Modularized remodeling mechanism

Abstract

The utility model relates to a modular remodeling mechanism which comprises a base, a supporting block is arranged on the base, a supporting part is arranged on the supporting block, a product to be produced is placed on the supporting part, a concave part is arranged on the base, the concave part is constructed to be capable of containing the supporting block, the supporting block is placed in the concave part, and the concave part is used for containing the product to be produced. The modularized remodeling mechanism further comprises a locking mechanism, the locking mechanism locks the supporting block in the concave part, the locking mechanism comprises a driving mechanism, the clamping part is installed at the movable end of the driving mechanism, the clamping part is configured to be a protruding clamping block, and the clamping block is arranged on the supporting block. The supporting block is supported through the concave part, the supporting block is fixed through cooperation of the locking mechanism and the limiting part, locking screws are not needed, the assembling speed is higher, scrap iron is not generated, and high-adaptability remodeling can be achieved in the environment with the high cleanliness requirement.

Description

Technical Field

[0001] This application relates to the field of workpiece fixing technology, and in particular to a modular changing mechanism. Background Technology

[0002] In the semiconductor manufacturing process, the use of automated equipment is already very high. Typically, a support mechanism is needed to support the materials during the processing. Due to the different models and sizes of materials, different support mechanisms need to be frequently changed during the production process. In the existing technology, the support mechanism is usually installed with bolts. During the replacement process, bolts often need to be disassembled and reassembled, resulting in low assembly efficiency. Moreover, the disassembly and assembly of bolts can easily generate debris. In the production process of semiconductor products and other fields, the cleanliness requirements of the workshop are very high. The debris generated by bolt disassembly and assembly can affect the cleanliness of the entire production environment. Therefore, there is an urgent need to provide a modular changeover mechanism that can be quickly replaced. Utility Model Content

[0003] The purpose of this application is to provide a modular changeover mechanism to solve the problem of rapid changeover of support mechanisms in the current semiconductor product manufacturing process.

[0004] The technical solution of this utility model is: a modular replacement mechanism, including: a base, a support block and a locking mechanism. The base is provided with a recessed portion and a limiting portion. The support block is installed in the recessed portion, at least one side of the support block abuts against the limiting portion, and the side of the support block away from the limiting portion is engaged by the locking mechanism.

[0005] Preferably, the support block is provided with a locking portion, and the locking mechanism is provided with a locking portion, wherein the locking portion is configured to engage with the locking portion when the locking mechanism engages the support block.

[0006] Preferably, the locking mechanism includes a drive mechanism, the movable end of which is fitted with the engaging portion, the engaging portion being configured as a protruding locking block, and the engaged portion being configured as a slot adapted to the engaging portion.

[0007] Preferably, the limiting part is provided in two places, and the two limiting parts can respectively abut against the two opposite sides of the support block.

[0008] Preferably, the limiting part is one of a retaining edge or a stop block protruding from the recessed part.

[0009] Preferably, the card slot and the card block are aligned in the horizontal direction.

[0010] Preferably, the support block is provided with a pair of support portions, wherein when any one of the support portions is configured as a lower support portion, the other support portion is configured as an upper support portion, and the lower support portion abuts against the recessed portion.

[0011] Preferably, the clamping groove is provided with two clamping grooves arranged on the side of the support block away from the limiting portion, wherein when any one of the support portions is configured as a lower support portion, the clamping block is clamped in the clamping groove close to the lower support portion.

[0012] Preferably, the number of support blocks is two, and the locking mechanism can clamp two support blocks at the same time.

[0013] Preferably, the base is provided with a scale indicating the position of the support block. Compared with the prior art, the application has the following advantages:

[0014] (1) The support block is installed through the recessed portion, and the support block is fixed through the cooperation of the locking mechanism and the limiting portion, without the need for locking screws, so that the assembly speed is faster, and no iron filings are generated. In an environment with high cleanliness requirements, high adaptive type changing can be achieved.

[0015] (2) The two surfaces of the support block are oppositely provided with a pair of support portions, each of which can be used to support different models of products. Only the support portion needs to be turned over to realize type changing, and the clamping portion on the locking mechanism is clamped on the side edge of the support block. Even after the support block is turned over, it can still be locked.

