Acid etching liquid temperature adjusting device

Abstract

The utility model relates to the technical field of acid etching liquid, in particular to an acid etching liquid temperature adjusting device, which adopts the technical scheme that the acid etching liquid temperature adjusting device comprises a material box, a pump body is mounted at the top of the material box, a fixed rod is movably mounted on the pump body, and paddles are mounted on the outer side of one section, positioned in the material box, of the fixed rod in an annular array manner; a gear ring is installed on the outer side of the fixing rod, a motor is installed on the top of the material box, a fluted disc is installed at one end of a motor transmission structure, connecting rods are movably installed on the two sides of the material box, stirring frames are fixedly installed at the opposite ends of the two connecting rods, and an air injection plate is installed at the bottom end, below the two stirring frames, in the material box. The material box has the advantages that cold air is conveyed into the material box to cool the acid etching liquid, and meanwhile, the acid etching liquid is stirred, so that the acid etching liquid is in full contact with the cold air to dissipate heat.

Description

TECHNICAL FIELD

[0001] The utility model relates to acid etching liquid technical field, concretely is a kind of acid etching liquid temperature regulating device. BACKGROUND

[0002] Acid etching liquid is a kind of chemical solution commonly used in semiconductor industry, for removing or etching part area on solid material, this process is usually implemented for manufacturing circuit board, chip and other micro electronic equipment, acid etching liquid usually contains acidic substance, can effectively dissolve or erode certain material, it plays an important role in semiconductor processing and electronic manufacturing process, acid etching liquid temperature regulating device is a kind of device for controlling etching liquid temperature, in semiconductor manufacturing and microelectronic industry, the temperature of etching liquid can play a key role in process step.

[0003] At present, when temperature regulating device uses cooling gas to reduce the temperature of acid etching liquid, acid etching liquid cannot be fully contacted with cooling gas, leading to long time of cooling consumption, and increasing cooling cost. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of acid etching liquid temperature regulating devices, with the cooling gas is sent to the inside of material box to the acid etching liquid cooling at the same time, the acid etching liquid is stirred, so that the acid etching liquid is fully contacted with cooling gas and the advantage of heat dissipation, solve the problem that the acid etching liquid cannot be fully contacted with cooling gas, leading to low cooling efficiency.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of acid etching liquid temperature regulating device, including material box, the pump body is installed at the top of material box, the fixed rod is movably installed in the pump body, the fixed rod is installed with paddle in ring array outside a section in the inside of material box, the fixed rod outside is installed with gear ring, the motor is installed at the top of material box, gear disc is installed at one end of motor transmission structure, the connecting rod is movably installed at both sides of material box, the stirring frame is fixedly installed at the opposite end of two connecting rods, the jet plate is installed at the bottom end in the inside of material box below two stirring frames.

[0006] When the acid etching liquid temperature adjusting device is used, the fixed frame is fixedly connected with the bearing structure through the fixed holes of the fixed frame by using bolts and other tools, the fixed frame fixes the material box, the acid etching liquid enters the material box from the feeding pipe, the material box stores the acid etching liquid, the air suction pipe is connected with the pipeline for conveying cold air, the motor drives the gear disc to rotate through the transmission structure, the gear disc drives the fixed rod to rotate through the gear ring, the fixed rod drives the paddle inside the pump body to rotate, the paddle generates suction force when rotating, the pump body sucks the cold air through the air suction pipe, and the cold air is conveyed to the inside of the air jet plate through the air outlet pipe, and the air jet plate sprays the cold air into the inside of the material box to cool the acid etching liquid in the inside of the material box; when the fixed rod rotates, the two connecting rods are driven to rotate through the two belts, the two stirring frames are driven to rotate through the two connecting rods, and the two stirring frames stir the acid etching liquid in the inside of the material box, so that the acid etching liquid is fully contacted with the cold air; the gas in the inside of the material box is discharged from the side air outlet pipe, and the acid etching liquid in the inside of the material box is discharged from the bottom discharge pipe.

[0007] Preferably, the feeding pipe is embeddedly arranged on the top of the material box, the guide plates are arranged on the bottom of the material box at two sides of the inside of the material box, and the discharge pipe is embeddedly arranged on the bottom of the material box at the opposite side of the two guide plates.

[0008] Preferably, the air suction pipe is arranged on the top of the pump body, the air outlet pipe is arranged on the bottom of the pump body, and the bottom of the air outlet pipe extends into the inside of the material box and is fixedly connected with the air jet plate. The pump body sucks the cold air through the air suction pipe, and the cold air is conveyed to the air jet plate through the air outlet pipe.

