Vacuum magnetic transmission mechanism

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses a vacuum magnetic transmission mechanism which comprises a base, a motor, a driving wheel, a driven wheel, first magnetic steel, a synchronous belt, a rotating shaft, second magnetic steel and a corrugated pipe, the motor is installed on the base, an output shaft of the motor is connected with the driving wheel, an installation boss is arranged on the base, the driven wheel is arranged on the installation boss in a sleeving mode, a sinking groove is formed in the installation boss in the axial direction, and one end of the rotating shaft is inserted into the sinking groove; the first magnetic steel is coaxially and fixedly arranged on the inner wall of the driven wheel, the second magnetic steel is coaxially and fixedly arranged on the outer wall of the rotating shaft, the first magnetic steel and the second magnetic steel correspond in position and are opposite in polarity, and the corrugated pipe is arranged outside the rotating shaft in a sleeving mode. The transmission mechanism has the beneficial effects that the structure is simplified, a sealing structure when the transmission mechanism is connected with the vacuum cavity is reduced, the manufacturing cost is reduced, and meanwhile, the position between the transmission mechanism and the vacuum cavity is adjustable.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating equipment technical field especially relates to a vacuum magnetic drive mechanism. BACKGROUND

[0002] In the vacuum coating equipment, often need to utilize chemical vapor deposition (CVD), physical vapor deposition (PVD) and so on multiple vacuum coating technology to realize the plating of the functional thin film on the surface of silicon wafer, because the vacuum cavity requires higher vacuum degree and cleanliness, and there is obvious difference with the atmospheric environment, therefore when driving the substrate table inside the vacuum cavity, on the one hand, the power from the cavity outside is transmitted to the cavity inside to drive the movement of related devices, on the other hand, the vacuum cavity also needs to be separated from the external environment, and the higher vacuum degree is maintained.

[0003] The existing transmission mechanism has complex overall structure, and in the transmission process, multiple sealing structures with the vacuum cavity need to be set, the manufacturing cost is higher, and simultaneously, the position of the transmission mechanism and the vacuum cavity is fixed and cannot be adjusted. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of vacuum magnetic drive mechanism, simplify structure, reduce the sealing structure when being connected with vacuum cavity, reduce manufacturing cost, and simultaneously, the position between transmission mechanism and vacuum cavity can be adjusted.

[0005] In order to realize the above-mentioned purpose, the utility model provides a kind of vacuum magnetic drive mechanism, and is connected with vacuum cavity, for driving substrate table rotation, installation hole is set up on the vacuum cavity, including base, motor, driving wheel, driven wheel, first magnetic steel, synchronous belt, pivot, second magnetic steel and bellows;

[0006] The motor is installed on the base, and the output shaft is connected with the driving wheel, the base is provided with mounting boss, the driven wheel is sleeved on mounting boss, and is rotationally connected with the mounting boss, the mounting boss is provided with sink groove along axial direction, one end of the pivot is inserted into the sink groove, and is rotationally connected with the sink groove, the other end of the pivot penetrates the installation hole and extends into the vacuum cavity and is fixedly connected with the substrate table;

[0007] The synchronous belt is engaged between the driving wheel and the driven wheel, the first magnetic steel is coaxially fixed on the inner wall of the driven wheel, the second magnetic steel is coaxially fixed on the outer wall of the pivot, the first magnetic steel and the second magnetic steel are positionally corresponding and have opposite polarity, the bellows is sleeved on the outer wall of the pivot, one end of the bellows is connected with the end face of the vacuum cavity towards the base, the other end of the bellows is connected with the mounting boss;

[0008] The sink, the bellows and the vacuum cavity are in internal communication and sealed.

[0009] Further, the rotating shaft is hollow and has open upper and lower ends and is in communication with the sink.

[0010] Further, the inner side wall of the driven wheel is provided with a first limiting groove in the axial direction, and the first magnetic steel is arranged in the first limiting groove.

[0011] Further, the first magnetic steel outer side cover is provided with a first cover body, and the first cover body is fixedly connected with the driven wheel.

[0012] Further, the outer wall of the rotating shaft is provided with a second limiting groove in the axial direction, and the second magnetic steel is arranged in the second limiting groove.

[0013] Further, the second magnetic steel outer side cover is provided with a second cover body, and the second cover body is fixedly connected with the rotating shaft.

[0014] Further, the driven wheel, the rotating shaft and the mounting boss are rotatably connected through bearings.

[0015] Further, the outer wall of the mounting boss and the inner wall of the sink are provided with limiting steps corresponding to the bearings.

[0016] Compared with the prior art, the motor drives the driven wheel to rotate through a synchronous belt, the driven wheel is sleeved on the mounting boss, the driven wheel is internally provided with a first magnetic steel, one end of the rotating shaft is inserted into the sink, the rotating shaft is rotatably connected with the sink, the outer wall of the rotating shaft is provided with a second magnetic steel, the first magnetic steel and the second magnetic steel are in position correspondence and have opposite polarities, when the motor operates, the rotating shaft is driven to rotate through the magnetic transmission of the first magnetic steel and the second magnetic steel, thereby driving the substrate table in the vacuum cavity to rotate, the overall structure is simple, and the manufacturing cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a structural schematic view of the vacuum magnetic transmission mechanism of the embodiment of the utility model;

[0018] Figure 2 is Figure 1 is a local enlarged view of A in FIG.