[0016] (3) The support blocks with the same size and the same clamped portion are provided with two and are simultaneously installed in the recessed portion, and one locking mechanism can simultaneously lock two support blocks, which is more convenient to use and can improve production efficiency.

[0017] (4) The base is provided with a scale that can correct the position data of the support block. When there is no need for a precise positioning mechanism, the position of the support block can be adjusted conveniently. BRIEF DESCRIPTION OF DRAWINGS

[0018] The application will be further described below in conjunction with the drawings and embodiments:

[0019] Figure 1 It is a whole schematic view of a modular type changing mechanism in the embodiments of the application;

[0020] Figure 2 It is a whole structural schematic view of a modular type changing mechanism in the embodiments of the application;

[0021] Figure 3 It is a schematic view of a support block of a modular type changing mechanism in the embodiments of the application;

[0022] Figure 4Figure 1 is a schematic diagram of a modular transformation mechanism support block according to an embodiment of the present application;

[0023] Figure 5 Figure 2 is a schematic diagram of a scale on a modular transformation mechanism support block according to an embodiment of the present application.

[0024] Wherein:

[0025] 1, base;

[0026] 11, scale;

[0027] 2, support block;

[0028] 21, clamping groove, 22, support part, 23, vacuum suction hole;

[0029] 3, recess;

[0030] 31, blocking edge;

[0031] 4, locking mechanism;

[0032] 41, locking cylinder, 42, clamping block; DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the present application more clear, the following will combine with the drawings to make further detailed description of the embodiments of the present application. Obviously, the described embodiments are only one embodiment of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative labor, belong to the scope of protection of the present application.

[0034] The "embodiments" referred to herein means that the specific features, structures or characteristics can be contained in at least one implementation of the present application. In the description of the embodiments of the present application, it should be understood that the terms "first", "second" and "third" are used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" and "third" can be explicitly or implicitly included one or more features. Moreover, the terms "first", "second" and "third" are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be exchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "comprise" and any variations thereof are intended to cover non-exclusive inclusion.

[0035] As Figure 1As shown, the embodiment provides a modular transformation mechanism, including a base 1, the base 1 is provided with a support block 2, the base 1 is usually fixed on the production equipment of the semiconductor, used for supporting the support block 2, the support block 2 is placed with the product to be produced, in the embodiment, the product is usually a sheet product, the base 1 is provided with a recess 3, the recess 3 is configured to accommodate the support block 2, the support block 2 is placed in the recess 3, the modular transformation mechanism further includes a locking mechanism 4, the locking mechanism 4 locks the support block 2 in the recess 3.

[0036] In the embodiment, one end of the recess 3 is provided with a limiting part, which can be a structure of a stop block, a stop edge and the like abutting against the support block, in the embodiment, the limiting part is configured as a stop edge 31, the support block 2 abuts against the stop edge 31, the locking mechanism 4 is arranged on the side of the support block 2 away from the stop edge, and the support block 2 is fixed in the recess 3 by abutting against the support block 2 through the locking mechanism 4.

[0037] The locking mechanism 4 includes a driving mechanism and a clamping block 42, the driving mechanism can be a power-provided structure such as a driving motor or a cylinder, in the embodiment, the driving mechanism is a locking cylinder 41, the support block 2 is provided with a clamping groove 21 on one side edge close to the locking mechanism 4, after the support block 2 is installed in the recess 3, one side edge of the support block 2 abuts against the stop edge 31, the locking cylinder 41 drives the clamping block 42 to move towards the support block 2, and the clamping block 42 is clamped in the clamping groove 21, in the embodiment, the outer contour of the clamping groove 21 is matched with the outer contour of the clamping block 42, so that the support block 2 can be locked in the recess 3. In another embodiment of the application, the number of stop edges 31 is a pair of oppositely arranged stop edges 31, the opposite two side edges of the support block 2 abut against or are close to one of the stop edges 31 respectively, and the locking mechanism 4 is arranged at a position close to one of the stop edges 31, and the clamping block 42 is clamped in the recess 3 by driving of the locking mechanism.

[0038] In another embodiment of the application, in order to improve the locking force of the support block 2, the clamping grooves 21 are arranged on the adjacent two side edges of the support block 2 and are connected, and the adjacent two clamping grooves 21 are configured as a complete clamped part, the shape of the clamping block 42 matched with the clamped part is configured as an L shape, the L-shaped clamping block 42 is installed on the movable end of the locking cylinder, and the locking cylinder 41 drives the clamping block 42 to be clamped in the clamped part.