[0009] Preferably, the gear disc is meshedly connected with the gear ring, and the fixed rod is movably connected with the two connecting rods through the two belts. The motor drives the gear disc to rotate through the transmission structure, the gear disc drives the fixed rod to rotate through the gear ring, and the fixed rod drives the two connecting rods to rotate through the two belts.

[0010] Preferably, baffles are arranged on the ends, away from each other, of the two connecting rods and on the two ends of the fixed rod. The baffles prevent the belts from sliding off the fixed rod and the connecting rods.

[0011] Preferably, the thermometer is arranged on the rear side of the material box, and the rear side of the material box on the side of the thermometer is provided with the observation window. The thermometer can measure the temperature of the acid etching liquid in the inside of the material box, and the liquid level of the acid etching liquid in the inside of the material box can be observed through the observation window.

[0012] Preferably, the air outlet pipe is embeddedly arranged on the side of the material box. The gas in the inside of the material box is discharged from the air outlet pipe.

[0013] Preferably, the front side of the material box is welded with a fixing frame, and the fixing frame is provided with fixing holes in a rectangular array.

[0014] Compared with the prior art, the present application has the following beneficial effects:

[0015] The utility model discloses a pump body, fixed link, paddle, air jet board, fixed frame, connecting rod and stirring frame are set up, and the acid etching solution in the material box is cooled and stirred, and the acid etching solution is contacted with the cold air fully, reaches the effect that the acid etching solution is contacted with the cold air fully and is cooled and stirred when the cold air is transported to the material box. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the first angle three-dimensional structure schematic diagram of the utility model;

[0017] Figure 2 It is the second angle three-dimensional structure schematic diagram of the utility model;

[0018] Figure 3 It is the third angle three-dimensional structure schematic diagram of the utility model;

[0019] Figure 4 It is the fourth angle three-dimensional structure schematic diagram of the utility model;

[0020] Figure 5 It is the utility model's cross section structure schematic diagram.

[0021] In the drawing: 1, material box;2, thermometer;3, observation window;4, belt;5, baffle;6, feed pipe;7, fixed link;8, pump body;9, gear ring;10, tooth disc;11, motor;12, exhaust pipe;13, discharge pipe;14, air suction pipe;15, air outlet pipe;16, fixed hole;17, deflector;18, connecting rod;19, stirring frame;20, paddle;21, air jet board;22, fixed frame. DETAILED DESCRIPTION

[0022] In order to make the above purpose, features and advantages of the utility model more obvious and easy to understand, the specific embodiment of the utility model is explained in detail below.

[0023] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0024] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0026] Example 1

[0027] like Figures 1-5 As shown, the present invention proposes an acid etching solution temperature regulating device, comprising a material tank 1, an inlet pipe 6 embedded in the top of the material tank 1, guide plates 17 installed on both sides of the bottom of the material tank 1, an outlet pipe 13 embedded in the bottom of the material tank 1 on the opposite side of the two guide plates 17, a pump body 8 installed on the top of the material tank 1, a fixed rod 7 movably installed on the pump body 8, blades 20 arranged in a ring array on the outer side of a section of the fixed rod 7 inside the material tank 1, an air suction pipe 14 installed on the top of the pump body 8, an air outlet pipe 15 installed at the bottom of the pump body 8, the bottom of the air outlet pipe 15 extending into the inside of the material tank 1 and fixedly connected to an air jet plate 21, and a toothed ring 9 installed on the outer side of the fixed rod 7. A motor 11 is installed at the top. A gear 10 is installed at one end of the transmission structure of the motor 11. The gear 10 and the gear ring 9 are meshed and connected. Connecting rods 18 are movably installed on both sides of the material box 1. The fixed rod 7 is movably connected to the two connecting rods 18 through two belts 4. A stirring rack 19 is fixedly installed at the opposite end of the two connecting rods 18. A jet plate 21 is installed at the bottom of the material box 1 below the two stirring racks 19. A thermometer 2 is installed on the rear side of the material box 1. An observation window 3 is installed on the rear side of the material box 1 on the side of the thermometer 2. An exhaust pipe 12 is embedded in the side of the material box 1. A fixing frame 22 is welded to the front side of the material box 1. The fixing frame 22 has fixing holes 16 in a rectangular array.