[0019] In the figure, 1, base; 100, mounting boss; 110, sink groove; 120, limiting step; 130, baffle ring; 2, motor; 3, drive wheel; 4, driven wheel; 5, first magnetic steel; 51, first cover body; 6, synchronous belt; 7, rotating shaft; 8, second magnetic steel; 81, second cover body; 9, bellows; 10, bearing; a, vacuum cavity; b, substrate table; a1, mounting hole. DETAILED DESCRIPTION

[0020] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate the present application, but not to limit the scope of the present application.

[0021] In the description of the present application, it should be understood that the positions or location relationships indicated by the terms "upper", "lower", "front", "rear", "inner", "outer" and the like in the present application are based on the position relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the devices and elements indicated to have a specific position, to be constructed and operated in a specific position, and therefore cannot be understood as limiting the present application.

[0022] In the description of the present application, it should be understood that the terms "first", "second" and the like are used to describe various information in the present application, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, the "first" information can also be referred to as "second" information without departing from the scope of the present application, and similarly, the "second" information can also be referred to as "first" information.

[0023] As shown in Figure 1 , Figure 2 The vacuum magnetic transmission mechanism of the preferred embodiment of the present application is provided outside the vacuum cavity, is connected with the vacuum cavity, and is used to drive the substrate table to rotate. In order to facilitate the connection of the vacuum cavity and the transmission mechanism, a mounting hole is formed on the vacuum cavity. The vacuum magnetic transmission mechanism of the present application comprises a base 1, a motor 2, a drive wheel 3, a driven wheel 4, a first magnetic steel 5, a synchronous belt 6, a rotating shaft 7, a second magnetic steel 8 and a bellows 9. The base 1 is used as a mounting carrier for mounting other components. The motor 2 is mounted on the base 1, and the output shaft is connected with the drive wheel 3. In order to facilitate the connection of the base 1 and the driven wheel 4, a mounting boss 100 is provided on the base 1. The driven wheel is sleeved on the mounting boss 100 and is rotatably connected with the mounting boss 100. The synchronous belt 6 is engaged between the drive wheel 3 and the driven wheel 4. In order to limit the installation of the rotating shaft 7 and separate the rotating shaft 7 from the external environment, a sink groove 110 is formed on the mounting boss 100 in the axial direction. One end of the rotating shaft 7 is inserted into the sink groove 110 and is rotatably connected with the sink groove 110. The other end of the rotating shaft 7 penetrates through the mounting hole and extends into the vacuum cavity and is fixedly connected with the substrate table.

[0024] In order to facilitate the rotation of the driven wheel 4 to drive the rotating shaft 7, and improve the transmission accuracy, the first magnetic steel 5 is coaxially arranged on the inner wall of the driven wheel 4, and the second magnetic steel 8 is coaxially arranged on the outer wall of the rotating shaft 7. The first magnetic steel 5 and the second magnetic steel 8 are opposite in position and opposite in polarity. Since the rotating shaft 7 is rotatably connected with the sink 110, the outer wall of the rotating shaft 7 is provided with the second magnetic steel 8. The second magnetic steel 8 is under the magnetic force of the first magnetic steel 5. Thus, when the driven wheel 4 rotates, the first magnetic steel 5 is driven to rotate, so that the second magnetic steel 8 drives the rotating shaft 7 to rotate synchronously. In order to realize the sealing of the transmission mechanism and the vacuum cavity, and at the same time, facilitate the adjustment of the installation position between the transmission mechanism and the vacuum cavity, a bellows 9 is arranged. The bellows 9 is sleeved on the outer wall of the rotating shaft 7. One end of the bellows 9 is connected with the end face of the vacuum cavity facing the base 1. The other end of the bellows 9 is connected with the mounting boss 100. The sink 110, the bellows 9 and the vacuum cavity are in sealed communication. At this time, the rotating shaft 7 is located in a vacuum environment, which is completely separated from the external environment.

[0025] In some embodiments, in order to further reduce the overall weight of the transmission mechanism, and at the same time, facilitate the wiring of the parts inside the vacuum cavity, reduce the occupied volume of the wiring, the rotating shaft 7 is hollow and open at the upper and lower ends, and is in communication with the sink 110. The rotating shaft 7 can be selected as a hollow shaft.

[0026] In some embodiments, in order to facilitate the fixation of the position of the first magnetic steel 5, a first limiting groove 41 is formed in the inner wall of the driven wheel 4 in the axial direction. The first magnetic steel 5 is arranged in the first limiting groove 41. Further, since the first magnetic steel 5 and the second magnetic steel 8 attract each other, in order to avoid the first magnetic steel 5 moving towards the second magnetic steel 8 and sliding out of the first limiting groove 41 under the action of the magnetic force, a first cover 51 is arranged outside the first magnetic steel 5. The first cover 51 is fixedly connected with the inner wall of the driven wheel 4.