[0039] As Figure 2As shown, in another embodiment of the modular transformation mechanism of the present application, the number of support blocks 2 is set to two, the two support blocks 2 are the same size and are placed side by side in the recess 3, the same side of the two support blocks 2 is provided with the same clamping groove 21, and the two clamping grooves 21 are arranged side by side at the same height. The clamping block 42 can be clamped in the two clamping grooves 21 arranged side by side at the same time. When the locking cylinder 41 moves towards the support block 2, the clamping block 42 is clamped in a pair of clamping grooves 21 arranged side by side at the same time. Thus, after increasing the number of support blocks 2, one locking mechanism 4 can lock two support blocks 2 at the same time, and more products can be supported at the same time, saving the processing time of the process.

[0040] As shown in the drawings, Figures 3-4 As shown, the support block 2 is provided with a support part 22, and a plurality of vacuum suction holes 23 are arranged on the support part 22. In this embodiment, the support part 22 is arranged on two opposite surfaces at the same time, and the two opposite support parts 22 are of different models. When any one of the support parts 22 is configured as a lower support part, the other support part 22 is configured as an upper support part. The lower support part abuts against the recess 3. Thus, after one of the support parts 22 is used, it can be flipped to support the product with the other support part 22, so as to support different models of products, making the product more adaptable. In this embodiment, the side of the support block 2 is provided with two clamping grooves 21, the two clamping grooves 21 are arranged at intervals, and when the lower support part is flipped to support the product as an upper support part, different clamping grooves 21 are replaced to be clamped with the clamping block 42. Thus, one support block can be quickly alternately used.

[0041] As shown in the drawings, Figure 5 As shown, a scale 11 is arranged on the base 1, which can be used to measure the position information of the support block 2. Without arranging an accurate positioning mechanism, the support block 2 can be quickly positioned.

[0042] By using the scheme of the present application, when the support block 2 needs to be transformed, the locking cylinder 41 is loosened, the clamping block 42 is separated from the clamping groove 21, then the support block 2 can be replaced with another support block 2, or the support block 2 can be flipped according to the characteristics of the product and then used, and then the clamping block 42 is clamped in the clamping groove 21 by the locking cylinder 41, completing the quick transformation of the support block 2. Compared with the support block fixed by screws, the whole process is more efficient and does not produce iron filings, meeting the cleanliness requirements in the use conditions of clean rooms.

[0043] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application, therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. A modular conversion mechanism, characterized by, The utility model relates to a support block locking mechanism, including: The base is provided with recessed part, the recessed part is provided with one place limit part, the support block is installed in the recessed part, at least one side of the support block abuts against the limit part, the side of the support block away from the limit part is clamped through the locking mechanism.

2. The modular transformation mechanism of claim 1, wherein, The support block is provided with the clamped part, the locking mechanism is provided with the clamped part, the clamped part is configured as the clamped part and the clamped part are matched when the locking mechanism clamps the support block.

3. The modular transformation mechanism of claim 2, wherein, The locking mechanism includes drive mechanism, the drive mechanism can drive the clamped part, the clamped part is configured as the convex clamping block, the clamped part is configured as the clamping groove matched with the clamped part.

4. The modular transformation mechanism of claim 3, wherein, The limit part is provided with two, two limit parts can respectively abut against the opposite two sides of the support block.

5. The modular transformation mechanism of claim 4, wherein, The limit part is one of the end protruding baffle, fender of recessed part.

6. The modular transformation mechanism of claim 3, wherein, The support block is provided with a pair of support parts, wherein any one support part is configured as a lower support part, and the other support part is configured as an upper support part, and the lower support part abuts against the recessed part.

7. A modular transformation mechanism according to claim 6, wherein, The clamping groove is provided with two, two clamping grooves are arranged on the side of the support block away from the limit part, wherein any one support part is configured as a lower support part, and the clamping block is clamped in the clamping groove close to the lower support part.

8. A modular transformation mechanism according to any one of claims 1 to 7, wherein, The number of support blocks is two, and the locking mechanism can clamp two support blocks at the same time.

9. A modular transformation mechanism according to any one of claims 1 to 7, wherein, The base is provided with a scale indicating the position of the support block.

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