[0028] In this embodiment, the fixed hole 16 of the fixed frame 22 is used to fix the fixed frame 22 and the bearing structure by using a bolt or the like, the fixed frame 22 fixes the material box 1, the acidic etching liquid enters the inside of the material box 1 from the feeding pipe 6, the material box 1 stores the acidic etching liquid, the suction pipe 14 is connected to the pipeline for conveying cold air, the motor 11 drives the gear disc 10 to rotate through the transmission structure, the gear disc 10 drives the fixed rod 7 to rotate through the gear ring 9, the fixed rod 7 drives the paddle 20 inside the pump body 8 to rotate, the paddle 20 generates suction force when rotating, the pump body 8 sucks the cold air through the suction pipe 14, and then the cold air is conveyed to the inside of the air jet plate 21 through the air outlet pipe 15, the air jet plate 21 sprays the cold air into the inside of the material box 1, the cold air cools the acidic etching liquid in the inside of the material box 1, when the fixed rod 7 rotates, the two connecting rods 18 are driven to rotate through the two belts 4, the two connecting rods 18 drive the two stirring frames 19 to rotate, and the two stirring frames 19 stir the acidic etching liquid in the inside of the material box 1, so that the acidic etching liquid is fully contacted with the cold air, the gas in the inside of the material box 1 is discharged from the side air outlet pipe 12, and the acidic etching liquid in the inside of the material box 1 is discharged from the bottom discharge pipe 13.

[0029] Embodiment two

[0030] As Figures 1-5 shown, the acidic etching liquid temperature adjusting device further comprises a baffle 5, and the opposite end of each of the two connecting rods 18 and the two ends of the fixed rod 7 are provided with the baffle 5.

[0031] In this embodiment, the baffle 5 can prevent the belt 4 from sliding off the connecting rod 18 and the fixed rod 7.

[0032] Finally, it should be noted that: the above only describes the preferred embodiments of the utility model, and is not used to limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical scheme recorded in the foregoing embodiments can be modified, or some technical features can be replaced equivalently. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. An apparatus for temperature adjustment of an acid etching solution comprising a tank (1), characterized in that: The top of said material box (1) is provided with a pump body (8), the pump body (8) is movably provided with a fixed rod (7), the fixed rod (7) is provided with a paddle (20) outside in a ring array inside the material box (1), the outer side of the fixed rod (7) is provided with a gear ring (9), the top of the material box (1) is provided with a motor (11), one end of the transmission structure of the motor (11) is provided with a gear disc (10), both sides of the material box (1) are movably provided with a connecting rod (18), both ends of the two connecting rods (18) are fixedly provided with a stirring frame (19), and the bottom of the material box (1) below the two stirring frames (19) is movably provided with a jet plate (21).

2. The temperature adjustment device for an acid etching solution according to claim 1, wherein: The top of said material box (1) is provided with a feed pipe (6), the bottom of the material box (1) is provided with a guide plate (17), and the bottom of the material box (1) is provided with a discharge pipe (13).

3. The temperature regulating device for acidic etching solution according to claim 1, wherein: The top of said pump body (8) is provided with an air suction pipe (14), the bottom of the pump body (8) is provided with an air outlet pipe (15), and the bottom of the air outlet pipe (15) extends into the material box (1) and is fixedly connected with the jet plate (21).

4. The temperature regulating device for acidic etching solution according to claim 1, wherein: The gear disc (10) and the gear ring (9) are connected in meshing connection, and the fixed rod (7) is movably connected with the two connecting rods (18) through two belts (4).

5. The temperature regulating device for an acid etching solution of claim 4, wherein: Both ends of said connecting rod (18) and both ends of the fixed rod (7) are provided with baffles (5).

6. The temperature regulating device for an acid etching solution of claim 1, wherein: The rear side of said material box (1) is provided with a thermometer (2), and the rear side of the material box (1) on one side of the thermometer (2) is provided with an observation window (3).

7. The temperature regulating device for acidic etching solution according to claim 1, wherein: The side of said material box (1) is embeddedly provided with an exhaust pipe (12).

8. The temperature regulating device for an acid etching solution of claim 1, wherein: The front side of said material box (1) is welded with a fixed frame (22), and the fixed frame (22) is provided with a fixed hole (16) in a rectangular array. The top of said material box (1) is provided with a feed pipe (6), the bottom of the material box (1) is provided with a guide plate (17), and the bottom of the material box (1) is provided with a discharge pipe (13).

Images