groove 1 are isolated during use. The bottom of the drying groove 1 is also provided with a drain 9 to effectively prevent water accumulation in the drying groove 1.

[0030] The drying groove 1 is provided with a vacuum pumping assembly 5 communicating with the inner cavity. The vacuum pumping assembly 5 includes a main vacuum pumping pipe 51 and a secondary vacuum pumping pipe 52 communicating with the inner cavity. The main vacuum pumping pipe 51 and the secondary vacuum pumping pipe 52 communicate with an external vacuum pump (not labeled in the figure). The inner cavity is sequentially pumped by the secondary vacuum pumping pipe 52 and the main vacuum pumping pipe 51. The secondary vacuum pumping pipe 52 first pumps to reduce the air pressure of the drying groove 1 slightly, and then the main vacuum pumping pipe 51 pumps to the required pressure. The inner wall of the drying groove 1 is also provided with a pressure gauge 8, and the air pressure in the drying groove 1 can be observed through the pressure gauge 8.

[0031] The side and bottom of the drying groove 1 are provided with uniform flow components 6 and drying pipelines 7. The drying pipelines are connected to the corresponding uniform flow components 6, and the hot air sent by the drying pipelines enters the inner cavity through the uniform flow components 6. The uniform flow components 6 are arranged on the bottom and front and rear surfaces of the cleaning tank. A plurality of drying pipelines are connected to a shared hot air drying device. One hot air drying device is used to provide hot air for each drying pipeline. The hot air blows out hot air to the side and bottom of the basket through the uniform flow components 6, and the hot air flows from bottom to top, thereby improving the drying effect. The hot air drying device (not shown in the figure) uses one high-pressure fan, one heater and one vacuum pump, which reduces energy consumption and saves installation space.

[0032] The uniform flow assembly 6 comprises an outer plate 61 and an inner plate 62, the outer plate 61 is connected to the drying groove 1 and communicates with the hot air drying assembly, the inner plate 62 is arranged in a gap with the outer plate 61, thereby forming a plurality of uniform flow holes 63 arranged on the inner hole of the air flow channel, and the hot air of the hot air drying assembly enters the air flow channel through the outer plate 61 and then uniformly flows into the cavity from the plurality of uniform flow holes 63. The plurality of uniform flow holes 63 are arranged opposite to the bottom and the side of the flower basket. The plurality of uniformly arranged uniform flow holes 63 can ensure the drying effect, so that the hot air in the air flow channel uniformly blows to the flower basket.

[0033] The outer plate 61 is provided with a slot on both sides, and the inner plate 62 is connected in the slot in a plug-in manner. The upper portion of the inner plate 62 is further provided with a plurality of handles. The inner plate 62 can be quickly disassembled and assembled through the handles, so that the broken silicon wafers attached to the inner plate 62 can be conveniently cleaned.

[0034] The vacuum drying device of the utility model, when using, first open the groove cover 2, then put the flower basket into the corresponding flower basket positioning support 3, then close the groove cover 2. Then start the vacuumizing device, and vacuumize through the auxiliary vacuumizing pipe 52 and the main vacuumizing pipe 51 in turn until the vacuum degree of the drying groove reaches the process requirement. The vacuum drying utilizes the principle of pressure reduction, reduces the boiling point of liquid, and makes the liquid on the surface of the flower basket evaporate quickly at the same temperature, so that the drying effect is achieved. Because water evaporates and absorbs heat, repeated negative pressure will cause the temperature to decrease and frost to form. After the groove cover 2 is opened, the hot air drying device provides hot air to the uniform flow assembly 6 through the drying pipeline, the hot air blows uniformly to the flower basket through the uniform flow assembly 6, so that the drying groove, the flower basket and the silicon wafers on the flower basket are heated, and the temperature condition is ensured.

[0035] In summary, the vacuum drying device of the utility model can simplify the structure and reduce energy consumption under the premise of ensuring drying efficiency.

[0036] The above-mentioned ideal embodiments according to the utility model are inspired, through the above-mentioned description, relevant staff can make various changes and modifications without deviating from the technical idea of the utility model. The technical scope of the utility model is not limited to the contents in the specification, and must be determined by the scope of claims.

Claims

1. A vacuum drying apparatus, comprising a drying tank (1) and a tank cover (2) for opening or closing the drying tank (1), wherein the inner cavity of the drying tank (1) is provided with a flower basket, characterized in that, The drying tank (1) is provided with a vacuum assembly (5) that communicates with the inner cavity. The drying tank (1) is provided with a flow equalization assembly (6) and a drying pipeline (7) on its side and bottom. The drying pipeline is connected to the corresponding flow equalization assembly (6). The hot air sent out by the drying pipeline enters the inner cavity through the flow equalization assembly (6). The flow equalization assembly (6) includes an outer plate (61) and an inner plate (62). The outer plate (61) is connected to the drying tank (1) and communicates with the hot air drying assembly. The inner plate (62) and the outer plate (61) are spaced apart to form an airflow channel. The inner plate (62) is provided with multiple rows of flow equalization holes (63). The hot air from the hot air drying assembly enters the airflow channel through the outer plate (61) and then flows evenly into the cavity through the multiple rows of flow equalization holes (63).

2. The vacuum drying apparatus according to claim 1, characterized in that, The outer plate (61) has slots on both sides, and the inner plate (62) is inserted into the slots on both sides.

3. The vacuum drying apparatus according to claim 2, characterized in that, The inner panel (62) is also provided with multiple handles on its upper part.

4. The vacuum drying apparatus according to any one of claims 1-3, characterized in that, The flow equalization component (6) is set on the bottom and front and rear sides of the cleaning tank, and multiple rows of flow equalization holes (63) are set facing the bottom and sides of the flower basket.

5. The vacuum drying apparatus according to claim 4, characterized in that, Multiple drying pipelines are connected to a common hot air drying device.

6. The vacuum drying apparatus according to claim 1, characterized in that, The vacuum assembly (5) includes a main vacuum tube (51) and a secondary vacuum tube (52) that are connected to the inner cavity. The inner cavity is evacuated by the secondary vacuum tube (52) and the main vacuum tube (51) in turn. A pressure gauge (8) is also provided on the inner wall of the drying tank (1).

7. The vacuum drying apparatus according to claim 1, characterized in that, The drying trough (1) is equipped with a flower basket positioning bracket (3), and the bottom of the drying trough (1) is also equipped with a drain outlet (9).

8. The vacuum drying apparatus according to claim 1, characterized in that, The upper end face of the drying tank (1) is provided with a sealing strip (4). The drying tank (1) and the tank cover (2) are sealed by the sealing strip (4). The tank cover (2) is hinged to the drying tank (1). A hydraulic cylinder (10) is connected to the tank cover (2).

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