[0027] Similarly, in order to facilitate the fixation of the position of the second magnetic steel 8, a second limiting groove 71 is formed in the outer wall of the rotating shaft 7 in the axial direction. The second magnetic steel 8 is arranged in the second limiting groove 71. At the same time, in order to avoid the movement of the position of the second magnetic steel 8, a second cover 81 is arranged outside the second magnetic steel 8. The second cover 81 is rotatably connected with the rotating shaft 7.

[0028] In the present embodiment, the driven wheel 4 and the mounting boss 100, and the rotating shaft 7 and the mounting boss 100 are rotatably connected through the bearing 10. In order to facilitate the axial positioning of the bearing 10, a limiting step 120 corresponding to the bearing 10 is arranged on the outer wall of the mounting boss 100 and the inner wall of the sink 110. At the same time, a retaining ring 130 is arranged on the outer wall of the mounting boss 100 and the inner wall of the sink 110 close to the bearing 10.

[0029] In conclusion, the embodiment of the utility model provides a kind of vacuum magnetic transmission mechanism, motor 2 is driven by synchronous belt 6 and drives driven wheel 4 to rotate, driven wheel 4 is sleeved in mounting boss 100, and first magnetic steel 5 is equipped in the inside of driven wheel 4, one end of rotating shaft 7 is inserted in sink 110, and rotating shaft 7 is rotatably connected with sink 110, and the outer wall of rotating shaft 7 is equipped with second magnetic steel 8, since first magnetic steel 5 and second magnetic steel 8 position correspond and polarity is opposite, when motor 2 acts, the magnetic transmission of first magnetic steel 5 and second magnetic steel 8 makes rotating shaft 7 rotate, and then drive wafer table in vacuum cavity to rotate, overall structure is simple, and production cost is reduced.In addition, there is bellows 9, bellows 9 is sleeved in rotating shaft 7, one end of bellows 9 is connected with vacuum cavity, and the other end is connected with mounting boss 100, and sink 110, bellows 9, vacuum cavity are sealed and communicated, since rotating shaft 7 is arranged in mounting hole, the transmission structure relevant to motor 2 can be moved along the axial direction of rotating shaft 7, adjust the position of vacuum cavity, and it is convenient to install and fix.

[0030] The above is only preferred embodiment of the utility model, it should be pointed out, for ordinary skilled person in the art, without departing from the technical principle of the utility model, can make several improvements and substitutions, these improvements and substitutions also should be considered as the protection scope of the utility model.

Claims

1. A vacuum magnetic transmission mechanism, connected to a vacuum chamber, for driving a substrate stage to rotate, wherein the vacuum chamber has mounting holes, characterized in that: Base, motor, drive wheel, driven wheel, first magnetic steel, synchronous belt, rotating shaft, second magnetic steel and bellows are included. The motor is installed on the base, and the output shaft is connected with the drive wheel. The base is provided with a mounting boss, the driven wheel is sleeved on the mounting boss and is rotationally connected with the mounting boss. The mounting boss is provided with a sink groove in the axial direction. One end of the rotating shaft is inserted into the sink groove and is rotationally connected with the sink groove. The other end of the rotating shaft penetrates the mounting hole and extends into the vacuum cavity and is fixedly connected with the substrate table. The synchronous belt is engaged between the drive wheel and the driven wheel. The inner wall of the driven wheel is coaxially fixedly provided with the first magnetic steel. The outer wall of the rotating shaft is coaxially fixedly provided with the second magnetic steel. The first magnetic steel and the second magnetic steel are positionally corresponding and have opposite polarities. The bellows is sleeved outside the rotating shaft. One end of the bellows is connected with the end face of the vacuum cavity facing the base. The other end of the bellows is connected with the mounting boss. The sink groove, the bellows and the vacuum cavity are internally communicated and sealed.

2. The vacuum magnetic transmission mechanism of claim 1, wherein: The rotating shaft is hollow inside and open at the upper and lower ends and is communicated with the sink groove.

3. The vacuum magnetic transmission mechanism of claim 1, wherein: The inner side wall of the driven wheel is provided with a first limiting groove in the axial direction. The first magnetic steel is arranged in the first limiting groove.

4. The vacuum magnetic transmission mechanism of claim 3, wherein: The first magnetic steel is provided with a first cover body. The first cover body is fixedly connected with the driven wheel.

5. The vacuum magnetic transmission mechanism of claim 1, wherein: The outer wall of the rotating shaft is provided with a second limiting groove in the axial direction. The second magnetic steel is arranged in the second limiting groove.

6. The vacuum magnetic transmission mechanism of claim 5, wherein: The second magnetic steel is provided with a second cover body. The second cover body is fixedly connected with the rotating shaft.

7. The vacuum magnetic transmission mechanism of claim 1, wherein: The driven wheel, the rotating shaft and the mounting boss are rotationally connected through bearings.

8. The vacuum magnetic transmission mechanism of claim 7, wherein: The outer wall of the mounting boss and the inner wall of the sink groove are provided with limiting steps corresponding to the bearings.

Images